JP2013539040A5 - - Google Patents
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- Publication number
- JP2013539040A5 JP2013539040A5 JP2013531587A JP2013531587A JP2013539040A5 JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5 JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive electrode
- dielectric layer
- sensor element
- conductive
- shitsupo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002745 absorbent Effects 0.000 claims 5
- 239000002250 absorbent Substances 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 239000002041 carbon nanotube Substances 0.000 claims 3
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 3
- 239000012530 fluid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38813010P | 2010-09-30 | 2010-09-30 | |
| US61/388,130 | 2010-09-30 | ||
| PCT/US2011/049145 WO2012044419A1 (en) | 2010-09-30 | 2011-08-25 | Sensor element, method of making the same, and sensor device including the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013539040A JP2013539040A (ja) | 2013-10-17 |
| JP2013539040A5 true JP2013539040A5 (https=) | 2014-09-25 |
| JP5932806B2 JP5932806B2 (ja) | 2016-06-08 |
Family
ID=44681415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013531587A Expired - Fee Related JP5932806B2 (ja) | 2010-09-30 | 2011-08-25 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9341588B2 (https=) |
| EP (1) | EP2622334B1 (https=) |
| JP (1) | JP5932806B2 (https=) |
| CN (1) | CN103154714A (https=) |
| WO (1) | WO2012044419A1 (https=) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7952261B2 (en) | 2007-06-29 | 2011-05-31 | Bayer Materialscience Ag | Electroactive polymer transducers for sensory feedback applications |
| EP2239793A1 (de) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung |
| WO2012050686A1 (en) | 2010-09-30 | 2012-04-19 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| WO2012118916A2 (en) | 2011-03-01 | 2012-09-07 | Bayer Materialscience Ag | Automated manufacturing processes for producing deformable polymer devices and films |
| JP2014517331A (ja) | 2011-03-22 | 2014-07-17 | バイエル・インテレクチュアル・プロパティ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 電場応答性高分子アクチュエータレンチキュラシステム |
| US9506888B2 (en) | 2011-04-13 | 2016-11-29 | 3M Innovative Properties Company | Vapor sensor including sensor element with integral heating |
| WO2012141925A1 (en) | 2011-04-13 | 2012-10-18 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
| US9279792B2 (en) | 2011-04-13 | 2016-03-08 | 3M Innovative Properties Company | Method of using an absorptive sensor element |
| KR101922035B1 (ko) | 2011-06-08 | 2018-11-26 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 습도 센서 및 그를 위한 센서 요소 |
| CN103620387B (zh) | 2011-06-16 | 2017-02-15 | 3M创新有限公司 | 表面等离子体共振传感器元件和包括其的传感器 |
| JP6038950B2 (ja) | 2011-12-13 | 2016-12-07 | スリーエム イノベイティブ プロパティズ カンパニー | 気体媒質内の未知の有機化合物の同定及び定量測定方法 |
| US9876160B2 (en) | 2012-03-21 | 2018-01-23 | Parker-Hannifin Corporation | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
| CN104487831B (zh) | 2012-05-29 | 2016-09-07 | 3M创新有限公司 | 湿度传感器和传感器元件 |
| KR20150031285A (ko) | 2012-06-18 | 2015-03-23 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | 연신 공정을 위한 연신 프레임 |
| CN104583763B (zh) | 2012-06-25 | 2017-03-08 | 3M创新有限公司 | 传感器元件及其制备和使用方法 |
| US9702840B2 (en) | 2012-08-02 | 2017-07-11 | 3M Innovative Properties Company | Portable electronic device and vapor sensor card |
| US9317068B2 (en) * | 2012-09-24 | 2016-04-19 | Donaldson Company, Inc. | Venting assembly and microporous membrane composite |
| TW201436311A (zh) * | 2012-10-16 | 2014-09-16 | 拜耳智慧財產有限公司 | 金屬化介電膜之方法 |
| US9590193B2 (en) | 2012-10-24 | 2017-03-07 | Parker-Hannifin Corporation | Polymer diode |
| EP3048983B1 (en) * | 2013-09-26 | 2020-11-25 | 3M Innovative Properties Company | Vapor sensor suitable for detecting alcoholic residue at a skin site |
| CN103698360A (zh) * | 2013-12-13 | 2014-04-02 | 苏州纳格光电科技有限公司 | 半导体气体传感器 |
| EP3111203A1 (en) * | 2014-02-27 | 2017-01-04 | 3M Innovative Properties Company | Sub-ambient temperature vapor sensor and method of use |
| TWI711806B (zh) | 2014-07-22 | 2020-12-01 | 美商布魯爾科技公司 | 傳感器、感測器以及偵測條件之存在的方法 |
| CN107205648B (zh) * | 2014-12-18 | 2020-10-27 | 皇家飞利浦有限公司 | 水合状态指示器 |
| US10083883B2 (en) * | 2016-06-20 | 2018-09-25 | Applied Materials, Inc. | Wafer processing equipment having capacitive micro sensors |
| JP6450506B2 (ja) * | 2016-09-09 | 2019-01-16 | 北陸電気工業株式会社 | 容量型ガスセンサ |
| US10209186B2 (en) * | 2017-01-03 | 2019-02-19 | International Business Machines Corporation | Chemical sensing based on plasmon resonance in carbon nanotubes |
