WO2014076473A1 - Beam profiler - Google Patents

Beam profiler Download PDF

Info

Publication number
WO2014076473A1
WO2014076473A1 PCT/GB2013/052991 GB2013052991W WO2014076473A1 WO 2014076473 A1 WO2014076473 A1 WO 2014076473A1 GB 2013052991 W GB2013052991 W GB 2013052991W WO 2014076473 A1 WO2014076473 A1 WO 2014076473A1
Authority
WO
WIPO (PCT)
Prior art keywords
blades
output field
optical axis
blade assembly
multiple blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/GB2013/052991
Other languages
English (en)
French (fr)
Inventor
Gordon Robertson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M Squared Lasers Ltd
Original Assignee
M Squared Lasers Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M Squared Lasers Ltd filed Critical M Squared Lasers Ltd
Priority to CA2890938A priority Critical patent/CA2890938A1/en
Priority to EP13806035.5A priority patent/EP2920560A1/en
Priority to JP2015541241A priority patent/JP2015535596A/ja
Priority to US14/442,174 priority patent/US9709438B2/en
Publication of WO2014076473A1 publication Critical patent/WO2014076473A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/044Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using shutters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G01J2001/4261Scan through beam in order to obtain a cross-sectional profile of the beam

Definitions

  • FIG. 3 Another significant disadvantage of this profiler 4 is the fact that in order to operate correctly the incident field 3 to be analysed must remain constant over the time that it takes to make a single scan of the field 3, otherwise spurious results will occur.
  • the rate of drum rotation and the detector response time limits the system to measuring beams that are either true continuous wave (CW), or pulsed at repetition rates of greater than 10MHz.
  • An alternative beam profiler 10 design known in the art for measuring the M 2 value of the output field of a laser 3 is present schematically in Figure 3.
  • This apparatus again comprises a focussing lens assembly 1 1 employed to create an artificial waist d 0 within the optical field 3 to be measured.
  • the focussing lens assembly 11 is not translated along the propagation axis 12 of the optical field 3.
  • the blades 28, 29, 30, 31 , 32, 33, 34, 35, 36 and 37 may be mounted longitudinally along the length of a mechanical actuator 51 instead of on the rotatable shaft 23.
  • the mechanical actuator 51 provides a means for selectively passing each of the blades 28, 29, 30, 31 , 32, 33, 34, 35, 36 and 37, preferably successively or in turn, through the location of the optical axis 22 e.g. the blades 28, 29, 30, 31 , 32, 33, 34, 35, 36 and 37 are passed in turn down through the location of the optical axis 22 and then in turn back up through the optical axis 22.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Lasers (AREA)
PCT/GB2013/052991 2012-11-13 2013-11-13 Beam profiler Ceased WO2014076473A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CA2890938A CA2890938A1 (en) 2012-11-13 2013-11-13 Beam profiler
EP13806035.5A EP2920560A1 (en) 2012-11-13 2013-11-13 Beam profiler
JP2015541241A JP2015535596A (ja) 2012-11-13 2013-11-13 ビームプロファイラー
US14/442,174 US9709438B2 (en) 2012-11-13 2013-11-13 Beam profiler

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1220416.0 2012-11-13
GB1220416.0A GB2507819B (en) 2012-11-13 2012-11-13 M-squared value beam profiler

Publications (1)

Publication Number Publication Date
WO2014076473A1 true WO2014076473A1 (en) 2014-05-22

Family

ID=47470530

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2013/052991 Ceased WO2014076473A1 (en) 2012-11-13 2013-11-13 Beam profiler

Country Status (6)

Country Link
US (1) US9709438B2 (enExample)
EP (1) EP2920560A1 (enExample)
JP (1) JP2015535596A (enExample)
CA (1) CA2890938A1 (enExample)
GB (1) GB2507819B (enExample)
WO (1) WO2014076473A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017227615A (ja) * 2016-06-25 2017-12-28 株式会社ウェイブサイバー 光ビームプロファイル測定装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016011568B4 (de) 2016-09-26 2019-03-07 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Bestimmung von räumlichen Abmessungen eines Lichtstrahls
EP3450936A1 (en) * 2017-09-05 2019-03-06 Renishaw PLC Optical apparatus and method for assessing the beam profile of a non-contact tool setting apparatus
US10520360B1 (en) * 2018-07-31 2019-12-31 Northrop Grumman Systems Corporation Automated power-in-the-bucket measurement apparatus for large aperture laser systems
US11609176B2 (en) * 2020-07-24 2023-03-21 Becton, Dickinson And Company Methods and devices for evaluating performance of a diode laser
US12153208B2 (en) * 2020-11-23 2024-11-26 Coherent Lasersystems Gmbh & Co. Kg Laser beam wavefront correction with adaptive optics and mid-field monitoring
JP7280459B1 (ja) 2022-01-11 2023-05-24 株式会社ウェイブサイバー リアルタイム小型光ビームプロファイル測定装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617755A (en) * 1969-12-10 1971-11-02 Bell Telephone Labor Inc Apparatus for locating and measuring the beam-waist radius of a gaussian laser beam
US5214485A (en) * 1989-04-27 1993-05-25 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
US6313910B1 (en) * 1998-09-11 2001-11-06 Dataray, Inc. Apparatus for measurement of optical beams

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5332781U (enExample) * 1976-08-26 1978-03-22
JPS6426119A (en) * 1987-07-22 1989-01-27 Nec Corp Light beam shape measuring instrument
US5064284A (en) * 1990-04-26 1991-11-12 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
JPH05296829A (ja) * 1992-04-17 1993-11-12 Nippei Toyama Corp ビーム計測装置
IT1290575B1 (it) * 1997-03-07 1998-12-10 Cise Spa Dispositivo per la caratterizzazione di fasci laser
US7405815B1 (en) * 2003-11-04 2008-07-29 The Boeing Company Systems and methods for characterizing laser beam quality
US9291825B2 (en) * 2013-03-22 2016-03-22 Applied Materials Israel, Ltd. Calibratable beam shaping system and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3617755A (en) * 1969-12-10 1971-11-02 Bell Telephone Labor Inc Apparatus for locating and measuring the beam-waist radius of a gaussian laser beam
US5214485A (en) * 1989-04-27 1993-05-25 Coherent, Inc. Apparatus for measuring the mode quality of a laser beam
US6313910B1 (en) * 1998-09-11 2001-11-06 Dataray, Inc. Apparatus for measurement of optical beams

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017227615A (ja) * 2016-06-25 2017-12-28 株式会社ウェイブサイバー 光ビームプロファイル測定装置

Also Published As

Publication number Publication date
GB2507819A (en) 2014-05-14
EP2920560A1 (en) 2015-09-23
GB2507819B (en) 2015-07-15
US20160290861A1 (en) 2016-10-06
GB201220416D0 (en) 2012-12-26
CA2890938A1 (en) 2014-05-22
JP2015535596A (ja) 2015-12-14
US9709438B2 (en) 2017-07-18

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