JP6259669B2 - 検査装置および計測装置 - Google Patents

検査装置および計測装置 Download PDF

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Publication number
JP6259669B2
JP6259669B2 JP2014007429A JP2014007429A JP6259669B2 JP 6259669 B2 JP6259669 B2 JP 6259669B2 JP 2014007429 A JP2014007429 A JP 2014007429A JP 2014007429 A JP2014007429 A JP 2014007429A JP 6259669 B2 JP6259669 B2 JP 6259669B2
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JP
Japan
Prior art keywords
voltage
output
photon counting
inspection
counting sensor
Prior art date
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Expired - Fee Related
Application number
JP2014007429A
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English (en)
Japanese (ja)
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JP2015135300A (ja
JP2015135300A5 (enExample
Inventor
幕内　雅巳
雅巳 幕内
神宮　孝広
孝広 神宮
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Priority to JP2014007429A priority Critical patent/JP6259669B2/ja
Priority to US15/109,726 priority patent/US9779912B2/en
Priority to PCT/JP2014/082359 priority patent/WO2015107795A1/ja
Publication of JP2015135300A publication Critical patent/JP2015135300A/ja
Publication of JP2015135300A5 publication Critical patent/JP2015135300A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0075—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by spectroscopy, i.e. measuring spectra, e.g. Raman spectroscopy, infrared absorption spectroscopy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2444—Electron Multiplier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24495—Signal processing, e.g. mixing of two or more signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biophysics (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2014007429A 2014-01-20 2014-01-20 検査装置および計測装置 Expired - Fee Related JP6259669B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014007429A JP6259669B2 (ja) 2014-01-20 2014-01-20 検査装置および計測装置
US15/109,726 US9779912B2 (en) 2014-01-20 2014-12-08 Inspection device and measurement device
PCT/JP2014/082359 WO2015107795A1 (ja) 2014-01-20 2014-12-08 検査装置および計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014007429A JP6259669B2 (ja) 2014-01-20 2014-01-20 検査装置および計測装置

Publications (3)

Publication Number Publication Date
JP2015135300A JP2015135300A (ja) 2015-07-27
JP2015135300A5 JP2015135300A5 (enExample) 2017-02-02
JP6259669B2 true JP6259669B2 (ja) 2018-01-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014007429A Expired - Fee Related JP6259669B2 (ja) 2014-01-20 2014-01-20 検査装置および計測装置

Country Status (3)

Country Link
US (1) US9779912B2 (enExample)
JP (1) JP6259669B2 (enExample)
WO (1) WO2015107795A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3411733A4 (en) 2016-02-01 2019-08-28 Shenzhen Xpectvision Technology Co., Ltd. X-RAY DETECTORS WITH POSSIBILITY TO MANAGE LOAD SHARING

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143251A (ja) * 1982-02-22 1983-08-25 Fuji Electric Corp Res & Dev Ltd 板状物体の欠陥検出方法
US6999183B2 (en) * 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
JP4719972B2 (ja) * 2000-12-11 2011-07-06 富士電機システムズ株式会社 充放電電流測定装置
US6833913B1 (en) 2002-02-26 2004-12-21 Kla-Tencor Technologies Corporation Apparatus and methods for optically inspecting a sample for anomalies
JP2007248255A (ja) * 2006-03-15 2007-09-27 Omron Corp 光強度計測方法及び光強度計測装置並びに偏光解析装置およびこれを用いた製造管理装置
US7710557B2 (en) * 2007-04-25 2010-05-04 Hitachi High-Technologies Corporation Surface defect inspection method and apparatus
JP5341440B2 (ja) * 2008-09-10 2013-11-13 株式会社日立ハイテクノロジーズ 検査装置
JP5357509B2 (ja) * 2008-10-31 2013-12-04 株式会社日立ハイテクノロジーズ 検査装置、検査方法および検査装置の校正システム
JP2012135096A (ja) 2010-12-20 2012-07-12 High Energy Accelerator Research Organization 電圧調整装置、電圧調整方法、電圧調整システム
JP2013228254A (ja) * 2012-04-25 2013-11-07 Hitachi High-Technologies Corp 光学式表面欠陥検査装置及び光学式表面欠陥検査方法
JP5773939B2 (ja) * 2012-04-27 2015-09-02 株式会社日立ハイテクノロジーズ 欠陥検査装置および欠陥検査方法
JP5918009B2 (ja) * 2012-05-11 2016-05-18 株式会社日立ハイテクノロジーズ 欠陥検査方法および欠陥検査装置

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Publication number Publication date
US9779912B2 (en) 2017-10-03
US20160322193A1 (en) 2016-11-03
WO2015107795A1 (ja) 2015-07-23
JP2015135300A (ja) 2015-07-27

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