BR112014014823A2 - sensor para medir a não uniformidade da superfície - Google Patents

sensor para medir a não uniformidade da superfície

Info

Publication number
BR112014014823A2
BR112014014823A2 BR112014014823A BR112014014823A BR112014014823A2 BR 112014014823 A2 BR112014014823 A2 BR 112014014823A2 BR 112014014823 A BR112014014823 A BR 112014014823A BR 112014014823 A BR112014014823 A BR 112014014823A BR 112014014823 A2 BR112014014823 A2 BR 112014014823A2
Authority
BR
Brazil
Prior art keywords
uniformity
sensor
array
focal points
sample
Prior art date
Application number
BR112014014823A
Other languages
English (en)
Inventor
L Hofeldt David
J Ribnick Evan
W Lai Jack
Qiao Yi
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of BR112014014823A2 publication Critical patent/BR112014014823A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

resumo “sensor para medir a não uniformidade da superfície” o método da presente invenção inclui a formação de um feixe de interrogação bidimensional em uma região de amostra selecionada de uma superfície; coletar luz transmitida através ou refletida a partir da região da amostra com um conjunto de lentes para formar uma matriz de amostra de pontos focais; formar a imagem da matriz de amostra de pontos focais através de uma lente de formação de imagem em um sensor; e comparar uma imagem da matriz de amostra de pontos focais com uma matriz de referência de pontos focais para determinar um nível de não uniformidade na região de amostra. 1 / 1
BR112014014823A 2011-12-20 2012-12-11 sensor para medir a não uniformidade da superfície BR112014014823A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161578174P 2011-12-20 2011-12-20
PCT/US2012/068935 WO2013096003A1 (en) 2011-12-20 2012-12-11 Sensor for measuring surface non-uniformity

Publications (1)

Publication Number Publication Date
BR112014014823A2 true BR112014014823A2 (pt) 2017-06-13

Family

ID=48669363

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112014014823A BR112014014823A2 (pt) 2011-12-20 2012-12-11 sensor para medir a não uniformidade da superfície

Country Status (8)

Country Link
US (1) US20140362371A1 (pt)
EP (1) EP2795250A4 (pt)
JP (1) JP2015503110A (pt)
KR (1) KR20140105593A (pt)
CN (1) CN104797906A (pt)
BR (1) BR112014014823A2 (pt)
SG (1) SG11201403446XA (pt)
WO (1) WO2013096003A1 (pt)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106970049B (zh) * 2017-05-15 2024-01-02 中国工程物理研究院激光聚变研究中心 透射率分布测量系统及方法
CN108007397A (zh) * 2018-01-09 2018-05-08 常州华达科捷光电仪器有限公司 一种激光测准系统
CN109870128B (zh) * 2019-03-19 2022-06-28 青岛科技大学 一种喷墨打印中微纳结构形貌实时监测光路系统

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2808359C3 (de) * 1978-02-27 1980-09-04 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Suchgerät für Löcher in Bahnen
DE3334357C2 (de) * 1983-09-22 1986-04-10 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optisches Fehlersuchgerät für Bahnen
JPH0641923B2 (ja) * 1988-09-20 1994-06-01 株式会社東芝 表面検査装置
US5966212A (en) * 1996-07-18 1999-10-12 Pixel Systems, Inc. High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
JP2000180373A (ja) * 1998-12-15 2000-06-30 Hoya Corp 欠陥検査方法及び欠陥検査装置
US7830522B2 (en) * 2002-09-25 2010-11-09 New York University Method and apparatus for determining reflectance data of a subject
CN1247956C (zh) * 2002-12-25 2006-03-29 合肥工业大学 并行像散三维光聚焦探测方法及装置
US7292333B2 (en) * 2003-06-24 2007-11-06 Corning Incorporated Optical interrogation system and method for 2-D sensor arrays
KR100662904B1 (ko) * 2004-03-09 2007-01-02 삼성전자주식회사 편향 디스크 판별방법 및 장치
KR20070111544A (ko) * 2005-03-09 2007-11-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 미세 복제품 제조 장치 및 방법
US7623251B2 (en) * 2006-04-07 2009-11-24 Amo Wavefront Sciences, Llc. Geometric measurement system and method of measuring a geometric characteristic of an object
CN1971232B (zh) * 2006-12-13 2010-06-16 中国科学院光电技术研究所 具有主动式对准功能的哈特曼波前传感器及其检测方法
KR101493115B1 (ko) * 2007-06-19 2015-02-12 쓰리엠 이노베이티브 프로퍼티즈 컴파니 웨브의 위치를 나타내는 시스템 및 방법
US7777872B2 (en) * 2007-07-31 2010-08-17 Alcon Research, Ltd. Method of measuring diffractive lenses
JP2011508907A (ja) * 2007-12-28 2011-03-17 ローリング オプティクス エービー 微細構造化製品を製造する方法
EP2552598B1 (en) * 2010-04-01 2017-04-19 3M Innovative Properties Company Precision control of web material having micro-replicated lens array
CN102226738B (zh) * 2011-03-25 2013-03-13 宁波大学 一种红外玻璃非均匀性检测方法

Also Published As

Publication number Publication date
EP2795250A1 (en) 2014-10-29
SG11201403446XA (en) 2014-10-30
WO2013096003A1 (en) 2013-06-27
KR20140105593A (ko) 2014-09-01
US20140362371A1 (en) 2014-12-11
EP2795250A4 (en) 2015-09-16
JP2015503110A (ja) 2015-01-29
CN104797906A (zh) 2015-07-22

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]
B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]
B350 Update of information on the portal [chapter 15.35 patent gazette]