JP2015159204A - ceramic package - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ceramic package in which a part of solder material is difficult to creep up onto the upper surface of a metal lid plate and stress caused by thermal deformation of the lid member is moderated even when the metal lid member is adhesively attached through the solder material onto a metalized layer which is formed on the surface of the package main body formed of ceramic and has a rectangular frame-like shape in plan view, so that the ceramic of the package main body is hardly damaged.SOLUTION: A ceramic package 1a is formed of ceramic such as alumina, and has a package main body 2a containing a surface 3 and a back surface 5 which have rectangular outer shapes in plan view, and four side surfaces 6 located between the respective sides of the surface 3 and the back surface 5, and a cavity (opening portion) 7 which is opened to the surface 3 side of the package main body 2a and has a rectangular shape in plan view. Hanger surface portions 4a are provided at the four corners of the rectangular surface 3. The highest positions M1, M2 of two adjacent side-shaped surfaces 3 between which each corner portion is sandwiched are set as reference surfaces, and the hanger surface portions 4a hang more greatly to the back surface side 5 of the package main body 2a than the two reference surfaces M1, M2.

Description

  The present invention comprises a package main body having a box shape as a whole and an opening such as a cavity opened on the surface of the main body, and after mounting various elements in the opening, the opening is made of metal. The present invention relates to a ceramic package sealed with a lid plate.

  For example, a sealing metallization layer formed in advance on a rectangular frame-shaped surface surrounding an opening of the recess after mounting an electronic component in a recess made of ceramic and entirely open on the surface of an insulating substrate having a box shape In addition, the metal lid body is accurately and firmly joined by seam welding through the brazing material to improve the airtight reliability, and the electronic components mounted in the recesses operate normally over a long period of time. There has been proposed an electronic component storage package in which each side of the sealing metallization layer having a rectangular frame shape is bent in a concave shape in the length direction thereof (for example, see Patent Document 1).

  However, as in the case of the electronic component storage package, the metallization layer for sealing formed in a rectangular frame shape on the surface of the insulating base made of ceramic is warped concavely in the length direction on each side. In this case, the four corners of the metallized layer are raised upward. Therefore, when the metal lid is joined by seam welding through the brazing material of the metallized layer, the metal lid after the part of the brazing material wraps around the outer surface of the metal lid near the four corners. In some cases, it may cause a problem that it is easy to crawl on the top surface. In addition, stress is generated in the ceramic near the surface of the insulating substrate through the brazing material due to thermal deformation of the metal lid due to expansion of the metal lid during the seam welding and subsequent contraction due to cooling. As a result, the ceramic may be damaged such as cracks. Further, in the case where the vicinity of the four corners of the metallization layer for sealing is raised upward and the central part in the length direction of each side is recessed as in the electronic component storage package, a pair of used for the seam welding There was also a problem that it was difficult to accurately set the roller electrode on the metallized layer at each corner and press it downward.

Japanese Patent No. 3140439 (pages 1 to 5, FIGS. 1 to 4)

  The present invention solves the problems described in the background art, and joins a metal cover plate over a metallized layer having a rectangular frame shape on a surface of a ceramic package body via a brazing material. However, it is possible to provide a ceramic package in which a part of the brazing material is unlikely to crawl up to the upper surface of the lid plate, and stress due to thermal deformation of the lid plate is relieved to prevent damage to the ceramic of the package body. Is an issue.

Means for Solving the Problems and Effects of the Invention

In order to solve the above-mentioned problems, the present invention has a rectangular frame-shaped surface surrounding an opening such as a cavity opened on the surface of a package body made of ceramic, and each corner is formed in an outer region at four corners of the surface. Is formed with the idea of forming a hanging surface portion that hangs down on the back side of the package body.
That is, the ceramic package of the present invention (Claim 1) is made of ceramic and includes a front surface and a back surface having a rectangular outer shape in plan view and four side surfaces located between the sides of the front surface and the back surface. And an opening having a rectangular shape in a plan view, and the four corners of the surface having the rectangular shape are provided with each of the corners. With the highest position of each of the two side surfaces adjacent to each other as a reference plane, a hanging surface portion hanging from the two reference surfaces to the back surface side of the package body is provided, and the hanging surface portion is in plan view On the reference line along the inner and outer direction passing through the intersection of two adjacent side surfaces of the package body and the intersection of two adjacent inner surfaces of the opening, the base It is provided on the outermost outside position to at least 10% or more positions in the entire length of the outermost and innermost intersecting the line, characterized in that.

