JP2015102689A5 - - Google Patents
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- Publication number
- JP2015102689A5 JP2015102689A5 JP2013243317A JP2013243317A JP2015102689A5 JP 2015102689 A5 JP2015102689 A5 JP 2015102689A5 JP 2013243317 A JP2013243317 A JP 2013243317A JP 2013243317 A JP2013243317 A JP 2013243317A JP 2015102689 A5 JP2015102689 A5 JP 2015102689A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- beams
- vibration
- piezoelectric body
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013243317A JP6231361B2 (ja) | 2013-11-25 | 2013-11-25 | 振動素子および光走査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013243317A JP6231361B2 (ja) | 2013-11-25 | 2013-11-25 | 振動素子および光走査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015102689A JP2015102689A (ja) | 2015-06-04 |
| JP2015102689A5 true JP2015102689A5 (enExample) | 2017-01-12 |
| JP6231361B2 JP6231361B2 (ja) | 2017-11-15 |
Family
ID=53378420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013243317A Expired - Fee Related JP6231361B2 (ja) | 2013-11-25 | 2013-11-25 | 振動素子および光走査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6231361B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6802125B2 (ja) * | 2017-08-24 | 2020-12-16 | 株式会社豊田中央研究所 | 振動ジャイロ |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11212002A (ja) * | 1998-01-23 | 1999-08-06 | Seiko Epson Corp | 空間光変調器および投写型表示装置 |
| JP2006310577A (ja) * | 2005-04-28 | 2006-11-09 | Canon Inc | 反射ミラー装置およびそれを用いた露光装置 |
| US20130278984A1 (en) * | 2011-02-25 | 2013-10-24 | Takeshi Honda | Optical scanning device |
| WO2013161271A1 (ja) * | 2012-04-23 | 2013-10-31 | キヤノン電子株式会社 | 光走査装置及び画像読取装置 |
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2013
- 2013-11-25 JP JP2013243317A patent/JP6231361B2/ja not_active Expired - Fee Related