JP2015153608A - 透明電極フィルムの製造方法およびレーザー加工機 - Google Patents
透明電極フィルムの製造方法およびレーザー加工機 Download PDFInfo
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Abstract
Description
一定の出力を連続して発振する連続発振のCWレーザー加工機ではなく、パルス状の出力を一定の周波数で発振できるパルスレーザー加工機にする必要がある。パルスレーザー加工機の例としては、直接変調法、Qスイッチ法、モード同期法(モードロック法)のレーザー加工機が挙げられる。
10 基材フィルム
20 透明電極
21 透明導電膜
25 引き回し回路
50 レーザー加工機
52 加工ノズル
70 外額縁部の四隅
71 X方向の外枠額縁部の辺
72 X方向の外枠額縁部の四隅に近い箇所
73 Y方向の外枠額縁部の四隅に近い箇所
74 Y方向の外枠額縁部の辺
100 透明電極フィルム
Claims (8)
- 基材フィルム上に透明電極が形成された透明電極フィルムの製造方法であって、該透明電極は透明導電膜にレーザー光線を照射してパターニングされ、該レーザー光線の移動速度に応じてレーザー光線のエネルギー量が可変されて該透明電極がパターニングされることを特徴とする透明電極フィルムの製造方法。
- 基材フィルム上に透明電極が形成され、該透明電極の外枠額縁部に引き回し回路が形成された透明電極フィルムの製造方法であって、該引き回し回路はレーザー光線を照射してパターニングされ、該レーザー光線の移動速度に応じてレーザー光線のエネルギー量が可変されて該引き回し回路がパターニングされることを特徴とする透明電極フィルムの製造方法。
- 前記レーザー光線の移動速度とレーザー光線のエネルギー量とが略比例関係にあることを特徴とする請求項1または請求項2のいずれかに記載の透明電極フィルムの製造方法。
- パルス発振レーザー加工機を用い、レーザー光線の移動速度に略比例してレーザー光線1の発振周波数を可変調節することにより、レーザー光線の移動速度に応じてレーザー光線のエネルギー量が可変されることを特徴とする請求項1ないし請求項3のいずれかに記載の透明電極フィルムの製造方法。
- レーザー発振器に付随するコントローラに指令する制御値、レーザー強度スタビライザに指令する制御値、レーザー発振器と加工ノズルとの間に介在する光学系に設けた減衰器に指令する制御値のいずれかの制御値を調節することにより、レーザー光線の移動速度に応じてレーザー光線のエネルギー量が可変されることを特徴とする請求項1ないし請求項3のいずれかに記載の透明電極フィルムの製造方法。
- レーザー光線の加工幅半径を調節することにより、レーザー光線の移動速度に応じてレーザー光線のエネルギー量が可変されることを特徴とする請求項1ないし請求項3のいずれかに記載の透明電極フィルムの製造方法。
- 前記請求項1ないし請求項6のいずれかに記載の透明電極フィルムの製造方法に用いるレーザー加工機であって、レーザー光線の移動手段が加工ノズルの移動またはガルバノスキャナによることを特徴とするレーザー加工機。
- 前記請求項1ないし請求項6のいずれかに記載の透明電極フィルムの製造方法によって製造された透明電極フィルムであって、透明電極が金属酸化物からなる透明導電膜、極細線の導体繊維を含有させた透明導電膜、目視で確認できない程度の細線からなる透明導電膜、有機物からなる透明導電膜のいずれかから構成される透明電極フィルム。
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JP2019021867A (ja) * | 2017-07-21 | 2019-02-07 | 株式会社ディスコ | 静電チャックプレートの製造方法 |
JP2021121069A (ja) * | 2020-01-30 | 2021-08-19 | セイコーエプソン株式会社 | 振動デバイスの製造方法 |
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JP2019021867A (ja) * | 2017-07-21 | 2019-02-07 | 株式会社ディスコ | 静電チャックプレートの製造方法 |
JP2021121069A (ja) * | 2020-01-30 | 2021-08-19 | セイコーエプソン株式会社 | 振動デバイスの製造方法 |
JP7419842B2 (ja) | 2020-01-30 | 2024-01-23 | セイコーエプソン株式会社 | 振動デバイスの製造方法 |
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