JP2015230279A5 - - Google Patents

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Publication number
JP2015230279A5
JP2015230279A5 JP2014117730A JP2014117730A JP2015230279A5 JP 2015230279 A5 JP2015230279 A5 JP 2015230279A5 JP 2014117730 A JP2014117730 A JP 2014117730A JP 2014117730 A JP2014117730 A JP 2014117730A JP 2015230279 A5 JP2015230279 A5 JP 2015230279A5
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JP
Japan
Prior art keywords
control system
previously described
advances
executes
starts
Prior art date
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Application number
JP2014117730A
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English (en)
Japanese (ja)
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JP2015230279A (ja
JP6180372B2 (ja
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Priority to JP2014117730A priority Critical patent/JP6180372B2/ja
Priority claimed from JP2014117730A external-priority patent/JP6180372B2/ja
Priority to DE102015108721.9A priority patent/DE102015108721B4/de
Publication of JP2015230279A publication Critical patent/JP2015230279A/ja
Publication of JP2015230279A5 publication Critical patent/JP2015230279A5/ja
Application granted granted Critical
Publication of JP6180372B2 publication Critical patent/JP6180372B2/ja
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JP2014117730A 2014-06-06 2014-06-06 半導体素子の検査方法および検査装置 Active JP6180372B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014117730A JP6180372B2 (ja) 2014-06-06 2014-06-06 半導体素子の検査方法および検査装置
DE102015108721.9A DE102015108721B4 (de) 2014-06-06 2015-06-02 Untersuchungsverfahren und Untersuchungsvorrichtung für ein Halbleiterelement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014117730A JP6180372B2 (ja) 2014-06-06 2014-06-06 半導体素子の検査方法および検査装置

Publications (3)

Publication Number Publication Date
JP2015230279A JP2015230279A (ja) 2015-12-21
JP2015230279A5 true JP2015230279A5 (enExample) 2016-11-24
JP6180372B2 JP6180372B2 (ja) 2017-08-16

Family

ID=54549025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014117730A Active JP6180372B2 (ja) 2014-06-06 2014-06-06 半導体素子の検査方法および検査装置

Country Status (2)

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JP (1) JP6180372B2 (enExample)
DE (1) DE102015108721B4 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102469942B1 (ko) * 2016-04-19 2022-11-22 엘에스일렉트릭(주) 인버터 스위칭 소자의 온도추정을 위한 파라미터 결정장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764179A (en) * 1980-10-06 1982-04-19 Mitsubishi Electric Corp Testing method for semiconductor device
JP2005345247A (ja) * 2004-06-02 2005-12-15 Toyota Motor Corp 半導体素子の評価装置
JP5045325B2 (ja) 2007-09-14 2012-10-10 トヨタ自動車株式会社 トランジスタの検査方法と検査装置
JP5258810B2 (ja) 2010-02-17 2013-08-07 三菱電機株式会社 半導体装置の試験装置
WO2013016643A2 (en) * 2011-07-28 2013-01-31 Integrated Technology Corporation Damage reduction method and apparatus for destructive testing of power semiconductors

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