JP2015156597A - Piezoelectric device and mounting structure thereof - Google Patents

Piezoelectric device and mounting structure thereof Download PDF

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JP2015156597A
JP2015156597A JP2014031274A JP2014031274A JP2015156597A JP 2015156597 A JP2015156597 A JP 2015156597A JP 2014031274 A JP2014031274 A JP 2014031274A JP 2014031274 A JP2014031274 A JP 2014031274A JP 2015156597 A JP2015156597 A JP 2015156597A
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base material
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substrate
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JP6334192B2 (en
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貴博 植田
Takahiro Ueda
貴博 植田
信孝 阿部
Nobutaka Abe
信孝 阿部
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Kyocera Crystal Device Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric device with a mounting structure in which stress is hard to be concentrated on individual joints due to an environmental temperature change and high reliability is achieved by enhancing joint strength.
SOLUTION: A mounting structure of a piezoelectric device includes: a package body 2 in which a piezoelectric element is housed in the inside and which has a plurality of external terminals on the bottom surface; and a package connection body 6 which is interposed between the package body 2 and a mounting substrate 100 and electrically connects the plurality of external terminals to a plurality of terminal joining pad parts 100A, 100B provided on the mounting substrate 100. A base material of the package connection body 6 is formed from a material having the thermal expansion coefficient in which the thermal expansion coefficient difference between the base material of the mounting substrate 100 is smaller than that between the base material of the package body 2.
COPYRIGHT: (C)2015,JPO&INPIT

Description

本発明は、電子機器等に用いられる圧電デバイスと、その実装構造に関するものである。   The present invention relates to a piezoelectric device used in an electronic apparatus or the like and a mounting structure thereof.

表面実装型の圧電デバイスは、パッケージ内に圧電素子、例えば水晶素子を収容し、パッケージを実装基板に半田付け等で接合する。   A surface-mount type piezoelectric device accommodates a piezoelectric element, for example, a crystal element in a package, and joins the package to a mounting substrate by soldering or the like.

実装基板は、ガラスエポキシ樹脂等のベース基板材に金属製の配線を設けて形成される。配線には、圧電デバイスの複数の外部端子を半田により接合する複数の端子接合パッド部を含む。
圧電振動子の場合、外部端子は2個又は4個の場合が一般的であり、その配置と個数に合わせて、実装基板に複数の端子接合パッドが予め形成される。
The mounting substrate is formed by providing a metal wiring on a base substrate material such as glass epoxy resin. The wiring includes a plurality of terminal bonding pad portions for bonding a plurality of external terminals of the piezoelectric device with solder.
In the case of a piezoelectric vibrator, the number of external terminals is generally two or four, and a plurality of terminal bonding pads are formed in advance on the mounting substrate in accordance with the arrangement and the number.

下記特許文献1は、水晶発振器において、小型パッケージのデバイスを、大型(旧式)のデバイス仕様の端子接合パッド部を有する実装基板に実装するための技術を開示する。具体的に、下記特許文献1に開示されたデバイス実装構造では、上面に狭ピッチの端子接合パッドを形成し、底面に旧式仕様の比較的大きなピッチの端子接合パッドを形成した表面実装用印刷配線基板を、小型のパッケージと実装基板との間に介在させている。これにより、パッケージサイズの変更があっても従来の実装基板に搭載可能な水晶発振器を提供することを可能としている。   Patent Document 1 below discloses a technique for mounting a small package device on a mounting substrate having a terminal bonding pad portion of a large (old) device specification in a crystal oscillator. Specifically, in the device mounting structure disclosed in Patent Document 1 below, a surface-mount printed wiring in which terminal pitch pads with a narrow pitch are formed on the top surface and terminal pitch pads with a relatively large pitch of the old specifications are formed on the bottom surface The substrate is interposed between the small package and the mounting substrate. This makes it possible to provide a crystal oscillator that can be mounted on a conventional mounting board even if the package size is changed.

特開2011−211340号公報JP 2011-2111340 A

圧電デバイスは、上記特許文献1等に記載されたパッケージサイズの縮小による小型化(および薄型化)に加えて、特に車載用途等では高信頼性が要求される。   Piezoelectric devices are required to have high reliability, particularly for in-vehicle applications, in addition to miniaturization (and thinning) by reducing the package size described in Patent Document 1 and the like.

例えば車載用途では、大きな温度変化があり振動を常に受ける環境を想定して、そのような環境に耐えうる構造の圧電デバイスが求められる。このような大きな環境変化に耐えうる高信頼性のデバイスは、上記特許文献1に記載の水晶発振器のように、単に異なる端子ピッチに対応した実装構造を採用しても得られない。   For example, in an in-vehicle application, a piezoelectric device having a structure capable of withstanding such an environment is required assuming an environment where there is a large temperature change and constantly receives vibration. A highly reliable device that can withstand such a large environmental change cannot be obtained by simply adopting a mounting structure corresponding to different terminal pitches as in the crystal oscillator described in Patent Document 1.

本発明の目的は、高信頼性化のため、環境温度変化によって個々の接合に応力が集中しにくい圧電デバイスの実装構造と、接合強度が高い圧電デバイスを提供することにある。   An object of the present invention is to provide a piezoelectric device mounting structure in which stress is less likely to concentrate on individual joints due to environmental temperature changes and a piezoelectric device with high joint strength for high reliability.

本発明の一態様に係る圧電デバイスの実装構造は、圧電素子を内部に収容し、底面に複数の外部端子を有するパッケージ本体と、前記パッケージ本体と実装基板との間に介在し、前記複数の外部端子を、前記実装基板に設けられた複数の端子接合パッド部に電気的に接続するパッケージ接続体と、を有し、前記パッケージ接続体の基材は、前記実装基板の基材との熱膨張係数差が前記パッケージ本体の基材との熱膨張係数差より小さい熱膨張係数を有する材料から形成されている。   A mounting structure of a piezoelectric device according to an aspect of the present invention includes a package body that houses a piezoelectric element and has a plurality of external terminals on a bottom surface, and is interposed between the package body and the mounting substrate. A package connection body for electrically connecting external terminals to a plurality of terminal bonding pad portions provided on the mounting board, and the base material of the package connection body is a heat with the base material of the mounting board. The expansion coefficient difference is formed from a material having a smaller thermal expansion coefficient than that of the package body.

ここで、「パッケージ接続体とパッケージ本体は基材同士に熱膨張係数に差があり、パッケージ接続体と実装基板は基材同士に熱膨張係数に差がない」場合も、上述した実装構造における「前記パッケージ接続体の基材は、前記実装基板の基材との熱膨張係数差が前記パッケージ本体の基材との熱膨張係数差より小さい熱膨張係数を有する材料から形成されている」の一例に該当する。
よって、好適には、前記パッケージ接続体の基材と前記実装基板の基材は同じ樹脂材料から形成してもよい。
Here, even in the case where “the package connection body and the package body have a difference in thermal expansion coefficient between the base materials, and the package connection body and the mounting substrate have no difference in thermal expansion coefficient between the base materials” "The base material of the package connector is formed of a material having a thermal expansion coefficient difference smaller than that of the base material of the package main body and the thermal expansion coefficient difference from the base material of the package body." This is an example.
Therefore, preferably, the base material of the package connector and the base material of the mounting substrate may be formed of the same resin material.

好適に、前記パッケージ接続体は、基材と、前記基材の第1主面に配置され、前記パッケージ本体の前記複数の外部端子に接続される複数の第1電極と、前記基材の第2主面に配置され、前記実装基板の複数の導電パッド部と接続される複数の第2電極と、を有し、前記複数の第1電極の各々が、前記基材の側面に設けられた導電性の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている。
さらに好適に、前記基材の側面は、当該側面から基材中心側に窪む側面凹部を有し、前記側面凹部内の前記基材の側面に、前記第1電極および前記第2電極と一体の導電材料からなる前記電極接続部が設けられている。
Preferably, the package connection body includes a base material, a plurality of first electrodes arranged on a first main surface of the base material, connected to the plurality of external terminals of the package body, and a first of the base material. 2 and a plurality of second electrodes connected to a plurality of conductive pad portions of the mounting substrate, and each of the plurality of first electrodes is provided on a side surface of the substrate. It is electrically connected to any of the plurality of second electrodes by a conductive electrode connection portion.
More preferably, the side surface of the base material has a side surface recess that is recessed from the side surface toward the center of the base material, and the side surface of the base material in the side surface recess is integrated with the first electrode and the second electrode. The electrode connection portion made of a conductive material is provided.

好適に、前記パッケージ接続体の基材は、第1主面と第2主面を厚さ方向に貫通する貫通孔を少なくとも1つ有する。
さらに好適に、前記パッケージ接続体は、基材と、前記基材の第1主面に配置され、前記パッケージ本体の前記複数の外部端子に接続される複数の第1電極と、前記基材の第2主面に配置され、前記実装基板の複数の導電パッド部と接続される複数の第2電極と、を有し、前記複数の第1電極の各々が、前記基材の側面および前記貫通孔の内壁面に設けられた導電性の複数の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている。
さらに好適に、前記基材の側面は、当該側面から基材中心側に窪む側面凹部を有し、前記貫通孔は、一辺の内壁面が、前記第1および第2電極を挟んで前記側面凹部に対応して位置し、前記側面凹部内の前記基材の側面と前記内壁面のそれぞれに、前記第1電極および前記第2電極と一体の導電材料からなる前記電極接続部が設けられている。
Suitably, the base material of the said package connection body has at least 1 through-hole which penetrates a 1st main surface and a 2nd main surface in thickness direction.
More preferably, the package connection body includes a base material, a plurality of first electrodes disposed on the first main surface of the base material and connected to the plurality of external terminals of the package body, and the base material A plurality of second electrodes disposed on the second main surface and connected to the plurality of conductive pad portions of the mounting substrate, wherein each of the plurality of first electrodes includes a side surface of the base material and the through hole The plurality of conductive electrode connection portions provided on the inner wall surface of the hole are electrically connected to any one of the plurality of second electrodes.
More preferably, the side surface of the substrate has a side surface recess recessed from the side surface toward the center of the substrate, and the through hole has an inner wall surface on one side sandwiching the first and second electrodes. The electrode connection portion made of a conductive material integrated with the first electrode and the second electrode is provided on each of the side surface and the inner wall surface of the base material in the side surface recess, corresponding to the recess. Yes.

