JP2015160259A - Surface-coated cutting tool excellent in abrasion resistance - Google Patents
Surface-coated cutting tool excellent in abrasion resistance Download PDFInfo
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本発明は、硬質被覆層がすぐれた耐摩耗性を備えた表面被覆切削工具に関し、さらに詳しくは、鋼や鋳鉄などの高速切削加工に供した場合においても、チッピング、欠損が発生しにくく、長期に亘ってすぐれた耐摩耗性を発揮する表面被覆切削工具（以下、被覆工具という）に関する。 The present invention relates to a surface-coated cutting tool having a hard coating layer with excellent wear resistance. More specifically, even when subjected to high-speed cutting such as steel and cast iron, chipping and chipping are less likely to occur, The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits excellent wear resistance.
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるインサート、被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、またインサートを着脱自在に取り付けてソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミルなどが知られている。 In general, coated tools are used for turning and planing of work materials such as various types of steel and cast iron, inserts that can be used detachably attached to the tip of a cutting tool, drilling processing of work materials, etc. There are drills, miniature drills, solid type end mills used for chamfering, grooving, shoulder processing, etc. of the work material, etc. Also, inserts are detachably attached and cutting is performed in the same way as solid type end mills An insert type end mill is known.
従来、被覆工具としては、例えば、ＷＣ基超硬合金、ＴｉＣＮ基サーメット、ｃＢＮ焼結体を工具基体とし、これに硬質被覆層を形成した被覆工具が知られており、切削性能の改善を目的として種々の提案がなされている。
例えば、特許文献１には、工具基体表面に、ＴｉとＡｌの窒化物、炭窒化物、窒酸化物、炭酸化物、炭窒酸化物の単層または多層からなる被膜を被覆し、該被膜は、Ｘ線回折により測定した（２００）面のピーク強度が最大になるように結晶配向させることにより、耐剥離性、耐酸化性、耐熱衝撃性および広範な温度域にわたりすぐれた耐摩耗性を備えた被覆工具が提案されている。
Conventionally, as a coated tool, for example, a coated tool in which a WC-based cemented carbide alloy, a TiCN-based cermet, and a cBN sintered body are used as a tool base and a hard coating layer is formed on the tool base is known. Various proposals have been made.
For example, in Patent Document 1, a tool base surface is coated with a single layer or multiple layers of Ti and Al nitride, carbonitride, nitride oxide, carbonate, carbonitride oxide, By providing crystal orientation that maximizes the peak intensity of the (200) plane measured by X-ray diffraction, it has exfoliation resistance, oxidation resistance, thermal shock resistance, and excellent wear resistance over a wide temperature range. Coated tools have been proposed.
また、特許文献２には、工具基体表面に、ＴｉとＡｌの複合窒化物、複合炭化物、複合炭窒化物の単層または多層からなる被膜を被覆し、該硬質被膜の結晶粒径の縦/横比を１〜７とすることで、耐酸化性、耐摩耗性にすぐれた長寿命の被覆工具が提案されている。 Patent Document 2 discloses that a tool base surface is coated with a single layer or multiple layers of Ti and Al composite nitride, composite carbide, composite carbonitride, and the crystal grain size of the hard coating is By setting the aspect ratio to 1 to 7, a long-life coated tool excellent in oxidation resistance and wear resistance has been proposed.
さらに、特許文献３には、工具基体表面に、（ＶＵ，Ｔｉ１−Ｕ）（ＮＶ，Ｃ１−Ｖ）系皮膜(但し、０．２５≦Ｕ≦０．７５，０．６≦Ｖ≦１)と（ＡｌＸ，Ｔｉ１−Ｘ）（ＮＹ，Ｃ１−Ｙ）系皮膜(但し、０．２５≦Ｘ≦０．７５，０．６≦Ｙ≦１)を積層した硬質皮膜において、各層の結晶組織が界面で実質的にエピタキシャル成長をしていることで、優れた耐摩耗性と密着性を発揮する被覆工具が提案されている。 Furthermore, Patent Document 3 discloses that a (V U , Ti 1-U ) (N V , C 1-V ) -based film (provided that 0.25 ≦ U ≦ 0.75, 0.6 ≦ V ≦ 1) and (Al X , Ti 1-X ) (N Y , C 1-Y ) -based film (however, 0.25 ≦ X ≦ 0.75, 0.6 ≦ Y ≦ 1) In the coating, a coated tool has been proposed that exhibits excellent wear resistance and adhesion because the crystal structure of each layer is substantially epitaxially grown at the interface.
前記従来技術で提案されているＴｉとＡｌの炭窒化物からなる硬質被覆層は、硬さ、耐熱性とともにすぐれた耐摩耗性を期待できるが、Ａｌ成分とＣ成分を含有していることによって、結晶格子の歪が増大し、材料特性の制御と結晶組織の制御を両立させることが実際上非常に困難であったため、高速切削加工のように切れ刃に高負荷が作用する切削条件においては、従来被覆工具は満足できる耐摩耗性を発揮することはできなかった。
したがって、高速切削加工に供した場合にも、長期にわたって安定した耐摩耗性を発揮するような被覆工具が求められている。
The hard coating layer made of Ti and Al carbonitrides proposed in the prior art can be expected to have excellent wear resistance as well as hardness and heat resistance, but by containing an Al component and a C component. Since the distortion of the crystal lattice increases and it is actually very difficult to achieve both the control of the material properties and the control of the crystal structure, in cutting conditions where a high load acts on the cutting edge as in high-speed cutting Conventionally, the coated tool has not been able to exhibit satisfactory wear resistance.
Accordingly, there is a need for a coated tool that exhibits stable wear resistance over a long period of time even when subjected to high-speed cutting.
そこで、本発明者らは、前記課題を解決すべく硬質被覆層の構造について鋭意検討したところ、次のような知見を得たのである。 Therefore, the present inventors diligently studied about the structure of the hard coating layer in order to solve the above problems, and obtained the following knowledge.
（１）工具基体表面に、結晶組織を制御したＴｉとＡｌの窒化物（以下、「（Ｔｉ，Ａｌ）Ｎ」という場合もある）層の直上に、ＴｉとＡｌの炭窒化物（以下、「（Ｔｉ，Ａｌ）（Ｃ，Ｎ）」という場合もある）層を積層させることによって、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層の結晶組織を結晶粒径の大きい柱状の組織に制御することができ、これによって、耐摩耗性を向上させることができる。
（２）つまり、工具基体表面に形成した（Ｔｉ，Ａｌ）Ｎ層の結晶組織を粒径が大きくなるよう制御し、その上に（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層を成膜し、しかも、実質的にエピタキシャル成長させることによって、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層の結晶粒径や結晶方位を制御することができ、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層を結晶粒径の大きい柱状の組織とすることができるので、切削加工時の負荷による粒界からの破壊が抑制され、より高い耐摩耗性が発揮される。
（３）そして、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層の結晶粒径を、基体表面と平行方向に幅の広い柱状の組織に制御するためには、（Ｔｉ，Ａｌ）Ｎ層のＸ線回折において（２００）面のピーク強度が大きくなるような配向組織を形成することが望ましい。
(1) Ti and Al carbonitride (hereinafter, referred to as “(Ti, Al) N”) having a crystal structure controlled directly on the tool base surface. By stacking “(Ti, Al) (C, N)” layers), the crystal structure of the (Ti, Al) (C, N) layer is controlled to a columnar structure having a large crystal grain size. This can improve the wear resistance.
(2) That is, the crystal structure of the (Ti, Al) N layer formed on the surface of the tool base is controlled to increase the grain size, and the (Ti, Al) (C, N) layer is formed thereon, Moreover, by substantially epitaxial growth, the crystal grain size and crystal orientation of the (Ti, Al) (C, N) layer can be controlled, and the (Ti, Al) (C, N) layer can be controlled by the crystal grain size. Since a large columnar structure can be obtained, breakage from the grain boundary due to a load during cutting is suppressed, and higher wear resistance is exhibited.
(3) In order to control the crystal grain size of the (Ti, Al) (C, N) layer to a columnar structure wide in the direction parallel to the substrate surface, the X of the (Ti, Al) N layer is controlled. It is desirable to form an oriented structure that increases the peak intensity of the (200) plane in line diffraction.
（４）また、耐摩耗性に加え、切削時の高負荷に対して、チッピング、欠損、剥離等を発生しないためには、層間の付着強度が高いことが必要とされるが、（Ｔｉ，Ａｌ）Ｎ層と（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層の総括的な残留応力を制御することによって、（Ｔｉ，Ａｌ）Ｎ層と（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層間の密着力を向上させることができる。
さらに、工具基体と（Ｔｉ，Ａｌ）Ｎ層間の付着強度を高めるために、工具基体と（Ｔｉ，Ａｌ）Ｎ層の間に、ＴｉＮ膜と（Ｔｉ，Ａｌ）Ｎ膜をナノレベルで交互に積層した下地層を挟むことが望ましい。特に、立方晶窒化硼素焼結体を工具基体とした場合には、界面で生じたクラックをナノレベルの積層界面に誘導、分散させることで一段と密着力を向上させることができる。
(4) In addition to wear resistance, in order not to cause chipping, chipping, peeling, etc. with respect to a high load during cutting, it is necessary that the adhesion strength between the layers is high. By controlling the overall residual stress of the Al) N layer and the (Ti, Al) (C, N) layer, the adhesion between the (Ti, Al) N layer and the (Ti, Al) (C, N) layer Can be improved.
