JP2015088743A5 - - Google Patents

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Publication number
JP2015088743A5
JP2015088743A5 JP2014195518A JP2014195518A JP2015088743A5 JP 2015088743 A5 JP2015088743 A5 JP 2015088743A5 JP 2014195518 A JP2014195518 A JP 2014195518A JP 2014195518 A JP2014195518 A JP 2014195518A JP 2015088743 A5 JP2015088743 A5 JP 2015088743A5
Authority
JP
Japan
Prior art keywords
outer periphery
dielectric substrate
ceramic dielectric
imaginary line
electrode layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014195518A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015088743A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014195518A priority Critical patent/JP2015088743A/ja
Priority claimed from JP2014195518A external-priority patent/JP2015088743A/ja
Publication of JP2015088743A publication Critical patent/JP2015088743A/ja
Publication of JP2015088743A5 publication Critical patent/JP2015088743A5/ja
Pending legal-status Critical Current

Links

JP2014195518A 2013-09-27 2014-09-25 静電チャック Pending JP2015088743A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014195518A JP2015088743A (ja) 2013-09-27 2014-09-25 静電チャック

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013201240 2013-09-27
JP2013201240 2013-09-27
JP2014195518A JP2015088743A (ja) 2013-09-27 2014-09-25 静電チャック

Publications (2)

Publication Number Publication Date
JP2015088743A JP2015088743A (ja) 2015-05-07
JP2015088743A5 true JP2015088743A5 (https=) 2017-11-02

Family

ID=53051172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014195518A Pending JP2015088743A (ja) 2013-09-27 2014-09-25 静電チャック

Country Status (1)

Country Link
JP (1) JP2015088743A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6124156B2 (ja) * 2015-04-21 2017-05-10 Toto株式会社 静電チャックおよびウェーハ処理装置
JP6903135B2 (ja) 2018-04-05 2021-07-14 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 冷却ガス区画および対応する溝ならびに単極静電クランプ電極パターンを備える静電チャック
CN119678251A (zh) 2022-08-16 2025-03-21 东京毅力科创株式会社 静电吸盘和基片处理装置
CN120077160A (zh) * 2023-09-29 2025-05-30 芝浦机械电子株式会社 靶材接合状态检测方法及成膜装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001219331A (ja) * 2000-02-07 2001-08-14 Ibiden Co Ltd 静電チャック
JP4646461B2 (ja) * 2001-08-10 2011-03-09 京セラ株式会社 電極内蔵セラミック部材及びその製造方法
JP4061131B2 (ja) * 2002-06-18 2008-03-12 キヤノンアネルバ株式会社 静電吸着装置
JP4031419B2 (ja) * 2003-09-19 2008-01-09 日本碍子株式会社 静電チャック及びその製造方法
JP4879929B2 (ja) * 2008-03-26 2012-02-22 日本碍子株式会社 静電チャック及びその製造方法
JP5189928B2 (ja) * 2008-08-18 2013-04-24 日本碍子株式会社 セラミックス部材の作成方法及び静電チャック
JP5969488B2 (ja) * 2011-10-05 2016-08-17 京セラ株式会社 試料保持具

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