好適に、前記パッケージ本体の前記複数の外部端子と前記複数の第1電極は、導電接着剤で接続され、前記実装基板の複数の導電パッド部と前記複数の第2電極は、導電接合材で接合され、前記電極接続部の各々に実装基板の上面にかけて上下方向の厚みが薄くなるように傾斜をつけて導電接合材が設けられている。   Preferably, the plurality of external terminals of the package body and the plurality of first electrodes are connected by a conductive adhesive, and the plurality of conductive pad portions of the mounting substrate and the plurality of second electrodes are formed of a conductive bonding material. Each of the electrode connecting portions is provided with a conductive bonding material with an inclination so that the thickness in the vertical direction decreases toward the upper surface of the mounting substrate.

本発明の一態様に係る圧電デバイスは、圧電素子を内部に収容し、底面に複数の外部端子を有するセラミック製のパッケージ本体と、前記パッケージ本体と重ねられたときに側面の主部同士が揃う大きさの樹脂製の基材、当該基材の第1主面に配置され前記複数の外部端子と接続される複数の第1電極、および、前記基材の第2主面に配置され、前記複数の第1電極の何れかと前記基材の側面側で接続された複数の第2電極を備えるパッケージ接続体と、を有し、前記複数の第1電極の各々が、前記基材の側面に設けられた導電性の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている。   A piezoelectric device according to one embodiment of the present invention has a ceramic package body that houses a piezoelectric element and has a plurality of external terminals on a bottom surface, and main portions of side surfaces that are aligned with the package body. A resin base material having a size, a plurality of first electrodes arranged on the first main surface of the base material and connected to the plurality of external terminals, and a second main surface of the base material, A package connector including a plurality of second electrodes connected to any one of the plurality of first electrodes on the side surface side of the substrate, and each of the plurality of first electrodes is disposed on a side surface of the substrate. The conductive electrode connection portion provided is electrically connected to any of the plurality of second electrodes.

好適に、前記パッケージ接続体の基材は、前記第1主面と前記第2主面を厚さ方向に貫通する貫通孔を少なくとも1つ有する。
さらに好適に、前記複数の第1電極の各々が、前記基材の側面および前記貫通孔の内壁面に設けられた導電性の複数の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている。
さらに好適に、前記基材の側面は、当該側面から基材中心側に窪む側面凹部を有し、
前記貫通孔は、一辺の内壁面が、前記第1および第2電極を挟んで前記側面凹部に対応して位置し、
前記側面凹部内の前記基材の側面と前記内壁面のそれぞれに、前記第1電極および前記第2電極と一体の導電材料からなる前記電極接続部が設けられている。
Suitably, the base material of the said package connection body has at least one through-hole which penetrates the said 1st main surface and the said 2nd main surface in thickness direction.
More preferably, each of the plurality of first electrodes is electrically connected to any one of the plurality of second electrodes by a plurality of conductive electrode connection portions provided on a side surface of the base material and an inner wall surface of the through hole. Connected.
More preferably, the side surface of the base material has a side surface recess recessed from the side surface toward the base material center side,
In the through hole, an inner wall surface of one side is located corresponding to the side surface recess with the first and second electrodes interposed therebetween,
The electrode connection portion made of a conductive material integral with the first electrode and the second electrode is provided on each of the side surface and the inner wall surface of the base material in the side recess.

上記の構成によれば、高信頼性化のため、環境温度変化によって個々の接合に応力が集中しにくい圧電デバイスの実装構造と、接合強度が高い圧電デバイスが提供される。   According to the above configuration, a piezoelectric device mounting structure in which stress is less likely to be concentrated in individual joints due to environmental temperature changes and a piezoelectric device having high joint strength are provided for high reliability.

第1の実施形態に係る圧電デバイスの実装構造の概略断面図。1 is a schematic cross-sectional view of a piezoelectric device mounting structure according to a first embodiment. パッケージ蓋部を外した内部の概略構成を例示する圧電デバイスの上面図(A)と裏面図(B)。The top view (A) and back view (B) of the piezoelectric device which illustrate the outline internal structure which removed the package cover part. パッケージ接続体の上面図(A)と短辺側の側面図(B)。The top view (A) and side view (B) of a short side of a package connection body. パッケージ本体を貼り合わせたパッケージ接続体を実装基板に実装するときの、実装前(A)と実装後(B)における実装構造の概略断面図。The schematic sectional drawing of the mounting structure before mounting (A) and after mounting (B) when mounting the package connection body which bonded the package main body on the mounting substrate. 第2の実施形態に係るパッケージ接続体の上面図(A)と長辺側の側面図(B)。The top view (A) and side view (B) of a long side of the package connection body which concern on 2nd Embodiment. 第3の実施形態に係るパッケージ接続体の上面図(A)と短辺側の側面図(B)。The top view (A) and side view (B) of a short side of the package connection body which concern on 3rd Embodiment. パッケージ本体を貼り合わせたパッケージ接続体を実装基板に実装した後の実装構造の概略断面図。The schematic sectional drawing of the mounting structure after mounting the package connection body which bonded the package main body on the mounting board. 第4の実施形態に係るパッケージ接続体の上面図(A)と長辺側の側面図(B)。The top view (A) and long side side view (B) of the package connection body which concern on 4th Embodiment.

本発明の実施形態を、圧電デバイスが水晶振動子の場合を例として、図面を参照して各種実施形態および変形例を説明する。
また、第2の実施形態以降において、既に説明した構成と同一又は類似する構成については、互いに同一の符号を付して説明することがある。
Various embodiments and modifications of the present invention will be described with reference to the drawings, taking as an example the case where the piezoelectric device is a crystal resonator.
In the second and subsequent embodiments, the same or similar configurations as those already described may be described with the same reference numerals.

以下、次の順で説明を行う。
1.第1の実施形態:2端子の圧電デバイスに対応した電極配置のパッケージ接続体(貫通孔なし)を介在させた実装構造の形態である。
2.第2の実施形態:4端子の圧電デバイスに対応した電極配置のパッケージ接続体(貫通孔なし)を介在させた実装構造の形態である。
3.第3の実施形態:2端子の圧電デバイスに対応した電極配置のパッケージ接続体(貫通孔あり)を介在させた実装構造の形態である。
4.第4の実施形態:4端子の圧電デバイスに対応した電極配置のパッケージ接続体(貫通孔あり)を介在させた実装構造の形態である。
5.変形例
6.別発明
Hereinafter, description will be given in the following order.
1. 1st Embodiment: It is the form of the mounting structure which interposed the package connection body (without a through-hole) of the electrode arrangement corresponding to the piezoelectric device of 2 terminals.
2. Second Embodiment: This is a form of a mounting structure in which a package connection body (without a through hole) having an electrode arrangement corresponding to a four-terminal piezoelectric device is interposed.
3. Third Embodiment: A mounting structure in which a package connection body (with a through hole) having an electrode arrangement corresponding to a two-terminal piezoelectric device is interposed.
4). Fourth Embodiment: A mounting structure in which a package connection body (with a through hole) having an electrode arrangement corresponding to a four-terminal piezoelectric device is interposed.
5. Modification 6 Another invention

<1.第1の実施形態>
図1は、本発明の第1の実施形態に係る圧電デバイスの実装構造の概略断面図である。また、図2(A)と図2(B)は、圧電デバイスの上面図と裏面図である。なお、図2(A)の上面図では、最上部のパッケージ蓋部5を外した内部の概略構成を例示している。
最初に、図2(A)及び図2(B)を用いて、圧電デバイスの構造と簡単な製法を説明する。
<1. First Embodiment>
FIG. 1 is a schematic cross-sectional view of a piezoelectric device mounting structure according to a first embodiment of the present invention. 2A and 2B are a top view and a back view of the piezoelectric device. Note that the top view of FIG. 2A illustrates an internal schematic configuration with the uppermost package lid 5 removed.
First, the structure of a piezoelectric device and a simple manufacturing method will be described with reference to FIGS. 2 (A) and 2 (B).

[圧電デバイスの構造と製法]
図2に示す圧電デバイス1は、主な構成として、パッケージ本体2と、パッケージ本体2の凹部2Aの内部に実装された水晶素子4とを有している。なお、後述する第2,第4の実施形態のように4端子デバイスの場合、水晶素子4の環境温度を検知する感温素子の一例としてのサーミスタ素子等がパッケージ本体2内に設けられることもあるが、本実施形態では2端子デバイスであるため、感温素子は有さない。
[Piezoelectric device structure and manufacturing method]
The piezoelectric device 1 shown in FIG. 2 has a package body 2 and a crystal element 4 mounted inside a recess 2A of the package body 2 as main components. In the case of a four-terminal device as in the second and fourth embodiments described later, a thermistor element or the like as an example of a temperature sensitive element that detects the environmental temperature of the crystal element 4 may be provided in the package body 2. However, in this embodiment, since it is a two-terminal device, it does not have a temperature sensitive element.