Further, in order to increase the adhesion strength between the tool base and the (Ti, Al) N layer, TiN films and (Ti, Al) N films are alternately arranged at the nano level between the tool base and the (Ti, Al) N layer. It is desirable to sandwich the laminated base layer. In particular, when a cubic boron nitride sintered body is used as a tool substrate, the adhesion can be further improved by inducing and dispersing cracks generated at the interface to the nano-level laminated interface.
本発明は、前記の研究結果に基づいてなされたものであって、
「（１）ＷＣ超硬合金、ＴｉＣＮ基サーメット、立方晶型窒化硼素焼結体のいずれかからなる工具基体の表面に硬質被覆層を蒸着形成した表面被覆切削工具において、
（ａ）前記硬質被覆層は、工具基体表面に形成した第１層と、第１層の上に形成した第２層とからなり、
前記第１層は、
組成式：（Ｔｉ１−ａＡｌａ）Ｎ（但し、ａは原子比で、０．３≦ａ≦０．７）を満足する０．５〜３．０μｍの平均層厚を有するＴｉとＡｌの窒化物層であり、
前記第２層は、
組成式：（Ｔｉ１−ｂＡｌｂ）（Ｎ１−ｃＣｃ）（但し、ｂ，ｃはそれぞれ原子比で、０．３≦ｂ≦０．７、０．０１≦ｃ≦０．４）を満足する０．５〜２．０μｍの平均層厚を有するＴｉとＡｌの炭窒化物層であり、
（ｂ）前記第１層と第２層の結晶粒は、第１層と第２層の界面長さ割合で７０％以上の界面領域において連続した結晶成長組織からなり、かつ、連続した結晶成長組織は同じ結晶方位を示し、
（ｃ）前記第２層の結晶粒の工具基体表面に平行な平均幅は０．０５〜１．０μｍであり、工具基体表面に垂直な平均高さは０．０５〜１．５μｍであり、かつ、平均アスペクト比（高さ／幅）が１〜１０であることを特徴とする表面被覆切削工具。
（２）前記第２層は、第１層との界面側から第２層の表面に向かってＣ成分含有割合が漸次増加する層厚方向の組成傾斜構造を有しており、かつ、第２層の平均組成は、
組成式：（Ｔｉ１−ｂＡｌｂ）（Ｎ１−ｃＣｃ）（但し、ｂ，ｃはそれぞれ原子比で、０．３≦ｂ≦０．７、０．０１≦ｃ≦０．４）を満足することを特徴とする（１）に記載の表面被覆切削工具。
（３）工具基体表面と前記第１層の間に、０．００５〜０．０２０μｍの平均層厚を有するＴｉＮ層と、組成式：（Ｔｉ１−ｄＡｌｄ）Ｎ（但し、ｄは原子比で、０．３≦ｄ≦０．７）を満足し、０．００５〜０．０２０μｍの平均層厚を有するＴｉとＡｌの窒化物層が交互に積層された、平均総層厚が０．１〜０．５μｍである下地層が形成されていることを特徴とする（１）、（２）に記載の表面被覆切削工具。
（４）前記第１層と第２層について、Ｘ線回折によって総括的なＸ線回折ピーク強度を測定し、測定された（２００）ピーク強度をＩ（２００）、（１１１）ピーク強度をＩ（１１１）としたとき、Ｉ（２００）／Ｉ（１１１）が２〜１０であることを特徴とする（１）〜（３）のいずれかに記載の表面被覆切削工具。
（５）前記第１層と第２層についての総括的な圧縮残留応力が−０．５〜−４．０ＧＰａであることを特徴とする（１）〜（４）のいずれかに記載の表面被覆切削工具。」
に特徴を有するものである。
The present invention has been made based on the above research results,
“(1) In a surface-coated cutting tool in which a hard coating layer is vapor-deposited on the surface of a tool substrate made of any one of WC cemented carbide, TiCN-based cermet, and cubic boron nitride sintered body,
(A) The hard coating layer consists of a first layer formed on the surface of the tool base and a second layer formed on the first layer,
The first layer is
Compositional formula: (Ti 1-a Al a ) N (where a is an atomic ratio, 0.3 ≦ a ≦ 0.7) Ti and Al having an average layer thickness of 0.5 to 3.0 μm A nitride layer of
The second layer is
Composition formula: (Ti 1-b Al b ) (N 1-c C c ) (where b and c are atomic ratios, 0.3 ≦ b ≦ 0.7, 0.01 ≦ c ≦ 0.4, respectively) And Ti and Al carbonitride layers having an average layer thickness of 0.5 to 2.0 μm satisfying
(B) The crystal grains of the first layer and the second layer have a continuous crystal growth structure in an interface region of 70% or more in terms of the interface length ratio between the first layer and the second layer, and the continuous crystal growth The structure shows the same crystal orientation,
(C) The average width parallel to the tool base surface of the crystal grains of the second layer is 0.05 to 1.0 μm, and the average height perpendicular to the tool base surface is 0.05 to 1.5 μm, A surface-coated cutting tool having an average aspect ratio (height / width) of 1 to 10.
(2) The second layer has a composition gradient structure in the layer thickness direction in which the C component content rate gradually increases from the interface side with the first layer toward the surface of the second layer, and the second layer The average composition of the layer is
Composition formula: (Ti 1-b Al b ) (N 1-c C c ) (where b and c are atomic ratios, 0.3 ≦ b ≦ 0.7, 0.01 ≦ c ≦ 0.4, respectively) The surface-coated cutting tool according to (1), wherein:
(3) Between the tool substrate surface and the first layer, a TiN layer having an average layer thickness of 0.005 to 0.020 μm, and a composition formula: (Ti 1-d Al d ) N (where d is an atom) Ratio of 0.3 ≦ d ≦ 0.7), and Ti and Al nitride layers having an average layer thickness of 0.005 to 0.020 μm are alternately stacked, and the average total layer thickness is 0. (1) The surface-coated cutting tool according to (2), wherein an underlayer having a thickness of 1 to 0.5 μm is formed.
(4) For the first layer and the second layer, the overall X-ray diffraction peak intensity is measured by X-ray diffraction, the measured (200) peak intensity is I (200), and the (111) peak intensity is I (111) The surface-coated cutting tool according to any one of (1) to (3), wherein I (200) / I (111) is 2 to 10.
(5) The surface according to any one of (1) to (4), wherein the overall compressive residual stress for the first layer and the second layer is −0.5 to −4.0 GPa Coated cutting tool. "
It has the characteristics.
ここで、本発明の被覆工具について、より詳しく説明する。 Here, the coated tool of the present invention will be described in more detail.
第１層の組成と平均層厚：
図１の模式図に示すように、組成式：（Ｔｉ１−ａＡｌａ）Ｎ（但し、ａは原子比で、０．３≦ａ≦０．７）で表される０．５〜３．０μｍの平均層厚を有する（Ｔｉ，Ａｌ）Ｎ層からなる第１層において、Ａｌ成分を、Ｔｉ成分との合量に占める原子比で０．３以上含有させると、層の高温硬さと高温耐酸化性が向上するが、一方、Ｔｉ成分との合量に占める割合が０．７を超えると、岩塩型結晶構造を維持することができず、アモルファス化し易くなり、硬さが低下してくることから、Ｔｉ成分との合量に占めるＡｌ成分の第１層における含有割合ａは、０．３≦ａ≦０．７と定めた。
また、上記第１層の平均層厚が０．５μｍ未満であると、第１層の結晶粒を、十分に幅の広い柱状の結晶粒に成長させることができないため、第２層の結晶組織制御を行うことができず、一方、第１層の平均層厚が３．０μｍを超えると、第１層内の歪が大きくなり、自壊しやすくなる。
したがって、この発明では、（Ｔｉ，Ａｌ）Ｎからなる第１層の平均層厚を、０．５〜３．０μｍと定めた。
First layer composition and average layer thickness:
As shown in the schematic diagram of FIG. 1, the composition formula: (Ti 1-a Al a ) N (where a is an atomic ratio, 0.5 ≦ 3 ≦ 0.5) In the first layer composed of the (Ti, Al) N layer having an average layer thickness of 0.0 μm, when the Al component is contained in an atomic ratio of 0.3 or more in the total amount with the Ti component, High-temperature oxidation resistance is improved. On the other hand, if the proportion of the total amount with the Ti component exceeds 0.7, the rock salt type crystal structure cannot be maintained, it becomes easy to become amorphous, and the hardness decreases. Therefore, the content ratio a in the first layer of the Al component in the total amount with the Ti component was determined to be 0.3 ≦ a ≦ 0.7.
In addition, if the average layer thickness of the first layer is less than 0.5 μm, the crystal grains of the first layer cannot be grown into sufficiently wide columnar crystal grains. On the other hand, if the average layer thickness of the first layer exceeds 3.0 μm, the strain in the first layer increases and the layer tends to break down.
Therefore, in this invention, the average layer thickness of the first layer made of (Ti, Al) N is set to 0.5 to 3.0 μm.