According to this, at the four corners of the surface having a rectangular (frame) shape in plan view, the highest position for each of the two side surfaces adjacent to each other with the corners interposed therebetween is used as the reference plane. A drooping surface portion that hangs down on the back surface side of the package body from two reference surfaces is provided, and the drooping surface portion is an intersection of two side surfaces adjacent to each other in the package body in a plan view or an extension line of the two side surfaces The intersection side of each other is the bottom. Therefore, as will be described later, when a metal lid plate is joined via a brazing material over the metallized layer and the metal plating layer previously coated on the surface, it is located near the four corners of the surface. The brazing material reservoir region is formed directly above the four hanging surface portions, and the lid plate is joined (brazed or seam welded) via a rectangular frame-shaped brazing material layer including the reservoir region in the vicinity of the four corners. )
As a result, even if the joining is performed while pushing the cover plate from the upper surface side toward the brazing material layer side, it is possible to prevent a part of the brazing material from climbing up to the upper surface of the cover plate.
In addition, the stress generated along with the thermal expansion and cooling contraction of the lid plate at the time of the bonding is reduced to a level just above the drooping surface portion located at each of the four corners on the surface of the package body where the stress is most likely to act. It can be relieved by the material accumulation area. Therefore, even if the stress is received, breakage such as cracks can be reliably prevented in the ceramic near the four corners of the surface of the package body.
Therefore, it is possible to provide a highly airtight and reliable ceramic package that can normally operate various elements mounted in the opening for a long period of time.

The ceramic is, for example, a high-temperature fired ceramic such as alumina, or a low-temperature fired ceramic such as glass-ceramic.
In addition, the opening includes, for example, a rectangular parallelepiped cavity or a concave portion formed of a concave curved surface. In the case of the cavity, for example, a crystal resonator or the like is mounted on the bottom surface of the cavity. A pair or more (plural) of electrodes are formed.
Further, the highest position for each side-shaped surface is the vicinity of the top of the convex surface located at the uppermost position among the uneven surfaces on the surface layer of the surface for each side. In order to obtain the highest position serving as the reference surface, when the side surfaces are viewed from the side, the side surface including the surface has a back surface of the package main body as a reference, and the plurality of convex portions from the back surface. The plane including the convex portion at the most distant position was taken as the reference plane. However, when the back surface of the package body is warped upward when viewed from the side, the position of the furthest distance from the virtual line is based on the virtual plane including the virtual line connecting both ends of the back surface in the side view. A plane including the convex portion was used as the reference plane.
In addition, the sagging surface portion is the lowermost portion at the intersection of two adjacent side surfaces of the package body in plan view, or at the intersection of the extension lines of the two side surfaces, for example, a convex, gently curved curve with the side view upward It exhibits a curved surface or a single inclined surface.
Further, in the plan view, the sagging surface portion is a curved line in which the innermost side located on the cavity side is convex or concave toward the corner side, or an inclined straight line that obliquely intersects between two adjacent side surfaces. It is.

In addition, the sagging surface portion is the entire length between the outermost portion and the innermost portion intersecting the reference line, preferably 20% or more from the outermost position, more preferably the outermost position. To 30% or more inside position. The innermost position is 100%, which is the same as the total length. In the case of 100%, the boundary between the drooping surface portion and the two adjacent side surfaces is the side of the two side surfaces. The form divided for each is also included.
Further, the hanging part surface is formed by, for example, devising a pressing jig at the time of thermocompression bonding after laminating a plurality of green sheets constituting the package main body, or by separating a plurality of green sheet laminates for taking multiple pieces. When forming the dividing grooves for singulation by laser processing along the vertical and horizontal directions, the processing conditions near the positions where the vertical and horizontal divided grooves intersect with each other are made different from the processing conditions at positions other than the vicinity of the intersections. It is formed.
In addition, the inside / outside direction is a direction in which the side surfaces of the four sides are on the outside and the center of the opening is on the inside in the package body in plan view.
Furthermore, the reference line, two intersections, or positions are virtual lines or points.
In addition, the ceramic package has a multi-cavity configuration having both a product region in which the package is adjacent to each other in the vertical and horizontal directions in plan view and an ear portion that is located around the product region and is made of the ceramic. May be provided as