パッケージ本体2は、主に、例えばアルミナセラミックス、ガラス−セラミックス等のセラミック材料からなる絶縁層を1層または複数層積層し、焼成して形成することができる。   The package body 2 can be formed mainly by laminating one or more insulating layers made of a ceramic material such as alumina ceramics and glass-ceramics, and firing them.

パッケージ本体2は、上方側がパッケージ蓋体5で封止されたときに内部空間を形成するための凹部2Aを有する。凹部2Aを形成するための好適な構成として、パッケージ本体2が基板部と枠体部とを有し、基板部の上面に枠体部を貼り付けたときに、基板部の上面に枠体部で囲まれた凹部が形成される構成を採用できる。この構成では、基板部及び枠体部を、上記したセラミック材料から形成してもよいし、基板部を上記したセラミック材料から形成し、枠体部を例えばFe−Ni−Co合金などの金属によって環状をなすように形成してもよい。   The package body 2 has a recess 2 </ b> A for forming an internal space when the upper side is sealed with the package lid 5. As a preferred configuration for forming the recess 2A, the package body 2 has a substrate portion and a frame portion, and the frame portion is attached to the upper surface of the substrate portion when the frame portion is attached to the upper surface of the substrate portion. It is possible to adopt a configuration in which a recess surrounded by is formed. In this configuration, the substrate portion and the frame portion may be formed from the above-described ceramic material, or the substrate portion is formed from the above-described ceramic material, and the frame portion is made of a metal such as an Fe—Ni—Co alloy. You may form so that it may form a ring.

パッケージ蓋体5は、矩形平板状のセラミック材料から形成してもよいし、矩形状平板状のFe−Ni合金やFe−Ni−Co合金から形成したものでもよい。パッケージ蓋体5は、真空に近い状態または窒素ガスなどが充填された凹部2Aを気密的に封止するための封止部として機能する。   The package lid 5 may be formed from a rectangular flat plate-shaped ceramic material, or may be formed from a rectangular flat plate-shaped Fe—Ni alloy or Fe—Ni—Co alloy. The package lid 5 functions as a sealing portion for hermetically sealing the recess 2A filled with nitrogen gas or the like in a state close to a vacuum.

図2(A)に示すように、パッケージ本体2の凹部2Aの底面には、水晶素子4を接合するために金属材料からなる接続パッド22A,22Bが配置されている。
一方、図2(B)に示すように、パッケージ本体2の裏面には、例えば水晶素子4の各端子に電気的に接続され、金属材料からなる2つの外部端子23A,23Bが配置されている。
接続パッド22Aと外部端子23Aの接続は、特に図示しないが、凹部2Aの内底面に形成された配線(またはセラミック材料内部に埋め込まれた配線)と、その下のビアにより達成される。また、接続パッド22Bと外部端子23Bの接続はビアにより達成される。
As shown in FIG. 2A, connection pads 22A and 22B made of a metal material are disposed on the bottom surface of the recess 2A of the package body 2 in order to join the crystal element 4.
On the other hand, as shown in FIG. 2B, on the back surface of the package body 2, for example, two external terminals 23A and 23B made of a metal material, which are electrically connected to the respective terminals of the crystal element 4, are arranged. .
The connection between the connection pad 22A and the external terminal 23A is achieved by a wiring (or a wiring embedded in the ceramic material) formed on the inner bottom surface of the recess 2A and a via thereunder, although not particularly shown. Further, the connection between the connection pad 22B and the external terminal 23B is achieved by a via.

水晶素子4は、矩形板状の水晶素板41と、当該水晶素板41の両面に形成された1対の電極を有する。各電極は、図2(A)に示すように、水晶素板41の主面に広く配置された矩形状の励振電極42と、水晶素板41の一方の角部を覆って水晶素板41の両面に配置された接続電極43Aと、接続電極43Aを励振電極42に接続する引出電極44と、を有する。これらの電極(42,43A,44)は、一体の導電層(例えば金属膜)から形成したものである。図2(A)では、水晶素板41の短辺のもう片側の角部に他の電極の接続電極43Bが図示してある。この他の電極は、接続電極43Bと、不図示の水晶素板41の他の面に配置された励振電極および引出電極とを一体の導電層から形成したものである。   The crystal element 4 includes a rectangular plate-shaped crystal element plate 41 and a pair of electrodes formed on both surfaces of the crystal element plate 41. As shown in FIG. 2A, each electrode covers a rectangular excitation electrode 42 widely disposed on the main surface of the crystal base plate 41 and one corner of the crystal base plate 41 so as to cover the crystal base plate 41. The connection electrode 43A is disposed on both surfaces, and the extraction electrode 44 connects the connection electrode 43A to the excitation electrode 42. These electrodes (42, 43A, 44) are formed from an integral conductive layer (for example, a metal film). In FIG. 2A, a connection electrode 43B of another electrode is shown at the corner on the other side of the short side of the quartz base plate 41. In this other electrode, the connection electrode 43B and the excitation electrode and the extraction electrode arranged on the other surface of the crystal base plate 41 (not shown) are formed from an integral conductive layer.

水晶素子4とパッケージ本体2の接合に関し、接続電極43Aと接続パッド22A、接続電極43Bと接続パッド22Bの接合時に導電接着剤DSが用いられている。
導電接着剤DSとして、例えば、シリコーン樹脂等のバインダーの中に導電フィラーとして導電性粉末が含有されているものであり、導電性粉末としては、アルミニウム(Al)、モリブデン(Mo)、タングステン(W)、白金(Pt)、パラジウム(Pd)、銀(Ag)、チタン(Ti)、ニッケル(Ni)、ニッケル鉄(NiFe)、のうちのいずれかまたはこれらの組み合わせを含むものを、好適に用いることができる。
Regarding the bonding of the crystal element 4 and the package body 2, the conductive adhesive DS is used when the connection electrode 43A and the connection pad 22A and the connection electrode 43B and the connection pad 22B are bonded.
As the conductive adhesive DS, for example, a conductive powder is contained as a conductive filler in a binder such as a silicone resin. As the conductive powder, aluminum (Al), molybdenum (Mo), tungsten (W ), Platinum (Pt), palladium (Pd), silver (Ag), titanium (Ti), nickel (Ni), nickel iron (NiFe), or any combination thereof is suitably used. be able to.

圧電デバイス1の製造では、セラミック材料からなるパッケージ本体2と、水晶素子4と、パッケージ蓋体5をそれぞれ形成する。
水晶素子4の形成では、まず、人工水晶体から所定のカットアングルで切断し外形加工を施すことによって水晶素板41を得る。その後、例えば、水晶素板41の両主面にスパッタリング等によって金属膜を被着させて加工する、あるいは印刷等により、励振電極42、接続電極43A(43B)、引出電極44を有する1対の電極を一体として形成する。
In the manufacture of the piezoelectric device 1, a package body 2 made of a ceramic material, a crystal element 4, and a package lid 5 are formed.
In the formation of the crystal element 4, first, a quartz base plate 41 is obtained by cutting from an artificial crystalline lens at a predetermined cut angle and performing external processing. After that, for example, a metal film is deposited on both main surfaces of the quartz base plate 41 by sputtering or the like, or by printing or the like, a pair of excitation electrodes 42, connection electrodes 43A (43B), and extraction electrodes 44 are provided. The electrodes are integrally formed.

水晶素子4をパッケージ本体2の凹部2Aに形成された接続パッド22A,22Bに対し、片持構造となるように導電接着剤DSで接合する。
パッケージ蓋体5を凹部2Aが塞がれるようにパッケージ本体2に被せ、パッケージ蓋体5とパッケージ本体2を加熱等で密封されるように強固に接合する。パッケージ蓋体5は、上記合金製の場合に、例えば、所定雰囲気中でパッケージ本体2上にシーム溶接等で接合される。
The crystal element 4 is bonded to the connection pads 22A and 22B formed in the recess 2A of the package body 2 with a conductive adhesive DS so as to have a cantilever structure.
The package lid 5 is placed on the package body 2 so that the recess 2A is closed, and the package lid 5 and the package body 2 are firmly joined so as to be sealed by heating or the like. When the package lid 5 is made of the above alloy, for example, it is joined to the package body 2 by seam welding or the like in a predetermined atmosphere.

[圧電デバイスの基板実装]
つぎに、圧電デバイスの実装構造と実装法を、図1、図3及び図4を用いて説明する。
図1に示す実装構造では、上述した構成の圧電デバイス1を、プリント配線基板等と称される実装基板100に実装する際に、両者間にパッケージ接続体6を介在させることに特徴がある。
なお、図1では、パッケージ本体2の外部端子とパッケージ接続体6の電極は図示を省略している。
[Board mounting of piezoelectric devices]
Next, the mounting structure and mounting method of the piezoelectric device will be described with reference to FIGS.
The mounting structure shown in FIG. 1 is characterized in that when the piezoelectric device 1 having the above-described configuration is mounted on a mounting board 100 called a printed wiring board or the like, a package connection body 6 is interposed therebetween.
In FIG. 1, the external terminals of the package body 2 and the electrodes of the package connector 6 are not shown.

