JP2015520514A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
- Publication number
- JP2015520514A JP2015520514A JP2015513954A JP2015513954A JP2015520514A JP 2015520514 A JP2015520514 A JP 2015520514A JP 2015513954 A JP2015513954 A JP 2015513954A JP 2015513954 A JP2015513954 A JP 2015513954A JP 2015520514 A JP2015520514 A JP 2015520514A
- Authority
- JP
- Japan
- Prior art keywords
- heating block
- substrate
- processing apparatus
- substrate processing
- installation space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 126
- 238000010438 heat treatment Methods 0.000 claims abstract description 112
- 238000000034 method Methods 0.000 claims abstract description 73
- 238000009434 installation Methods 0.000 claims abstract description 61
- 238000002347 injection Methods 0.000 claims abstract description 9
- 239000007924 injection Substances 0.000 claims abstract description 9
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 23
- 229910000953 kanthal Inorganic materials 0.000 description 9
- 239000012495 reaction gas Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000005137 deposition process Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000005019 vapor deposition process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
Abstract
Description
前記下部ヒーターは前記下部設置空間の底面から離隔配置される。
以下に,本発明の実施形態を添付した図4を参照してより詳細に説明する。本発明の実施形態は様々な態様に変更してもよく,本発明の範囲が後述する実施形態によって限られると解釈してはならない。本実施形態は,当該発明の属する技術分野における通常の知識を有する者に本発明をより詳細に説明するために提供されるものである。よって,図面に示す各要素の形状はより明確な説明を強調するために誇張されている可能性がある。
Claims (11)
- 基板に対する工程が行われる基板処理装置において,
一側壁に形成されて前記基板が出入する通路と上部及び下部にそれぞれ形成された上部開口及び下部開口を有するメインチャンバと,
前記上部開口を閉鎖し,外部から遮断されて前記工程が行われる工程空間を形成するチャンバ蓋と,
前記工程空間に設置されてプロセスガスを噴射する複数個の噴射孔を有するシャワーヘッドと,
前記下部開口に固定設置されて前記工程空間と区分された下部設置区間を有し,上部に前記基板が置かれる下部ヒーティングブロックと,
前記基板と平行する方向に沿って前記下部設置空間に設置され,前記下部ヒーティングブロックを加熱する複数の下部ヒーターと,
を含むことを特徴とする基板処理装置。 - 前記基板処理装置は,
前記下部ヒーティングブロックの一側壁に形成された下部排気孔に連結され,前記下部設置空間の内部を排気する下部排気管を更に含むことを特徴とする請求項1記載の基板処理装置。 - 前記下部ヒーターは,前記下部設置空間の底面から離隔配置されることを特徴とする請求項1記載の基板処理装置。
- 前記基板処理装置は,
前記ヒーティングブロックの上部面に固定設置されて前記基板の下部面を支持する複数のリフトピンを更に含むことを特徴とする請求項1記載の基板処理装置。 - 前記基板処理装置は,
前記メインチャンバの他側壁に形成されて前記プロセスガスを排出する排気ポートを更に含むことを特徴とする請求項1記載の基板処理装置。 - 前記下部ヒーティングブロックの下部は開放され,
前記基板処理装置は,前記下部ヒーティングブロックの開放された下部を閉鎖して前記下部設置空間を外部から遮断する下部蓋を更に含むことを特徴とする請求項1記載の基板処理装置。 - 基板に対する工程が行われる基板処理装置において,
一側壁に形成されて前記基板が出入する通路と,上部及び下部にそれぞれ形成された上部開口及び下部開口を有するメインチャンバと,
前記上部開口に固定設置されて前記上部開口を閉鎖する上部ヒーティングブロックと,
前記下部開口に固定設置されて前記下部開口を閉鎖し,上部に前記基板が置かれる下部ヒーティングブロックと,
前記下部ヒーティングフロック及び前記下部ヒーティングブロックの間に形成された工程空間に設置されてプロセスガスを噴射する複数個の噴射孔を有するシャワーヘッドと,
前記工程空間と区分されて前記上部ヒーティングブロックの内部に形成された上部設置空間に設置され,前記基板と平行する方向に沿って配置されて前記上部ヒーティングブロックを加熱する複数の上部ヒーターと,
前記工程空間と区分されて前記下部ヒーティングブロックの内部に形成された下部設置空間に設置され,前記基板と平行する方向に沿って配置されて前記下部ヒーティングブロックを加熱する複数の下部ヒーターと,
を含むことを特徴とする基板処理装置。 - 前記基板処理装置は,
前記下部ヒーティングブロックの一側壁に形成された下部排気孔に連結されて前記下部設置空間の内部を排気する下部排気管と,
前記上部ヒーティングブロックの一側壁に形成された上部排気孔に連結されて前記上部設置空間の内部を排気する上部排気管と,
を更に含むことを特徴とする請求項7記載の基板処理装置。 - 前記上部ヒーター及び前記下部ヒーターは,前記下部設置空間の天井面及び下部設備空間の底面からそれぞれ離隔配置されることを特徴とする請求項7記載の基板処理装置。
- 前記上部ヒーティングブロックの上部及び前記下部ヒーティングブロックの下部は開放され,
前記基板処理装置は,
前記上部ヒーティングブロックの開放された上部を閉鎖して前記上部設置空間を外部から遮断する上部蓋と,
前記下部ヒーティングブロックの開放された下部を閉鎖して前記下部設置空間を外部から遮断する下部蓋と,を更に含むことを特徴とする請求項7記載の基板処理装置。 - 前記シャワーヘッドは,前記基板と平行する方向に前記プロセスガスを噴射し,
前記噴射孔は,同じ高さに形成されることを特徴とする請求項1記載の基板処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120065137A KR101440911B1 (ko) | 2012-06-18 | 2012-06-18 | 기판증착장치 |