According to the present invention, there is also provided a ceramic package in which a rectangular surface of the package body is covered with a metallized layer and a metal plating layer including the hanging surface portions located at four corners of the surface. ) Is also included.
According to this, the metallized layer and the metal plating layer are sequentially coated on the rectangular (frame) -shaped surface including the sagging surface portion located near the four corners. Therefore, a metal lid plate described below can be directly joined (brazed or so-called direct seam) via a brazing material at least on the metal plating layer on the surface layer side. It is possible to eliminate or surely prevent the ceramic plate from being crushed to the upper surface of the cover plate and from the thermal stress generated during the joining.
In the metallized layer, when the package body is a high-temperature fired ceramic, a metal mainly composed of W or Mo is used. When the package body is a low-temperature fired ceramic, Cu or Ag is mainly used. The component metal is used.
The metal plating film is composed of, for example, a lower Ni plating film and an upper Au plating film.

Furthermore, the present invention includes a ceramic package (Claim 3) in which a metal cover plate is joined above the metal plating layer via a brazing material.
According to this, on the rectangular (frame) -shaped surface including the sagging surface portion located near each of the four corners, the brazing material including a pool region in the vicinity of the four corners on the metallized layer and the metal plating layer that are sequentially coated. A metal lid plate is joined via the layers. Therefore, it is possible to eliminate or surely suppress the above-described creeping of the brazing material to the upper surface of the lid plate and the breakage of the ceramic due to the thermal stress generated during the joining. Accordingly, it is possible to provide a highly airtight and reliable ceramic package that normally operates various elements mounted in the opening for a long period of time.
For example, Ag brazing (Ag-15% Cu) is used for the brazing material.
The lid plate may be, for example, 42 alloy (42% Ni-Fe), Kovar (Fe-29% Ni-17% Co), 194 alloy (Cu-2.3% Fe-0.03% P), Or it consists of stainless steel.

The perspective view which shows the ceramic package of one form by this invention. The top view of the said ceramic package. FIG. 3A is a partial perspective view showing the package near the corner indicated by an arrow A in FIG. 2, and FIG. 3B is a plan view showing the vicinity of the corner. FIG. 3 is a vertical sectional view taken along line XX in FIG. 2. The expanded sectional view which shows the dashed-dotted line part Y in FIG. The vertical sectional view which shows the state which joined the cover plate above the surface of the said package. The expanded sectional view which shows the dashed-dotted line part Z in FIG. (A) The said same partial perspective view which shows the drooping part of a different form, (B) is the said same partial perspective view which shows the drooping part of a different form further. The top view which shows the ceramic package of a different form. (A) The said same partial perspective view which shows the drooping part used for the said package, (B), (C) is the said same partial perspective view which shows the drooping part of a different form. The same fragmentary top view which shows the hanging part of another form different from the above. Furthermore, the same fragmentary top view which shows the drooping part of another form.

Hereinafter, modes for carrying out the present invention will be described.
FIG. 1 is a perspective view showing a ceramic package (hereinafter simply referred to as a package) 1a according to an embodiment of the present invention, and FIG. 2 is a plan view of the package 1a.
As shown in FIGS. 1 and 2, the package 1a includes a package body 2a made of ceramic and having a box shape as a whole, and a cavity (opening) 7 that opens to the center side of the surface 3 side of the package body 2a. It is equipped with.
The package body 2a is made of, for example, a high-temperature fired ceramic such as alumina, or a low-temperature fired ceramic such as glass-ceramic, and has a front surface 3 and a back surface 5 that are rectangular (rectangular) in outer shape in plan view, and between these four sides. It includes four side surfaces 6 located. The surface 3 has a rectangular frame shape as a whole in a plan view, and includes a fan-shaped drooping surface portion 4a in a plan view in which the intersection point between the extension lines of two side surfaces 6 adjacent to the four corners is the lowest position. Yes. The back surface 5 is a flat surface.
A concave groove 10 having a circular arc shape in plan view is formed along the vertical direction between the two adjacent side surfaces 6.