実装基板100は、コアと称される基材が、例えばガラスエポキシ樹脂製であり、基材の片側主面または両側主面に金属製の配線を形成したものである。金属製の配線は基材の主面のほかに、基材内部に形成されることもある。
図1の断面図では、実装基板100の上面の配線のうち、パッケージ接続体6を介して圧電デバイス1の外部端子と電気的に接続される2つの端子接合パッド部110A,100Bを示す。
In the mounting substrate 100, a base material called a core is made of, for example, glass epoxy resin, and a metal wiring is formed on one or both main surfaces of the base material. In addition to the main surface of the base material, the metal wiring may be formed inside the base material.
In the cross-sectional view of FIG. 1, two terminal bonding pad portions 110 </ b> A and 100 </ b> B that are electrically connected to the external terminals of the piezoelectric device 1 through the package connection body 6 among the wirings on the upper surface of the mounting substrate 100 are shown.

図3(A)と図3(B)は、パッケージ接続体6の裏面図と短辺側の側面図である。ここで裏面とは、実装基板100と接合されたときに実装基板100と向き合う第2主面S2を指す。一方、パッケージ本体2と向き合う第1主面S1(上面)は、裏面側と同様な構成となっているため、図示を省略する。
なお、この裏面(第2主面S2)と上面(第1主面S1)の定義は、後述する第2実施形態以降でも同様である。
FIGS. 3A and 3B are a back view and a side view of the short side of the package connection body 6. Here, the back surface refers to the second main surface S <b> 2 that faces the mounting substrate 100 when bonded to the mounting substrate 100. On the other hand, the first main surface S1 (upper surface) facing the package body 2 has the same configuration as that of the back surface side, and is not shown.
In addition, the definition of this back surface (2nd main surface S2) and upper surface (1st main surface S1) is the same also after 2nd Embodiment mentioned later.

パッケージ接続体6は、矩形平板状の基材61を有する。
パッケージ接続体6の基材61は、当該基材61と実装基板100の基材との熱膨張係数の差が、当該基材61とパッケージ本体2の基材との熱膨張係数の差より小さい熱膨張係数を有する材料から形成されている。
例えば、パッケージ本体2の基材がセラミック製で、実装基板100の基材がガラスエポキシ樹脂製の場合、パッケージ接続体6の基材61をガラスエポキシ樹脂製とすることが可能である。このように、パッケージ接続体62の基材と実装基板100の基材は同じ樹脂材料からなるようにすることにより、熱膨張係数の差をより小さくすることができる。なお、上記熱膨張係数の差の要件を満たすかぎり、パッケージ接続体6の基材61を他の樹脂製等から形成することもできる。
The package connector 6 has a rectangular flat base 61.
The base material 61 of the package connector 6 is such that the difference in thermal expansion coefficient between the base material 61 and the base material of the mounting substrate 100 is smaller than the difference in thermal expansion coefficient between the base material 61 and the base material of the package body 2. It is formed from a material having a thermal expansion coefficient.
For example, when the base material of the package body 2 is made of ceramic and the base material of the mounting substrate 100 is made of glass epoxy resin, the base material 61 of the package connector 6 can be made of glass epoxy resin. Thus, the difference of thermal expansion coefficient can be made smaller by making the base material of the package connector 62 and the base material of the mounting substrate 100 be made of the same resin material. In addition, as long as the requirements for the difference in thermal expansion coefficient are satisfied, the base material 61 of the package connection body 6 can also be formed from another resin or the like.

パッケージ接続体6の基材61は、その第1主面S1と第2主面S2のそれぞれに2つの電極を有する。
より詳細には、図3(A)に示す第2主面S2には、第2電極63A,63Bが基材長手方向に互いに離れて配置されている。同様に、第1主面S1には、第1電極64A,64Bが基材長手方向に互いに離れて配置されている。また、第1電極64Aと第2電極63Aは基材61を挟んで対向し、第1電極64Bと第2電極63Bは基材61を挟んで対向している。以下、この基材を挟んで対向する電極を「1対の電極」または「電極対」と表記する。
The substrate 61 of the package connector 6 has two electrodes on each of the first main surface S1 and the second main surface S2.
More specifically, the second electrodes 63A and 63B are disposed apart from each other in the longitudinal direction of the base material on the second main surface S2 shown in FIG. Similarly, on the first main surface S1, the first electrodes 64A and 64B are arranged apart from each other in the longitudinal direction of the base material. The first electrode 64A and the second electrode 63A are opposed to each other with the base material 61 interposed therebetween, and the first electrode 64B and the second electrode 63B are opposed to each other with the base material 61 interposed therebetween. Hereinafter, the electrodes facing each other with the base material interposed therebetween are referred to as “one pair of electrodes” or “electrode pairs”.

パッケージ接続体6の基材61は、その側面、例えば短側面S3のそれぞれに、当該短側面S3から基材中心側に窪む側面凹部62を備える。各側面凹部62は、その基材内側のコーナ部が緩やかな曲面となるように形成されている。
基材61を挟んで対向する1対の電極間を接続する電極接続部65が、各側面凹部62の内部の基材側面に設けられている。このようにすることにより、第1電極64A,64Bと第2電極63A,63Bとを導通させると共に、実装基板100に実装した際に、導電接合材SLの接合面積を大きくし、接合強度を向上させることができる。また、この電極接続部65と1対の電極は、望ましくは一体の金属膜から形成されている。このため、第1電極64Aと第2電極63Aは、一方の短側面S3に設けられた電極接続部65により確実に接続され、導通不良を低減することができる。同様に、第1電極64Bと第2電極63Bは、他の短側面S3に設けられた別の電極接続部65により確実に接続され、導通不良を低減することができる。
The substrate 61 of the package connector 6 includes a side recess 62 that is recessed from the short side S3 toward the center of the substrate on each of the side surfaces, for example, the short side S3. Each side recess 62 is formed such that the corner portion inside the base material has a gently curved surface.
An electrode connection portion 65 that connects a pair of electrodes facing each other with the base material 61 interposed therebetween is provided on the side surface of the base material inside each side surface recess 62. By doing so, the first electrodes 64A and 64B and the second electrodes 63A and 63B are electrically connected, and when mounted on the mounting substrate 100, the bonding area of the conductive bonding material SL is increased and the bonding strength is improved. Can be made. Further, the electrode connection portion 65 and the pair of electrodes are preferably formed of an integral metal film. For this reason, the first electrode 64A and the second electrode 63A are reliably connected by the electrode connecting portion 65 provided on the one short side surface S3, and the conduction failure can be reduced. Similarly, the 1st electrode 64B and the 2nd electrode 63B are reliably connected by another electrode connection part 65 provided in other short side S3, and can reduce conduction failure.

このような構成のパッケージ接続体6は、2つの第1電極64A,64Bが、図2(B)に示す外部端子23A,23Bに、例えば、耐熱性を有する導電接着剤DSにより1対1で接合されるように、圧電デバイス1と予め貼り合わされる(図1参照)。
圧電デバイス1を貼り合わせたパッケージ接続体6は、その2つの第2電極63A,63Bが端子接合パッド部110A,100Bと導電接合材SLを介して、実装基板100に実装される。
In the package connection body 6 having such a configuration, the two first electrodes 64A and 64B are connected to the external terminals 23A and 23B shown in FIG. 2B on a one-to-one basis by, for example, a conductive adhesive DS having heat resistance. The piezoelectric device 1 is bonded in advance so as to be bonded (see FIG. 1).
The package connection body 6 to which the piezoelectric device 1 is bonded is mounted on the mounting substrate 100 with the two second electrodes 63A and 63B via the terminal bonding pad portions 110A and 100B and the conductive bonding material SL.

図4(A)および(B)に実装前後における実装構造の概略断面図を示す。
実装前を示す図4(A)では、実装基板100の端子接合パッド部110A,100B上に導電接合材SLがディスペンサ等で供給される。このとき導電接合材SLは、中央部ほど導電接合材SLが多い山なりの形状となっている。
実装時に導電接合材SLが押しつぶされ、周囲に広がる。このとき本実施形態では、基材61に側面凹部62が形成されているため、導電接合材SLが基材61の外側に広がるより先に導電接合材SLで側面凹部62が充填される(図4(B))。あるいは、完全に充填されなくとも、側面凹部62に形成された導電性の電極接続部65(不図示)に沿って導電接合材SLが這い上がる。導電接合材SLは、電極接続部65の各々から実装基板110の上面にかけて導電接合材SLの上下方向の厚みが薄くなるように傾斜が設けられている。また、導電性接合材SLが上下方向の厚みが薄くなるように設けられた傾斜のことをフィレットとする。このようにして側面凹部62内にフィレットが形成され、そのため、導電接合材SLの剥がれに対する強度が向上して強固な接合が達成される。導電接合材SLは、例えば、銀ペースト又は鉛フリー半田により構成されている。また、導電接合材SLには、塗布し易い粘度に調整するための添加した溶剤が含有されている。鉛フリー半田の成分比率は、錫が95〜97.5%、銀が2〜4%、銅が0.5〜1.0%のものが使用されている。
4A and 4B are schematic cross-sectional views of the mounting structure before and after mounting.
In FIG. 4A showing the state before mounting, the conductive bonding material SL is supplied onto the terminal bonding pad portions 110A and 100B of the mounting substrate 100 by a dispenser or the like. At this time, the conductive bonding material SL has a mountain shape with more conductive bonding material SL at the center.
At the time of mounting, the conductive bonding material SL is crushed and spreads around. At this time, in this embodiment, since the side surface recess 62 is formed in the base material 61, the side surface recess 62 is filled with the conductive bonding material SL before the conductive bonding material SL spreads outside the base material 61 (FIG. 4 (B)). Alternatively, even if not completely filled, the conductive bonding material SL crawls up along the conductive electrode connection portion 65 (not shown) formed in the side recess 62. The conductive bonding material SL is inclined so that the thickness in the vertical direction of the conductive bonding material SL decreases from each of the electrode connection portions 65 to the upper surface of the mounting substrate 110. In addition, the slope in which the conductive bonding material SL is provided so that the thickness in the vertical direction is thin is defined as a fillet. In this way, a fillet is formed in the side recess 62, so that the strength against the peeling of the conductive bonding material SL is improved and a strong bonding is achieved. The conductive bonding material SL is made of, for example, silver paste or lead-free solder. In addition, the conductive bonding material SL contains an added solvent for adjusting the viscosity to be easily applied. The component ratio of the lead-free solder is 95 to 97.5% for tin, 2 to 4% for silver, and 0.5 to 1.0% for copper.

