JP2015129088A - セラミック構造体およびセラミック構造体の製造方法 - Google Patents
セラミック構造体およびセラミック構造体の製造方法 Download PDFInfo
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
- C04B35/195—Alkaline earth aluminosilicates, e.g. cordierite or anorthite
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B35/64—Burning or sintering processes
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- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
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- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6562—Heating rate
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
- C04B2235/661—Multi-step sintering
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- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249967—Inorganic matrix in void-containing component
- Y10T428/249969—Of silicon-containing material [e.g., glass, etc.]
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- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
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- Compositions Of Oxide Ceramics (AREA)
- Processes For Solid Components From Exhaust (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Abstract
Description
Claims (6)
- 粘土材料と有機材料とを含む原料を、コアおよび外皮部分を有する未焼成構造体の形態に形成する工程と、
前記未焼成構造体を焼成環境中で焼成する工程であって、前記焼成は、
前記未焼成構造体のコアのごく近傍で前記粘土材料の脱水が開始される前に前記有機材料の焼き払いを実質的に完了させるのに十分な第1の時間にわたり、約12℃/時以下の平均昇温速度で、焼成環境を約400℃〜約425℃の範囲にある第1の閾値温度まで加熱すること、および
粘土脱水が起こる第2の時間にわたり、前記第1の閾値温度から前記第1の閾値温度より高く約750℃以下の第2の閾値温度まで約11℃/時〜約75℃/時の範囲の平均昇温速度で前記焼成環境を加熱すること、
を含むものである、焼成する工程と、
を含み、
前記第1の時間および前記第2の時間の合計が約62時間以下である、
方法により製造される、多孔性セラミック構造体。 - 前記第1の閾値温度が約425℃であることを特徴とする、請求項1記載のセラミック構造体。
- 前記第2の閾値温度が約750℃であることを特徴とする、請求項1または2記載のセラミック構造体。
- 前記第1の時間にわたり前記焼成環境を前記第1の閾値温度まで加熱することが、約24時間〜約46時間の範囲にある所定の最小時間にわたり前記焼成環境を前記第1の閾値温度まで加熱することを含むことを特徴とする、請求項1から3いずれか1項記載のセラミック構造体。
- 前記第1の時間にわたり前記焼成環境を前記第1の閾値温度まで加熱することが、前記未焼成構造体のコアのごく近傍で前記粘土材料の脱水が開始される前に前記有機材料の焼き払いの実質的完了を達成するに十分な時間にわたり前記焼成環境を前記第1の閾値温度に保持することを含むことを特徴とする請求項1から4いずれか1項記載のセラミック構造体。
- 粘土材料と有機材料とを含む原料を、コアおよび外皮部分を有する未焼成構造体の形態に形成する工程と、
前記未焼成構造体を焼成環境中で焼成する工程であって、前記焼成は、
約24時間〜約46時間の範囲にある第1の段階において、(i)焼成環境を、約180℃から、約400℃〜約425℃の範囲にある第1の閾値温度まで、約12℃/時以下の平均昇温速度で加熱し、(ii)前記未焼成構造体のコアのごく近傍で前記粘土材料の脱水が開始される前に前記有機材料の焼き払いの実質的完了を達成するに十分な時間にわたり前記焼成環境を前記第1の閾値温度に保持すること、
第2の段階において、前記第1の閾値温度から前記第1の閾値温度より高く約750℃以下の第2の閾値温度まで約11℃/時〜約75℃/時の範囲の平均昇温速度で前記焼成環境を加熱すること、
を含むものである、焼成する工程と、
を含み、
前記第1の段階および前記第2の段階の合計時間が約62時間以下である、
方法により製造される、多孔性セラミック構造体。
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US12/394,874 | 2009-02-27 | ||
US12/394,874 US8444737B2 (en) | 2009-02-27 | 2009-02-27 | Ceramic structures and methods of making ceramic structures |
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JP2011552168A Division JP2012519137A (ja) | 2009-02-27 | 2010-02-26 | セラミック構造体およびセラミック構造体の製造方法 |
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JP2015129088A true JP2015129088A (ja) | 2015-07-16 |
JP5957110B2 JP5957110B2 (ja) | 2016-07-27 |
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EP (1) | EP2401244B1 (ja) |
JP (2) | JP2012519137A (ja) |
CN (1) | CN102414145B (ja) |
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US9604249B2 (en) | 2012-07-26 | 2017-03-28 | Applied Materials, Inc. | Innovative top-coat approach for advanced device on-wafer particle performance |
US9343289B2 (en) | 2012-07-27 | 2016-05-17 | Applied Materials, Inc. | Chemistry compatible coating material for advanced device on-wafer particle performance |
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CN105517975A (zh) * | 2013-03-08 | 2016-04-20 | 康宁股份有限公司 | 陶瓷的快速烧制方法 |
US9865434B2 (en) | 2013-06-05 | 2018-01-09 | Applied Materials, Inc. | Rare-earth oxide based erosion resistant coatings for semiconductor application |
US9850568B2 (en) | 2013-06-20 | 2017-12-26 | Applied Materials, Inc. | Plasma erosion resistant rare-earth oxide based thin film coatings |
US9452578B2 (en) * | 2013-07-26 | 2016-09-27 | Corning Incorporated | Fast firing method for high porosity ceramics |
US9446560B2 (en) * | 2013-07-26 | 2016-09-20 | Corning Incorporated | Fast firing method for high porosity ceramics |
CN107635947B (zh) | 2015-05-07 | 2021-03-23 | 康宁股份有限公司 | 烧制陶瓷蜂窝坯体的方法 |
US11047035B2 (en) | 2018-02-23 | 2021-06-29 | Applied Materials, Inc. | Protective yttria coating for semiconductor equipment parts |
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2009
- 2009-02-27 US US12/394,874 patent/US8444737B2/en active Active
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- 2010-02-26 CN CN201080019240.6A patent/CN102414145B/zh active Active
- 2010-02-26 EP EP10706871.0A patent/EP2401244B1/en active Active
- 2010-02-26 PL PL10706871T patent/PL2401244T3/pl unknown
- 2010-02-26 WO PCT/US2010/025478 patent/WO2010099366A1/en active Application Filing
- 2010-02-26 JP JP2011552168A patent/JP2012519137A/ja active Pending
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JP2012519137A (ja) | 2012-08-23 |
JP5957110B2 (ja) | 2016-07-27 |
US20100218472A1 (en) | 2010-09-02 |
CN102414145A (zh) | 2012-04-11 |
CN102414145B (zh) | 2014-07-16 |
EP2401244B1 (en) | 2017-10-11 |
EP2401244A1 (en) | 2012-01-04 |
US8444737B2 (en) | 2013-05-21 |
PL2401244T3 (pl) | 2017-12-29 |
WO2010099366A1 (en) | 2010-09-02 |
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