BR112014014823A2 - sensor para medir a não uniformidade da superfície - Google Patents
sensor para medir a não uniformidade da superfícieInfo
- Publication number
- BR112014014823A2 BR112014014823A2 BR112014014823A BR112014014823A BR112014014823A2 BR 112014014823 A2 BR112014014823 A2 BR 112014014823A2 BR 112014014823 A BR112014014823 A BR 112014014823A BR 112014014823 A BR112014014823 A BR 112014014823A BR 112014014823 A2 BR112014014823 A2 BR 112014014823A2
- Authority
- BR
- Brazil
- Prior art keywords
- uniformity
- sensor
- array
- focal points
- sample
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
resumo sensor para medir a não uniformidade da superfície o método da presente invenção inclui a formação de um feixe de interrogação bidimensional em uma região de amostra selecionada de uma superfície; coletar luz transmitida através ou refletida a partir da região da amostra com um conjunto de lentes para formar uma matriz de amostra de pontos focais; formar a imagem da matriz de amostra de pontos focais através de uma lente de formação de imagem em um sensor; e comparar uma imagem da matriz de amostra de pontos focais com uma matriz de referência de pontos focais para determinar um nível de não uniformidade na região de amostra. 1 / 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161578174P | 2011-12-20 | 2011-12-20 | |
PCT/US2012/068935 WO2013096003A1 (en) | 2011-12-20 | 2012-12-11 | Sensor for measuring surface non-uniformity |
Publications (1)
Publication Number | Publication Date |
---|---|
BR112014014823A2 true BR112014014823A2 (pt) | 2017-06-13 |
Family
ID=48669363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112014014823A BR112014014823A2 (pt) | 2011-12-20 | 2012-12-11 | sensor para medir a não uniformidade da superfície |
Country Status (8)
Country | Link |
---|---|
US (1) | US20140362371A1 (pt) |
EP (1) | EP2795250A4 (pt) |
JP (1) | JP2015503110A (pt) |
KR (1) | KR20140105593A (pt) |
CN (1) | CN104797906A (pt) |
BR (1) | BR112014014823A2 (pt) |
SG (1) | SG11201403446XA (pt) |
WO (1) | WO2013096003A1 (pt) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106970049B (zh) * | 2017-05-15 | 2024-01-02 | 中国工程物理研究院激光聚变研究中心 | 透射率分布测量系统及方法 |
CN108007397A (zh) * | 2018-01-09 | 2018-05-08 | 常州华达科捷光电仪器有限公司 | 一种激光测准系统 |
CN109870128B (zh) * | 2019-03-19 | 2022-06-28 | 青岛科技大学 | 一种喷墨打印中微纳结构形貌实时监测光路系统 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2808359C3 (de) * | 1978-02-27 | 1980-09-04 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Suchgerät für Löcher in Bahnen |
DE3334357C2 (de) * | 1983-09-22 | 1986-04-10 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Optisches Fehlersuchgerät für Bahnen |
JPH0641923B2 (ja) * | 1988-09-20 | 1994-06-01 | 株式会社東芝 | 表面検査装置 |
US5966212A (en) * | 1996-07-18 | 1999-10-12 | Pixel Systems, Inc. | High-speed, high-resolution, large area inspection using multiple optical fourier transform cells |
JP2000180373A (ja) * | 1998-12-15 | 2000-06-30 | Hoya Corp | 欠陥検査方法及び欠陥検査装置 |
US7830522B2 (en) * | 2002-09-25 | 2010-11-09 | New York University | Method and apparatus for determining reflectance data of a subject |
CN1247956C (zh) * | 2002-12-25 | 2006-03-29 | 合肥工业大学 | 并行像散三维光聚焦探测方法及装置 |
US7292333B2 (en) * | 2003-06-24 | 2007-11-06 | Corning Incorporated | Optical interrogation system and method for 2-D sensor arrays |
KR100662904B1 (ko) * | 2004-03-09 | 2007-01-02 | 삼성전자주식회사 | 편향 디스크 판별방법 및 장치 |
KR20070111544A (ko) * | 2005-03-09 | 2007-11-21 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 미세 복제품 제조 장치 및 방법 |
US7623251B2 (en) * | 2006-04-07 | 2009-11-24 | Amo Wavefront Sciences, Llc. | Geometric measurement system and method of measuring a geometric characteristic of an object |
CN1971232B (zh) * | 2006-12-13 | 2010-06-16 | 中国科学院光电技术研究所 | 具有主动式对准功能的哈特曼波前传感器及其检测方法 |
KR101493115B1 (ko) * | 2007-06-19 | 2015-02-12 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 웨브의 위치를 나타내는 시스템 및 방법 |
US7777872B2 (en) * | 2007-07-31 | 2010-08-17 | Alcon Research, Ltd. | Method of measuring diffractive lenses |
JP2011508907A (ja) * | 2007-12-28 | 2011-03-17 | ローリング オプティクス エービー | 微細構造化製品を製造する方法 |
EP2552598B1 (en) * | 2010-04-01 | 2017-04-19 | 3M Innovative Properties Company | Precision control of web material having micro-replicated lens array |
CN102226738B (zh) * | 2011-03-25 | 2013-03-13 | 宁波大学 | 一种红外玻璃非均匀性检测方法 |
-
2012
- 2012-12-11 KR KR1020147020263A patent/KR20140105593A/ko not_active Application Discontinuation
- 2012-12-11 BR BR112014014823A patent/BR112014014823A2/pt not_active IP Right Cessation
- 2012-12-11 WO PCT/US2012/068935 patent/WO2013096003A1/en active Application Filing
- 2012-12-11 US US14/366,399 patent/US20140362371A1/en not_active Abandoned
- 2012-12-11 EP EP12860619.1A patent/EP2795250A4/en not_active Withdrawn
- 2012-12-11 CN CN201280063616.2A patent/CN104797906A/zh active Pending
- 2012-12-11 JP JP2014549117A patent/JP2015503110A/ja not_active Withdrawn
- 2012-12-11 SG SG11201403446XA patent/SG11201403446XA/en unknown
Also Published As
Publication number | Publication date |
---|---|
EP2795250A1 (en) | 2014-10-29 |
SG11201403446XA (en) | 2014-10-30 |
WO2013096003A1 (en) | 2013-06-27 |
KR20140105593A (ko) | 2014-09-01 |
US20140362371A1 (en) | 2014-12-11 |
EP2795250A4 (en) | 2015-09-16 |
JP2015503110A (ja) | 2015-01-29 |
CN104797906A (zh) | 2015-07-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] | ||
B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] | ||
B350 | Update of information on the portal [chapter 15.35 patent gazette] |