第２層の組成と平均層厚：
図１の模式図に示すように、組成式：（Ｔｉ１−ｂＡｌｂ）（Ｎ１−ｃＣｃ）（但し、ｂ，ｃはそれぞれ原子比で、０．３≦ｂ≦０．７、０．０１≦ｃ≦０．４）で表される０．５〜２．０μｍの平均層厚を有する（Ｔｉ，Ａｌ）（Ｃ，Ｎ）からなる第２層において、Ａｌ成分については、前記第１層について述べたと同様、Ｔｉ成分との合量に占める原子比が０．３以上になると、層の高温硬さと高温耐酸化性が向上するが、０．７を超えると、岩塩型結晶構造を維持することができず、アモルファス化し易くなり、硬さが低下してくることから、Ｔｉ成分との合量に占めるＡｌ成分の第２層における含有割合ｂは、０．３≦ｂ≦０．７と定めた。
また、第２層におけるＣ成分については、Ｎ成分との合量に占めるＣ成分の原子比が０．０１以上になると、層の硬さは向上するが、一方、Ｃ成分の含有割合が０．４を超えると靭性が低下し、また、層がアモルファス化し易くなることから、Ｎ成分との合量に占めるＣ成分の含有割合ｃは、０．０１≦ｃ≦０．４と定めた。
さらに、上記第２層の平均層厚が０．５μｍ未満であると、十分な耐摩耗性向上の効果を発揮することができず、一方、第２層の平均層厚が２．０μｍを超えると、第２層内の歪が大きくなり、自壊しやすくなる。
したがって、この発明では、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）からなる第２層の平均層厚を、０．５〜２．０μｍと定めた。
なお、第１層、第２層の組成、平均層厚については、走査型電子顕微鏡（Ｓｃａｎｎｉｎｇ Ｅｌｅｃｔｒｏｎ Ｍｉｃｒｏｓｃｏｐｙ：ＳＥＭ）、透過型電子顕微鏡（Ｔｒａｎｓｍｉｓｓｉｏｎ Ｅｌｅｃｔｒｏｎ Ｍｉｃｒｏｓｃｏｐｅ：ＴＥＭ）、エネルギー分散型Ｘ線分光法（Ｅｎｅｒｇｙ Ｄｉｓｐｅｒｓｉｖｅ Ｘ−ｒａｙ Ｓｐｅｃｔｒｏｓｃｏｐｙ：ＥＤＳ）、オージェ電子分光法（Ａｕｇｅｒ Ｅｌｅｃｔｒｏｎ Ｓｐｅｃｔｒｏｓｃｏｐｙ：ＡＥＳ）を用いた断面測定により、測定することができる。
Second layer composition and average layer thickness:
As shown in the schematic diagram of FIG. 1, the composition formula: (Ti 1-b Al b ) (N 1-c C c ) (where b and c are atomic ratios, and 0.3 ≦ b ≦ 0.7 In the second layer made of (Ti, Al) (C, N) having an average layer thickness of 0.5 to 2.0 μm represented by 0.01 ≦ c ≦ 0.4) As described for the first layer, when the atomic ratio in the total amount with the Ti component is 0.3 or more, the high-temperature hardness and high-temperature oxidation resistance of the layer are improved. Since the crystal structure cannot be maintained, it becomes easy to become amorphous, and the hardness is lowered. Therefore, the content ratio b of the Al component in the total amount with the Ti component is 0.3 ≦ b. ≦ 0.7.
In addition, regarding the C component in the second layer, when the atomic ratio of the C component in the total amount with the N component is 0.01 or more, the hardness of the layer is improved, whereas the content ratio of the C component is 0. If it exceeds .4, the toughness is lowered and the layer is easily amorphized. Therefore, the content ratio c of the C component in the total amount with the N component is determined to be 0.01 ≦ c ≦ 0.4.
Furthermore, if the average layer thickness of the second layer is less than 0.5 μm, the effect of sufficiently improving the wear resistance cannot be exhibited, while the average layer thickness of the second layer exceeds 2.0 μm. Then, the strain in the second layer becomes large, and it is easy to break.
Therefore, in this invention, the average layer thickness of the second layer made of (Ti, Al) (C, N) is set to 0.5 to 2.0 μm.
Note that the composition and average layer thickness of the first layer and the second layer were determined by using a scanning electron microscope (SEM), a transmission electron microscope (TEM), an energy dispersive X-ray spectroscopy (TEM). It can be measured by cross-sectional measurement using Energy Dispersive X-ray Spectroscopy (EDS) and Auger Electron Spectroscopy (AES).
第１層と第２層の界面長さ割合で７０％以上の界面領域において連続した結晶成長組織：
図２（ａ）に、本発明の被覆工具における第１層と第２層の界面付近の断面走査型電子顕微鏡（ＳＥＭ）写真の模式図を示し、また、図２（ｂ）に、本発明における連続した結晶成長組織の界面長さを記載した図を示す。
本発明の硬質被覆層は、図２（ａ）、（ｂ）からも分かるように、第１層と第２層の界面において、界面長さの７０％以上の割合で、第１層の結晶粒と第２層の結晶粒が、連続した結晶成長組織を有する。
図２（ｂ）において、第１層と第２層の界面を貫通して成長した連続した結晶成長組織は、グレーの領域として示している。
第１層と第２層の界面を貫通して成長した連続した結晶成長組織の割合は、成膜時の、アーク電流、反応ガス分圧およびバイアス電圧を制御することによって調整することができるが、上記連続した結晶成長組織の生成割合、即ち、第１層と第２層の界面長さに占める割合が７０％未満では、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）からなる第２層の結晶組織制御が困難であり、第２層の結晶粒の平均幅、アスペクト比等を所定の値に制御できず、また、第１層と第２層間の密着性も十分に確保することができない。
したがって、この発明では、第１層と第２層の界面領域に形成する第１層と第２層の界面を貫通して成長した連続した結晶成長組織の界面長さ割合は、第１層と第２層の界面長さに対する割合で７０％以上と定めた。
Continuous crystal growth structure in the interface region where the interface length ratio between the first layer and the second layer is 70% or more:
FIG. 2 (a) shows a schematic view of a cross-sectional scanning electron microscope (SEM) photograph near the interface between the first layer and the second layer in the coated tool of the present invention, and FIG. 2 (b) shows the present invention. The figure which described the interface length of the continuous crystal growth structure | tissue in is shown.
As can be seen from FIGS. 2 (a) and 2 (b), the hard coating layer of the present invention is a crystal of the first layer at a ratio of 70% or more of the interface length at the interface between the first layer and the second layer. The grains and the crystal grains of the second layer have a continuous crystal growth structure.
In FIG. 2B, a continuous crystal growth structure that has grown through the interface between the first layer and the second layer is shown as a gray region.
The ratio of the continuous crystal growth structure grown through the interface between the first layer and the second layer can be adjusted by controlling the arc current, reactive gas partial pressure, and bias voltage during film formation. When the ratio of the generation of the continuous crystal growth structure, that is, the ratio of the interface length between the first layer and the second layer is less than 70%, the crystal of the second layer made of (Ti, Al) (C, N) It is difficult to control the structure, and the average width, aspect ratio, etc. of the crystal grains of the second layer cannot be controlled to predetermined values, and sufficient adhesion between the first layer and the second layer cannot be ensured.
Therefore, according to the present invention, the interface length ratio of the continuous crystal growth structure grown through the interface between the first layer and the second layer formed in the interface region between the first layer and the second layer is The ratio with respect to the interface length of the second layer was determined to be 70% or more.
なお、ここでいう界面長さ割合とは、図２（ｂ）に則して説明すれば、次のとおりである。
まず、透過型電子顕微鏡（TEM）にて第1層と第2層の界面領域を観察し、観察した所定の視野における界面粗さの基準線の長さをL（μｍ）とする。次に、観察した所定の視野において、界面を貫いて成長している結晶粒を定め、該結晶粒内において、界面粗さの基準線から垂直な方向に第１層、第２層側にそれぞれ０．２μｍの位置における回折図形を確認し、同じ結晶方位であるかどうかを確認した。界面を貫いて成長し、かつ同じ結晶方位を向いているものを、本願で規定する、界面を貫通して成長した連続した結晶成長組織、とし、該結晶粒の界面粗さの基準線上における結晶粒の幅をＬ１，Ｌ２，Ｌ３，Ｌ４，Ｌ５，Ｌ６（μｍ）とした場合、Ｌ１〜Ｌ６の合計を、Ｌで除した値、即ち、
（Ｌ１＋Ｌ２＋Ｌ３＋Ｌ４＋Ｌ５＋Ｌ６）×１００／Ｌ
の値が、第１層と第２層の界面領域において連続した結晶成長組織の界面長さ割合である。
In addition, the interface length ratio here is as follows if it demonstrates according to FIG.2 (b).
First, the interface region between the first layer and the second layer is observed with a transmission electron microscope (TEM), and the length of the reference line of the interface roughness in the observed predetermined field of view is L (μm). Next, in the predetermined field of view, the crystal grains growing through the interface are defined, and the crystal grains in the first layer and the second layer side in the direction perpendicular to the reference line of the interface roughness, respectively. A diffraction pattern at a position of 0.2 μm was confirmed to confirm whether or not the crystal orientation was the same. What grows through the interface and faces the same crystal orientation is defined as a continuous crystal growth structure grown through the interface as defined in the present application, and the crystal on the interface roughness reference line of the crystal grain. When the grain width is L 1 , L 2 , L 3 , L 4 , L 5 , L 6 (μm), the value obtained by dividing the total of L 1 to L 6 by L,
(L 1 + L 2 + L 3 + L 4 + L 5 + L 6 ) × 100 / L
Is the interface length ratio of the continuous crystal growth structure in the interface region between the first layer and the second layer.
