JP2015524160A - 読み出しエレクトロニクス及び/又はフォトセンサにアンチエイリアシングフィルタを備えた撮像検出器 - Google Patents
読み出しエレクトロニクス及び/又はフォトセンサにアンチエイリアシングフィルタを備えた撮像検出器 Download PDFInfo
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Abstract
Description
Claims (20)
- 少なくとも1つの検出器タイルを備える検出器アレイを有する撮像装置であって、
前記検出器タイルは、
非感光性領域内に位置する2次元アレイ状の個々の感光性検出器画素を備えるフォトセンサアレイと、
前記フォトセンサアレイに結合され、前記個々の検出器画素に対応する個々の読み出しチャネルウェルを含む読み出しエレクトロニクスと、
検出器画素のアンチエイリアシングフィルタであり、該検出器画素に対応する前記フォトセンサアレイの領域、又は該検出器画素に対応する前記読み出しエレクトロニクスの領域、の少なくとも一方内に位置するアンチエイリアシングフィルタと、
を有する、
撮像装置。 - 1つのアンチエイリアシングフィルタの幾何学形状は、1つの検出器画素の幾何学形状に略等しいか、それより小さいかである、請求項1に記載の撮像装置。
- 前記読み出しエレクトロニクスの幾何学形状は、前記検出器画素の幾何学形状に略等しいか、それより小さいかである、請求項1又は2に記載の撮像装置。
- 前記読み出しエレクトロニクスは複数の金属層を有し、前記アンチエイリアシングフィルタは、前記読み出しエレクトロニクスの前記複数の金属層内に位置する、請求項1乃至3の何れかに記載の撮像装置。
- 前記アンチエイリアシングフィルタは、対応する読み出しチャネルウェル内に位置する、請求項1乃至3の何れかに記載の撮像装置。
- 前記フォトセンサアレイは複数の金属層を有し、前記アンチエイリアシングフィルタは、前記フォトセンサアレイの前記複数の金属層内に位置する、請求項1乃至3の何れかに記載の撮像装置。
- 前記アンチエイリアシングフィルタは、2つのキャパシタを含む、請求項4乃至6の何れかに記載の撮像装置。
- 前記アンチエイリアシングフィルタは、絶縁体によって離隔された2つの導電性電極を含む、請求項7に記載の撮像装置。
- 前記2つの導電性電極の各々のおよそ1/10が前記キャパシタのうちの一方を形成し、前記2つの導電性電極の各々のおよそ9/10が前記キャパシタのうちの他方を形成する、請求項8に記載の撮像装置。
- 前記フォトセンサアレイはシリコンフォトセンサアレイであり、前記読み出しエレクトロニクスは、シリコン集積回路の一部であり、前記シリコン集積回路と前記フォトセンサアレイとがシリコン−シリコン接合により接合されている、請求項1乃至9の何れかに記載の撮像装置。
- 前記フォトセンサアレイは裏面照射型フォトダイオードを含む、請求項1乃至10の何れかに記載の撮像装置。
- 前記フォトセンサアレイは前面照射型フォトダイオードを含む、請求項1乃至11の何れかに記載の撮像装置。
- 前記読み出しエレクトロニクス及び前記フォトセンサアレイは、共有結合により共に接合されたシリコン基板を含む、請求項1乃至12の何れかに記載の撮像装置。
- 撮像検出器のフォトセンサアレイ内の複数の検出器画素のうちの1つである検出器画素の出力信号を、該検出器画素に対応する読み出しエレクトロニクスに、前記フォトセンサアレイ又は前記読み出しエレクトロニクスの一方内に位置するアンチエイリアシングフィルタを介して送るステップであり、該検出器画素の前記読み出しエレクトロニクスは、該検出器画素に対応するウェル内に位置する、送るステップと、
前記読み出しエレクトロニクスを用いて前記信号を処理するステップと、
を有する方法。 - 前記読み出しエレクトロニクスの幾何学形状は、1つの検出器画素の幾何学形状に略等しいか、それより小さいかである、請求項14に記載の方法。
- 1つのアンチエイリアシングフィルタの幾何学形状は、1つの検出器画素の幾何学形状に略等しいか、それより小さいかである、請求項14に記載の方法。
- 前記アンチエイリアシングフィルタは、前記読み出しエレクトロニクスの複数の金属層内に位置する、請求項14乃至16の何れかに記載の方法。
- 前記アンチエイリアシングフィルタは、前記対応するウェル内に位置する、請求項14乃至16の何れかに記載の方法。
- 前記アンチエイリアシングフィルタは、前記フォトセンサアレイの複数の金属層内に位置する、請求項14乃至16の何れかに記載の方法。
- 非感光性領域内に位置する2次元アレイ状の個々の感光性検出器画素を備えるフォトセンサアレイと、