本実施形態では、上記導電接合材SLの剥がれに対する強度の向上に加えて、前述したように基材同士の熱膨張係数差を規定したことによる、以下のような望ましい効果が期待できる。   In the present embodiment, in addition to the improvement in the strength against peeling of the conductive bonding material SL, the following desirable effects can be expected by defining the difference in thermal expansion coefficient between the substrates as described above.

一般に、パッケージ接続体6がない場合にパッケージ本体2と実装基板100との大きな熱膨張係数差に起因した応力が、導電接合材SLにかかり導電接合材SLにクラック等が発生することがある。とくにデバイスの小型化により導電接合材SLの接合面積が小さくなると、小さなクラックでも接合不良を起こす可能性が高まる。   In general, when the package connection body 6 is not provided, a stress due to a large difference in thermal expansion coefficient between the package body 2 and the mounting substrate 100 may be applied to the conductive bonding material SL, and a crack or the like may occur in the conductive bonding material SL. In particular, when the bonding area of the conductive bonding material SL is reduced due to the miniaturization of the device, the possibility of causing a bonding failure even with a small crack increases.

本実施形態において、パッケージ接続体6の基材61は、当該基材61と実装基板100の基材との熱膨張係数の差が、当該基材61とパッケージ本体2の基材との熱膨張係数の差より小さい熱膨張係数を有する材料から形成されている。
このため、加熱で実装基板100が変形した場合でも、その変形による応力がパッケージ接続体6の存在により緩和され、その結果として、導電接合材SLにかかる応力も緩和される。このため、導電接合材クラックが発生し難くなる。
In the present embodiment, the base material 61 of the package connector 6 has a difference in thermal expansion coefficient between the base material 61 and the base material of the mounting substrate 100, so that the thermal expansion between the base material 61 and the base material of the package body 2 is the same. It is made of a material having a thermal expansion coefficient smaller than the difference in coefficient.
For this reason, even when the mounting substrate 100 is deformed by heating, the stress due to the deformation is relieved by the presence of the package connection body 6, and as a result, the stress applied to the conductive bonding material SL is also relieved. For this reason, it becomes difficult to generate | occur | produce a conductive joining material crack.

なお、実装基板100の変形にともなって、熱膨張係数が同じまたは近いパッケージ接続体6も多少変形する。このため、パッケージ接続体6をパッケージ本体2に接合している導電接着剤DSにもある程度の応力がかかる。しかしながら、導電接着剤DSは、耐熱性があり、しかもシリコーン樹脂等の樹脂をベース材料とするため応力印加による破断に強い(柔軟性が高い)。また、実装基板100に比べて面積が小さく、導電接合材SLを介して接合されているパッケージ接続体6に対し、実装基板100からの応力がそのままかかるわけではない。したがって、実装基板100からの応力が、導電接合材SL側と耐熱性の導電接着剤DS側に分散され、その結果として、導電接合材クラックの発生が抑制または防止される。   As the mounting substrate 100 is deformed, the package connector 6 having the same or close thermal expansion coefficient is also slightly deformed. For this reason, a certain amount of stress is also applied to the conductive adhesive DS that joins the package connector 6 to the package body 2. However, the conductive adhesive DS has heat resistance and is resistant to breakage due to stress application (high flexibility) because it uses a resin such as a silicone resin as a base material. Moreover, the area from the mounting substrate 100 is small, and the stress from the mounting substrate 100 is not applied as it is to the package connection body 6 bonded through the conductive bonding material SL. Therefore, the stress from the mounting substrate 100 is dispersed on the conductive bonding material SL side and the heat-resistant conductive adhesive DS side, and as a result, generation of conductive bonding material cracks is suppressed or prevented.

<2.第2の実施形態>
図5(A)および(B)は、第2の実施形態に係るパッケージ接続体6Aの裏面図と長辺側の側面図である。以下の第2実施形態以降の説明では、従前の実施形態と同様な構成は、同一符号を付すことで、その説明を省略または簡略化する。
<2. Second Embodiment>
FIGS. 5A and 5B are a back view and a side view of the long side of the package connection body 6A according to the second embodiment. In the following description of the second and subsequent embodiments, the same components as those in the previous embodiments are denoted by the same reference numerals, and the description thereof is omitted or simplified.

パッケージ接続体6Aは、第1の実施形態と同様な材料製の矩形平板状の基材61Aを有する。
パッケージ接続体6Aの基材61Aは、当該基材61Aと実装基板100の基材との熱膨張係数の差が、当該基材61Aとパッケージ本体2の基材との熱膨張係数の差より小さい熱膨張係数を有する材料から形成されている。
The package connector 6A includes a rectangular flat plate-shaped substrate 61A made of the same material as that of the first embodiment.
In the base material 61A of the package connector 6A, the difference in thermal expansion coefficient between the base material 61A and the base material of the mounting substrate 100 is smaller than the difference in thermal expansion coefficient between the base material 61A and the base material of the package body 2. It is formed from a material having a thermal expansion coefficient.

第1の実施形態が2端子デバイスに対応していたのに対し、第2の実施形態のパッケージ接続体6Aは、4端子デバイスに対応した電極配置を有する。
第1の実施形態で説明し、水晶素子4の2つの外部電極に接続されている2つの電極対(63A,64A)と(63B,64B)が、第2の実施形態では両主面の一方の対角側に配置されている。これに加え、第2の実施形態では、もう2つの電極対(第2電極63C,第1電極64C)と(第2電極63D,第1電極64D)が、両主面の他方の対角側に配置されている。ここで、第1電極64C,64Dは第1主面S1に形成され、第2電極63C,63Dは第2主面S2に形成されている。
ここで2つの電極対(63C,64C)と(63D,64D)は、グランドに接続させてもよいし、感温素子用としてもよい。
While the first embodiment corresponds to a two-terminal device, the package connector 6A of the second embodiment has an electrode arrangement corresponding to a four-terminal device.
The two electrode pairs (63A, 64A) and (63B, 64B) described in the first embodiment and connected to the two external electrodes of the crystal element 4 are one of both main surfaces in the second embodiment. It is arranged on the diagonal side. In addition, in the second embodiment, another electrode pair (second electrode 63C, first electrode 64C) and (second electrode 63D, first electrode 64D) are provided on the other diagonal side of both main surfaces. Is arranged. Here, the first electrodes 64C and 64D are formed on the first main surface S1, and the second electrodes 63C and 63D are formed on the second main surface S2.
Here, the two electrode pairs (63C, 64C) and (63D, 64D) may be connected to the ground or may be used for the temperature sensitive element.

パッケージ接続体6Aの基材61Aは、その側面、例えば長側面S4のそれぞれに2つずつ、当該長側面S4から基材中心側に窪む側面凹部62を備える。各側面凹部62には、第1の実施形態と同様、その内部の基材側面に、基材61を挟んで対向する1対の電極間を接続する電極接続部65が設けられている。
2つの電極対(63A,64A)と(63B,64B)と同様に、第1電極64Cと第2電極63Cは、一方の長側面S4に設けられた電極接続部65により確実に接続され、導通不良を低減することができる。同様に、第1電極64Dと第2電極63Dは、他の長側面S4に設けられた別の電極接続部65により確実に接続され、導通不良を低減することができる。
The base 61A of the package connector 6A includes two side recesses 62 that are recessed from the long side S4 toward the center of the base, two on each side, for example, the long side S4. As in the first embodiment, each side recess 62 is provided with an electrode connection portion 65 that connects a pair of electrodes facing each other with the base material 61 interposed therebetween, on the side surface of the base material inside.
Similar to the two electrode pairs (63A, 64A) and (63B, 64B), the first electrode 64C and the second electrode 63C are securely connected by the electrode connecting portion 65 provided on one long side surface S4, and are conductive. Defects can be reduced. Similarly, the first electrode 64D and the second electrode 63D are reliably connected by another electrode connecting portion 65 provided on the other long side surface S4, and the conduction failure can be reduced.

