CN104487831B - 湿度传感器和传感器元件 - Google Patents

湿度传感器和传感器元件 Download PDF

Info

Publication number
CN104487831B
CN104487831B CN201380027971.9A CN201380027971A CN104487831B CN 104487831 B CN104487831 B CN 104487831B CN 201380027971 A CN201380027971 A CN 201380027971A CN 104487831 B CN104487831 B CN 104487831B
Authority
CN
China
Prior art keywords
humidity sensor
sensor element
conductive electrode
permeable
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380027971.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN104487831A (zh
Inventor
S·H·格里斯卡
K·A·莱温斯基
M·C·帕拉佐托
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN104487831A publication Critical patent/CN104487831A/zh
Application granted granted Critical
Publication of CN104487831B publication Critical patent/CN104487831B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CN201380027971.9A 2012-05-29 2013-05-13 湿度传感器和传感器元件 Expired - Fee Related CN104487831B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261652496P 2012-05-29 2012-05-29
US61/652,496 2012-05-29
PCT/US2013/040709 WO2013180936A1 (en) 2012-05-29 2013-05-13 Humidity sensor and sensor element

Publications (2)

Publication Number Publication Date
CN104487831A CN104487831A (zh) 2015-04-01
CN104487831B true CN104487831B (zh) 2016-09-07

Family

ID=48538062

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380027971.9A Expired - Fee Related CN104487831B (zh) 2012-05-29 2013-05-13 湿度传感器和传感器元件

Country Status (5)

Country Link
US (1) US9562872B2 (https=)
EP (1) EP2856128B1 (https=)
JP (1) JP6129304B2 (https=)
CN (1) CN104487831B (https=)
WO (1) WO2013180936A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US11056365B2 (en) * 2017-09-27 2021-07-06 Taiwan Semiconductor Manufacturing Co., Ltd. Fault detection method in semiconductor fabrication facility
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
EP4027417A1 (en) 2021-01-07 2022-07-13 AVL List GmbH Dual purpose sensor for measuring hydrogen and humidity in the anode loop of a fuel cell system
CN118706911B (zh) * 2024-08-29 2024-11-15 太原科技大学 一种平行板电容器式介电传感器及其应用

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57202405A (en) 1981-06-03 1982-12-11 Sharp Corp Wick raising device
US4520341A (en) * 1981-12-08 1985-05-28 Sharp Kabushiki Kaisha Moisture responsive element with crosslinked organic membrane and protective layering
JPS5991355A (ja) * 1982-11-16 1984-05-26 Murata Mfg Co Ltd 湿度センサ
JPS59202052A (ja) 1983-04-30 1984-11-15 Sharp Corp 感湿素子
JPS6016451A (ja) 1983-07-08 1985-01-28 Matsushita Electronics Corp 樹脂封止型半導体装置の製造方法
JPH0640092B2 (ja) * 1983-08-09 1994-05-25 工業技術院長 湿度測定方法
JPS61176844A (ja) * 1985-02-01 1986-08-08 Nisshinbo Ind Inc 感湿素子
US4662220A (en) 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
JPH01213564A (ja) * 1988-02-23 1989-08-28 Japan Gore Tex Inc 感湿素子およびその製造法
JPH0212047A (ja) * 1988-06-30 1990-01-17 Toshiba Corp 容量変化型感湿素子およびその製造方法
JPH065216B2 (ja) * 1988-07-26 1994-01-19 工業技術院長 静電容量変化型感湿素子の製造方法
DE3919864A1 (de) 1989-06-19 1990-12-20 Testoterm Mestechnik Gmbh & Co Kapazitiver feuchtesensor
US5131990A (en) * 1989-07-27 1992-07-21 Texas Instruments Incorporated Fluoropolymer humidity sensors
US5036704A (en) 1990-03-23 1991-08-06 Gas Research Institute Moisture sensor
JP3630306B2 (ja) * 2001-02-23 2005-03-16 株式会社豊田中央研究所 多官能化電解質及びこれを用いた電気化学デバイス並びに多官能化電解質の製造方法
WO2004078830A1 (ja) * 2003-03-04 2004-09-16 Eamex Corporation 変形性高強度ポリピロールフィルム
US7071271B2 (en) 2003-10-30 2006-07-04 3M Innovative Properties Company Aqueous emulsion polymerization of functionalized fluoromonomers
JP2006105628A (ja) * 2004-09-30 2006-04-20 Tdk Corp 湿度センサ素子
JP2007139447A (ja) * 2005-11-15 2007-06-07 Shinshu Univ 薄膜の透湿度測定装置および透湿度測定方法
CN100579996C (zh) * 2007-01-12 2010-01-13 山东东岳神舟新材料有限公司 带有磺酰氟及醚端基侧基的氟树脂及其合成方法与应用
CN101688052A (zh) 2007-07-27 2010-03-31 E.I.内穆尔杜邦公司 包含无机纳米颗粒的导电聚合物的含水分散体
JP2010540966A (ja) 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法
EP2208058B1 (en) * 2007-10-05 2018-07-11 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
CN102834374B (zh) 2010-04-16 2016-08-03 3M创新有限公司 质子传导材料
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
CN103154712B (zh) 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
CN103477217B (zh) 2011-04-13 2015-12-23 3M创新有限公司 包含校准信息的电子器件及其使用方法
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
EP2718706B1 (en) 2011-06-08 2015-03-11 3M Innovative Properties Company Humidity sensor and sensor element therefor