前記フォトセンサアレイに結合された読み出しエレクトロニクスであり、各ウェルが前記個々の検出器画素の1つに対応する個々の読み出しチャネルウェルを有する読み出しエレクトロニクスと、
前記個々の読み出しチャネルウェルの各々に関するアンチエイリアシングフィルタであり、前記フォトセンサアレイ又は前記読み出しエレクトロニクスの一方内に位置するアンチエイリアシングフィルタと、
を有する撮像検出器アレイ。
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US201261640029P | 2012-04-30 | 2012-04-30 | |
US61/640,029 | 2012-04-30 | ||
PCT/IB2013/052980 WO2013164720A1 (en) | 2012-04-30 | 2013-04-15 | Imaging detector with anti-aliasing filter in the readout electronics and/or photosensor |
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JP2015524160A true JP2015524160A (ja) | 2015-08-20 |
JP6298447B2 JP6298447B2 (ja) | 2018-03-28 |
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JP2015509523A Active JP6298447B2 (ja) | 2012-04-30 | 2013-04-15 | 読み出しエレクトロニクス及び/又はフォトセンサにアンチエイリアシングフィルタを備えた撮像検出器 |
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US (1) | US9316751B2 (ja) |
EP (1) | EP2845229B1 (ja) |
JP (1) | JP6298447B2 (ja) |
CN (1) | CN104285297B (ja) |
BR (1) | BR112014026769A2 (ja) |
RU (1) | RU2014148174A (ja) |
WO (1) | WO2013164720A1 (ja) |
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KR20170097748A (ko) * | 2014-12-19 | 2017-08-28 | 쥐-레이 스위츨란드 에스에이 | 모놀리식 cmos 통합된 픽셀 검출기와, 다양한 적용예를 포함하는 입자 검출 및 이미지화를 위한 시스템 및 방법 |
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WO2011077580A1 (ja) * | 2009-12-26 | 2011-06-30 | キヤノン株式会社 | 固体撮像装置および撮像システム |
Cited By (2)
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JP2020520165A (ja) * | 2017-05-12 | 2020-07-02 | ゼネラル・エレクトリック・カンパニイ | 活性画素センサのコンピュータ断層撮影(ct)検出器および読み出し方法 |
JP7094988B2 (ja) | 2017-05-12 | 2022-07-04 | ゼネラル・エレクトリック・カンパニイ | 活性画素センサのコンピュータ断層撮影(ct)検出器および読み出し方法 |
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CN104285297A (zh) | 2015-01-14 |
JP6298447B2 (ja) | 2018-03-28 |
US20150060681A1 (en) | 2015-03-05 |
EP2845229B1 (en) | 2021-07-07 |
US9316751B2 (en) | 2016-04-19 |
RU2014148174A (ru) | 2016-06-20 |
EP2845229A1 (en) | 2015-03-11 |
BR112014026769A2 (pt) | 2017-06-27 |
WO2013164720A1 (en) | 2013-11-07 |
CN104285297B (zh) | 2017-08-29 |
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