As shown in FIG. 1 and FIG. 2, a metallized layer (11) and a lower plating layer (described later) are formed on almost the entire surface 3 including the hanging surface portion 4a in the vicinity of the four corners, and on the entire surface of the concave groove 10 at the four corners. 12), the plating layer 13 on the surface layer side is covered.
Further, the cavity 7 has a bottom surface 8 that is rectangular (rectangular) in plan view, an inner surface 9 that is erected from the four sides to the surface 3 side, and a curved surface that is positioned at an inner corner between each two adjacent inner surfaces 9. 9a. A pair of electrodes 14 is formed on the bottom surface 8.
When the package main body 2a is a high-temperature fired ceramic, a metal mainly composed of W or Mo is used for the electrode 14, and when the package body 2a is a low-temperature fired ceramic, Cu or Ag is the main ingredient. The metal is used and the surface thereof is coated with plating layers (12, 13) described later.
The electrode 14 has a plurality of external connection terminals (see FIG. 5) formed on the back surface 5 via via conductors (not shown) penetrating between the bottom surface 8 of the cavity 7 and the back surface 5 of the package body 2a. (Not shown) can be individually conducted. The via conductor and the external connection terminal are also made of the same metal as described above, and the surface of the external connection terminal is covered with the same plating layer.

Each of the four corners of the package body 2a illustrated by the arrow A in FIG. 2 is surrounded by a flat surface 3, two adjacent side surfaces 6, and a groove 10 as shown in FIG. The sagging surface portion 4a, which has a fan-like shape as a whole when viewed from the side and is a convex curved surface when viewed from the side, is located.
As shown in FIG. 3 (B), the sagging surface portion 4a is obtained by using the highest positions M1 and M2 for each of the two side surfaces 3 and 3 adjacent to each other across the corner as a reference plane. Also hangs down on the back surface 5 side of the package body 2a. In addition, the sagging surface portion 4a has a reference line L that passes through the intersection V between the extension lines of the two side surfaces 6 adjacent in plan view and the intersection U between the extension lines of the two inner surfaces 9 adjacent in the cavity 7. Above, with respect to the total length W1 of the outermost part and the innermost part intersecting with the reference line L, it is provided between the outermost part and an inner position S within a range of at least 10% of the total length W1. . That is, the length W2 in the inner and outer direction of the hanging surface portion 4a that intersects the reference line L is in the range of 10% to 100% of the total length W1.
The length W2 is desirably in the range of 20% to 90% of the full length W1, and more desirably in the range of 30% to 80% of the full length W1.

As shown in FIG. 4 which is a vertical sectional view taken along the line X--X in FIG. 2 and FIG. 5 in which the one-dot chain line portion Y in FIG. 4 is enlarged, the surface 3 of the package body 2a hangs down. A metallized layer 11 and metal platings 12 and 13 are sequentially coated on the surface portion 4 a and the concave groove 10. When the package body 2a is a high-temperature fired ceramic, the metallized layer 11 is also made of a metal containing W or Mo as a main component. When the package body 2a is a low-temperature fired ceramic, the metallized layer 11 is mainly made of Cu or Ag. For example, the metal has a thickness of about 5 to 40 μm.
Moreover, the metal plating layer 12 on the lower layer (underlying) side is made of, for example, a Ni plating film having a thickness of about 1 to 10 μm, and the metal plating layer 13 on the surface layer side is, for example, about 0.1 to 1.2 μm in thickness. Made of an Au plating film.
The metallized layer 11 and the metal platings 12 and 13 are also located along the back surface 5 side of the package main body 2a. For example, this portion is used when the package 1a is mounted on the surface of a motherboard (not shown). Used for joining.