Also Published As

Publication number Publication date
JP6129304B2 (ja) 2017-05-17
EP2856128B1 (en) 2016-09-14
JP2015518168A (ja) 2015-06-25
CN104487831A (zh) 2015-04-01
US20150153296A1 (en) 2015-06-04
EP2856128A1 (en) 2015-04-08
US9562872B2 (en) 2017-02-07
WO2013180936A1 (en) 2013-12-05

Similar Documents

Publication Publication Date Title
CN103547915B (zh) 湿度传感器及其传感器元件
CN104487831B (zh) 湿度传感器和传感器元件
CN103154712B (zh) 传感器元件及其制备方法和包括所述传感器元件的传感器装置
JP5932806B2 (ja) センサー素子、その製造方法、及びそれを含むセンサー装置
CN103477217B (zh) 包含校准信息的电子器件及其使用方法
US10161896B2 (en) Sub-ambient temperature vapor sensor and method of use
CN104583763B (zh) 传感器元件及其制备和使用方法
CN101815936B (zh) 包含微孔聚合物的有机化学传感器及使用方法
TWI671514B (zh) 氣體感測器
RU2602489C1 (ru) Емкостный сенсор влажности газообразной среды
KR101876942B1 (ko) 이산화티탄 미립자가 혼합된 기능성 폴리머를 이용한 고감도 저 히스테리시스 다공성 ｍｉｍ 타입 용량성 습도 센서
KR101882401B1 (ko) 이산화티탄 미립자가 혼합된 기능성 폴리머를 이용한 고감도 저 히스테리시스 다공성 mim 타입 용량성 습도 센서 제조 방법
KR102839774B1 (ko) 상온에서 작동하는 포름알데히드 가스센서 및 측정시스템
Imawan et al. A capacitive-type humidity sensor using polymer electrolytes of PVA-LiCl thick films
Komarevtsev et al. Microelectromechanical gas sensor of resistive type for detection of hydrogen sulfide down to low concentrations
US20240102879A1 (en) Liquid leakage detection system and liquid leakage sensor
KR20210123596A (ko) 플렉시블 가스 센서 및 이의 제조 방법
CN110702746A (zh) 稠环方酰胺聚合物、基于稠环方酰胺聚合物的湿敏传感器及其制备方法
JPH03122591A (ja) 薄膜感湿素子

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160907

Termination date: 20200513