JP2015093875A - 樹脂組成物、先供給型半導体封止剤および半導体装置 - Google Patents
樹脂組成物、先供給型半導体封止剤および半導体装置 Download PDFInfo
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- JP2015093875A JP2015093875A JP2013231976A JP2013231976A JP2015093875A JP 2015093875 A JP2015093875 A JP 2015093875A JP 2013231976 A JP2013231976 A JP 2013231976A JP 2013231976 A JP2013231976 A JP 2013231976A JP 2015093875 A JP2015093875 A JP 2015093875A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Wire Bonding (AREA)
- Sealing Material Composition (AREA)
- Polymerisation Methods In General (AREA)
- Polymerization Catalysts (AREA)
- Graft Or Block Polymers (AREA)
Abstract
Description
(F)成分は、樹脂組成物の全質量に対し50〜65質量%含まれることが好ましい。
表1および表2は、実施例1〜10および比較例1〜4の樹脂組成物の組成、および後述する評価の結果を示す。表1および表2において、樹脂組成物の組成は質量部で表されている。また、評価結果は、(不良品数)/(試料数)で表されている。
実施例1〜10および比較例1〜4に対し、実装試験を行った。試験に用いた試料は、所定の形状の半導体チップを所定の形状の基板に実装することにより作製した。図2は、試料の作成に用いた基板および半導体チップの概形を示している。実装には、パナソニックファクトリーソリューションズ株式会社製のフリップチップボンダーFCB3を用いた。実装の条件は以下のとおりである。ステージ温度70℃、125℃で30分で基板ベーク、半導体チップを基板に載せた後、図3の温度プロファイルに従って樹脂組成物の硬化および半導体チップと基板の接合を行った。荷重は15Nであった。接合後、後硬化として、165℃で60分熱処理した。
実施例1〜10および比較例1〜4に対し、ヒートショック試験を行った。実装性の評価に用いた試料のうち5つ(半導体チップを研磨していないもの)の試料を、液槽ヒートサイクル試験機に投入した。液槽ヒートサイクル試験機においては、最低温度−55℃、最高温度125℃(各5分)のヒートサイクルが繰り返された。ヒートサイクル数が100回、250回、500回、750回、および1000回となったところで試料を液槽ヒートサイクル試験機から取り出し、超音波画像観察、顕微鏡観察(外周部)、および抵抗値測定により評価した。超音波画像観察においては、デラミネーション(樹脂組成物の剥がれ)が起きていたものを不良品と判断した。外周部の顕微鏡観察においては、フィレットにクラックが確認されたものを不良品と判断した。抵抗値測定においては、実装性の評価における抵抗値測定と同様、28〜32Ωの抵抗値を示したものを良品と判断し、この範囲外の抵抗値を示したものを不良品と判断した。
Claims (8)
- (G)シランカップリング剤を含む
ことを特徴とする請求項1ないし3のいずれか一項に記載の樹脂組成物。 - (H)ビスマレイミドを含む
ことを特徴とする請求項1ないし5のいずれか一項に記載の樹脂組成物。 - 請求項1ないし6のいずれか一項に記載の樹脂組成物を含む先供給型半導体封止剤。
- 請求項7に記載の先供給型半導体封止剤を用いて封止された半導体素子を有する半導体装置。
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JP2015093875A true JP2015093875A (ja) | 2015-05-18 |
JP6207348B2 JP6207348B2 (ja) | 2017-10-04 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108713032A (zh) * | 2016-03-24 | 2018-10-26 | 纳美仕有限公司 | 树脂组合物 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20030146521A1 (en) * | 2000-04-10 | 2003-08-07 | Nobuki Tanaka | Die-attaching paste and semiconductor device |
JP2006176576A (ja) * | 2004-12-21 | 2006-07-06 | Dainippon Ink & Chem Inc | 液晶パネルシール用光硬化性組成物及び液晶パネル |
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US20030146521A1 (en) * | 2000-04-10 | 2003-08-07 | Nobuki Tanaka | Die-attaching paste and semiconductor device |
JP2006176576A (ja) * | 2004-12-21 | 2006-07-06 | Dainippon Ink & Chem Inc | 液晶パネルシール用光硬化性組成物及び液晶パネル |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108713032A (zh) * | 2016-03-24 | 2018-10-26 | 纳美仕有限公司 | 树脂组合物 |
CN108713032B (zh) * | 2016-03-24 | 2020-11-10 | 纳美仕有限公司 | 树脂组合物 |
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