KR10-2012-0065137 | 2012-06-18 | ||
PCT/KR2013/005262 WO2013191414A1 (ko) | 2012-06-18 | 2013-06-14 | 기판처리장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015520514A true JP2015520514A (ja) | 2015-07-16 |
JP6002837B2 JP6002837B2 (ja) | 2016-10-05 |
Family
ID=49768969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015513954A Active JP6002837B2 (ja) | 2012-06-18 | 2013-06-14 | 基板処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20150136026A1 (ja) |
JP (1) | JP6002837B2 (ja) |
KR (1) | KR101440911B1 (ja) |
CN (1) | CN104412363B (ja) |
TW (1) | TWI506701B (ja) |
WO (1) | WO2013191414A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2019117250A1 (ja) * | 2017-12-15 | 2020-12-24 | 芝浦メカトロニクス株式会社 | 有機膜形成装置 |
JP7473700B2 (ja) | 2017-12-15 | 2024-04-23 | 芝浦メカトロニクス株式会社 | 有機膜形成装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108807215B (zh) * | 2017-04-28 | 2021-01-29 | 苏州均晟豪智能科技有限公司 | 处理装置 |
KR101975454B1 (ko) * | 2018-03-21 | 2019-05-09 | (주)앤피에스 | 기판 처리 장치 및 이를 이용한 기판 처리 방법 |
KR102517747B1 (ko) | 2022-12-19 | 2023-04-03 | 백정훈 | Pcb 기판용 회전형 열 증발 확산 증착장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01278715A (ja) * | 1988-05-02 | 1989-11-09 | Nippon Telegr & Teleph Corp <Ntt> | 膜製造装置 |
JPH1092753A (ja) * | 1996-09-18 | 1998-04-10 | Tokyo Electron Ltd | 枚葉式の熱処理装置 |
JP2000058529A (ja) * | 1998-08-12 | 2000-02-25 | Hitachi Electron Eng Co Ltd | 化学気相成長装置及び半導体デバイスの製造方法 |
US6111225A (en) * | 1996-02-23 | 2000-08-29 | Tokyo Electron Limited | Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures |
JP2009041081A (ja) * | 2007-08-10 | 2009-02-26 | Toyota Motor Corp | 加熱炉および加熱炉の加熱方法 |
JP2010212430A (ja) * | 2009-03-10 | 2010-09-24 | Mitsui Eng & Shipbuild Co Ltd | 原子層成長装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6303906B1 (en) * | 1999-11-30 | 2001-10-16 | Wafermasters, Inc. | Resistively heated single wafer furnace |
JP4470274B2 (ja) * | 2000-04-26 | 2010-06-02 | 東京エレクトロン株式会社 | 熱処理装置 |
JP2001319886A (ja) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | 熱処理装置及びその方法 |
US6707011B2 (en) * | 2001-04-17 | 2004-03-16 | Mattson Technology, Inc. | Rapid thermal processing system for integrated circuits |
JP2002317269A (ja) * | 2001-04-18 | 2002-10-31 | Hitachi Ltd | 半導体装置の製造方法 |
TWI242815B (en) * | 2001-12-13 | 2005-11-01 | Ushio Electric Inc | Method for thermal processing semiconductor wafer |
US6952889B2 (en) * | 2002-11-05 | 2005-10-11 | Wafermasters, Inc. | Forced convection assisted rapid thermal furnace |
DE102005024118B4 (de) * | 2005-05-25 | 2009-05-07 | Mattson Thermal Products Gmbh | Vorrichtung und Verfahren zur Reduktion von Partikeln bei der thermischen Behandlung rotierender Substrate |
KR20100114037A (ko) * | 2007-12-20 | 2010-10-22 | 어플라이드 머티어리얼스, 인코포레이티드 | 향상된 가스 유동 분포를 가진 열 반응기 |
JP2009253242A (ja) * | 2008-04-11 | 2009-10-29 | Tokyo Electron Ltd | アニール装置 |
US9499905B2 (en) * | 2011-07-22 | 2016-11-22 | Applied Materials, Inc. | Methods and apparatus for the deposition of materials on a substrate |
CN104471678B (zh) * | 2012-07-27 | 2018-06-29 | 应用材料公司 | 用于输送工艺气体至基板的方法和设备 |
US20140026816A1 (en) * | 2012-07-27 | 2014-01-30 | Applied Materials, Inc. | Multi-zone quartz gas distribution apparatus |
-
2012