| WO2018234896A1 (en) * | 2017-06-20 | 2018-12-27 | Abdolahad Mohammad | Real-time and label free analyzer for in-vitro and in-vivo detecting the suspicious regions to cancer |
| EP3762391A4 (en) | 2018-03-08 | 2022-08-03 | ExxonMobil Technology and Engineering Company | SPIROCENTRIC COMPOUNDS AND POLYMERS THEREOF |
| WO2020036171A1 (ja) * | 2018-08-17 | 2020-02-20 | 富士フイルム株式会社 | センサ |
| CN109546890B (zh) * | 2019-01-18 | 2020-07-31 | 清华大学 | 湿气发电方法及装置 |
| IL302845A (en) * | 2020-11-11 | 2023-07-01 | B G Negev Technologies And Applications Ltd At Ben Gurion Univ | Device and methods for identifying pathogens |
| US12591162B2 (en) | 2021-09-20 | 2026-03-31 | Apple Inc. | Controllable aperture with index-matched central region for a portable electronic device imaging system |
| US20230093313A1 (en) * | 2021-09-22 | 2023-03-23 | Apple Inc. | Imaging System with Multi-Stop Aperture |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE9704329D0 (sv) * | 1997-11-25 | 1997-11-25 | Siemens Elema Ab | Gasmätare |
| US6085576A (en) * | 1998-03-20 | 2000-07-11 | Cyrano Sciences, Inc. | Handheld sensing apparatus |
| JP2003227806A (ja) * | 2002-02-01 | 2003-08-15 | Kansai Research Institute | 気体物質検知方法 |
| US20070048180A1 (en) | 2002-09-05 | 2007-03-01 | Gabriel Jean-Christophe P | Nanoelectronic breath analyzer and asthma monitor |
| US7449146B2 (en) | 2002-09-30 | 2008-11-11 | 3M Innovative Properties Company | Colorimetric sensor |
| GB0317557D0 (en) | 2003-07-26 | 2003-08-27 | Univ Manchester | Microporous polymer material |
| US7217354B2 (en) * | 2003-08-29 | 2007-05-15 | Ut-Battelle, Llc | Method and apparatus for detection of chemical vapors |
| GB0322832D0 (en) | 2003-09-30 | 2003-10-29 | Epigem Ltd | Sensor platforms utilising nanoporous membranes |
| US6997039B2 (en) | 2004-02-24 | 2006-02-14 | Clemson University | Carbon nanotube based resonant-circuit sensor |
| US8603825B2 (en) * | 2004-03-31 | 2013-12-10 | Agency For Science, Technology And Research | Sensor for measuring gas permeability of a test material |
| US8052932B2 (en) | 2006-12-22 | 2011-11-08 | Research Triangle Institute | Polymer nanofiber-based electronic nose |
| US7776269B2 (en) * | 2005-03-15 | 2010-08-17 | The United States Of America As Represented By The Secretary Of The Navy | Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes |
| US7837844B2 (en) * | 2005-04-26 | 2010-11-23 | Seacoast Science, Inc. | Interdigitated chemical sensors, and methods of making and using the same |
| US7208327B2 (en) * | 2005-05-25 | 2007-04-24 | Intel Corporation | Metal oxide sensors and method of forming |
| US8293340B2 (en) | 2005-12-21 | 2012-10-23 | 3M Innovative Properties Company | Plasma deposited microporous analyte detection layer |
| US7556774B2 (en) | 2005-12-21 | 2009-07-07 | 3M Innovative Properties Company | Optochemical sensor and method of making the same |
| US7767143B2 (en) | 2006-06-27 | 2010-08-03 | 3M Innovative Properties Company | Colorimetric sensors |
| US8067110B2 (en) | 2006-09-11 | 2011-11-29 | 3M Innovative Properties Company | Organic vapor sorbent protective device with thin-film indicator |
| JP2010532095A (ja) | 2007-06-28 | 2010-09-30 | スリーエム イノベイティブ プロパティズ カンパニー | 界面導電性クラスターを組み入れた薄膜トランジスタ |
| US20090091337A1 (en) | 2007-10-04 | 2009-04-09 | Robinson Joshua A | Carbon film composite, method of manufacturing a carbon film composite and sensor made therewith |
| US8835180B2 (en) | 2007-10-05 | 2014-09-16 | 3M Innovative Properties Company | Organic chemical sensor comprising microporous polymer, and method of use |
| WO2009046011A2 (en) | 2007-10-05 | 2009-04-09 | 3M Innovative Properties Company | Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using |
| JP5128380B2 (ja) * | 2008-06-19 | 2013-01-23 | 一般財団法人電力中央研究所 | 分解ガスセンサ |
| CN102405409B (zh) | 2008-12-23 | 2014-11-05 | 3M创新有限公司 | 具有微孔有机硅材料的有机化学传感器 |
| CN101811658B (zh) | 2009-02-20 | 2012-09-19 | 清华大学 | 碳纳米管阵列传感器及其制备方法 |
| JP5889182B2 (ja) | 2009-03-30 | 2016-03-22 | スリーエム イノベイティブ プロパティズ カンパニー | 検体の検出のための光電子法及びデバイス |
| CN103069269B (zh) | 2010-06-15 | 2016-08-03 | 3M创新有限公司 | 可变电容传感器及其制造方法 |
| WO2012050686A1 (en) | 2010-09-30 | 2012-04-19 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| WO2012141925A1 (en) | 2011-04-13 | 2012-10-18 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
-
2011
- 2011-08-25 US US13/825,663 patent/US9341588B2/en active Active
- 2011-08-25 EP EP11761429.7A patent/EP2622334B1/en not_active Not-in-force
- 2011-08-25 WO PCT/US2011/049145 patent/WO2012044419A1/en not_active Ceased
- 2011-08-25 CN CN2011800475842A patent/CN103154714A/zh active Pending
- 2011-08-25 JP JP2013531587A patent/JP5932806B2/ja not_active Expired - Fee Related
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