The package 1a as described above was manufactured as follows, for example.
Prepare a plurality of multi-sheet green sheets that have multiple package areas both vertically and horizontally in plan view, and punch the center part of each of these green sheets in plan view for each package area. A through hole having a rectangular shape was formed, and a via hole having a relatively small diameter was formed by punching in an appropriate place for each package region in the remaining flat green sheet.
Next, a conductive paste containing W, Mo, Cu, or Ag powder is screen-printed on the entire surface of a part of the green sheet in which the rectangular through-holes are formed for each package region. The metallized layer 11 for firing was formed.
On the other hand, after forming the unfired via conductor by filling the same conductive paste into each via hole of the green sheet in which the remaining via hole is formed for each package region, the upper end surface and the lower end surface for each via conductor The conductive paste similar to the above was screen-printed on the front surface and back surface of each package region where the surface was exposed to form the unfired electrodes 14 and external connection terminals.

Subsequently, after laminating a plurality of the above two types of green sheets on a surface plate, thermocompression bonding was performed while pressing a downward pressing jig against the surface of the obtained green sheet laminate. At this time, in the vicinity of the position where the vertical and horizontal boundary lines that divide between the four adjacent package regions in the uppermost green sheet cross each other, the concave pressure surface of the pressing jig is devised to provide four hanging surface portions. 4a was formed.
Further, a through hole having a circular cross section is formed between the front surface and the back surface of the green sheet laminate around the position where the vertical and horizontal boundary lines intersect, and then the same as described above along the inner wall surface of each through hole. The conductive paste was applied in a cylindrical shape. Next, along each of the vertical and horizontal boundary lines, a cutting blade was inserted from the surface side or laser processing was performed to form a dividing groove having a lattice shape and a certain depth in plan view. After firing the green sheet laminate, the obtained multi-package assembly is sequentially immersed in each of the electrolytic plating baths for Ni plating and Au plating. Using the plated electrode, the Ni plating film 12 and the Au plating film 13 were sequentially coated with the required thickness on the surface of the metallized layer 11 and the electrode 14.
Finally, a plurality of the packages 1a can be obtained simultaneously by shearing the package assembly along the dividing grooves into individual pieces.

FIG. 6 is a vertical sectional view showing a state in which a metal lid 18 is joined via a brazing material 16 above the metal plating layers 12 and 13 located on the surface 3 of the package 1a. These are the enlarged views of the dashed-dotted line part Z in FIG.
As shown in FIGS. 6 and 7, for example, after mounting a crystal resonator 15 on a pair of electrodes 14 formed on the bottom surface 8 of the cavity 7 in advance via a brazing material (not shown), metal plating is performed. On the layer 13, a rectangular frame-shaped brazing material 16 that is similar in shape to the surface 3 of the package body 2 a in plan view is placed in advance, and a metal lid 18 is placed on the brazing material 16. I put it. The lid plate 18 is a flat plate made of Kovar, for example.
Next, the package 1a on which the brazing material 16 and the cover plate 18 were placed was inserted into a heating furnace (not shown) while pressing the cover plate 18 downward, and heated in a predetermined temperature zone. As a result, the entire brazing material 16 was softened and the surface layer portion was in a molten state, and the lid plate 18 could be brazed (joined) above the Au plating layer 13. Thereafter, the brazing material 16 was cooled when taken out of the heating furnace.

As shown in FIG. 7, the brazing material 16 forms a pool region 16a of the brazing material 16 directly above each hanging surface portion 4a of the package body 2a. As a result, the outer surface 17 made of a curved surface of the brazing material 16 was located at the uppermost end near the middle of the side surface of the lid plate 18 and did not crawl up to the upper surface of the lid plate 18.
Further, as the brazing material 16 is heated and cooled, the lid plate 18 also undergoes thermal expansion and cooling contraction along the plane direction and the thickness direction. The stress caused by the thermal deformation of the lid plate 18 was also alleviated by the pool region 16a of the brazing material 16. As a result, local breakage such as cracks occur in the sagging surface portion 4a of the package body 2a located immediately below the four corners of the lid plate 18 where the stress is most prominent, and in the ceramic of the surface 3 adjacent thereto. Did not occur.
Note that, instead of the brazing, seam welding in which a pair of roller electrodes are rolled while being pressed downward along two opposing sides of the lid plate 18 may be performed in the same manner as described above. It is possible to prevent scooping and breakage of the ceramic on the surface 3. In such a method, the pair of roller electrodes can be easily and reliably rolled along the entire length of every two opposite sides of the lid plate 18.

