JP2015220700A - フィルタおよび分波器 - Google Patents
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6483—Ladder SAW filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/703—Networks using bulk acoustic wave devices
- H03H9/706—Duplexers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/72—Networks using surface acoustic waves
- H03H9/725—Duplexers
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
12a、12b 下部電極
14a、14b 圧電膜
16a、16b 上部電極
18a、18b 空隙
20 共振領域
30 受信フィルタ
32 送信フィルタ
40 ラダー型フィルタ
50 横結合型共振器
Claims (12)
- 入力端子と出力端子との間に直列に接続された1または複数の直列共振器と、
前記入力端子と前記出力端子との間に並列に接続された1または複数の並列共振器と、
前記1または複数の直列共振器のうち少なくとも1つの直列共振器と並列に接続された横結合型共振器と、
を具備することを特徴とするフィルタ。 - 前記横結合型共振器は、第1圧電膜と、前記第1圧電膜を挟む第1下部電極および複数の第1上部電極と、を備えることを特徴とする請求項1記載のフィルタ。
- 前記1または複数の直列共振器および前記1または複数の並列共振器は、第2圧電膜と、前記第2圧電膜を挟む第2下部電極および第2上部電極と、を備える圧電薄膜共振器であり、
前記第1圧電膜と前記第2圧電膜とは同じ材料からなることを特徴とする請求項2記載のフィルタ。 - 前記第1圧電膜と前記第2圧電膜との膜厚は略等しいことを特徴とする請求項3記載のフィルタ。
- 前記複数の第1上部電極は、互いに対向する櫛型電極であることを特徴とする請求項2から4のいずれか一項記載のフィルタ。
- 前記少なくとも1つの直列共振器に並列、かつ前記横結合型共振器に直列に接続されたキャパシタを具備することを特徴とする請求項1から5のいずれか一項記載のフィルタ。
- 前記キャパシタは、前記横結合共振器の前記入力端子側と前記出力端子側に設けられていることを特徴とする請求項6記載のフィルタ。
- 抑圧帯域において、前記少なくとも1つの直列共振器を通過する第1信号と前記横結合型共振器を通過する第2信号との振幅は略一致し、前記第1信号と前記第2信号とは略逆相であることを特徴とする請求項1から7のいずれか一項記載のフィルタ。
- 共通端子と送信端子との間に接続された送信フィルタと、
前記共通端子と受信端子との間に接続された受信フィルタと、
を具備し、
前記送信フィルタおよび前記受信フィルタの少なくとも一方は請求項1から8のいずれか一項記載のフィルタであることを特徴とする分波器。 - 前記横結合型共振器の共振周波数は、前記送信フィルタおよび前記受信フィルタのうち相手方フィルタの通過帯域における位相が誘導性となるような周波数であることを特徴とする請求項9記載の分波器。
- 共通端子と送信端子との間に接続された送信フィルタと、
前記共通端子と受信端子との間に接続された受信フィルタと、
前記送信端子と前記受信端子との間に前記送信フィルタおよび前記受信フィルタと並列に接続された横結合型共振器と、
を具備することを特徴とする分波器。 - 前記横結合型共振器は、第1圧電膜と、前記第1圧電膜を挟む第1下部電極および複数の第1上部電極と、を備え、
前記送信フィルタおよび前記受信フィルタの少なくとも一方は、第2圧電膜と、前記第2圧電膜を挟む第2下部電極および第2上部電極と、を備える圧電薄膜共振器を含み、
前記第1圧電膜と前記第2圧電膜とは同じ材料からなることを特徴とする請求項9から11のいずれか一項記載の分波器。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014104933A JP6603012B2 (ja) | 2014-05-21 | 2014-05-21 | 分波器 |
US14/693,706 US9742377B2 (en) | 2014-05-21 | 2015-04-22 | Filter and duplexer |
CN201510262707.4A CN105099391B (zh) | 2014-05-21 | 2015-05-21 | 双工器 |
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JP2014104933A JP6603012B2 (ja) | 2014-05-21 | 2014-05-21 | 分波器 |
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JP2015220700A true JP2015220700A (ja) | 2015-12-07 |
JP6603012B2 JP6603012B2 (ja) | 2019-11-06 |
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US (1) | US9742377B2 (ja) |
JP (1) | JP6603012B2 (ja) |
CN (1) | CN105099391B (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017126900A (ja) * | 2016-01-14 | 2017-07-20 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
JP2018007239A (ja) * | 2016-06-24 | 2018-01-11 | 株式会社村田製作所 | 弾性波装置 |
JP2018074539A (ja) * | 2016-11-04 | 2018-05-10 | 株式会社村田製作所 | マルチプレクサ |
JP2018078489A (ja) * | 2016-11-10 | 2018-05-17 | 太陽誘電株式会社 | フィルタおよびマルチプレクサ |
JP2019004264A (ja) * | 2017-06-13 | 2019-01-10 | 太陽誘電株式会社 | 弾性波デバイス |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107196623B (zh) * | 2016-03-15 | 2021-03-12 | 络达科技股份有限公司 | 具主动校准机制的声波装置 |
JP6556094B2 (ja) * | 2016-05-11 | 2019-08-07 | 太陽誘電株式会社 | フィルタおよびマルチプレクサ |