特に図示しないが、パッケージ本体の裏面側の外部端子は、上記パッケージ接続体6Aの4つの第1電極64A〜64Dの大きさと配置に適合した大きさと配置で構成されている。
また、実装基板の端子接続パッド部も、上記パッケージ接続体6Aの4つの第2電極63A〜63Dの大きさと配置に適合した大きさと配置で構成されている。
第2の実施形態における、その他の実装構造は、第1の実施形態の実装構造と同じである。また、実装法も基本的に同じである。
Although not shown in particular, the external terminals on the back surface side of the package body are configured with a size and an arrangement suitable for the size and arrangement of the four first electrodes 64A to 64D of the package connector 6A.
In addition, the terminal connection pad portion of the mounting substrate is also configured with a size and arrangement suitable for the size and arrangement of the four second electrodes 63A to 63D of the package connection body 6A.
The other mounting structure in the second embodiment is the same as the mounting structure in the first embodiment. The mounting method is basically the same.

第2の実施形態においても、第1の実施形態と同様に、実装時に導電接合材SLが押しつぶされ、周囲に広がる。このとき本実施形態では、基材61Aの側面凹部62が形成されているため、導電接合材SLが基材61Aの外側に広がるより先に導電接合材SLで側面凹部62が充填される(図4(B)参照)。あるいは、完全に充填されなくとも、側面凹部62に形成された導電性の電極接続部65(図4(B)では不図示)に沿って這い上がる。このようにして側面凹部62内に形成されたフィレットにより、導電接合材SLの剥がれに対する強度が向上して強固な接合が達成される。   Also in the second embodiment, as in the first embodiment, the conductive bonding material SL is crushed during the mounting and spreads around. At this time, in this embodiment, since the side surface recess 62 of the base material 61A is formed, the side surface recess 62 is filled with the conductive bonding material SL before the conductive bonding material SL spreads outside the base material 61A (FIG. 4 (B)). Or even if it is not completely filled, it crawls up along the conductive electrode connecting portion 65 (not shown in FIG. 4B) formed in the side recess 62. The fillet formed in the side recess 62 in this way improves the strength against peeling of the conductive bonding material SL and achieves strong bonding.

この導電接合材SLの剥がれに対する強度向上に加えて、第1の実施形態で基材同士の熱膨張係数差を規定したことによる、第1の実施形態と同様な望ましい効果が期待できる。   In addition to improving the strength against peeling of the conductive bonding material SL, a desirable effect similar to that of the first embodiment can be expected by defining the difference in thermal expansion coefficient between the substrates in the first embodiment.

<3.第3の実施形態>
図6(A)および(B)は、第3の実施形態に係るパッケージ接続体6Bの裏面図と長辺側の側面図である。
<3. Third Embodiment>
FIGS. 6A and 6B are a rear view and a side view of the long side of the package connection body 6B according to the third embodiment.

パッケージ接続体6Bは、第1の実施形態と同様な材料製の矩形平板状の基材61Bを有する。
パッケージ接続体6Bの基材61は、当該基材61Bと実装基板100の基材との熱膨張係数の差が、当該基材61Bとパッケージ本体2の基材との熱膨張係数の差より小さい熱膨張係数を有する材料から形成されている。
The package connection body 6B has a rectangular flat plate-like base material 61B made of the same material as that of the first embodiment.
In the base material 61 of the package connector 6B, the difference in thermal expansion coefficient between the base material 61B and the base material of the mounting substrate 100 is smaller than the difference in thermal expansion coefficient between the base material 61B and the base material of the package body 2. It is formed from a material having a thermal expansion coefficient.

パッケージ接続体6Bは、電極配置構成が第1の実施形態と同じであるが、基材61Bのほぼ中央に第1主面S1から第2主面S2に貫通する貫通孔66Bを有する点で、第1の実施形態における基材61と異なる。   The package connection body 6B has the same electrode arrangement configuration as that of the first embodiment, but has a through-hole 66B penetrating from the first main surface S1 to the second main surface S2 at substantially the center of the base material 61B. Different from the substrate 61 in the first embodiment.

また、第1の実施形態と同様に2つの側面凹部62が2つの短側面S3に設けられている。
ここで、上記貫通孔66Bは、その一方向の両端部が、各電極に対して側面凹部62と同様な形状を提供する外形と位置を有する。このため、貫通孔66Bの両端部の一方は、電極対(63A,64A)を挟んで一方の側面凹部62と互いに対向する凹部を形成する。また、貫通孔66Bの両端部の他方は、他の電極対(63B,64B)を挟んで他方の側面凹部62と互いに対向する凹部を形成する。
Further, similarly to the first embodiment, two side surface recesses 62 are provided on the two short side surfaces S3.
Here, the through hole 66B has an outer shape and a position in which both end portions in one direction provide the same shape as the side recess 62 with respect to each electrode. For this reason, one of both end portions of the through hole 66B forms a recess facing the one side recess 62 across the electrode pair (63A, 64A). Further, the other of both end portions of the through-hole 66B forms a recess facing the other side surface recess 62 across the other electrode pair (63B, 64B).

また、貫通孔66Bの両端部が形成する2つの上記凹部の内壁面(基材の内側面)に、側面凹部62と同様な電極接続部65を有する。したがって、2つの電極対の各々は、2つの電極接続部65により、第1の実施形態よりも確実に電極間が接続されているので、さらに導通不良を低減することができる。また、貫通孔66Bは、一辺の内壁面が、第1電極64A,64Bおよび第2電極63A,63Bを挟んで側面凹部62に対応して位置し、側面凹部62内の基材の側面と内壁面のそれぞれに、第1電極64A,64Bおよび第2電極63A,63Bと一体の導電材料から形成されている。このようにすることにより、確実に電極間が接続されるので、導通不良をさらに低減することができる。   Moreover, the electrode connection part 65 similar to the side surface recessed part 62 is provided in the inner wall surface (inner side surface of a base material) of two said recessed parts which the both ends of the through-hole 66B form. Therefore, each of the two electrode pairs is more reliably connected between the electrodes by the two electrode connection portions 65 than in the first embodiment, so that the conduction failure can be further reduced. The through-hole 66B has an inner wall surface on one side positioned corresponding to the side recess 62 with the first electrodes 64A and 64B and the second electrodes 63A and 63B interposed therebetween, Each of the wall surfaces is formed of a conductive material that is integral with the first electrodes 64A and 64B and the second electrodes 63A and 63B. By doing in this way, since between electrodes are connected reliably, conduction | electrical_connection defect can be reduced further.

図7は、第3の実施形態に係る実装構造の概略断面図である。この断面図は、図6(A)の2つの側面凹部62と、その間の貫通孔66Bを通る線に沿った構造を表している。
実装時に各側面凹部62が導電接合材SLで完全または一部に充填され、フィレットが形成されることは第1の実施形態と同様である。さらに本実施形態では、電極対に対する凹部を形成する貫通孔66Bの両端部側にも同様に電極接続部65が形成されているため、それに沿って導電接合材SLが這い上がり、フィレットが形成される。したがって、導電接合材SLの剥がれに対する強度が第1の実施形態よりさらに増し、極めて強固な接合が達成されている。
FIG. 7 is a schematic cross-sectional view of the mounting structure according to the third embodiment. This sectional view shows a structure along a line passing through the two side recesses 62 in FIG. 6A and the through hole 66B therebetween.
As in the first embodiment, each side recess 62 is completely or partially filled with the conductive bonding material SL and a fillet is formed at the time of mounting. Furthermore, in the present embodiment, since the electrode connection portions 65 are similarly formed on both end sides of the through-hole 66B that forms the concave portion for the electrode pair, the conductive bonding material SL crawls up along therewith, and a fillet is formed. The Therefore, the strength against peeling of the conductive bonding material SL is further increased than that of the first embodiment, and extremely strong bonding is achieved.

この導電接合材剥がれに対する強度向上に加えて、第1の実施形態で基材同士の熱膨張係数差を規定したことによる、第1の実施形態と同様な望ましい効果が期待できる。   In addition to improving the strength against peeling of the conductive bonding material, the same desirable effect as in the first embodiment can be expected by defining the difference in thermal expansion coefficient between the substrates in the first embodiment.

<4.第4の実施形態>
図8(A)および(B)は、第4の実施形態に係るパッケージ接続体6Cの裏面図と長辺側の側面図である。
このパッケージ接続体6Cは、第2の実施形態で説明したパッケージ接続体6Bに、さらに、2つの貫通孔66Cを追加したものと同等である。このため、以下の説明では、第1および第2の実施形態と同一の構成は、同一符号を付して、その説明を省略または簡略化する。
<4. Fourth Embodiment>
FIGS. 8A and 8B are a back view and a side view of the long side of the package connection body 6C according to the fourth embodiment.
This package connection body 6C is equivalent to the package connection body 6B described in the second embodiment in which two through holes 66C are further added. For this reason, in the following description, the same configurations as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof is omitted or simplified.

2つの貫通孔のうち、一方の貫通孔66Cは、電極対(63A,64A)と電極対(63D,64D)の間に位置する。そして、当該一方の貫通孔66Cは、基材61Cの短辺方向(長側面S4同士の対向方向)の両端部が各電極対に対して凹部を形成するように、その貫通孔の大きさ、形状および位置が決められている。
同様に、他方の貫通孔66Cは、他の2つの電極対の間、即ち電極対(63B,64B)と電極対(63C,64C)の間に位置する。そして、当該他方の貫通孔66Cは、基材61Cの短辺方向の両端部が各電極対に対して凹部を形成するように、その貫通孔の大きさ、形状および位置が決められている。
Of the two through holes, one through hole 66C is located between the electrode pair (63A, 64A) and the electrode pair (63D, 64D). The one through hole 66C has a size of the through hole such that both ends of the base 61C in the short side direction (opposite direction of the long side surfaces S4) form a recess with respect to each electrode pair, The shape and position are determined.
Similarly, the other through-hole 66C is located between the other two electrode pairs, that is, between the electrode pair (63B, 64B) and the electrode pair (63C, 64C). The size, shape, and position of the through hole 66C are determined such that both end portions in the short side direction of the base 61C form a recess with respect to each electrode pair.