Further, in place of the sagging surface portion 4a of the package body 2a, as shown in FIG. 8A, a sagging surface portion 4b having a fan-like shape as a whole in a plan view and a curved surface convex upward in a side view is provided as a package 1a. Even if used in the above, the same action as described above is achieved.
Further, as shown in FIG. 8 (B), the same operation as described above can be achieved even when a hanging surface portion 4c having a fan shape as a whole in plan view and having a single inclined surface in side view is used for the package 1a. The As shown by the straight broken line in FIG. 8B, the sagging surface portion 4c may have a form in which the boundary line with the surface 3 is an oblique straight line in plan view.

According to the package 1a as described above, when the metal cover plate 18 is joined via the brazing material 16 above the metallized layer 11 and the metal plating layers 12 and 13 coated on the surface 3 of the package body 2a. Further, a reservoir region 16a of the brazing material 16 is formed immediately above the four drooping surface portions 4a located in the vicinity of the four corners of the surface 3, and a rectangular frame-shaped brazing material layer including the reservoir region 16a in the vicinity of the four corners. The lid plate 18 is joined via 16. As a result, even if the joining is performed while pushing the cover plate 18 from the upper surface side toward the brazing material layer 16 side, it is easy to cause a situation where a part of the brazing material 16 crawls up to the upper surface of the cover plate 18. Can be prevented.
Furthermore, the stress generated along with the thermal expansion and cooling contraction of the lid plate 18 at the time of the bonding is applied to each of the drooping surface portions 4a located near the four corners of the surface 3 of the package body 2a where the stress is most likely to act. It is relieved by the accumulation region 16a of the brazing material 16 directly above. Therefore, even if the stress is applied, the ceramic near the surface 3 of the package body 2a can be hardly damaged such as a crack.
Therefore, it is possible to provide a ceramic package 1a with high hermetic reliability that allows elements such as the vibrator 15 mounted in the cavity (opening) 7 to operate normally over a long period of time.

FIG. 9 is a plan view showing a package 1b of a different form, and FIG. 10A is a partial perspective view illustrating the vicinity of a corner portion on the surface 3 of the package body 2b.
As shown in FIG. 9, the package 1b has the same front surface 3, rear surface 5, side surface 6, cavity (opening) 7, metallized layer 11, metal plating layers 12, 13 and electrodes 14, and the like. However, in the vicinity of the four corners on the surface 3 of the package body 2b, the concave groove 10 is not present, and the vertical sides of the two adjacent side surfaces 6 are corners in plan view. Therefore, as shown in FIG. 10 (A), a curved surface having a fan shape that is a quarter of a circle in plan view and convex upward in side view is provided near each of the four corners of the surface 3 of the package body 2b. A hanging surface portion 4d made of is located.

The package 1b as described above is also manufactured by the same method as described above.
Even with the package 1b as described above, when the lid plate 18 is joined, the same effect as the package 1a can be achieved and the same effect as described above can be achieved.
In addition, as shown in FIG. 10 (B), instead of the sagging surface portion 4d, each of the four corners of the surface 3 of the package body 2b has a circular fan shape in a plan view, and has a side view. May be a hanging surface portion 4e formed of a downwardly convex curved surface.
Further, as shown in FIG. 10 (C), a drooping surface portion 4e having a single fan shape having a circular shape in a plan view and a single inclined straight line in a side view may be used. The drooping surface portion 4f may have a form in which a boundary line with the surface 3 is an oblique straight line in plan view, as indicated by a straight broken line in FIG.

  FIG. 11 is a partial plan view showing a sagging surface portion 4g of a form different from the above-described forms. As shown in FIG. 11, at the corners in the plan view of the same substrate body 2a, the drooping surface portion 4g has the reference line with respect to the total length W1 between the outermost part and the innermost part intersecting the same reference line L. A total length W2 of the outermost part and the innermost part (intersection point S) intersecting with L is common, and a boundary line R between two adjacent side surfaces 3 is an inner surface 9 of the cavity 7 in plan view. , 9 is in contact with the center of the curved surface 9a. The fan-shaped hanging surface portion 4g is the same inclined surface or curved surface as described above, with the concave groove 10 side being the lowest position.

