JP2015069683A5 - - Google Patents
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- Publication number
- JP2015069683A5 JP2015069683A5 JP2013204451A JP2013204451A JP2015069683A5 JP 2015069683 A5 JP2015069683 A5 JP 2015069683A5 JP 2013204451 A JP2013204451 A JP 2013204451A JP 2013204451 A JP2013204451 A JP 2013204451A JP 2015069683 A5 JP2015069683 A5 JP 2015069683A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- magnetic disk
- abrasive grains
- dresser
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 22
- 238000004519 manufacturing process Methods 0.000 claims 8
- 239000006061 abrasive grain Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 6
- 239000002245 particle Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 3
- 238000007517 polishing process Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013204451A JP6227357B2 (ja) | 2013-09-30 | 2013-09-30 | 磁気ディスク用基板の製造方法および磁気ディスクの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013204451A JP6227357B2 (ja) | 2013-09-30 | 2013-09-30 | 磁気ディスク用基板の製造方法および磁気ディスクの製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015069683A JP2015069683A (ja) | 2015-04-13 |
JP2015069683A5 true JP2015069683A5 (ru) | 2016-10-13 |
JP6227357B2 JP6227357B2 (ja) | 2017-11-08 |
Family
ID=52836192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013204451A Active JP6227357B2 (ja) | 2013-09-30 | 2013-09-30 | 磁気ディスク用基板の製造方法および磁気ディスクの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6227357B2 (ru) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023190428A1 (ja) * | 2022-03-29 | 2023-10-05 | 富士紡ホールディングス株式会社 | 研磨パッド、研磨パッドの製造方法、及び光学材料又は半導体材料の表面を研磨する方法 |
CN114800055A (zh) | 2022-04-28 | 2022-07-29 | 浙江美迪凯光学半导体有限公司 | 一种方形片的抛光工艺 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010107891A (ja) * | 2008-10-31 | 2010-05-13 | Konica Minolta Opto Inc | ウエハレンズ集合体及びその製造方法、レンズユニット、撮像装置 |
JP5233621B2 (ja) * | 2008-12-02 | 2013-07-10 | 旭硝子株式会社 | 磁気ディスク用ガラス基板及びその製造方法。 |
JP5428793B2 (ja) * | 2009-11-17 | 2014-02-26 | 旭硝子株式会社 | ガラス基板研磨方法および磁気記録媒体用ガラス基板の製造方法 |
JP2013052503A (ja) * | 2011-05-20 | 2013-03-21 | Ohara Inc | 光学部品の製造方法 |
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2013
- 2013-09-30 JP JP2013204451A patent/JP6227357B2/ja active Active
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