これら2つの貫通孔66Cの各々が、対応する電極対に対する凹部を形成する両端部のそれぞれに電極間を短絡する電極接続部65を有する点は、第3の実施形態における貫通孔66Bと同様である。   Each of these two through-holes 66C has an electrode connection portion 65 that short-circuits between the electrodes at each of both ends forming a recess for the corresponding electrode pair, similar to the through-hole 66B in the third embodiment. is there.

その他のパッケージ接続体の構成、パッケージ接続体以外の実装構造、および実装法は第1および第2の実施形態と同様である。
また、実装時に、側面凹部62のみならず、貫通孔66Cの内壁側にもフィレットが形成されて(図7の貫通孔66B参照)、さらに強固な接合が達成される点で、第3の実施形態と同様な効果が得られる。
Other configurations of the package connection body, the mounting structure other than the package connection body, and the mounting method are the same as those in the first and second embodiments.
Further, in mounting, not only the side surface recess 62 but also the fillet is formed on the inner wall side of the through hole 66C (see the through hole 66B in FIG. 7), and the third embodiment is achieved in that a stronger bond is achieved. The same effect as the form can be obtained.

この導電接合材SLの剥がれに対する強度向上に加えて、第1の実施形態で基材同士の熱膨張係数差を規定したことによる、第1の実施形態と同様な望ましい効果が期待できる。   In addition to improving the strength against peeling of the conductive bonding material SL, a desirable effect similar to that of the first embodiment can be expected by defining the difference in thermal expansion coefficient between the substrates in the first embodiment.

<5.変形例>
以上の第1〜第4の実施形態は、上記説明に限定されず、例えば以下に例示する種々の変形が可能である。
<5. Modification>
The above 1st-4th embodiment is not limited to the said description, For example, the various deformation | transformation illustrated below is possible.

電極接続部65は、第1および第2電極(一対の電極)とは別の導電材料から形成してもよい。   The electrode connecting portion 65 may be formed of a conductive material different from the first and second electrodes (a pair of electrodes).

また、パッケージ接続体6,6A,6B,6Cの基材61,61A,61B,61Cは、その短側面S3と長側面S4の一方に側面凹部62を形成しているが、短側面S3と長側面S4の両方に側面凹部62を形成することが可能である。また、側面凹部62を電極対に対し1つ設ける場合でも、その位置自体は上記の説明に限定されない。   Further, the bases 61, 61A, 61B, 61C of the package connectors 6, 6A, 6B, 6C have a side recess 62 formed on one of the short side surface S3 and the long side surface S4. Side surface recesses 62 can be formed on both side surfaces S4. Further, even when one side recess 62 is provided for the electrode pair, the position itself is not limited to the above description.

例えば図3,図6に示す2端子デバイス向けのパッケージ接続体では、各電極対に対し、短側面S3側の側面凹部62に加えて、2つの長側面S4の一方または他方にも側面凹部62を形成して、電極接続部65による電極間短絡箇所を増やしてもよい。また、各電極対に対し、短側面S3側には側面凹部62を形成せずに、2つの長側面S4の一方または他方に側面凹部62を形成してもよい。
この側面凹部62による電極間短絡箇所の追加における位置と個数が任意な点は、4端子デバイス向けのパッケージ接続体でも同様である。
For example, in the package connector for a two-terminal device shown in FIGS. 3 and 6, in addition to the side recess 62 on the short side S3 side, one or the other of the two long sides S4 has a side recess 62 for each electrode pair. May be formed to increase the number of short-circuited portions between the electrodes by the electrode connecting portion 65. Further, for each electrode pair, the side surface recess 62 may be formed on one or the other of the two long side surfaces S4 without forming the side surface recess 62 on the short side surface S3 side.
The point where the position and the number of the short-circuit portions between the electrodes by the side recess 62 are arbitrary is the same as in the package connection body for a four-terminal device.

さらに、各側面凹部62については、電極接続部65を有さず、単に裏面の電極から凹部内壁の途中まで延在する導電層を有する構成として電極間短絡に寄与しないが、フィレットの形成のみに寄与する変形も可能である。   Further, each side recess 62 does not have the electrode connection portion 65 and does not contribute to the inter-electrode short circuit as a configuration having a conductive layer that extends from the electrode on the back surface to the middle of the inner wall of the recess, but only for the formation of the fillet. Contributing deformations are also possible.

ここで、側面凹部62は必須の構成ではない。上述した実施形態では、各電極の位置が基材側面から若干離れた位置にあるため、側面凹部62を形成して電極接続部65による電極間短絡を容易にしているが、この短絡構造に限定されない。
例えば、側面凹部62を有さない場合、電極接続部65を、基材側面から表裏面の各電極まで延びるように形成してもよい。この場合、電極接続部65の基材側面部分でフィレットが形成される。
Here, the side recess 62 is not an essential component. In the above-described embodiment, since the position of each electrode is slightly away from the side surface of the substrate, the side recess 62 is formed to facilitate the short circuit between the electrodes by the electrode connection portion 65, but this is limited to this short-circuit structure. Not.
For example, when the side recess 62 is not provided, the electrode connection portion 65 may be formed so as to extend from the side surface of the base material to each electrode on the front and back surfaces. In this case, a fillet is formed at the base material side surface portion of the electrode connection portion 65.

電極接続部65による基材側面での電極間接続に加えて、あるいは、当該基材側面側の電極間接続に代えて、1対の電極間をプラグ接続してもよい。
例えば、パッケージ接続体の基材を成形する工程において、電極を配置する予定の基材位置に、貫通孔を、各電極対につき、少なくとも1つ形成する。このプラグ用の孔形成は、例えば矩形基材を打ち抜き加工して側面凹部62を形成する場合に同時に行うとよい。形成した貫通孔を導電性のプラグ材料(例えば金属)で埋め込んだ後、1対の電極と、必要であれば1対の電極間を短絡する電極接続部65を形成することで電極間短絡構造を実現可能である。
In addition to the interelectrode connection on the side surface of the base material by the electrode connection portion 65, or instead of the interelectrode connection on the base material side surface side, a pair of electrodes may be plug-connected.
For example, in the step of forming the base material of the package connector, at least one through hole is formed for each electrode pair at the base material position where the electrode is to be arranged. The hole formation for the plug is preferably performed at the same time when the side surface recess 62 is formed by punching a rectangular base material, for example. After the formed through hole is filled with a conductive plug material (for example, metal), an electrode short circuit structure is formed by forming an electrode connection portion 65 that short-circuits between a pair of electrodes and, if necessary, a pair of electrodes. Is feasible.

その他、本発明は、種々の態様で実施されてよい。   In addition, the present invention may be implemented in various modes.

上記第1〜第4の実施形態および変形例は、主に「実装構造」の観点から本発明の好適な形態を記載している。
但し、側面凹部の有無を問わず、基材側面側の電極接続部により電極間接続を達成した構成をもつ構成を「圧電デバイス」の観点から以下のように捉え直した下記<6.別発明>の実施形態も、上記第1〜第4の実施形態及び変形例を含む、以上の記載全体に実質的に記載されている。
The first to fourth embodiments and the modified examples describe preferred embodiments of the present invention mainly from the viewpoint of “mounting structure”.
However, the configuration having the configuration in which the interelectrode connection is achieved by the electrode connecting portion on the side surface of the base material, regardless of the presence or absence of the side surface concave portion, has been re-examined as follows from the viewpoint of the “piezoelectric device”. Embodiments of other inventions are also substantially described throughout the above description, including the first to fourth embodiments and modifications.

<6.別発明>
『圧電素子を内部に収容し、底面に複数の外部端子を有するセラミック製のパッケージ本体と、前記パッケージ本体と重ねられたときに側面の主部同士が揃う大きさの樹脂製の基材、当該基材の第1主面に配置され前記複数の外部端子と接続される複数の第1電極、および、前記基材の第2主面に配置され、前記複数の第1電極の何れかと前記基材の側面側で接続された複数の第2電極を備えるパッケージ接続体と、を有し、前記複数の第1電極の各々が、前記基材の側面に設けられた導電性の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている圧電デバイス。』
<6. Another invention>
“A ceramic package body containing a piezoelectric element therein and having a plurality of external terminals on the bottom surface, and a resin base material having a size in which main portions of the side surfaces are aligned when overlapped with the package body, A plurality of first electrodes arranged on the first main surface of the base material and connected to the plurality of external terminals; and a base electrode arranged on the second main surface of the base material and any one of the plurality of first electrodes and the base A package connection body including a plurality of second electrodes connected on the side surface side of the material, and each of the plurality of first electrodes is formed by a conductive electrode connection portion provided on the side surface of the base material. A piezoelectric device electrically connected to any one of the plurality of second electrodes. ]

