JP2015141899A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2015141899A5 JP2015141899A5 JP2015012456A JP2015012456A JP2015141899A5 JP 2015141899 A5 JP2015141899 A5 JP 2015141899A5 JP 2015012456 A JP2015012456 A JP 2015012456A JP 2015012456 A JP2015012456 A JP 2015012456A JP 2015141899 A5 JP2015141899 A5 JP 2015141899A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- image
- lens
- particle
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 109
- 239000002245 particle Substances 0.000 claims description 72
- 238000000034 method Methods 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000000399 optical microscopy Methods 0.000 claims description 2
- 230000009466 transformation Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 86
- 230000035945 sensitivity Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 239000012472 biological sample Substances 0.000 description 3
- 239000003550 marker Substances 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical class [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical class [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000000080 cathodoluminescence detection Methods 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000002073 fluorescence micrograph Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000002632 lipids Chemical class 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052709 silver Chemical class 0.000 description 1
- 239000004332 silver Chemical class 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14152582.4A EP2899743B1 (en) | 2014-01-27 | 2014-01-27 | Correlative optical and charged particle microscope |
| EP14152582.4 | 2014-01-27 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015141899A JP2015141899A (ja) | 2015-08-03 |
| JP2015141899A5 true JP2015141899A5 (enExample) | 2016-05-19 |
| JP6047592B2 JP6047592B2 (ja) | 2016-12-21 |
Family
ID=49998160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015012456A Expired - Fee Related JP6047592B2 (ja) | 2014-01-27 | 2015-01-26 | 相関光学及び荷電粒子顕微鏡 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9293297B2 (enExample) |
| EP (1) | EP2899743B1 (enExample) |
| JP (1) | JP6047592B2 (enExample) |
| CN (1) | CN104810230B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9564291B1 (en) * | 2014-01-27 | 2017-02-07 | Mochii, Inc. | Hybrid charged-particle beam and light beam microscopy |
| DE102014103360A1 (de) | 2014-03-12 | 2015-09-17 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Vorrichtung für die korrelative Raster-Transmissionselektronenmikroskopie (STEM) und Lichtmikroskopie |
| DE102014108331A1 (de) | 2014-06-13 | 2015-12-17 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung | Spezifische Proteinmarkierung sowie Verfahren zur Identifizierung der statistischen Verteilung der Proteinstöchiometrie |
| DE102014108825A1 (de) * | 2014-06-24 | 2015-12-24 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung | Vorrichtung und Verfahren für die stöchiometrische Analyse von Proben |
| US10176567B2 (en) * | 2015-12-21 | 2019-01-08 | Canon Kabushiki Kaisha | Physical registration of images acquired by Fourier Ptychography |
| WO2017216941A1 (ja) | 2016-06-17 | 2017-12-21 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
| US10176963B2 (en) | 2016-12-09 | 2019-01-08 | Waviks, Inc. | Method and apparatus for alignment of optical and charged-particle beams in an electron microscope |
| EP3616162B1 (en) * | 2017-04-27 | 2023-08-09 | King Abdullah University Of Science And Technology | Image series alignment system and method |
| JP6775003B2 (ja) * | 2018-12-26 | 2020-10-28 | 株式会社日立ハイテク | 荷電粒子線装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6373070B1 (en) | 1999-10-12 | 2002-04-16 | Fei Company | Method apparatus for a coaxial optical microscope with focused ion beam |
| TW200703409A (en) * | 2005-03-03 | 2007-01-16 | Ebara Corp | Mapping projection type electron beam apparatus and defects inspection system using such apparatus |
| EP1724809A1 (en) * | 2005-05-18 | 2006-11-22 | FEI Company | Particle-optical apparatus for the irradiation of a sample |
| EP1953791A1 (en) | 2007-02-05 | 2008-08-06 | FEI Company | Apparatus for observing a sample with a particle beam and an optical microscope |
| US7781733B2 (en) * | 2007-05-16 | 2010-08-24 | International Business Machines Corporation | In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques |
| JP2008300354A (ja) | 2007-05-31 | 2008-12-11 | Fei Co | 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置 |
| JP5276860B2 (ja) * | 2008-03-13 | 2013-08-28 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| US9310596B2 (en) * | 2010-04-06 | 2016-04-12 | Inter-University Research Institute Corporation National Institute Of Natural Sciences | Compound microscope device |
| US8698098B2 (en) * | 2010-07-30 | 2014-04-15 | E.A. Fischione Instruments, Inc. | In situ holder assembly |
| JP5814741B2 (ja) * | 2011-10-20 | 2015-11-17 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
-
2014
- 2014-01-27 EP EP14152582.4A patent/EP2899743B1/en not_active Not-in-force
-
2015
- 2015-01-26 JP JP2015012456A patent/JP6047592B2/ja not_active Expired - Fee Related
- 2015-01-27 CN CN201510040069.1A patent/CN104810230B/zh not_active Expired - Fee Related
- 2015-01-27 US US14/606,850 patent/US9293297B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6047592B2 (ja) | 相関光学及び荷電粒子顕微鏡 | |
| JP2015141899A5 (enExample) | ||
| CN101241087B (zh) | 用于通过粒子束和光学显微镜观测样品的设备 | |
| Mayo et al. | Quantitative X‐ray projection microscopy: phase‐contrast and multi‐spectral imaging | |
| US8476588B2 (en) | Method of electron diffraction tomography | |
| Le Gros et al. | Biological soft X-ray tomography on beamline 2.1 at the Advanced Light Source | |
| JP5354850B2 (ja) | 表面分析用分光装置と分析方法 | |
| US20150055745A1 (en) | Phase Contrast Imaging Using Patterned Illumination/Detector and Phase Mask | |
| JP7577403B2 (ja) | サンプルからエネルギー分析器および電子分光計装置への電子伝達のための装置および方法 | |
| JP2003014667A (ja) | 電子線を用いた観察装置及び観察方法 | |
| JP5842308B2 (ja) | 複合顕微鏡装置 | |
| Kaech | Introduction to Electron Microscopy | |
| CN114730684A (zh) | 阴极射线发光电子显微镜 | |
| JP5002604B2 (ja) | 偏光位相顕微鏡 | |
| JP7278983B2 (ja) | マルチビーム走査透過荷電粒子顕微鏡 | |
| Wang et al. | CryoFIB milling large tissue samples for cryo-electron tomography | |
| US20250166956A1 (en) | Transmission electron microscopy with square beams | |
| JPWO2007058182A1 (ja) | 位相差電子顕微鏡装置 | |
| CN119731762A (zh) | 用于样品材料的多模态分析的装置 | |
| EP4391007A1 (en) | Pole piece incorporating optical cavity for improved phase-contrast in electron microscope imaging | |
| CN104819987B (zh) | 一种超高谱分辨的x射线掠入射显微成像系统 | |
| JP6636061B2 (ja) | Ｔｅｍ内での特徴のない薄膜の位置合わせ | |
| Tromp | Catadioptric aberration correction in cathode lens microscopy | |
| JP2005127967A (ja) | 高分解能・化学結合電子・２次イオン顕微鏡装置 | |
| Le Gros et al. | ARTICLE IN PRESS–J. Synchrotron Rad. |