第２層の結晶粒の平均幅、平均高さ、平均アスペクト比：
工具基体表面に平行な方向に測定した第２層の結晶粒の平均幅が０．０５μｍ未満、工具基体表面に垂直な方向に測定した第２層の結晶粒の平均高さが０．０５μｍ未満、または平均アスペクト比(高さ／幅)が１未満であると、所望の耐摩耗性が得られない。一方、平均幅が１μｍを超える場合、平均高さが１．５μｍを超える場合、あるいは、平均アスペクト比(高さ／幅)が１０を超える場合には、結晶粒界が少なくなり、高負荷な切削の際にクラックが粒界に沿って伝播・進展してしまうために、耐欠損性が低下する。
したがって、この発明では、第２層の結晶粒の平均幅は０．０５〜１．０μｍ、平均高さは０．０５〜１．５μｍ、また、平均アスペクト比(高さ／幅)は１〜１０と定めた。
なお、第２層の結晶粒の平均幅、平均高さは、第２層の断面を、走査型電子顕微鏡（ＳＥＭ）で観察測定し、複数の測定値を平均することによって求めることができる。また、平均アスペクト比(高さ／幅)は、前記で測定した平均幅、平均高さから算出することができる。
ここで、工具基体表面とは、基体の硬質被覆層と接する面の面方向に垂直な断面の観察像における、基体と硬質被覆層の界面粗さの基準線とする。
Average width, average height, average aspect ratio of crystal grains in the second layer:
The average width of the second layer crystal grains measured in the direction parallel to the tool base surface is less than 0.05 μm, and the average height of the second layer crystal grains measured in the direction perpendicular to the tool base surface is less than 0.05 μm. If the average aspect ratio (height / width) is less than 1, desired wear resistance cannot be obtained. On the other hand, when the average width exceeds 1 μm, when the average height exceeds 1.5 μm, or when the average aspect ratio (height / width) exceeds 10, the grain boundary is reduced and the load is high. Since cracks propagate and propagate along the grain boundaries during cutting, chipping resistance decreases.
Therefore, in this invention, the average width of the crystal grains of the second layer is 0.05 to 1.0 μm, the average height is 0.05 to 1.5 μm, and the average aspect ratio (height / width) is 1 to 1. 10 was determined.
The average width and average height of the crystal grains of the second layer can be obtained by observing and measuring the cross section of the second layer with a scanning electron microscope (SEM) and averaging a plurality of measured values. The average aspect ratio (height / width) can be calculated from the average width and average height measured above.
Here, the surface of the tool base is a reference line of the interface roughness between the base and the hard coating layer in an observation image of a cross section perpendicular to the surface direction of the surface in contact with the hard coating layer of the base.
第２層の組成傾斜構造：
本発明の被覆工具の硬質被覆層の第２層は、第１層との界面側から第２層の表面に向かってＣ成分含有割合が漸次増加する層厚方向の組成傾斜構造を有していることが望ましく、かつ、その際の第２層の平均組成は、
組成式：（Ｔｉ１−ｂＡｌｂ）（Ｎ１−ｃＣｃ）（但し、ｂ，ｃはそれぞれ原子比で、０．３≦ｂ≦０．７、０．０１≦ｃ≦０．４）を満足することが望ましい。
これは、第２層のＣ成分含有割合が多い場合、第１層と第２層の格子定数のミスマッチが大きくなり、密着性が低下し易くなるが、第２層のＣ成分含有割合を、第1層と第2層の界面側から、第2層の表面に向かって漸次増加する組成傾斜構造を形成しておくことによって、第１層と第２層の界面付近の化学組成を近づけることで、密着性の低下を防止し得るとともに、第１層と第２層の界面領域における連続した結晶成長組織の界面長さ割合を高めることもできるという理由による。
なお、上記組成傾斜構造を形成した場合であっても、第2層の平均組成は、既に述べた理由と同じであり、Ｔｉ成分との合量に占めるＡｌ成分の第２層における含有割合ｂは、０．３≦ｂ≦０．７とし、また、Ｎ成分との合量に占めるＣ成分の含有割合ｃは、０．０１≦ｃ≦０．４とすることが望ましい。
Composition gradient structure of the second layer:
The second layer of the hard coating layer of the coated tool of the present invention has a composition gradient structure in the layer thickness direction in which the C component content ratio gradually increases from the interface side with the first layer toward the surface of the second layer. It is desirable that the average composition of the second layer is
Composition formula: (Ti 1-b Al b ) (N 1-c C c ) (where b and c are atomic ratios, 0.3 ≦ b ≦ 0.7, 0.01 ≦ c ≦ 0.4, respectively) ) Is desirable.
This is because, when the C component content ratio of the second layer is large, the mismatch between the lattice constants of the first layer and the second layer becomes large, and the adhesiveness tends to decrease. The chemical composition in the vicinity of the interface between the first layer and the second layer is made closer by forming a composition gradient structure that gradually increases from the interface between the first layer and the second layer toward the surface of the second layer. Thus, the adhesiveness can be prevented from decreasing, and the interface length ratio of the continuous crystal growth structure in the interface region between the first layer and the second layer can be increased.
Even when the composition gradient structure is formed, the average composition of the second layer is the same as the reason already described, and the content ratio b of the Al component in the total amount with the Ti component is b. Is preferably 0.3 ≦ b ≦ 0.7, and the content ratio c of the C component in the total amount with the N component is preferably 0.01 ≦ c ≦ 0.4.
交互積層からなる下地層：
本発明の被覆工具は、工具基体表面と前記第1層との間に、０．００５〜０．０２０μｍの平均層厚を有するＴｉＮ層と、組成式：（Ｔｉ１−ｄＡｌｄ）Ｎ（但し、０．３≦ｄ≦０．７）を満足し、０．００５〜０．０２０μｍの平均層厚を有するＴｉとＡｌの窒化物層を交互に積層した、平均総層厚０．１〜０．５μｍの下地層を介在形成することによって、工具基体と前記第1層との間の密着強度をさらに高めることができる。
ここで、ＴｉＮ層と、組成式：（Ｔｉ１−ｄＡｌｄ）Ｎ（但し、０．３≦ｄ≦０．７）で表されるＴｉとＡｌの窒化物層の平均層厚が、それぞれ０．００５μｍ未満である場合、交互積層間に明確な界面が得られにくく、所望の効果が得られない。また、交互積層からなる下地層の平均総層厚が０．１μｍ未満である場合、またはＴｉＮ層と、前記ＴｉとＡｌの窒化物層の平均層厚が、それぞれ０．０２μｍを超える場合には、交互積層間の界面が少ないため密着性改善効果が少なく、下地層の平均総層厚が０．５μｍを超える場合、皮膜の歪が大きくなり自壊しやすくなるため、交互積層を構成するそれぞれの平均層厚は、０．００５〜０．０２０μｍとすることが望ましく、また、下地層の平均総層厚は、０．１〜０．５μｍとすることが望ましい。
さらに、交互積層を構成する組成式：（Ｔｉ１−ｄＡｌｄ）Ｎ（但し、０．３≦ｄ≦０．７）で表されるＴｉとＡｌの窒化物層について、Ｔｉとの合量に占めるＡｌの含有割合ｄ（但し、原子比）は、第１層のＡｌ含有割合ａについてのべた理由と同じであるが、Ａｌの含有割合ｄが０．３未満では、層の高温硬さと高温耐酸化性向上効果は少なく、一方、Ａｌの含有割合ｄが０．７を超えると、硬さが低下してくることから、Ｔｉ成分との合量に占めるＡｌ成分の含有割合ｄは、０．３≦ｄ≦０．７とすることが望ましい。
Underlayer consisting of alternating layers:
The coated tool of the present invention includes a TiN layer having an average layer thickness of 0.005 to 0.020 μm between the tool base surface and the first layer, and a composition formula: (Ti 1-d Al d ) N ( However, 0.3 ≦ d ≦ 0.7) is satisfied, and Ti and Al nitride layers having an average layer thickness of 0.005 to 0.020 μm are alternately stacked. By interposing and forming the 0.5 μm base layer, the adhesion strength between the tool base and the first layer can be further increased.
Here, the average layer thickness of the TiN layer and the Ti and Al nitride layers represented by the composition formula: (Ti 1-d Al d ) N (where 0.3 ≦ d ≦ 0.7) are respectively When the thickness is less than 0.005 μm, it is difficult to obtain a clear interface between the alternating layers, and a desired effect cannot be obtained. Also, when the average total layer thickness of the underlayer composed of alternating layers is less than 0.1 μm, or when the average layer thickness of the TiN layer and the nitride layer of Ti and Al exceeds 0.02 μm, respectively. Since there are few interfaces between alternating layers, the effect of improving the adhesion is small, and when the average total layer thickness of the underlayer exceeds 0.5 μm, the distortion of the film increases and the film tends to break down. The average layer thickness is preferably 0.005 to 0.020 μm, and the average total layer thickness of the underlayer is preferably 0.1 to 0.5 μm.
Furthermore, for the nitride layer of Ti and Al represented by the composition formula: (Ti 1-d Al d ) N (provided that 0.3 ≦ d ≦ 0.7) constituting the alternate lamination, the total amount of Ti The Al content ratio d (wherein the atomic ratio) is the same as the reason for the Al content ratio a of the first layer, but if the Al content ratio d is less than 0.3, the high-temperature hardness of the layer On the other hand, since the hardness decreases when the Al content ratio d exceeds 0.7, the Al component content ratio d in the total amount with the Ti component is: It is desirable that 0.3 ≦ d ≦ 0.7.
