JP2015068885A5 - - Google Patents

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Publication number
JP2015068885A5
JP2015068885A5 JP2013201045A JP2013201045A JP2015068885A5 JP 2015068885 A5 JP2015068885 A5 JP 2015068885A5 JP 2013201045 A JP2013201045 A JP 2013201045A JP 2013201045 A JP2013201045 A JP 2013201045A JP 2015068885 A5 JP2015068885 A5 JP 2015068885A5
Authority
JP
Japan
Prior art keywords
region
interference filter
reflective film
conductive layer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2013201045A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015068885A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013201045A priority Critical patent/JP2015068885A/ja
Priority claimed from JP2013201045A external-priority patent/JP2015068885A/ja
Priority to US14/487,367 priority patent/US20150092273A1/en
Priority to CN201410505597.5A priority patent/CN104516041A/zh
Publication of JP2015068885A publication Critical patent/JP2015068885A/ja
Publication of JP2015068885A5 publication Critical patent/JP2015068885A5/ja
Withdrawn legal-status Critical Current

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JP2013201045A 2013-09-27 2013-09-27 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 Withdrawn JP2015068885A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013201045A JP2015068885A (ja) 2013-09-27 2013-09-27 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
US14/487,367 US20150092273A1 (en) 2013-09-27 2014-09-16 Interference filter, optical filter device, optical module, and electronic apparatus
CN201410505597.5A CN104516041A (zh) 2013-09-27 2014-09-26 干涉滤波器、光学滤波器装置、光模块以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013201045A JP2015068885A (ja) 2013-09-27 2013-09-27 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器

Publications (2)

Publication Number Publication Date
JP2015068885A JP2015068885A (ja) 2015-04-13
JP2015068885A5 true JP2015068885A5 (enExample) 2016-11-04

Family

ID=52739904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013201045A Withdrawn JP2015068885A (ja) 2013-09-27 2013-09-27 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器

Country Status (3)

Country Link
US (1) US20150092273A1 (enExample)
JP (1) JP2015068885A (enExample)
CN (1) CN104516041A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6671860B2 (ja) * 2015-04-28 2020-03-25 浜松ホトニクス株式会社 光検出装置
WO2020071181A1 (ja) * 2018-10-03 2020-04-09 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6915048B2 (en) * 2001-06-18 2005-07-05 Cidra Corporation Fabry-perot filter/resonator
FR2839812B1 (fr) * 2002-05-17 2005-07-01 Atmel Grenoble Sa Procede de fabrication collective de composants de filtrage optique et plaquette de composants
CN100538432C (zh) * 2006-01-19 2009-09-09 精工爱普生株式会社 波长可变滤波器、波长可变滤波器模块及光谱分析器
US20100296099A1 (en) * 2008-02-06 2010-11-25 Van Brocklin Andrew L Optical device
JP5370246B2 (ja) * 2009-05-27 2013-12-18 セイコーエプソン株式会社 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法
JP2012108220A (ja) * 2010-11-16 2012-06-07 Seiko Epson Corp 光フィルターおよび光機器
US20120154915A1 (en) * 2010-12-21 2012-06-21 Seiko Epson Corporation Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus

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