JP2015135300A5 - - Google Patents

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Publication number
JP2015135300A5
JP2015135300A5 JP2014007429A JP2014007429A JP2015135300A5 JP 2015135300 A5 JP2015135300 A5 JP 2015135300A5 JP 2014007429 A JP2014007429 A JP 2014007429A JP 2014007429 A JP2014007429 A JP 2014007429A JP 2015135300 A5 JP2015135300 A5 JP 2015135300A5
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JP
Japan
Prior art keywords
voltage
inspection
output
current
measurement device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2014007429A
Other languages
English (en)
Japanese (ja)
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JP6259669B2 (ja
JP2015135300A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014007429A priority Critical patent/JP6259669B2/ja
Priority claimed from JP2014007429A external-priority patent/JP6259669B2/ja
Priority to US15/109,726 priority patent/US9779912B2/en
Priority to PCT/JP2014/082359 priority patent/WO2015107795A1/ja
Publication of JP2015135300A publication Critical patent/JP2015135300A/ja
Publication of JP2015135300A5 publication Critical patent/JP2015135300A5/ja
Application granted granted Critical
Publication of JP6259669B2 publication Critical patent/JP6259669B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014007429A 2014-01-20 2014-01-20 検査装置および計測装置 Expired - Fee Related JP6259669B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014007429A JP6259669B2 (ja) 2014-01-20 2014-01-20 検査装置および計測装置
US15/109,726 US9779912B2 (en) 2014-01-20 2014-12-08 Inspection device and measurement device
PCT/JP2014/082359 WO2015107795A1 (ja) 2014-01-20 2014-12-08 検査装置および計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014007429A JP6259669B2 (ja) 2014-01-20 2014-01-20 検査装置および計測装置

Publications (3)

Publication Number Publication Date
JP2015135300A JP2015135300A (ja) 2015-07-27
JP2015135300A5 true JP2015135300A5 (enExample) 2017-02-02
JP6259669B2 JP6259669B2 (ja) 2018-01-10

Family

ID=53542699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014007429A Expired - Fee Related JP6259669B2 (ja) 2014-01-20 2014-01-20 検査装置および計測装置

Country Status (3)

Country Link
US (1) US9779912B2 (enExample)
JP (1) JP6259669B2 (enExample)
WO (1) WO2015107795A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017132789A1 (en) * 2016-02-01 2017-08-10 Shenzhen Xpectvision Technology Co.,Ltd. X-ray detectors capable of managing charge sharing

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143251A (ja) * 1982-02-22 1983-08-25 Fuji Electric Corp Res & Dev Ltd 板状物体の欠陥検出方法
US6999183B2 (en) * 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
JP4719972B2 (ja) * 2000-12-11 2011-07-06 富士電機システムズ株式会社 充放電電流測定装置
US6833913B1 (en) 2002-02-26 2004-12-21 Kla-Tencor Technologies Corporation Apparatus and methods for optically inspecting a sample for anomalies
JP2007248255A (ja) * 2006-03-15 2007-09-27 Omron Corp 光強度計測方法及び光強度計測装置並びに偏光解析装置およびこれを用いた製造管理装置
US7710557B2 (en) * 2007-04-25 2010-05-04 Hitachi High-Technologies Corporation Surface defect inspection method and apparatus
JP5341440B2 (ja) * 2008-09-10 2013-11-13 株式会社日立ハイテクノロジーズ 検査装置
JP5357509B2 (ja) * 2008-10-31 2013-12-04 株式会社日立ハイテクノロジーズ 検査装置、検査方法および検査装置の校正システム
JP2012135096A (ja) 2010-12-20 2012-07-12 High Energy Accelerator Research Organization 電圧調整装置、電圧調整方法、電圧調整システム
JP2013228254A (ja) * 2012-04-25 2013-11-07 Hitachi High-Technologies Corp 光学式表面欠陥検査装置及び光学式表面欠陥検査方法
JP5773939B2 (ja) * 2012-04-27 2015-09-02 株式会社日立ハイテクノロジーズ 欠陥検査装置および欠陥検査方法
JP5918009B2 (ja) * 2012-05-11 2016-05-18 株式会社日立ハイテクノロジーズ 欠陥検査方法および欠陥検査装置

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