第１層と第２層の総括的なX線回折ピークにおけるピーク強度比、残留応力：
本発明の被覆工具は、Ｘ線回折により、第１層と第２層を総括した（２００）面、（１１１）面の回折ピーク強度Ｉ（２００）およびＩ（１１１）を測定した場合、ピーク強度比Ｉ（２００）／Ｉ（１１１）が２未満であると第１層と第２層が連続して成長しにくくなるため、第２層の結晶組織制御が困難となる。一方、Ｉ（２００）／Ｉ（１１１）が１０を超えると皮膜の結晶粒が粗大化しやすく、結晶粒界が少なくなり、高負荷な切削時の耐欠損性が低下するため、ピーク強度比Ｉ（２００）／Ｉ（１１１）は２〜１０とすることが望ましい。
ここで、総括したＸ線回折ピーク強度とは、第１層と第２層の重なった回折ピークを、一つの回折ピークと看做して求めた回折ピーク強度である。そして、ピーク強度比は、総括した回折ピーク強度Ｉ（２００）と回折ピーク強度Ｉ（１１１）から強度比を算出する。
Peak intensity ratio and residual stress at the overall X-ray diffraction peaks of the first and second layers:
The coated tool of the present invention has a peak when the diffraction peak intensities I (200) and I (111) of the (200) plane and the (111) plane summing up the first layer and the second layer are measured by X-ray diffraction. If the intensity ratio I (200) / I (111) is less than 2, the first layer and the second layer are unlikely to grow continuously, so that it is difficult to control the crystal structure of the second layer. On the other hand, if I (200) / I (111) exceeds 10, the crystal grains of the film are likely to be coarsened, the crystal grain boundary is reduced, and the chipping resistance during high-load cutting is reduced. (200) / I (111) is preferably 2-10.
Here, the summed X-ray diffraction peak intensities are diffraction peak intensities obtained by regarding a diffraction peak where the first layer and the second layer overlap as one diffraction peak. The peak intensity ratio is calculated from the summed diffraction peak intensity I (200) and diffraction peak intensity I (111).
第１層と第２層の総括的な残留応力：
第１層と第２層を総括した残留応力の測定はＸ線回折装置を用い、２θ−ｓｉｎ２ψ法にて実施する。この場合、Ｃｒ管球を用い、第１層と第２層を総括した（２２０）ピークにて測定する。ヤング率としては４７０ＧＰａ、ポアソン比としては０．２を使用して計算を実施した。
第１層と第２層を総括した残留応力が−４ＧＰａより大きい（即ち、圧縮残留応力が大き過ぎる）と、第１層と第２層の層間もしくは層内で自壊してしまい、一方、−０．５ＧＰａより小さい（即ち、圧縮残留応力がほぼゼロに近い）と耐欠損性が低下することから、１層と第２層を総括した残留応力は−０．５〜−４．０ＧＰａとすることが望ましい。
Overall residual stress for the first and second layers:
The measurement of the residual stress in which the first layer and the second layer are summarized is performed by the 2θ-sin 2 ψ method using an X-ray diffractometer. In this case, a Cr tube is used, and measurement is performed at the (220) peak obtained by summarizing the first layer and the second layer. The calculation was performed using a Young's modulus of 470 GPa and a Poisson's ratio of 0.2.
If the total residual stress of the first layer and the second layer is larger than −4 GPa (that is, the compressive residual stress is too large), the first layer and the second layer are self-destructed, or − If it is less than 0.5 GPa (that is, the compressive residual stress is almost zero), the fracture resistance is lowered. Therefore, the residual stress of the first layer and the second layer is -0.5 to -4.0 GPa. It is desirable.
本発明の被覆工具は、工具基体表面に形成した結晶組織を制御した（Ｔｉ，Ａｌ）Ｎからなる第１層の直上に、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）からなる第２層を成膜し、しかも、実質的にエピタキシャル成長させることによって、第２層の結晶粒径や結晶方位を制御し、結晶粒径の大きい柱状の組織とし、これによって、切削加工時の負荷による粒界からの破壊が抑制され、すぐれた耐摩耗性が発揮される。
また、第２層にＣ成分の組成傾斜構造を形成することによって、第１層と第２層間の密着強度を高めることができ、工具基体と第１層間に下地層を介在形成することによって、工具基体と第１層間の密着強度を高めることができることから、切削時の高負荷によるチッピング、欠損、剥離等の発生を抑制することができる。
さらに、第１層と第２層を総括した回折ピーク強度Ｉ（２００）とＩ（１１１）のピーク強度比Ｉ（２００）／Ｉ（１１１）を所定範囲とすることによって、また、第１層と第２層を総括した残留応力を所定範囲とすることによって、耐摩耗性に加え、第１層と第２層間の密着強度向上、耐異常損傷性の向上が図られる。
In the coated tool of the present invention, the second layer made of (Ti, Al) (C, N) is formed directly on the first layer made of (Ti, Al) N whose crystal structure formed on the surface of the tool base is controlled. A film is formed, and the crystal grain size and crystal orientation of the second layer are controlled by substantially epitaxial growth, thereby forming a columnar structure having a large crystal grain size. Destruction is suppressed, and excellent wear resistance is exhibited.
Further, by forming a composition gradient structure of the C component in the second layer, the adhesion strength between the first layer and the second layer can be increased, and by forming an underlayer between the tool base and the first layer, Since the adhesion strength between the tool base and the first layer can be increased, the occurrence of chipping, chipping, peeling, and the like due to a high load during cutting can be suppressed.
Furthermore, by setting the peak intensity ratio I (200) / I (111) of the diffraction peak intensities I (200) and I (111) summing up the first layer and the second layer within a predetermined range, the first layer In addition to the wear resistance, the adhesion strength between the first layer and the second layer and the abnormal damage resistance can be improved by setting the residual stress that summarizes the second layer within a predetermined range.
つぎに、本発明の被覆工具を実施例により具体的に説明する。
なお、具体的な説明としては、ｃＢＮ基体からなる被覆工具、超硬合金基体からなる被覆工具について説明するが、ＴｉＣＮ基サーメットを工具基体とする被覆工具についても同様である。
Next, the coated tool of the present invention will be specifically described with reference to examples.
As a specific explanation, a coated tool made of a cBN substrate and a coated tool made of a cemented carbide substrate will be described, but the same applies to a coated tool using a TiCN-based cermet as a tool substrate.
工具基体の作製：
原料粉末として、２．０μｍ以下の平均粒径を有するｃＢＮ粒子を硬質相形成用原料粉末として用意するとともに、いずれも２．０μｍ以下の平均粒径を有するＴｉＮ粉末、ＴｉＣ粉末、ＴｉＣＮ粉末、Ａｌ粉末、ＡｌＮ粉末、Ａｌ２Ｏ３粉末を結合相形成用原料粉末として用意する。
これら中からいくつかの原料粉末とｃＢＮ粉末の合量を１００体積％としたときのｃＢＮ粒子の含有割合が５０容量％となるように表１に示される配合比で配合する。
次いで、この原料粉末をボールミルで７２時間湿式混合し、乾燥した後、成形圧１００ＭＰａで直径：５０ｍｍ×厚さ：１．５ｍｍの寸法にプレス成形し、ついでこの成形体を、圧力：１Ｐａ以下の真空雰囲気中、９００〜１３００℃の範囲内の所定温度に保持して仮焼結し、その後、超高圧焼結装置に装入して、圧力：５ＧＰa、温度：１２００〜１４００℃の範囲内の所定の温度で焼結することにより、ｃＢＮ焼結体を作製する。
この焼結体をワイヤー放電加工機で所定寸法に切断し、Ｃｏ：５質量％、ＴａＣ：５質量％、ＷＣ：残りの組成およびＩＳＯ規格ＣＮＧＡ１２０４０８のインサート形状をもったＷＣ基超硬合金製インサート本体のろう付け部（コーナー部）に、質量％で、Ｃｕ：２６％、Ｔｉ：５％、Ａｇ：残りからなる組成を有するＡｇ系ろう材を用いてろう付けし、上下面および外周研磨、ホーニング処理を施すことによりＩＳＯ規格ＣＮＧＡ１２０４０８のインサート形状をもったｃＢＮ工具基体１〜３を製造した。
Tool substrate production:
As raw material powder, cBN particles having an average particle diameter of 2.0 μm or less are prepared as hard phase forming raw material powders, and all of them are TiN powder, TiC powder, TiCN powder, Al having an average particle diameter of 2.0 μm or less. Powder, AlN powder, and Al 2 O 3 powder are prepared as binder phase forming raw material powders.
Among these, the blending ratio shown in Table 1 is blended so that the content ratio of cBN particles is 50% by volume when the total amount of some raw material powder and cBN powder is 100% by volume.
Next, the raw material powder was wet-mixed for 72 hours in a ball mill, dried, and then press-molded at a molding pressure of 100 MPa to a size of diameter: 50 mm × thickness: 1.5 mm. In a vacuum atmosphere, it is preliminarily sintered while being held at a predetermined temperature in the range of 900 to 1300 ° C., and then charged into an ultra-high pressure sintering apparatus, pressure: 5 GPa, temperature: in the range of 1200 to 1400 ° C. A cBN sintered body is prepared by sintering at a predetermined temperature.
This sintered body is cut into a predetermined size with a wire electric discharge machine, Co: 5% by mass, TaC: 5% by mass, WC: remaining composition and insert made of WC-based cemented carbide with ISO standard CNGA120408 insert shape Brazing to the brazing part (corner part) of the main body using an Ag-based brazing material having a composition consisting of Cu: 26%, Ti: 5%, and Ag: the rest, and polishing the upper and lower surfaces and outer periphery, By performing the honing process, cBN tool bases 1 to 3 having an insert shape of ISO standard CNGA120408 were manufactured.
硬質被覆層の成膜：
前述の工程によって作製した工具基体１〜３に対して、図３に示したようなアークイオンプレーティング装置を用いて、硬質被覆層を形成した。
なお、図３には、一種類のＴｉ−Ａｌ合金ターゲットしか図面に記載していないが、目標とする（Ｔｉ，Ａｌ）Ｎ層、（Ｔｉ，Ａｌ）（Ｃ，Ｎ）層の種類によって、組成の異なる複数のＴｉ−Ａｌ合金ターゲットを装置内に配備することができる。
（ａ）工具基体１〜３を、アセトン中で超音波洗浄し、乾燥した状態で、アークイオンプレーティング装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着する。また、カソード電極（蒸発源）として、所定組成のＴｉ−Ａｌ合金ターゲットおよびＴｉターゲットを配置する。
（ｂ）まず、装置内を排気して１０−２Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、０．５〜２．０ＰａのＡｒガス雰囲気に設定し、前記回転テーブル上で自転しながら回転する工具基体に−４００〜−１０００Ｖの直流バイアス電圧を印加し、もって工具基体表面をアルゴンイオンによって５〜３０分間ボンバード処理する。
（ｃ）次に、下地層の成膜を、次のとおり行う。
装置内に反応ガスとして窒素ガスを導入して表２に示す２〜１０Ｐａの所定の反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転する工具基体に表２に示す−２５〜１００Ｖの所定の直流バイアス電圧を印加し、かつ、前記Ｔｉターゲットからなるカソード電極（蒸発源）および前記所定組成のＴｉ−Ａｌ合金ターゲットからなるカソード電極（蒸発源）とアノード電極との間に表２に示す９０〜２００Ａの所定の電流を同時に所定時間流してアーク放電を発生させ、前記工具基体の表面に、表４に示される目標平均総層厚の下地層を蒸着形成した。
（ｄ）次いで、第１層および第２層の成膜を、次のとおり行う。
まず、装置内に反応ガスとして窒素ガスを導入して表２に示す４〜１０Ｐａの範囲内の所定の反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転する工具基体に表２に示す−２５〜−７５Ｖの範囲内の所定の直流バイアス電圧を印加し、かつ、前記Ｔｉ−Ａｌ合金ターゲットからなるカソード電極（蒸発源）とアノード電極との間に表２に示す９０〜１４０Ａの範囲内の所定の電流を流してアーク放電を発生させ、前記下地層表面に、表５に示される目標組成、目標平均層厚の（Ｔｉ，Ａｌ）Ｎ層からなる第１層を蒸着形成した。
ついで、反応ガスとして窒素ガスとメタンガスの混合ガスを使用し、窒素ガスとメタンガスの流量比を徐々に変えながら、表２に示す４〜１０Ｐａの範囲内の所定の反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転する工具基体に表２に示す−２５〜−７５Ｖの範囲内の所定の直流バイアス電圧を印加し、かつ、前記Ｔｉ−Ａｌ合金ターゲットからなるカソード電極（蒸発源）とアノード電極との間に表２に示す９０〜１４０Ａの範囲内の所定の電流を流してアーク放電を発生させることにより、表５に示される目標組成、目標平均層厚の（Ｔｉ，Ａｌ）（Ｎ，Ｃ）層からなる第２層を蒸着形成した。
なお、本発明工具１、２については、上記工程（ｃ）による下地層の形成は行っておらず、また、本発明工具３、４については、第２層におけるＣ成分の組成傾斜構造を形成していない。
Formation of hard coating layer:
A hard coating layer was formed on the tool bases 1 to 3 produced by the above-described process using an arc ion plating apparatus as shown in FIG.
In FIG. 3, only one type of Ti—Al alloy target is shown in the drawing, but depending on the type of target (Ti, Al) N layer and (Ti, Al) (C, N) layer, A plurality of Ti—Al alloy targets having different compositions can be deployed in the apparatus.
(A) The tool bases 1 to 3 are ultrasonically cleaned in acetone and dried. Then, the tool bases 1 to 3 are arranged along the outer periphery at a predetermined distance in the radial direction from the central axis on the rotary table in the arc ion plating apparatus. Install. In addition, a Ti—Al alloy target and a Ti target having a predetermined composition are disposed as a cathode electrode (evaporation source).
(B) First, the inside of the apparatus was evacuated and kept at a vacuum of 10 −2 Pa or less, and the inside of the apparatus was heated to 500 ° C. with a heater, and then set to an Ar gas atmosphere of 0.5 to 2.0 Pa A DC bias voltage of −400 to −1000 V is applied to the tool base rotating while rotating on the rotary table, and the tool base surface is bombarded with argon ions for 5 to 30 minutes.
(C) Next, the underlayer is formed as follows.
Nitrogen gas is introduced into the apparatus as a reaction gas to obtain a predetermined reaction atmosphere of 2 to 10 Pa shown in Table 2, and the tool base that rotates while rotating on the rotary table has a voltage of -25 to 100 V shown in Table 2. A predetermined DC bias voltage is applied, and the cathode electrode (evaporation source) made of the Ti target and the cathode electrode (evaporation source) made of the Ti-Al alloy target having the predetermined composition and the anode electrode are shown in Table 2. A predetermined current of 90 to 200 A shown in the figure was simultaneously supplied for a predetermined time to generate an arc discharge, and a base layer having a target average total layer thickness shown in Table 4 was formed on the surface of the tool base by vapor deposition.
(D) Next, the first layer and the second layer are formed as follows.
First, nitrogen gas is introduced into the apparatus as a reaction gas to obtain a predetermined reaction atmosphere within a range of 4 to 10 Pa shown in Table 2, and Table 2 shows a tool base that rotates while rotating on the rotary table. A predetermined DC bias voltage in the range of −25 to −75 V is applied, and the range of 90 to 140 A shown in Table 2 is provided between the cathode electrode (evaporation source) made of the Ti—Al alloy target and the anode electrode. An arc discharge was generated by flowing a predetermined current, and a first layer composed of a (Ti, Al) N layer having a target composition and a target average layer thickness shown in Table 5 was deposited on the surface of the underlayer.
Next, a mixed gas of nitrogen gas and methane gas is used as a reaction gas, and while changing the flow rate ratio of nitrogen gas and methane gas gradually, a predetermined reaction atmosphere within the range of 4 to 10 Pa shown in Table 2 is obtained, and the rotation A predetermined DC bias voltage within a range of −25 to −75 V shown in Table 2 is applied to a tool base that rotates while rotating on a table, and a cathode electrode (evaporation source) made of the Ti—Al alloy target; By causing a predetermined current in the range of 90 to 140 A shown in Table 2 to flow between the anode electrode and the arc discharge to generate an arc discharge, the target composition and target average layer thickness (Ti, Al) (shown in Table 5) A second layer comprising N, C) layers was formed by vapor deposition.
In addition, about this invention tool 1 and 2, formation of the foundation layer by the said process (c) is not performed, and about this invention tool 3 and 4, the composition gradient structure of the C component in a 2nd layer is formed. Not done.
図２（ａ）には、本発明工具の第１層と第２層の界面近傍のＳＥＭ断面写真の一例を示し、（ｂ）に、観察領域における連続した結晶成長組織の模式図と、連続した結晶組織の界面長さＬ１〜Ｌ６および界面長さＬを示す。 FIG. 2A shows an example of an SEM cross-sectional photograph in the vicinity of the interface between the first layer and the second layer of the tool of the present invention, and FIG. 2B shows a schematic diagram of a continuous crystal growth structure in the observation region, The interface lengths L 1 to L 6 and the interface length L of the obtained crystal structure are shown.
比較のため、工具基体１〜３に対して、表３に示す条件で前述の（ａ）〜（ｃ）の工程を行って、表４に示す下地層を蒸着形成した後、表３に示す条件で、第１層および第２層を蒸着することにより、表６に示す比較例被覆工具(「比較例工具」という)１〜６を作製した。 For comparison, the above-described steps (a) to (c) are performed on the tool bases 1 to 3 under the conditions shown in Table 3 to form a base layer shown in Table 4 by vapor deposition. By depositing the first layer and the second layer under the conditions, Comparative coated tools (referred to as “comparative tools”) 1 to 6 shown in Table 6 were produced.
上記で作製した本発明工具１〜６および比較例工具１〜６について、ＦＩＢを用いた薄片加工により、工具逃げ面から工具基体および硬質被覆層を含む、幅１００μｍ×高さ３００μｍ×厚さ０．２μｍの薄片を切り出し、該薄片のうち、硬質被覆層の厚み領域が全て含まれるよう設定された、工具基体表面に平行な方向の幅が１０μｍである視野について、走査型電子顕微鏡（ＳＥＭ）、透過型電子顕微鏡（ＴＥＭ）、エネルギー分散型Ｘ線分光法（ＥＤＳ）、オージェ電子分光法（ＡＥＳ）を用いた断面測定により、各層の組成、層厚を複数箇所で測定し、これを平均することにより、平均組成、平均層厚を算出した。
なお、組成傾斜構造が形成されている第２層については、第２層の層厚を層厚方向に３分割し、３分割された領域を基体側から（１）, （２）, （３）として、それぞれ中間点の組成を測定し、組成が傾斜していることを確認し、またこれらを平均することにより、平均組成を算出した。
About this invention tool 1-6 produced above and comparative example tools 1-6, the width of 100 μm × height 300 μm × thickness 0 including the tool base and the hard coating layer from the tool flank face by thin piece processing using FIB A 2 μm thin piece was cut out, and a scanning electron microscope (SEM) was used for a visual field whose width in the direction parallel to the surface of the tool substrate was 10 μm, which was set to include all the thickness regions of the hard coating layer. The composition and thickness of each layer were measured at multiple locations by cross-sectional measurement using a transmission electron microscope (TEM), energy dispersive X-ray spectroscopy (EDS), and Auger electron spectroscopy (AES). By doing so, the average composition and the average layer thickness were calculated.
For the second layer in which the composition gradient structure is formed, the layer thickness of the second layer is divided into three in the layer thickness direction, and the three divided regions are (1), (2), (3 ), The composition at the midpoint was measured, the composition was confirmed to be inclined, and the average composition was calculated by averaging these.
第１層と第２層の連続した結晶組織については、走査型電子顕微鏡（ＳＥＭ）にて観察し、観察領域における連続した結晶成長組織の有無および連続した結晶組織の界面長さＬ１〜ＬＸ（Ｘは観察領域における連続した結晶組織の個数)および界面長さＬとから界面長さ割合（％）を算出した。なお、連続した結晶組織の界面長さ割合（％）は、図２（ｂ）に示すように、観察領域のＳＥＭ断面画像において、界面粗さの基準線と結晶粒界の交点をプロットし、交点間の長さ（Ｌ１〜Ｌ６）を界面長さとし、画像全体の界面粗さの基準線方向の長さ（Ｌ）に対する比率［（Ｌ１＋Ｌ２＋Ｌ３＋Ｌ４＋Ｌ５＋Ｌ６）×１００／Ｌ］として求めることができる。
界面粗さの基準線は、以下の手順で定める。まず、硬質被覆層の断面に対してＡＥＳを用いた元素マッピングを実施することによって第１層と第２層の界面を定める。こうして得られた第１層と第２層の界面の粗さ曲線について、平均線を算術的に求め、これを界面粗さの基準線とする。
また、連続した結晶粒の結晶方位の測定は、透過型電子顕微鏡（ＴＥＭ）を用いた断面観察により求めることができる。
The continuous crystal structure of the first layer and the second layer is observed with a scanning electron microscope (SEM), and the presence or absence of the continuous crystal growth structure in the observation region and the interface length L 1 to L of the continuous crystal structure. The interface length ratio (%) was calculated from X (X is the number of continuous crystal structures in the observation region) and the interface length L. In addition, as shown in FIG. 2B, the interface length ratio (%) of the continuous crystal structure plots the intersection of the interface roughness reference line and the grain boundary in the SEM cross-sectional image of the observation region, The length between the intersection points (L 1 to L 6 ) is defined as the interface length, and the ratio of the interface roughness of the entire image to the length (L) in the reference line direction [(L 1 + L 2 + L 3 + L 4 + L 5 + L 6 ) × 100 / L].
The interface roughness reference line is determined by the following procedure. First, element mapping using AES is performed on the cross section of the hard coating layer to determine the interface between the first layer and the second layer. About the roughness curve of the interface between the first layer and the second layer thus obtained, an average line is obtained arithmetically, and this is used as a reference line for interface roughness.
Moreover, the measurement of the crystal orientation of continuous crystal grains can be obtained by cross-sectional observation using a transmission electron microscope (TEM).
第２層の結晶粒の平均幅、平均高さおよび平均アスペクト比については、走査型電子顕微鏡（ＳＥＭ）を用いた断面観察により、複数箇所の値を測定し、これを平均することにより、平均幅、平均高さおよび平均アスペクト比を算出することができる。各結晶粒の平均幅、平均高さは、結晶粒の形状を長方形に近似した際の幅、高さとする。平均幅は界面粗さの基準線に平行な方向の結晶粒界の交点間の長さとし、断面画像中の結晶粒の面積と等価な面積となるような長方形を定め、平均高さを求める。
結晶粒の平均幅、平均高さの算出は、工具基体表面と平行な方向に長さ１０μｍの範囲に存在する第２層の結晶粒について上記の手順にて測定し、測定範囲内に存在する粒子についての平均値を算出することにより求めた。
For the average width, average height, and average aspect ratio of the crystal grains in the second layer, the values at a plurality of locations were measured by cross-sectional observation using a scanning electron microscope (SEM), and the average was obtained by averaging these values. Width, average height and average aspect ratio can be calculated. The average width and average height of each crystal grain are the width and height when the shape of the crystal grain is approximated to a rectangle. The average width is defined as the length between the intersections of crystal grain boundaries in the direction parallel to the interface roughness reference line, and a rectangular shape having an area equivalent to the area of the crystal grains in the cross-sectional image is determined to obtain the average height.
The average width and average height of the crystal grains are calculated by measuring the second layer crystal grains existing in the range of 10 μm in length in the direction parallel to the tool base surface and within the measurement range. It calculated | required by calculating the average value about particle | grains.
第１層と第２層の総括したＸ線回折ピーク強度比は、第１層と第２層の重なった（２００）面の回折ピーク強度Ｉ（２００）と、（１１１）面の回折ピーク強度Ｉ（１１１）を測定し、Ｉ（２００）／Ｉ（１１１）から回折ピーク強度比を算出した。
また、第１層と第２層の総括した残留応力は、Ｘ線回折装置を用い、２θ−ｓｉｎ２ψ法にて求めた。なお、Ｘ線回折は、Ｃｒ管球を用い、（２２０）ピークを測定し、ヤング率として４７０ＧＰａ、ポアソン比として０．２を使用して計算を実施した。
なお、第１層と第２層の総括した残留応力とは、図４に示すように、第１層と第２層の重なったＸＲＤピークを一つのピークとして評価して算出した残留応力値である。
The overall X-ray diffraction peak intensity ratio of the first layer and the second layer is the diffraction peak intensity I (200) of the (200) plane where the first layer and the second layer overlap and the diffraction peak intensity of the (111) plane. I (111) was measured, and the diffraction peak intensity ratio was calculated from I (200) / I (111).
Moreover, the total residual stress of the first layer and the second layer was obtained by the 2θ-sin2ψ method using an X-ray diffractometer. X-ray diffraction was calculated using a Cr tube, measuring the (220) peak, using 470 GPa as the Young's modulus, and 0.2 as the Poisson's ratio.
The overall residual stress of the first layer and the second layer is a residual stress value calculated by evaluating the XRD peak where the first layer and the second layer overlap as one peak as shown in FIG. is there.
表４、表５に、上記で求めた各種の値を示す。 Tables 4 and 5 show the various values obtained above.
次いで、本発明工具１〜６および比較例工具１〜６について、
切削条件Ａ：
被削材：ＪＩＳ・ＳＣｒ４２０の浸炭焼入れ材（ＨＲＣ６０）の丸棒、
切削速度：２５０ ｍ／ｍｉｎ．、
切り込み：０．２ ｍｍ、
送り：０．１ ｍｍ、
の乾式連続切削条件で切削試験を行い、切削長９００ｍまで切削し、逃げ面摩耗幅を測定した。
表７にその結果を示す。
Then, about this invention tools 1-6 and comparative example tools 1-6,
Cutting condition A:
Work material: JIS / SCr420 carburized quenching material (HRC60) round bar,
Cutting speed: 250 m / min. ,
Cutting depth: 0.2 mm,
Feed: 0.1 mm,
A cutting test was performed under the dry continuous cutting conditions, cutting to a cutting length of 900 m, and flank wear width was measured.
Table 7 shows the results.
工具基体の作製：：
原料粉末として、いずれも０．５〜５μｍの平均粒径を有する、Ｃｏ粉末、ＶＣ粉末、Ｃｒ３Ｃ２粉末、ＴｉＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、ＷＣ粉末を用意し、これら原料粉末を、表８に示される配合組成に配合し、さらにワックスを加えてボールミルで７２時間湿式混合し、減圧乾燥した後、１００ＭＰａの圧力でプレス成形し、これらの圧粉成形体を焼結し、所定寸法となるように加工して、ＩＳＯ規格ＳＥＥＮ１２０３ＡＦＴＮ１のインサート形状をもったＷＣ基超硬合金工具基体１１〜１３を製造した。
Tool substrate production ::
As raw material powders, Co powder, VC powder, Cr 3 C 2 powder, TiC powder, TaC powder, NbC powder, WC powder, all having an average particle diameter of 0.5 to 5 μm, are prepared. After blending into the composition shown in Table 8, adding wax, wet mixing with a ball mill for 72 hours, drying under reduced pressure, press molding at a pressure of 100 MPa, sintering these powder compacts, predetermined dimensions WC-based cemented carbide tool bases 11 to 13 having an insert shape of ISO standard SEEN1203AFTN1 were manufactured.
成膜工程：
前述の工程によって作製したＷＣ基超硬合金工具基体１１〜１３に対して、図３に示したようなアークイオンプレーティング装置を用いて、実施例１の場合と同様にして、表９に示す条件で硬質被覆層を蒸着形成することにより、表１１に示す下部層と、表１２に示す第１層、第２層を有する本発明被覆工具(「本発明工具」という)１１〜１６を作製した。
なお、本発明工具１１、１２については、下地層の形成は行っておらず、また、本発明工具１３、１４については、第２層におけるＣ成分の組成傾斜構造を形成していない。
Film formation process:
Using the arc ion plating apparatus as shown in FIG. 3 for the WC-base cemented carbide tool bases 11 to 13 produced by the above-described steps, the same as in Example 1 is shown in Table 9. By subjecting the hard coating layer to vapor deposition under conditions, the present invention coated tools (referred to as “the present invention tool”) 11 to 16 having the lower layer shown in Table 11 and the first and second layers shown in Table 12 are produced. did.
Note that the base layer is not formed for the inventive tools 11 and 12, and the composition gradient structure of the C component in the second layer is not formed for the inventive tools 13 and 14.
比較のため、上記工具基体１１〜１３に対して、比較例工具１〜６と同様に、表１０に示す条件で硬質被覆層を蒸着形成することにより、表１１に示す下部層と、表１３に示す第１層、第２層を有する比較例被覆工具(「比較例工具」という)１１〜１６を作製した。 For comparison, the hard coating layer is formed by vapor deposition under the conditions shown in Table 10 on the tool bases 11 to 13 in the same manner as Comparative Tools 1 to 6, and the lower layers shown in Table 11 and Table 13 are formed. Comparative coated tools (referred to as “comparative example tools”) 11 to 16 having the first layer and the second layer shown in FIG.
上記で作製した本発明工具１１〜１６および比較例工具１１〜１６について、実施例１と同様にして、各層の平均組成、平均層厚を算出した。
なお、組成傾斜構造が形成されている第２層については、実施例１と同様に、第２層の層厚を３分割し、３分割された領域のそれぞれ中間点の組成を測定し、これを平均することにより、平均組成を算出した。
また、第１層と第２層の連続した結晶組織についての界面長さ割合（％）、連続した結晶粒の結晶方位、第２層の結晶粒の平均幅、平均高さおよび平均アスペクト比、回折ピーク強度比、第１層と第２層の総括した残留応力についても、実施例１と同様にして、測定・算出することによって求めた。
表１１、表１３に、上記で求めた各種の値を示す。
About this invention tool 11-16 produced above and the comparative example tools 11-16, it carried out similarly to Example 1, and computed the average composition and average layer thickness of each layer.
As for the second layer in which the composition gradient structure is formed, the layer thickness of the second layer is divided into three as in Example 1, and the composition of the intermediate point of each of the three divided regions is measured. The average composition was calculated by averaging.
Further, the interface length ratio (%) for the continuous crystal structure of the first layer and the second layer, the crystal orientation of the continuous crystal grains, the average width, average height and average aspect ratio of the second layer crystal grains, The diffraction peak intensity ratio and the total residual stress of the first layer and the second layer were also determined by measurement and calculation in the same manner as in Example 1.
Tables 11 and 13 show the various values obtained above.
次いで、本発明工具１１〜１６および比較例工具１１〜１６について、ＳＥ４４５Ｒ０５０６Ｅのカッタを用いて、以下の切削条件Ｂで、単刃の高速正面フライス切削試験を実施した。
切削条件Ｂ：
被削材：ＪＩＳ・Ｓ５５Ｃの幅６０ｍｍ×長さ２５０ｍｍのブロック材、
切削速度：２８０ ｍ／ｍｉｎ．、
回転速度：７１３ ｒｅｖ／ｍｉｎ、
切り込み：２ ｍｍ、
送り：０．１ ｍｍ／刃、
切削幅：６０ｍｍ
の条件で、切削長１４００ｍまで切削し、逃げ面摩耗幅を測定した。
表１４にその結果を示す。
Next, for the inventive tools 11 to 16 and the comparative tools 11 to 16, a single-blade high-speed face milling test was carried out under the following cutting conditions B using a cutter of SE445R0506E.
Cutting condition B:
Work material: JIS S55C block 60mm wide x 250mm long,
Cutting speed: 280 m / min. ,
Rotational speed: 713 rev / min,
Cutting depth: 2 mm,
Feed: 0.1 mm / tooth,
Cutting width: 60mm
Under these conditions, the cutting length was cut to 1400 m, and the flank wear width was measured.
Table 14 shows the results.
表１４の結果によれば、本発明工具１１〜１６は、逃げ面摩耗幅の平均は約０．１２ｍｍであるのに対して、比較例工具１１〜１６は逃げ面摩耗が進行し、また、短時間で欠損による寿命となるものも生じた。
この結果から、本発明工具１１〜１６は、比較例工具１１〜１６に比して、耐欠損性、耐摩耗性のいずれもすぐれていることが分かる。
According to the results in Table 14, while the tools 11 to 16 of the present invention have an average flank wear width of about 0.12 mm, the flank wear of the comparative tools 11 to 16 proceeds, Some of them had a lifetime due to defects in a short time.
From these results, it can be seen that the inventive tools 11 to 16 are superior in both fracture resistance and wear resistance as compared with the comparative tools 11 to 16.
本発明の表面被覆切削工具は、各種の鋼などの通常の切削条件での切削加工は勿論のこと、特に高熱発生を伴うとともに、切刃部に対して大きな負荷がかかる合金鋼、ステンレス鋼などの高速切削加工においても、すぐれた耐欠損性および耐摩耗性を発揮し、長期に亘ってすぐれた切削性能を示すものであるから、切削加工装置の高性能化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。
The surface-coated cutting tool of the present invention is not only for cutting under normal cutting conditions such as various steels, but also alloy steel, stainless steel, etc. that are accompanied by high heat generation and a heavy load on the cutting edge part. Even in the high-speed cutting process, it exhibits excellent chipping resistance and wear resistance, and exhibits excellent cutting performance over a long period of time. It can cope with energy saving and cost reduction sufficiently satisfactorily.
Claims (5)
（ａ）前記硬質被覆層は、工具基体表面に形成した第１層と、第１層の上に形成した第２層とからなり、
前記第１層は、
組成式：（Ｔｉ１−ａＡｌａ）Ｎ（但し、ａは原子比で、０．３≦ａ≦０．７）を満足する０．５〜３．０μｍの平均層厚を有するＴｉとＡｌの窒化物層であり、
前記第２層は、
組成式：（Ｔｉ１−ｂＡｌｂ）（Ｎ１−ｃＣｃ）（但し、ｂ，ｃはそれぞれ原子比で、０．３≦ｂ≦０．７、０．０１≦ｃ≦０．４）を満足する０．５〜２．０μｍの平均層厚を有するＴｉとＡｌの炭窒化物層であり、
（ｂ）前記第１層と第２層の結晶粒は、第１層と第２層の界面長さ割合で７０％以上の界面領域において連続した結晶成長組織からなり、かつ、連続した結晶成長組織は同じ結晶方位を示し、
（ｃ）前記第２層の結晶粒の工具基体表面に平行な平均幅は０．０５〜１．０μｍであり、工具基体表面に垂直な平均高さは０．０５〜１．５μｍであり、かつ、平均アスペクト比（高さ／幅）が１〜１０であることを特徴とする表面被覆切削工具。 In a surface-coated cutting tool in which a hard coating layer is vapor-deposited on the surface of a tool base made of any of WC cemented carbide, TiCN-based cermet, and cubic boron nitride sintered body,
(A) The hard coating layer consists of a first layer formed on the surface of the tool base and a second layer formed on the first layer,
The first layer is
Compositional formula: (Ti 1-a Al a ) N (where a is an atomic ratio, 0.3 ≦ a ≦ 0.7) Ti and Al having an average layer thickness of 0.5 to 3.0 μm A nitride layer of
The second layer is
Composition formula: (Ti 1-b Al b ) (N 1-c C c ) (where b and c are atomic ratios, 0.3 ≦ b ≦ 0.7, 0.01 ≦ c ≦ 0.4, respectively) And Ti and Al carbonitride layers having an average layer thickness of 0.5 to 2.0 μm satisfying
(B) The crystal grains of the first layer and the second layer have a continuous crystal growth structure in an interface region of 70% or more in terms of the interface length ratio between the first layer and the second layer, and the continuous crystal growth The structure shows the same crystal orientation,
(C) The average width parallel to the tool base surface of the crystal grains of the second layer is 0.05 to 1.0 μm, and the average height perpendicular to the tool base surface is 0.05 to 1.5 μm, A surface-coated cutting tool having an average aspect ratio (height / width) of 1 to 10.
組成式：（Ｔｉ１−ｂＡｌｂ）（Ｎ１−ｃＣｃ）（但し、ｂ，ｃはそれぞれ原子比で、０．３≦ｂ≦０．７、０．０１≦ｃ≦０．４）を満足することを特徴とする請求項１に記載の表面被覆切削工具。 The second layer has a composition gradient structure in the layer thickness direction in which the C component content ratio gradually increases from the interface side with the first layer toward the surface of the second layer, and the average of the second layer The composition is
Composition formula: (Ti 1-b Al b ) (N 1-c C c ) (where b and c are atomic ratios, 0.3 ≦ b ≦ 0.7, 0.01 ≦ c ≦ 0.4, respectively) The surface-coated cutting tool according to claim 1, wherein:
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