JP2015110504A - 圧電セラミックス、その製造方法、及び、それを有する圧電セラミックスピーカ - Google Patents
圧電セラミックス、その製造方法、及び、それを有する圧電セラミックスピーカ Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 65
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000013078 crystal Substances 0.000 claims abstract description 8
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 7
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 7
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 5
- 229910052745 lead Inorganic materials 0.000 claims abstract description 4
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 4
- 239000002245 particle Substances 0.000 claims description 35
- 239000000203 mixture Substances 0.000 claims description 32
- 238000010304 firing Methods 0.000 claims description 11
- 238000002156 mixing Methods 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims 1
- 239000012071 phase Substances 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 12
- 239000000843 powder Substances 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
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- 239000002002 slurry Substances 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 238000000748 compression moulding Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000003746 solid phase reaction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000002847 impedance measurement Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- -1 preferably Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Abstract
【解決手段】Pb、Nb、Zn、Ti、Zrを含むペロブスカイト型結晶構造を有するセラミックス粒子からなる主相と、主相中に散在するZnO粒子からなる副相と、を有する圧電セラミックス。
【選択図】なし
Description
好ましくは、主相は、Pb{(Zr(1-a)Tia)x・(Ni1/3Nb2/3)y・(Zn1/3Nb2/3)z}O3(但し、0<x≦0.85、0≦y<1、0<z<1、x+y+z=1、0.45≦a≦0.60である。)なる組成のセラミックス粒子からなり、より好ましくは、前記x及びyについて、0<x<0.75、0<y<1である。また、好ましくは、副相としてのZnO粒子の大きさが0.4〜1.6μmである。
本発明の圧電セラミックスの好適な製造方法として、Pb{(Zr(1-a)Tia)x・(Ni1/3Nb2/3)y・(Zn1/3Nb2/3)z}O3(但し、0<x≦0.75、0≦y<1、0<z<1、x+y+z=1、0.45≦a≦0.60である。)なる組成のペロブスカイト型結晶構造を有するセラミックス粒子からなる組成物を得るステップと、得られた組成物とZnO粒子とを混合し、成形し、焼成するステップと、を有する製造方法が提供される。前記製造方法において、好ましくは、0<x<0.75、0<y<1である。
本発明によれば、上記圧電セラミックスを有する音響素子を備える圧電セラミックスピーカも提供される。
主相のセラミックス粒子は、Pb、Nb、Zn、Ti、Zrをすべて含み、好ましくはNiをさらに含むペロブスカイト型結晶構造を有する。本発明の圧電セラミックスは主として主相が占めていて、主相の中に副相が散在している。副相はZnO粒子からなる。
まず、PbO,ZrO2,TiO2,NiO,ZnO,Nb2O5からなる原料粉末を各々準備し、これらを秤量し、ポットミル内にジルコニアビーズ、イオン交換水と共に入れ、16時間湿式混合し、得られたスラリーをバットに移し、乾燥器内に入れ、150℃で乾燥させた。原料の投入量は、Pb{(Zr(1-a)Tia)x・(Ni1/3Nb2/3)y・(Zn1/3Nb2/3)z}O3なる組成のセラミックス粒子における各金属の存在量比を反映させた。ここで、a=0.548、x=0.636、y=0.14、z=0.224とした。
主相のペロブスカイト化合物の組成をPb{(Zr(1-a)Tia)x・(Ni1/3Nb2/3)y・(Zn1/3Nb2/3)z}O3なる組成(但し、a=0.49、x=0.8、y=0、z=0.2)としたことのほかは上記と同様にして(それ故、NiOを用いなかった。)、副相としてのZnO粒子を添加してなる実施例3とそのような添加が無い比較例2の試料を製造して、上述のように分極処理、圧電特性の算出を行った。
実施例1、2、3では、副相部分を100個見つけだし、それらの直径を画像から測定して平均することにより、ZnO粒子の大きさを算出した。
ZnOの大きさ(μm) kr(%) 比誘電率(ε 33 t /ε 0 )
比較例1 0 66.7 3114
比較例2 0 68. 0 1831
実施例1 0.4 68.0 3283
実施例2 1.6 67.8 3271
実施例3 0.9 69.1 1992
音圧は、krと比誘電率との関係によって決まる。
すなわち、krが69以上で、比誘電率が1900以上あれば、所定の音圧を確保できる。またはkrが67以上で、比誘電率が3000以上あれば、所定の音圧を確保できる。
本実施例ではNiが含まれると、比誘電率が高くなり、本実施例ではNiが含まれないとKrが高くなることが判明した。
12A…接着剤 14…駆動板
14A〜14C…積層シート 14D〜14F…スルーホール
16…振動抑制材 20…筐体
32,34…電極 36…スルーホール導体
Claims (7)
- Pb、Nb、Zn、Ti、Zrを含むペロブスカイト型結晶構造を有するセラミックス粒子からなる主相と、
ZnO粒子からなる副相と、
を有する圧電セラミックス。 - 前記ZnO粒子の平均粒径が0.4〜1.6μmである請求項1記載の圧電セラミックス。
- 前記主相が、
組成式Pb{(Zr(1-a)Tia)x・(Ni1/3Nb2/3)y・(Zn1/3Nb2/3)z}O3
(但し、0<x≦0.85、0≦y<1、0<z<1、x+y+z=1、0.45≦a≦0.60である。)
で表されるセラミックス粒子からなる請求項1又は2記載の圧電セラミックス。 - 前記x及びyについて、0<x<0.75、かつ、0<y<1である請求項3記載の圧電セラミックス。
- 請求項1〜4のいずれか1項記載の圧電セラミックスを有する音響素子を備える圧電セラミックスピーカ。
- Pb{(Zr(1-a)Tia)x・(Ni1/3Nb2/3)y・(Zn1/3Nb2/3)z}O3
(但し、0<x≦0.85、0≦y<1、0<z<1、x+y+z=1、0.45≦a≦0.60である。)なる組成のペロブスカイト型結晶構造を有するセラミックス粒子からなる組成物を得るステップと、
得られた組成物とZnO粒子とを混合し、成形し、焼成するステップと、
を有する圧電セラミックスの製造方法。 - 前記x及びyについて、0<x<0.75、かつ、0<y<1である請求項6記載の製造方法。
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US14/522,280 US9786833B2 (en) | 2013-11-08 | 2014-10-23 | Piezoelectric ceramic, method of manufacturing same, and piezoelectric ceramic speaker using same |
US15/695,993 US10418542B2 (en) | 2013-11-08 | 2017-09-05 | Piezoelectric ceramic speaker using vibration sheet formed with piezoelectric ceramic |
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US20150132529A1 (en) | 2015-05-14 |
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