JP6573853B2 (ja) * | 2016-08-10 | 2019-09-11 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法 |
US10804879B2 (en) * | 2016-09-30 | 2020-10-13 | Intel Corporation | Film bulk acoustic resonator (FBAR) devices for high frequency RF filters |
JP7057636B2 (ja) * | 2017-08-16 | 2022-04-20 | 株式会社村田製作所 | マルチプレクサ |
US11165406B2 (en) * | 2018-03-02 | 2021-11-02 | Skyworks Solutions, Inc. | Lamb wave element and bulk acoustic wave resonator on common substrate |
WO2020003956A1 (ja) * | 2018-06-28 | 2020-01-02 | 株式会社村田製作所 | マルチプレクサ、高周波フロントエンド回路および通信装置 |
CN109802644B (zh) * | 2018-12-20 | 2021-11-30 | 天津大学 | 一种双工器 |
US11349454B2 (en) * | 2018-12-28 | 2022-05-31 | Skyworks Global Pte. Ltd. | Acoustic wave devices with common glass substrate |
US11088670B2 (en) * | 2019-09-11 | 2021-08-10 | Vtt Technical Research Centre Of Finland Ltd | Loaded series resonators for adjusting frequency response of acoustic wave resonators |
CN111082777B (zh) * | 2019-12-31 | 2021-03-12 | 诺思(天津)微系统有限责任公司 | 底电极为空隙电极的体声波谐振器、滤波器及电子设备 |
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US12016247B2 (en) * | 2020-08-27 | 2024-06-18 | Qualcomm Incorporated | Package comprising an integrated passive device configured as a cap for a filter |
CN116671013A (zh) * | 2020-12-31 | 2023-08-29 | 华为技术有限公司 | 滤波器以及滤波器的制备方法 |
CN117013986B (zh) * | 2022-11-30 | 2024-01-26 | 北京芯溪半导体科技有限公司 | 一种滤波器、双工器、多工器和通信设备 |
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2014
- 2014-05-21 JP JP2014104933A patent/JP6603012B2/ja active Active
-
2015
- 2015-04-22 US US14/693,706 patent/US9742377B2/en not_active Expired - Fee Related
- 2015-05-21 CN CN201510262707.4A patent/CN105099391B/zh active Active
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JP2008543157A (ja) * | 2005-05-27 | 2008-11-27 | エヌエックスピー ビー ヴィ | バルク音波共振器装置 |
JP2013118611A (ja) * | 2011-11-04 | 2013-06-13 | Taiyo Yuden Co Ltd | 分波器、フィルタ及び通信モジュール |
WO2013068652A1 (en) * | 2011-11-11 | 2013-05-16 | Teknologian Tutkimuskeskus Vtt | Laterally coupled bulk acoustic wave filter with improved passband characteristics |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017126900A (ja) * | 2016-01-14 | 2017-07-20 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
US10469049B2 (en) | 2016-01-14 | 2019-11-05 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonator, filter, and duplexer |
JP2018007239A (ja) * | 2016-06-24 | 2018-01-11 | 株式会社村田製作所 | 弾性波装置 |
JP2018074539A (ja) * | 2016-11-04 | 2018-05-10 | 株式会社村田製作所 | マルチプレクサ |
JP2018078489A (ja) * | 2016-11-10 | 2018-05-17 | 太陽誘電株式会社 | フィルタおよびマルチプレクサ |
JP2019004264A (ja) * | 2017-06-13 | 2019-01-10 | 太陽誘電株式会社 | 弾性波デバイス |
JP7117828B2 (ja) | 2017-06-13 | 2022-08-15 | 太陽誘電株式会社 | 弾性波デバイス |
Also Published As
Publication number | Publication date |
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JP6603012B2 (ja) | 2019-11-06 |
CN105099391B (zh) | 2019-03-01 |
US20150341016A1 (en) | 2015-11-26 |
CN105099391A (zh) | 2015-11-25 |
US9742377B2 (en) | 2017-08-22 |
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