1…圧電デバイス、2…パッケージ本体、2A…凹部、22A,22B…接続パッド、4…水晶素子、5…パッケージ蓋体、6…パッケージ接続体、22A,22B…接続パッド、23A,23B…外部端子、41…水晶素板、42…励振電極、43A,43B…接続電極、44…引出電極、61…基材、62…側面凹部、63A,63B…第2電極、64A,64B…第1電極、65…電極接続部、66…貫通孔、100…実装基板、110A,100B…端子接合パッド部、S1…第1主面、S2…第2主面、S3…短側面、S4…長側面、DS…導電接着剤、SL…導電接合材   DESCRIPTION OF SYMBOLS 1 ... Piezoelectric device, 2 ... Package main body, 2A ... Recessed part, 22A, 22B ... Connection pad, 4 ... Crystal element, 5 ... Package lid, 6 ... Package connection body, 22A, 22B ... Connection pad, 23A, 23B ... External Terminals 41... Crystal base plate 42. Excitation electrodes 43 A and 43 B Connection electrodes 44 Extraction electrodes 61 Substrates 62 Side recesses 63 A and 63 B Second electrodes 64 A and 64 B First electrodes , 65 ... electrode connection part, 66 ... through hole, 100 ... mounting board, 110A, 100B ... terminal bonding pad part, S1 ... first main surface, S2 ... second main surface, S3 ... short side surface, S4 ... long side surface, DS ... conductive adhesive, SL ... conductive bonding material

Claims (12)

圧電素子を内部に収容し、底面に複数の外部端子を有するパッケージ本体と、
前記パッケージ本体と実装基板との間に介在し、前記複数の外部端子を、前記実装基板に設けられた複数の端子接合パッド部に電気的に接続するパッケージ接続体と、
を有し、
前記パッケージ接続体の基材は、前記実装基板の基材との熱膨張係数差が前記パッケージ本体の基材との熱膨張係数差より小さい熱膨張係数を有する材料から形成されている、
圧電デバイスの実装構造。
A package body containing a piezoelectric element therein and having a plurality of external terminals on the bottom surface;
A package connection body interposed between the package body and the mounting substrate, and electrically connecting the plurality of external terminals to a plurality of terminal bonding pad portions provided on the mounting substrate;
Have
The base material of the package connection body is formed of a material having a thermal expansion coefficient smaller than that of the base material of the package body.
Mounting structure of piezoelectric device.
前記パッケージ接続体の基材と前記実装基板の基材は同じ樹脂材料からなる、
請求項1記載の圧電デバイスの実装構造。
The base material of the package connector and the base material of the mounting substrate are made of the same resin material,
The mounting structure of the piezoelectric device according to claim 1.
前記パッケージ接続体は、
基材と、
前記基材の第1主面に配置され、前記パッケージ本体の前記複数の外部端子に接続される複数の第1電極と、
前記基材の第2主面に配置され、前記実装基板の複数の導電パッド部と接続される複数の第2電極と、
を有し、
前記複数の第1電極の各々が、前記基材の側面に設けられた導電性の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている、
請求項1または2記載の圧電デバイスの実装構造。
The package connector is
A substrate;
A plurality of first electrodes disposed on the first main surface of the substrate and connected to the plurality of external terminals of the package body;
A plurality of second electrodes disposed on the second main surface of the base material and connected to a plurality of conductive pad portions of the mounting substrate;
Have
Each of the plurality of first electrodes is electrically connected to any one of the plurality of second electrodes by a conductive electrode connecting portion provided on a side surface of the substrate.
The mounting structure of the piezoelectric device according to claim 1 or 2.
前記基材の側面は、当該側面から基材中心側に窪む側面凹部を有し、
前記側面凹部内の前記基材の側面に、前記第1電極および前記第2電極と一体の導電材料からなる前記電極接続部が設けられている、
請求項3に記載の圧電デバイスの実装構造。
The side surface of the substrate has a side recess recessed from the side surface to the substrate center side,
The electrode connection portion made of a conductive material integral with the first electrode and the second electrode is provided on the side surface of the base material in the side surface recess,
The mounting structure of the piezoelectric device according to claim 3.
前記パッケージ接続体の基材は、第1主面と第2主面を厚さ方向に貫通する貫通孔を少なくとも1つ有する、
請求項1から4の何れか一項記載の圧電デバイスの実装構造。
The base material of the package connector has at least one through-hole penetrating the first main surface and the second main surface in the thickness direction.
The mounting structure of the piezoelectric device according to any one of claims 1 to 4.
前記パッケージ接続体は、
基材と、
前記基材の第1主面に配置され、前記パッケージ本体の前記複数の外部端子に接続される複数の第1電極と、
前記基材の第2主面に配置され、前記実装基板の複数の導電パッド部と接続される複数の第2電極と、
を有し、
前記複数の第1電極の各々が、前記基材の側面および前記貫通孔の内壁面に設けられた導電性の複数の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている、
請求項5記載の圧電デバイスの実装構造。
The package connector is
A substrate;
A plurality of first electrodes disposed on the first main surface of the substrate and connected to the plurality of external terminals of the package body;
A plurality of second electrodes disposed on the second main surface of the base material and connected to a plurality of conductive pad portions of the mounting substrate;
Have
Each of the plurality of first electrodes is electrically connected to any one of the plurality of second electrodes by a plurality of conductive electrode connection portions provided on a side surface of the base material and an inner wall surface of the through hole. ing,
The mounting structure of the piezoelectric device according to claim 5.
前記基材の側面は、当該側面から基材中心側に窪む側面凹部を有し、
前記貫通孔は、一辺の内壁面が、前記第1および第2電極を挟んで前記側面凹部に対応して位置し、
前記側面凹部内の前記基材の側面と前記内壁面のそれぞれに、前記第1電極および前記第2電極と一体の導電材料からなる前記電極接続部が設けられている、
請求項6記載の圧電デバイスの実装構造。
The side surface of the substrate has a side recess recessed from the side surface to the substrate center side,
In the through hole, an inner wall surface of one side is located corresponding to the side surface recess with the first and second electrodes interposed therebetween,
The electrode connection portion made of a conductive material integral with the first electrode and the second electrode is provided on each of the side surface and the inner wall surface of the base material in the side surface recess,
The mounting structure of the piezoelectric device according to claim 6.
前記パッケージ本体の前記複数の外部端子と前記複数の第1電極は、導電接着剤で接続され、
前記実装基板の複数の導電パッド部と前記複数の第2電極は、導電接合材で接合され、
前記導電接合材が前記電極接続部の各々から前記実装基板の上面にかけて上下方向の厚みが薄くなるように傾斜をつけて設けられている、
請求項3または6記載の圧電デバイスの実装構造。
The plurality of external terminals of the package body and the plurality of first electrodes are connected with a conductive adhesive,
The plurality of conductive pad portions of the mounting substrate and the plurality of second electrodes are bonded with a conductive bonding material,
The conductive bonding material is provided with an inclination so that the thickness in the vertical direction decreases from each of the electrode connection portions to the upper surface of the mounting substrate.
The mounting structure of the piezoelectric device according to claim 3 or 6.
圧電素子を内部に収容し、底面に複数の外部端子を有するセラミック製のパッケージ本体と、
前記パッケージ本体と重ねられたときに側面の主部同士が揃う大きさの樹脂製の基材、当該基材の第1主面に配置され前記複数の外部端子と接続される複数の第1電極、および、前記基材の第2主面に配置され、前記複数の第1電極の何れかと前記基材の側面側で接続された複数の第2電極を備えるパッケージ接続体と、
を有し、
前記複数の第1電極の各々が、前記基材の側面に設けられた導電性の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている、
圧電デバイス。
A package body made of ceramic containing a piezoelectric element inside and having a plurality of external terminals on the bottom surface;
Resin base material having a size such that main parts of side surfaces are aligned with each other when overlapped with the package body, and a plurality of first electrodes arranged on the first main surface of the base material and connected to the plurality of external terminals And a package connector including a plurality of second electrodes arranged on the second main surface of the base material and connected to any one of the plurality of first electrodes on the side surface side of the base material,
Have
Each of the plurality of first electrodes is electrically connected to any one of the plurality of second electrodes by a conductive electrode connecting portion provided on a side surface of the substrate.
Piezoelectric device.
前記パッケージ接続体の基材は、前記第1主面と前記第2主面を厚さ方向に貫通する貫通孔を少なくとも1つ有する、
請求項9記載の圧電デバイス。
The base material of the package connector has at least one through-hole penetrating the first main surface and the second main surface in the thickness direction.
The piezoelectric device according to claim 9.
前記複数の第1電極の各々が、前記基材の側面および前記貫通孔の内壁面に設けられた導電性の複数の電極接続部により、前記複数の第2電極の何れかと電気的に接続されている、
請求項10記載の圧電デバイス。
Each of the plurality of first electrodes is electrically connected to any one of the plurality of second electrodes by a plurality of conductive electrode connection portions provided on a side surface of the base material and an inner wall surface of the through hole. ing,
The piezoelectric device according to claim 10.
前記基材の側面は、当該側面から基材中心側に窪む側面凹部を有し、
前記貫通孔は、一辺の内壁面が、前記第1および第2電極を挟んで前記側面凹部に対応して位置し、
前記側面凹部内の前記基材の側面と前記内壁面のそれぞれに、前記第1電極および前記第2電極と一体の導電材料からなる前記電極接続部が設けられている、
請求項11記載の圧電デバイス。
The side surface of the substrate has a side recess recessed from the side surface to the substrate center side,
In the through hole, an inner wall surface of one side is located corresponding to the side surface recess with the first and second electrodes interposed therebetween,
The electrode connection portion made of a conductive material integral with the first electrode and the second electrode is provided on each of the side surface and the inner wall surface of the base material in the side surface recess,
The piezoelectric device according to claim 11.
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