JP2015535596A - ビームプロファイラー - Google Patents

ビームプロファイラー Download PDF

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Publication number
JP2015535596A
JP2015535596A JP2015541241A JP2015541241A JP2015535596A JP 2015535596 A JP2015535596 A JP 2015535596A JP 2015541241 A JP2015541241 A JP 2015541241A JP 2015541241 A JP2015541241 A JP 2015541241A JP 2015535596 A JP2015535596 A JP 2015535596A
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JP
Japan
Prior art keywords
output field
optical axis
beam profiler
blades
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015541241A
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English (en)
Japanese (ja)
Other versions
JP2015535596A5 (enExample
Inventor
ロバートソン，ゴードン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M Squared Lasers Ltd
Original Assignee
M Squared Lasers Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M Squared Lasers Ltd filed Critical M Squared Lasers Ltd
Publication of JP2015535596A publication Critical patent/JP2015535596A/ja
Publication of JP2015535596A5 publication Critical patent/JP2015535596A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/044—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G01J2001/4261—Scan through beam in order to obtain a cross-sectional profile of the beam

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Lasers (AREA)
JP2015541241A 2012-11-13 2013-11-13 ビームプロファイラー Pending JP2015535596A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1220416.0 2012-11-13
GB1220416.0A GB2507819B (en) 2012-11-13 2012-11-13 M-squared value beam profiler
PCT/GB2013/052991 WO2014076473A1 (en) 2012-11-13 2013-11-13 Beam profiler

Publications (2)

Publication Number Publication Date
JP2015535596A true JP2015535596A (ja) 2015-12-14
JP2015535596A5 JP2015535596A5 (enExample) 2016-12-28

Family

ID=47470530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015541241A Pending JP2015535596A (ja) 2012-11-13 2013-11-13 ビームプロファイラー

Country Status (6)

Country Link
US (1) US9709438B2 (enExample)
EP (1) EP2920560A1 (enExample)
JP (1) JP2015535596A (enExample)
CA (1) CA2890938A1 (enExample)
GB (1) GB2507819B (enExample)
WO (1) WO2014076473A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020532742A (ja) * 2017-09-05 2020-11-12 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 非接触式ツールセッティング装置のビームプロファイルを評価するための装置および方法
JP7280459B1 (ja) 2022-01-11 2023-05-24 株式会社ウェイブサイバー リアルタイム小型光ビームプロファイル測定装置
JP2023550481A (ja) * 2020-11-23 2023-12-01 コヒーレント レーザーシステムズ ゲーエムベーハー ウント コンパニー カーゲー 補償光学系および中間視野監視を用いたレーザビーム波面補正

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6899524B2 (ja) * 2016-06-25 2021-07-07 株式会社ウェイブサイバー 光ビームプロファイル測定装置
DE102016011568B4 (de) 2016-09-26 2019-03-07 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Bestimmung von räumlichen Abmessungen eines Lichtstrahls
US10520360B1 (en) * 2018-07-31 2019-12-31 Northrop Grumman Systems Corporation Automated power-in-the-bucket measurement apparatus for large aperture laser systems
US11609176B2 (en) * 2020-07-24 2023-03-21 Becton, Dickinson And Company Methods and devices for evaluating performance of a diode laser

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617755A (en) * 1969-12-10 1971-11-02 Bell Telephone Labor Inc Apparatus for locating and measuring the beam-waist radius of a gaussian laser beam
JPS5332781U (enExample) * 1976-08-26 1978-03-22
JPS6426119A (en) * 1987-07-22 1989-01-27 Nec Corp Light beam shape measuring instrument
US5214485A (en) * 1989-04-27 1993-05-25 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
JPH05296829A (ja) * 1992-04-17 1993-11-12 Nippei Toyama Corp ビーム計測装置
JPH10274559A (ja) * 1997-03-07 1998-10-13 Cise Spa レーザービームの特性用装置
US6313910B1 (en) * 1998-09-11 2001-11-06 Dataray, Inc. Apparatus for measurement of optical beams

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5064284A (en) * 1990-04-26 1991-11-12 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
US7405815B1 (en) * 2003-11-04 2008-07-29 The Boeing Company Systems and methods for characterizing laser beam quality
US9291825B2 (en) * 2013-03-22 2016-03-22 Applied Materials Israel, Ltd. Calibratable beam shaping system and method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617755A (en) * 1969-12-10 1971-11-02 Bell Telephone Labor Inc Apparatus for locating and measuring the beam-waist radius of a gaussian laser beam
JPS5332781U (enExample) * 1976-08-26 1978-03-22
JPS6426119A (en) * 1987-07-22 1989-01-27 Nec Corp Light beam shape measuring instrument
US5214485A (en) * 1989-04-27 1993-05-25 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
JPH05296829A (ja) * 1992-04-17 1993-11-12 Nippei Toyama Corp ビーム計測装置
JPH10274559A (ja) * 1997-03-07 1998-10-13 Cise Spa レーザービームの特性用装置
US6313910B1 (en) * 1998-09-11 2001-11-06 Dataray, Inc. Apparatus for measurement of optical beams

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020532742A (ja) * 2017-09-05 2020-11-12 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 非接触式ツールセッティング装置のビームプロファイルを評価するための装置および方法
JP7266585B2 (ja) 2017-09-05 2023-04-28 レニショウ パブリック リミテッド カンパニー 非接触式ツールセッティング装置のビームプロファイルを評価するための装置および方法
JP2023550481A (ja) * 2020-11-23 2023-12-01 コヒーレント レーザーシステムズ ゲーエムベーハー ウント コンパニー カーゲー 補償光学系および中間視野監視を用いたレーザビーム波面補正
JP7280459B1 (ja) 2022-01-11 2023-05-24 株式会社ウェイブサイバー リアルタイム小型光ビームプロファイル測定装置
JP2023102230A (ja) * 2022-01-11 2023-07-24 株式会社ウェイブサイバー リアルタイム小型光ビームプロファイル測定装置

Also Published As

Publication number Publication date
GB2507819A (en) 2014-05-14
EP2920560A1 (en) 2015-09-23
GB2507819B (en) 2015-07-15
US20160290861A1 (en) 2016-10-06
GB201220416D0 (en) 2012-12-26
CA2890938A1 (en) 2014-05-22
US9709438B2 (en) 2017-07-18
WO2014076473A1 (en) 2014-05-22

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