JP2015503110A5 - - Google Patents

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Publication number
JP2015503110A5
JP2015503110A5 JP2014549117A JP2014549117A JP2015503110A5 JP 2015503110 A5 JP2015503110 A5 JP 2015503110A5 JP 2014549117 A JP2014549117 A JP 2014549117A JP 2014549117 A JP2014549117 A JP 2014549117A JP 2015503110 A5 JP2015503110 A5 JP 2015503110A5
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JP
Japan
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sample
array
focal
item
focal spot
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JP2014549117A
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English (en)
Japanese (ja)
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JP2015503110A (ja
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Priority claimed from PCT/US2012/068935 external-priority patent/WO2013096003A1/en
Publication of JP2015503110A publication Critical patent/JP2015503110A/ja
Publication of JP2015503110A5 publication Critical patent/JP2015503110A5/ja
Withdrawn legal-status Critical Current

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JP2014549117A 2011-12-20 2012-12-11 表面不均一性を測定するためのセンサ Withdrawn JP2015503110A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161578174P 2011-12-20 2011-12-20
US61/578,174 2011-12-20
PCT/US2012/068935 WO2013096003A1 (en) 2011-12-20 2012-12-11 Sensor for measuring surface non-uniformity

Publications (2)

Publication Number Publication Date
JP2015503110A JP2015503110A (ja) 2015-01-29
JP2015503110A5 true JP2015503110A5 (enExample) 2015-12-10

Family

ID=48669363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014549117A Withdrawn JP2015503110A (ja) 2011-12-20 2012-12-11 表面不均一性を測定するためのセンサ

Country Status (8)

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US (1) US20140362371A1 (enExample)
EP (1) EP2795250A4 (enExample)
JP (1) JP2015503110A (enExample)
KR (1) KR20140105593A (enExample)
CN (1) CN104797906A (enExample)
BR (1) BR112014014823A2 (enExample)
SG (1) SG11201403446XA (enExample)
WO (1) WO2013096003A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106970049B (zh) * 2017-05-15 2024-01-02 中国工程物理研究院激光聚变研究中心 透射率分布测量系统及方法
CN108007397A (zh) 2018-01-09 2018-05-08 常州华达科捷光电仪器有限公司 一种激光测准系统
CN109870128B (zh) * 2019-03-19 2022-06-28 青岛科技大学 一种喷墨打印中微纳结构形貌实时监测光路系统
US12320632B2 (en) * 2022-02-10 2025-06-03 Sarcos Corp. High resolution optical displacement measurement

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2808359C3 (de) * 1978-02-27 1980-09-04 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Suchgerät für Löcher in Bahnen
DE3334357C2 (de) * 1983-09-22 1986-04-10 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optisches Fehlersuchgerät für Bahnen
JPH0641923B2 (ja) * 1988-09-20 1994-06-01 株式会社東芝 表面検査装置
US5966212A (en) * 1996-07-18 1999-10-12 Pixel Systems, Inc. High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
JP2000180373A (ja) * 1998-12-15 2000-06-30 Hoya Corp 欠陥検査方法及び欠陥検査装置
US7830522B2 (en) * 2002-09-25 2010-11-09 New York University Method and apparatus for determining reflectance data of a subject
CN1247956C (zh) * 2002-12-25 2006-03-29 合肥工业大学 并行像散三维光聚焦探测方法及装置
US7292333B2 (en) * 2003-06-24 2007-11-06 Corning Incorporated Optical interrogation system and method for 2-D sensor arrays
KR100662904B1 (ko) * 2004-03-09 2007-01-02 삼성전자주식회사 편향 디스크 판별방법 및 장치
JP2008535682A (ja) * 2005-03-09 2008-09-04 スリーエム イノベイティブ プロパティズ カンパニー 微細複製物品の作製装置および方法
US7623251B2 (en) * 2006-04-07 2009-11-24 Amo Wavefront Sciences, Llc. Geometric measurement system and method of measuring a geometric characteristic of an object
CN1971232B (zh) * 2006-12-13 2010-06-16 中国科学院光电技术研究所 具有主动式对准功能的哈特曼波前传感器及其检测方法
US8405831B2 (en) * 2007-06-19 2013-03-26 3M Innovative Properties Company Systems and methods for indicating the position of a web
US7777872B2 (en) * 2007-07-31 2010-08-17 Alcon Research, Ltd. Method of measuring diffractive lenses
WO2009085004A1 (en) * 2007-12-28 2009-07-09 Rolling Optics Ab Method of producing a microstructured product
SG184034A1 (en) * 2010-04-01 2012-10-30 3M Innovative Properties Co Precision control of web material having micro-replicated lens array
CN102226738B (zh) * 2011-03-25 2013-03-13 宁波大学 一种红外玻璃非均匀性检测方法

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