JP2015516044A5 - - Google Patents

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Publication number
JP2015516044A5
JP2015516044A5 JP2015509479A JP2015509479A JP2015516044A5 JP 2015516044 A5 JP2015516044 A5 JP 2015516044A5 JP 2015509479 A JP2015509479 A JP 2015509479A JP 2015509479 A JP2015509479 A JP 2015509479A JP 2015516044 A5 JP2015516044 A5 JP 2015516044A5
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JP
Japan
Prior art keywords
pump
booster pump
backing
millibar
predetermined threshold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015509479A
Other languages
English (en)
Japanese (ja)
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JP2015516044A (ja
JP6208219B2 (ja
Filing date
Publication date
Priority claimed from GB1207721.0A external-priority patent/GB2501735B/en
Application filed filed Critical
Publication of JP2015516044A publication Critical patent/JP2015516044A/ja
Publication of JP2015516044A5 publication Critical patent/JP2015516044A5/ja
Application granted granted Critical
Publication of JP6208219B2 publication Critical patent/JP6208219B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015509479A 2012-05-02 2013-04-24 真空ポンプ装置のウォーミングアップ方法およびウォーミングアップ装置 Expired - Fee Related JP6208219B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1207721.0A GB2501735B (en) 2012-05-02 2012-05-02 Method and apparatus for warming up a vacuum pump arrangement
GB1207721.0 2012-05-02
PCT/GB2013/051033 WO2013164571A2 (en) 2012-05-02 2013-04-24 Method and apparatus for warming up a vacuum pump arrangement

Publications (3)

Publication Number Publication Date
JP2015516044A JP2015516044A (ja) 2015-06-04
JP2015516044A5 true JP2015516044A5 (https=) 2017-04-13
JP6208219B2 JP6208219B2 (ja) 2017-10-04

Family

ID=46330713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015509479A Expired - Fee Related JP6208219B2 (ja) 2012-05-02 2013-04-24 真空ポンプ装置のウォーミングアップ方法およびウォーミングアップ装置

Country Status (8)

Country Link
US (1) US20150086387A1 (https=)
EP (1) EP2844879A2 (https=)
JP (1) JP6208219B2 (https=)
KR (1) KR20150005945A (https=)
CN (1) CN104246230B (https=)
GB (1) GB2501735B (https=)
TW (1) TWI640687B (https=)
WO (1) WO2013164571A2 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016112442A1 (en) * 2015-01-15 2016-07-21 Atlas Copco Airpower, Naamloze Vennootschap Method for controlling a gas supply to a vacuum pump
US10094381B2 (en) 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
JP2017031892A (ja) * 2015-08-03 2017-02-09 アルバック機工株式会社 真空排気装置及びその運転方法
CN106762540A (zh) * 2015-11-24 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种节能型真空泵氮气吹扫装置
CN105422454B (zh) * 2015-12-09 2017-12-19 攀枝花钢城集团瑞钢工业有限公司 真空抽气系统和真空抽气方法
DE102016005216A1 (de) * 2016-04-28 2017-11-02 Linde Aktiengesellschaft Fluidenergiemaschine
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
DE102017107601B4 (de) * 2017-04-10 2019-11-07 Gardner Denver Deutschland Gmbh Verfahren zur Steuerung eines Schraubenverdichters
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2583942A (en) * 2019-05-14 2020-11-18 Edwards Ltd Heater control unit
CN111734615B (zh) * 2020-06-28 2022-03-18 安图实验仪器(郑州)有限公司 用于真空系统的后级泵控制系统及控制方法
JP7502217B2 (ja) * 2021-02-26 2024-06-18 株式会社荏原製作所 真空排気方法および真空排気システム
WO2025009947A1 (ko) * 2023-07-06 2025-01-09 (주)엘오티베큠 진공펌프 시스템 및 이의 제어 방법
GB2641036A (en) * 2024-05-13 2025-11-19 Edwards Ltd Vacuum pumping system and method
US20260028975A1 (en) * 2024-07-29 2026-01-29 Applied Materials, Inc. Protective coatings for cryogenic pump components in process chambers

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
US6673323B1 (en) * 2000-03-24 2004-01-06 Applied Materials, Inc. Treatment of hazardous gases in effluent
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP4364670B2 (ja) * 2004-02-24 2009-11-18 株式会社日立国際電気 Ａｌｄ装置
US7695231B2 (en) * 2004-03-08 2010-04-13 Jusung Engineering Co., Ltd. Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
JP2006342688A (ja) * 2005-06-07 2006-12-21 Ebara Corp 真空排気システム
GB0513867D0 (en) * 2005-07-06 2005-08-10 Boc Group Plc Method of treating an exhaust gas
JP4825608B2 (ja) * 2005-08-12 2011-11-30 株式会社荏原製作所 真空排気装置および真空排気方法、基板の加工装置および基板の加工方法
GB0520468D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Fluorine abatement
GB0521944D0 (en) * 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
EP1979619B1 (en) * 2006-01-31 2016-12-14 Ebara Corporation Vacuum pump unit
JP4702236B2 (ja) * 2006-09-12 2011-06-15 株式会社豊田自動織機 真空ポンプの運転停止制御方法及び運転停止制御装置
JP2008088880A (ja) * 2006-09-29 2008-04-17 Anest Iwata Corp 真空排気装置
KR100885919B1 (ko) * 2007-05-21 2009-02-26 삼성전자주식회사 펌프 폴트 예측 장치 및 펌프 폴트 예측 방법

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