JP2015518168A5 - - Google Patents

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Publication number
JP2015518168A5
JP2015518168A5 JP2015515019A JP2015515019A JP2015518168A5 JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5 JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5
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JP
Japan
Prior art keywords
humidity sensor
conductive electrode
sensor element
disposed
capacitance
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JP2015515019A
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English (en)
Japanese (ja)
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JP2015518168A (ja
JP6129304B2 (ja
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Priority claimed from PCT/US2013/040709 external-priority patent/WO2013180936A1/en
Publication of JP2015518168A publication Critical patent/JP2015518168A/ja
Publication of JP2015518168A5 publication Critical patent/JP2015518168A5/ja
Application granted granted Critical
Publication of JP6129304B2 publication Critical patent/JP6129304B2/ja
Active legal-status Critical Current
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JP2015515019A 2012-05-29 2013-05-13 湿度センサ及びセンサ素子 Active JP6129304B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261652496P 2012-05-29 2012-05-29
US61/652,496 2012-05-29
PCT/US2013/040709 WO2013180936A1 (en) 2012-05-29 2013-05-13 Humidity sensor and sensor element

Publications (3)

Publication Number Publication Date
JP2015518168A JP2015518168A (ja) 2015-06-25
JP2015518168A5 true JP2015518168A5 (https=) 2016-06-30
JP6129304B2 JP6129304B2 (ja) 2017-05-17

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ID=48538062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515019A Active JP6129304B2 (ja) 2012-05-29 2013-05-13 湿度センサ及びセンサ素子

Country Status (5)

Country Link
US (1) US9562872B2 (https=)
EP (1) EP2856128B1 (https=)
JP (1) JP6129304B2 (https=)
CN (1) CN104487831B (https=)
WO (1) WO2013180936A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US11056365B2 (en) * 2017-09-27 2021-07-06 Taiwan Semiconductor Manufacturing Co., Ltd. Fault detection method in semiconductor fabrication facility
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
EP4027417A1 (en) 2021-01-07 2022-07-13 AVL List GmbH Dual purpose sensor for measuring hydrogen and humidity in the anode loop of a fuel cell system
CN118706911B (zh) * 2024-08-29 2024-11-15 太原科技大学 一种平行板电容器式介电传感器及其应用

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