FIG. 12 is a partial plan view showing a sagging surface portion 4h of another form different from the above-described forms. As shown in FIG. 12, at the corners in the plan view of the same substrate body 2a, the drooping surface portion 4h has the above-mentioned reference line with respect to the total length W1 of the outermost part and the innermost part intersecting the same reference line L A total length W2 of the outermost part and the innermost part intersecting with L is common. Further, the boundary line R between the drooping surface portion 4h and each of the two adjacent side surfaces 3 is divided into two for each of the two surfaces 3 and 3, and the boundary line R and the reference line L should cross each other. The intersection S intersects a virtual curve r connecting the two boundary lines R. Such a fan-shaped hanging surface portion 4h is also the same inclined surface or curved surface as described above with the concave groove 10 side as the lowest position.
Even with the above-described hanging surface portions 4g and 4h, when the lid plate 18 is joined to the opening of the cavity 7, the same operation as the package 1a is achieved and the same effect as described above can be obtained. Is possible.
The sagging surface portions 4g and 4h can also be applied to the ceramic package 1b provided with the package body 2b without the concave groove 10 at every four corners.

The present invention is not limited to the embodiments described above.
For example, the outer shape of the front and rear surfaces 3 and 5 of the package bodies 2a and 2b in a plan view may be a square (rectangular) shape.
Further, the sagging surface portions 4a to 4f may be arcuate curves whose boundary lines with the surfaces 3 of the package bodies 2a and 2b in plan view are convex toward the corners.
Further, in the middle part of the surface 3 of the four sides in the surface 3 of the package body 2a, 2b, the side surface 6 side in the longitudinal direction of each side is located in a semicircular or semi-elliptical shape in plan view. In addition, the central portion on the side surface 6 side may have one or a plurality of depending surface portions that hang down to the back surface 5 side.
Further, the package bodies 2a and 2b may be configured such that the back surfaces 5 thereof are further provided with openings such as cavities 7 and recesses similar to those described above.
Further, when the lengths of the sagging surface portions along the adjacent side surfaces 6 of the two side surfaces 3 sandwiching the sagging surface portion are different, the shorter one of the two lengths is used as a reference. And 10% or more from the outermost portion.
Further, the brazing material 16 may be made of other than Ag brazing.
In addition, the lid plate 18 may have a flat box shape as a whole composed of a flat plate that is rectangular in plan view and a vertical wall that faces downward along the four sides of the flat plate.

  According to the present invention, even if a metal lid plate is joined via a brazing material on a metallized layer having a rectangular frame shape in plan view formed on the surface of a package body made of ceramic, a part of the brazing material However, it is possible to provide a ceramic package in which the ceramic of the package body is less likely to be damaged by relieving stress due to thermal deformation of the lid plate.

1a, 1b ceramic package 2a, 2b package body 3 ..... front surface 4a to 4f ... sagging surface part 5 ........... back surface 6 ........... side surface 7 ........... cavity (opening)
11 ………… Metalized layer 12,13… Metal plating layer 16 ………… Braze material 18 ………… Metal lid plate M1, M2… Maximum position V, U ……… Intersection L …………… Reference line S ......... Position inside the hanging surface

Claims (3)

A package main body made of ceramic and including a front surface and a back surface having a rectangular outer shape in plan view, and four side surfaces located between the sides of the front surface and the back surface;
A ceramic package having an opening on the surface side of the package body and having a rectangular opening in plan view,
At the four corners of the rectangular surface, the back surface of the package body is more than the two reference surfaces, with the highest positions of the two adjacent side surfaces sandwiching the corners as reference surfaces. A hanging surface part that hangs down on the side,
The sagging surface portion is a reference line on a reference line along an inner / outer direction passing through an intersection of two adjacent side surfaces of the package body in plan view and an intersection of two adjacent inner surfaces of the opening. Is provided at a position of 10% or more from the outermost position in the entire length of the outermost part and the innermost part intersecting with
A ceramic package characterized by that. The rectangular surface of the package body is covered with a metallized layer and a metal plating layer, including the hanging surface portions located at the four corners of the surface,
The ceramic package according to claim 1. Above the metal plating layer, a metal lid plate is joined via a brazing material,
The ceramic package according to claim 2.

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