- 2012-06-18 KR KR1020120065137A patent/KR101440911B1/ko active IP Right Grant
-
2013
- 2013-04-15 TW TW102113242A patent/TWI506701B/zh active
- 2013-06-14 US US14/400,807 patent/US20150136026A1/en not_active Abandoned
- 2013-06-14 WO PCT/KR2013/005262 patent/WO2013191414A1/ko active Application Filing
- 2013-06-14 CN CN201380032133.0A patent/CN104412363B/zh active Active
- 2013-06-14 JP JP2015513954A patent/JP6002837B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01278715A (ja) * | 1988-05-02 | 1989-11-09 | Nippon Telegr & Teleph Corp <Ntt> | 膜製造装置 |
US6111225A (en) * | 1996-02-23 | 2000-08-29 | Tokyo Electron Limited | Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures |
JPH1092753A (ja) * | 1996-09-18 | 1998-04-10 | Tokyo Electron Ltd | 枚葉式の熱処理装置 |
JP2000058529A (ja) * | 1998-08-12 | 2000-02-25 | Hitachi Electron Eng Co Ltd | 化学気相成長装置及び半導体デバイスの製造方法 |
JP2009041081A (ja) * | 2007-08-10 | 2009-02-26 | Toyota Motor Corp | 加熱炉および加熱炉の加熱方法 |
JP2010212430A (ja) * | 2009-03-10 | 2010-09-24 | Mitsui Eng & Shipbuild Co Ltd | 原子層成長装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2019117250A1 (ja) * | 2017-12-15 | 2020-12-24 | 芝浦メカトロニクス株式会社 | 有機膜形成装置 |
JP7008727B2 (ja) | 2017-12-15 | 2022-01-25 | 芝浦メカトロニクス株式会社 | 有機膜形成装置 |
JP2022069440A (ja) * | 2017-12-15 | 2022-05-11 | 芝浦メカトロニクス株式会社 | 有機膜形成装置 |
JP7260681B2 (ja) | 2017-12-15 | 2023-04-18 | 芝浦メカトロニクス株式会社 | 有機膜形成装置 |
US11906246B2 (en) | 2017-12-15 | 2024-02-20 | Shibaura Mechatronics Corporation | Organic film forming apparatus |
JP7473700B2 (ja) | 2017-12-15 | 2024-04-23 | 芝浦メカトロニクス株式会社 | 有機膜形成装置 |
Also Published As
Publication number | Publication date |
---|---|
TW201401377A (zh) | 2014-01-01 |
JP6002837B2 (ja) | 2016-10-05 |
KR20130141968A (ko) | 2013-12-27 |
US20150136026A1 (en) | 2015-05-21 |
WO2013191414A1 (ko) | 2013-12-27 |
CN104412363A (zh) | 2015-03-11 |
KR101440911B1 (ko) | 2014-09-18 |
CN104412363B (zh) | 2017-02-22 |
TWI506701B (zh) | 2015-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10145012B2 (en) | Substrate processing apparatus and substrate processing method | |
KR101535155B1 (ko) | 기판 처리장치 | |
KR101387518B1 (ko) | 기판처리장치 | |
JP6088659B2 (ja) | 基板処理装置及びヒータの温度調節方法 | |
JP6002837B2 (ja) | 基板処理装置 | |
JP2012222024A (ja) | 基板処理装置及び半導体装置の製造方法 | |
KR101440307B1 (ko) | 기판처리장치 | |
US8968475B2 (en) | Substrate processing apparatus | |
KR101356537B1 (ko) | 기판 처리 장치 | |
US11242601B2 (en) | Showerhead and substrate processing apparatus including the same | |
KR101464202B1 (ko) | 기판 처리 장치 | |
KR101452829B1 (ko) | 히터의 온도조절방법 | |
JP7468926B2 (ja) | シャワーヘッド及び基板処理装置 | |
JP5957609B2 (ja) | 基板処理装置 | |
KR101570227B1 (ko) | 기판 처리장치 및 기판 처리방법 | |
KR20150133670A (ko) | 기판 처리장치 및 기판 처리방법 | |
KR20120133870A (ko) | 박막 증착장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20151125 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20151127 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160226 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160502 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160715 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20160715 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160808 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160905 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6002837 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |