JP2015130503A - 集積回路チップパッケージ用のインターポーザ - Google Patents
集積回路チップパッケージ用のインターポーザ Download PDFInfo
- Publication number
- JP2015130503A JP2015130503A JP2014262544A JP2014262544A JP2015130503A JP 2015130503 A JP2015130503 A JP 2015130503A JP 2014262544 A JP2014262544 A JP 2014262544A JP 2014262544 A JP2014262544 A JP 2014262544A JP 2015130503 A JP2015130503 A JP 2015130503A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- substrate
- recess
- interposer
- conductive vias
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 126
- 239000012530 fluid Substances 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 36
- 230000005540 biological transmission Effects 0.000 claims description 13
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 5
- 239000003792 electrolyte Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000835 fiber Substances 0.000 description 15
- 239000010410 layer Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 239000011241 protective layer Substances 0.000 description 10
- 238000004891 communication Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000002411 adverse Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4266—Thermal aspects, temperature control or temperature monitoring
- G02B6/4268—Cooling
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0655—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00015—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed as prior art
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1432—Central processing unit [CPU]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Geometry (AREA)
- Ceramic Engineering (AREA)
Abstract
電子回路チップパッケージ用のインターポーザを提供する。
【解決手段】
電子回路チップパッケージ用のインターポーザは、基板、凹部、第1の導電ビア、及び第2の導電ビアを含み得る。基板は、第1の表面と、第1の表面に対して実質的に平行であり且つ反対側の第2の表面と、第1の表面及び第2の表面に実質的に平行な第3の表面と、第1の表面及び第3の表面に対して実質的に直角であり且つ交わる直交表面とを有し得る。凹部は、基板内に形成され、且つ第3の表面及び直交表面によって画成され得る。第1の導電ビアは、第2の表面から第1の表面まで通り得る。第2の導電ビアは、第2の表面から第3の表面まで通り得る。
【選択図】 図2A
Description
202 パッケージ基板
204、700 インターポーザ
206 第1のチップ
208 第2のチップ
210 ファイバ(細長い伝送媒体)
212 ヒートシンク
214、704 インターポーザの基板
216、720 凹部
218 第1の導電ビア
220 第2の導電ビア
222、708 第1の表面
224、710 第2の表面
226、722 第3の表面
228、724 直交表面
230 結合器
232 ドライバ
234 側面部品
236 バッフル板
302 延長部
304 第1のノッチ
308 第2のノッチ
402 流路
404 流体溜め
406 流体ガイド
408 第1の突起
410 第2の突起
700 インターポーザ
704 インターポーザの基板
706 導電ビア
712 導電層
720 凹部
728 接合パッド
Claims (20)
- 電子回路チップパッケージ用のインターポーザであって、
第1の表面と、前記第1の表面に対して実質的に平行であり且つ反対側の第2の表面と、前記第1の表面及び前記第2の表面に実質的に平行な第3の表面と、前記第1の表面及び前記第3の表面に対して実質的に直角であり且つ交わる直交表面と、を有する基板と、
前記基板内に形成され、且つ前記第3の表面及び前記直交表面によって画成された凹部と、
前記第2の表面から前記第1の表面まで通る第1の複数の導電ビアと、
前記第2の表面から前記第3の表面まで通る第2の複数の導電ビアと、
を有するインターポーザ。 - 前記基板は、金属、誘電体、又は半導体を有する、請求項1に記載のインターポーザ。
- 前記第1の複数の導電ビアは、前記第2の表面にマウントされる第1のチップを、前記第1の表面に結合されるパッケージ基板に電気的に結合するように構成され、且つ
前記第2の複数の導電ビアは、前記第2の表面にマウントされる前記第1のチップを、前記凹部内で前記第3の表面にマウントされる第2のチップに電気的に結合するように構成される、
請求項1又は2に記載のインターポーザ。 - 当該インターポーザは更に、前記直交表面とは反対側の前記凹部の側面、を画成する側面部品を有し、前記側面部品は、複数の貫通路を画成し、前記複数の貫通路の各々は、前記第3の表面に実質的に平行な方向に前記複数の貫通路のうちの対応する1つを通って前記第2のチップから前記凹部の外まで延在する細長い伝送媒体、を受け入れるように構成される、請求項3に記載のインターポーザ。
- 前記基板は更に、前記第2の表面から遠ざかる方向に前記第3の表面から延在した延長部を含み、前記延長部は、前記側面部品と協働して前記貫通路を画成する、請求項4に記載のインターポーザ。
- 前記基板及び前記側面部品と協働して前記凹部内に前記第2のチップを囲い込むように構成されたバッフル板、を更に有する請求項4に記載のインターポーザ。
- 電子回路チップパッケージのインターポーザを形成することを有する方法であって、
前記インターポーザを形成することは、
第1の表面と、前記第1の表面に対して実質的に平行であり且つ反対側の第2の表面と、を有する基板を形成し、
前記基板内に複数の導電ビアを形成し、
前記第1の表面に実質的に平行な前記基板の第3の表面と、前記第1の表面及び前記第3の表面に対して実質的に直角であり且つ交わる直交表面と、によって画成される凹部を、前記基板内に形成し、前記複数の導電ビアのうちの第1のものが前記第2の表面から前記第3の表面まで通り、且つ
前記複数の導電ビアのうちの前記第1のものに電気的に結合された第1の接合パッドを、前記第3の表面上に形成する
ことを有する、
方法。 - 前記凹部を前記基板内に形成することは、前記第1の表面から前記第3の表面まで、前記基板の一部と前記複数の導電ビアのうちの前記第1のものの一部とを除去することを含む、請求項7に記載の方法。
- 前記基板の前記一部と前記複数の導電ビアのうちの前記第1のものの前記一部とが、実質的に同時に、あるいは順次に除去される、請求項8に記載の方法。
- 前記複数の導電ビアは、第1の複数の導電ビアと第2の複数の導電ビアとを含み、前記第1の複数の導電ビアの各々は、前記第1の表面から前記第2の表面まで通り、前記第2の複数の導電ビアは、前記複数の導電ビアのうちの前記第1のものを含み、且つ前記第2の複数の導電ビアの各々は、前記第2の表面から前記第3の表面まで通り、
当該方法は更に、
前記基板の前記第2の表面に第1のチップをマウントすることと、
前記凹部内で前記基板の前記第3の表面に第2のチップをマウントして、前記第2の複数の導電ビアが前記第1のチップを前記第2のチップに電気的に結合するようにすることと、
前記基板の前記第1の表面を前記電子回路チップパッケージのパッケージ基板に結合して、前記第1の複数の導電ビアが前記第1のチップを前記パッケージ基板に電気的に結合するようにすることと
を有する、請求項7乃至9の何れか一項に記載の方法。 - 前記凹部は更に、前記第2の表面から遠ざかる方向に前記第3の表面から延在する前記基板の延長部によって画成され、
前記インターポーザを形成することは更に、
前記基板の前記延長部と協働して、前記直交表面とは反対側の前記凹部の側面を画成する側面部品を形成し、
前記側面部品に面する前記延長部の表面に第1のノッチを形成し、
前記延長部に面する前記側面部品の表面に第2のノッチを形成し、
前記第3の表面に実質的に平行な方向に前記凹部の外まで延在する細長い伝送媒体を、前記第2のチップに通信可能に結合し、且つ
前記第1のノッチと前記第2のノッチとが、前記細長い伝送媒体が前記凹部の外まで延在するのに通る貫通路を形成するよう、前記延長部に対して前記側面部品を固定する
ことを含む、
請求項10に記載の方法。 - 前記インターポーザを形成することは更に、
バッフル板を形成し、
前記直交表面と前記第1の表面とが交わるところで前記基板に第1の突起を形成し、
前記側面部品に第2の突起を形成し、前記第1の突起及び前記第2の突起がバッフル板台座を画成し、且つ
前記バッフル板を前記バッフル板台座に取り付け、前記バッフル板と前記基板と前記側面部品とが協働して前記凹部内に前記第2のチップを囲い込む、
ことを含む、
請求項11に記載の方法。 - 前記基板、前記側面部品、及び前記バッフル板のうちの少なくとも1つを貫く流路を形成し、且つ
前記凹部へ、前記凹部から、あるいは前記凹部へ及び前記凹部からの双方で、前記流路を通じて流体を搬送するように構成された流体ガイドを、前記流路に結合する、
ことを更に有する請求項12に記載の方法。 - 前記第1の接合パッドは、前記第3の表面上に、
前記複数の導電ビアのうちの前記第1のものに電気的に結合された導電層を、前記第2の表面上に形成し、
前記基板及び前記導電層を電解液槽内に置き、
前記導電層に電流を印加し、且つ
前記第1の接合パッドが前記複数の導電ビアのうちの前記第1のものに電気的に結合されるよう、前記第1の接合パッドを前記第3の表面上に形成する
ことによって形成される、
請求項7乃至13の何れか一項に記載の方法。 - パッケージ基板と、
第1の表面と、前記第1の表面に対して実質的に平行であり且つ反対側の第2の表面と、を有する基板を含むインターポーザであって、前記第1の表面が前記パッケージ基板に結合されている、インターポーザと、
前記基板の前記第2の表面にマウントされた第1のチップであり、前記基板は、前記第2の表面にマウントされた該第1のチップを、前記第1の表面に結合された前記パッケージ基板に電気的に結合する第1の複数の導電ビアを含む、第1のチップと、
前記パッケージ基板に面する前記基板の第3の表面に凹部内でマウントされた第2のチップであり、前記凹部は、前記第1の表面に実質的に平行な前記第3の表面と、前記第1の表面及び前記第3の表面に対して実質的に直角であり且つ交わる直交表面とによって画成され、前記基板は、前記第2の表面にマウントされた前記第1のチップを、前記第3の表面に結合された該第2のチップに電気的に結合する第2の複数の導電ビアを含む、第2のチップと、
を有する電子回路チップパッケージ。 - 前記第1のチップは中央演算処理ユニット(CPU)を有し、前記第2のチップはフォトニック集積回路(PIC)を有する、請求項15に記載の電子回路チップパッケージ。
- 前記インターポーザの前記基板の前記第2の表面に結合された前記第1のチップの正面、に対して実質的に平行であり且つ反対側の前記第1のチップの裏面、に結合されたヒートシンク、を更に有する請求項15又は16に記載の電子回路チップパッケージ。
- 前記第2の複数の導電ビアは、前記第1のチップのドライバを前記第2のチップに電気的に結合する、請求項15乃至17の何れか一項に記載の電子回路チップパッケージ。
- 前記インターポーザの前記凹部は、少なくとも部分的に前記基板によって形成されるエンクロージャによって包囲され、前記インターポーザは、前記エンクロージャを通り抜ける少なくとも1つの流路を画成し、当該電子回路チップパッケージは更に、
流体溜めと、
前記流路と前記流体溜めとの間に結合された流体ガイドであり、前記流体溜めと前記凹部との間で流体を搬送するように構成された流体ガイドと
を有する、請求項15乃至18の何れか一項に記載の電子回路チップパッケージ。 - 前記第2のチップに通信可能に結合されて、前記第3の表面に実質的に平行な方向に前記エンクロージャを貫いて前記凹部の外まで延在した、複数の細長い伝送媒体、を更に有する請求項19に記載の電子回路チップパッケージ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/148,557 | 2014-01-06 | ||
US14/148,557 US9496248B2 (en) | 2014-01-06 | 2014-01-06 | Interposer for integrated circuit chip package |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015130503A true JP2015130503A (ja) | 2015-07-16 |
JP6447114B2 JP6447114B2 (ja) | 2019-01-09 |
Family
ID=53495798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014262544A Active JP6447114B2 (ja) | 2014-01-06 | 2014-12-25 | 集積回路チップパッケージ用のインターポーザ |
Country Status (2)
Country | Link |
---|---|
US (1) | US9496248B2 (ja) |
JP (1) | JP6447114B2 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112015006958T5 (de) * | 2015-09-25 | 2018-07-19 | Intel Corporation | Gehäuseintegrierte Mikrokanäle |
US20230296853A9 (en) | 2015-10-08 | 2023-09-21 | Teramount Ltd. | Optical Coupling |
US11585991B2 (en) | 2019-02-28 | 2023-02-21 | Teramount Ltd. | Fiberless co-packaged optics |
US9804334B2 (en) | 2015-10-08 | 2017-10-31 | Teramount Ltd. | Fiber to chip optical coupler |
US10564374B2 (en) * | 2015-10-08 | 2020-02-18 | Teramount Ltd. | Electro-optical interconnect platform |
US10880994B2 (en) | 2016-06-02 | 2020-12-29 | Intel Corporation | Top-side connector interface for processor packaging |
US10634734B2 (en) | 2016-07-15 | 2020-04-28 | Tdk Corporation | Sensor unit |
WO2018125213A1 (en) * | 2016-12-30 | 2018-07-05 | Intel Corporation | Recessed semiconductor die in a die stack to accommodate a component |
US11333907B2 (en) | 2017-05-23 | 2022-05-17 | Rockley Photonics Limited | Optical engine |
KR102404058B1 (ko) | 2017-12-28 | 2022-05-31 | 삼성전자주식회사 | 반도체 패키지 |
WO2019197896A1 (en) | 2018-04-12 | 2019-10-17 | Rockley Photonics Limited | Electro-optical package and method of fabrication |
US11573387B2 (en) | 2018-04-12 | 2023-02-07 | Rockley Photonics Limited | Optical engine |
US10872854B2 (en) | 2018-04-25 | 2020-12-22 | Rockley Photonics Limited | Electro-optical package and method of fabrication |
US11152308B2 (en) | 2018-11-05 | 2021-10-19 | Ii-Vi Delaware, Inc. | Interposer circuit |
FR3089310A1 (fr) * | 2018-12-04 | 2020-06-05 | Stmicroelectronics (Grenoble 2) Sas | Dispositif électronique comprenant une puce électronique pourvue d’un câble optique |
US11209598B2 (en) | 2019-02-28 | 2021-12-28 | International Business Machines Corporation | Photonics package with face-to-face bonding |
US11300740B1 (en) * | 2021-03-17 | 2022-04-12 | Oprocessor Inc | Optical module package |
US11835777B2 (en) * | 2022-03-18 | 2023-12-05 | Celestial Ai Inc. | Optical multi-die interconnect bridge (OMIB) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001274530A (ja) * | 2000-01-17 | 2001-10-05 | Hitachi Aic Inc | プリント配線板 |
JP2007067215A (ja) * | 2005-08-31 | 2007-03-15 | Sanyo Electric Co Ltd | 回路基板、回路基板の製造方法および回路装置 |
JP2012069882A (ja) * | 2010-09-27 | 2012-04-05 | Panasonic Corp | 光モジュール |
US20130230272A1 (en) * | 2012-03-01 | 2013-09-05 | Oracle International Corporation | Chip assembly configuration with densely packed optical interconnects |
JP2013232022A (ja) * | 2013-08-23 | 2013-11-14 | Toppan Printing Co Ltd | 光基板およびその製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4891762A (en) * | 1988-02-09 | 1990-01-02 | Chotiros Nicholas P | Method and apparatus for tracking, mapping and recognition of spatial patterns |
US4967260A (en) * | 1988-05-04 | 1990-10-30 | International Electronic Research Corp. | Hermetic microminiature packages |
US5199165A (en) * | 1991-12-13 | 1993-04-06 | Hewlett-Packard Company | Heat pipe-electrical interconnect integration method for chip modules |
US5939782A (en) * | 1998-03-03 | 1999-08-17 | Sun Microsystems, Inc. | Package construction for integrated circuit chip with bypass capacitor |
JP3109477B2 (ja) * | 1998-05-26 | 2000-11-13 | 日本電気株式会社 | マルチチップモジュール |
TW511409B (en) * | 2000-05-16 | 2002-11-21 | Hitachi Aic Inc | Printed wiring board having cavity for mounting electronic parts therein and method for manufacturing thereof |
US6686653B2 (en) * | 2000-06-28 | 2004-02-03 | Institut National D'optique | Miniature microdevice package and process for making thereof |
JP3937840B2 (ja) * | 2002-01-10 | 2007-06-27 | 株式会社日立製作所 | 高周波モジュール |
US20060239612A1 (en) | 2002-06-19 | 2006-10-26 | Peter De Dobbelaere | Flip-chip devices formed on photonic integrated circuit chips |
US6774366B1 (en) * | 2003-08-07 | 2004-08-10 | The United States Of America As Represented By The Secretary Of The Army | Image integration and multiple laser source projection |
TWI251916B (en) * | 2003-08-28 | 2006-03-21 | Phoenix Prec Technology Corp | Semiconductor assembled heat sink structure for embedding electronic components |
US7139448B2 (en) | 2003-11-20 | 2006-11-21 | Anvik Corporation | Photonic-electronic circuit boards |
US7434308B2 (en) * | 2004-09-02 | 2008-10-14 | International Business Machines Corporation | Cooling of substrate using interposer channels |
US7532785B1 (en) | 2007-10-23 | 2009-05-12 | Hewlett-Packard Development Company, L.P. | Photonic interconnects for computer system devices |
JP2012138473A (ja) * | 2010-12-27 | 2012-07-19 | Zycube:Kk | 半導体デバイス・電子部品の実装構造 |
-
2014
- 2014-01-06 US US14/148,557 patent/US9496248B2/en active Active
- 2014-12-25 JP JP2014262544A patent/JP6447114B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001274530A (ja) * | 2000-01-17 | 2001-10-05 | Hitachi Aic Inc | プリント配線板 |
JP2007067215A (ja) * | 2005-08-31 | 2007-03-15 | Sanyo Electric Co Ltd | 回路基板、回路基板の製造方法および回路装置 |
JP2012069882A (ja) * | 2010-09-27 | 2012-04-05 | Panasonic Corp | 光モジュール |
US20130230272A1 (en) * | 2012-03-01 | 2013-09-05 | Oracle International Corporation | Chip assembly configuration with densely packed optical interconnects |
JP2013232022A (ja) * | 2013-08-23 | 2013-11-14 | Toppan Printing Co Ltd | 光基板およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP6447114B2 (ja) | 2019-01-09 |
US9496248B2 (en) | 2016-11-15 |
US20150194413A1 (en) | 2015-07-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6447114B2 (ja) | 集積回路チップパッケージ用のインターポーザ | |
JP6766049B2 (ja) | パッケージ化された光電子モジュール | |
US9391708B2 (en) | Multi-substrate electro-optical interconnection system | |
US10082633B2 (en) | Wafer-level integrated opto-electronic module | |
KR101831275B1 (ko) | 램프-스택 칩 패키지의 광 통신 | |
US10591689B2 (en) | Reflow-compatible optical I/O assembly adapter | |
TWI583086B (zh) | 光發射器散熱結構及包含其的光發射器 | |
CN110837150B (zh) | 互连封装件、互连器件和制成光学通信的互连器件的方法 | |
US9360644B2 (en) | Laser die and photonics die package | |
US20160085038A1 (en) | Integrated chip package with optical interface | |
TW201725408A (zh) | 用於基板上晶圓上晶片總成之方法及系統 | |
TWI493636B (zh) | 具有集成插槽的系統級封裝及用於製造其的方法 | |
US20170303431A1 (en) | Silicon Cooling Plate With An Integrated PCB | |
US20160150678A1 (en) | Silicon Cooling Plate With An Integrated PCB | |
WO2018178745A1 (en) | Chip-carrier socket for microfluidic-cooled three-dimensional electronic/photonic integrated circuits | |
US20210048587A1 (en) | Photonic optoelectronic module packaging | |
JP2015204456A (ja) | チップパッケージ及びその形成方法 | |
KR20220000339A (ko) | 재분배 층 및 emib 커넥터를 갖는 통합형 포토닉스 및 프로세서 패키지 | |
TW201943038A (zh) | 具有電連接與光學連通的積體電路封裝以及製造此積體電路封裝的方法 | |
JP2014507809A (ja) | Pcb基板に埋め込まれたチップモジュール | |
CN108983374B (zh) | 一种光模块封装结构及制作方法 | |
JP2004235636A (ja) | 可撓性を有する電気的接続を用いたasicモジュール上の集積化vcsel | |
CN114664806A (zh) | 具有直接光互连的可堆叠光子管芯 | |
US11762155B2 (en) | Photonics packaging platform | |
US20230244045A1 (en) | OPTO-Electronic Integrated Module |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20171113 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180709 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180717 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180914 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20181106 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20181119 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6447114 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |