JP2015058378A - Tool cleaning method and tool cleaning device for machine tool - Google Patents

Tool cleaning method and tool cleaning device for machine tool Download PDF

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JP2015058378A
JP2015058378A JP2013192623A JP2013192623A JP2015058378A JP 2015058378 A JP2015058378 A JP 2015058378A JP 2013192623 A JP2013192623 A JP 2013192623A JP 2013192623 A JP2013192623 A JP 2013192623A JP 2015058378 A JP2015058378 A JP 2015058378A
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tool
cleaning
abrasive grains
cleaning liquid
machine
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JP5827653B2 (en
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藤本 一也
Kazuya Fujimoto
一也 藤本
優 坪井
Masaru Tsuboi
優 坪井
和樹 藤井
Kazuki Fujii
和樹 藤井
拓人 安田
Takuto Yasuda
拓人 安田
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Yasuda Kogyo KK
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Abstract

PROBLEM TO BE SOLVED: To provide a tool cleaning method and a tool cleaning device for a machine tool, which enable foreign matters and an oil content, firmly adhering to a tool by cutting work, to be reliably removed by a simple configuration.SOLUTION: A tool cleaning device for a machine tool includes a cleaning vessel 10 that accommodates powdery abrasive grain 11 and a cleaning fluid 12, and a rotary drive unit 2 that rotatively drives a tool 1. The tool cleaning device for the machine tool makes the tool 1 advance into the cleaning fluid 12 containing the abrasive grain 11 within the cleaning vessel 10, and performs cleaning by rotating the tool 1.

Description

本発明は、工作機械による切削加工において、工具測定器による工具長又は工具径の計測を行う前に、工具に付着した異物を取り除く工作機械の工具洗浄方法及び工具洗浄装置に関する。   The present invention relates to a tool cleaning method and a tool cleaning apparatus for a machine tool that remove foreign matter adhering to a tool before measuring a tool length or a tool diameter with a tool measuring instrument in cutting with a machine tool.

一般的に、工作機械による切削加工の前には、接触式又は非接触式の工具測定器を使用し、工具長や工具径など工具寸法の測定を行っている。この工具寸法の測定時に、工具に付着した異物及び油分を取り除いた状態で、工具長測定又は工具径測定を実施しないと、実際の工具情報(工具長・工具径)とは異なる間違った工具情報で加工が行われることになり、製品の加工精度が低下し、加工された製品が不良品となる場合が生じる。   In general, before cutting with a machine tool, a contact-type or non-contact-type tool measuring instrument is used to measure tool dimensions such as a tool length and a tool diameter. If the tool length measurement or the tool diameter measurement is not performed with the foreign matter and oil adhering to the tool removed when measuring the tool dimensions, incorrect tool information that differs from the actual tool information (tool length / tool diameter) In this case, the processing accuracy is reduced, and the processed product may be defective.

従来、この工具に付着した異物を除去する方法としては、加工前の工具に対するエアーの噴き付けが広く用いられていた。近年は、加工精度の向上に伴って、工具寸法の測定に非接触式のレーザ測定器やCCDカメラが用いられるようになってきた。非接触式の測定器は、測定精度が高く、工具に付着した僅かな異物や油分によって測定誤差が生じることから、工具への洗浄液の噴き付けや、超音波洗浄などの工具洗浄が行なわれるようになってきた。   Conventionally, as a method of removing the foreign matter adhering to the tool, blowing of air to the tool before processing has been widely used. In recent years, with the improvement of machining accuracy, non-contact type laser measuring instruments and CCD cameras have been used for measuring tool dimensions. Non-contact type measuring instruments have high measurement accuracy, and measurement errors occur due to slight foreign matter and oil adhering to the tool, so that cleaning liquid is sprayed onto the tool and tool cleaning such as ultrasonic cleaning is performed. It has become.

工具に洗浄液を噴き付けて異物を除去する方法としては、例えば、レーザ測定器による工具長の測定前に、工具に付着した油膜を取り除くために、揮発性または速乾性の脱脂洗浄剤を封入した気密容器から、脱脂洗浄剤を霧状に噴射して工具を洗浄する方法が知られている(特許文献1参照)。   As a method of removing foreign matters by spraying cleaning liquid on the tool, for example, before measuring the tool length with a laser measuring instrument, a volatile or quick-drying degreasing cleaner is enclosed in order to remove the oil film adhering to the tool. A method of cleaning a tool by spraying a degreasing detergent in a mist form from an airtight container is known (see Patent Document 1).

工具に洗浄液を噴き付けて異物を除去する方法としては、他に、工具に対して洗浄剤を噴射して工具の洗浄を行った後、CCDカメラによって工具の先端を撮像し、この撮影画像から抽出した形状と予め設定した基準の形状とを比較し、工具に付着した異物の有無を判定して、工具に異物が付着していないことを確認したうえで工具の寸法を測定する方法も知られている(特許文献2参照)。   Another method for removing foreign matter by spraying cleaning liquid on the tool is to spray the cleaning agent onto the tool to clean the tool, and then image the tip of the tool with a CCD camera. We also know how to compare the extracted shape with a preset reference shape, determine the presence or absence of foreign matter adhering to the tool, confirm that no foreign matter has adhered to the tool, and measure the tool dimensions. (See Patent Document 2).

また、工具を超音波洗浄して異物を除去する方法としては、例えば、水、油溶性又は脂溶性の液体に工具を漬けて超音波洗浄し、吹飛し装置によって乾燥させる方法が知られている(特許文献3参照)。特許文献3には、スピンドルの停止状態に限らず、回動状態でも工具の洗浄を行うことが可能であり、回動状態の場合には液体粒子を遠心力によって分解できることが示されている。   In addition, as a method for removing foreign matter by ultrasonic cleaning of a tool, for example, a method of immersing the tool in water, oil-soluble or fat-soluble liquid, ultrasonic cleaning, and drying with a blow-off device is known. (See Patent Document 3). Patent Document 3 shows that the tool can be cleaned not only in a spindle stopped state but also in a rotating state, and in the rotating state, liquid particles can be decomposed by centrifugal force.

特開2005−66746号公報JP 2005-66746 A 特開2010−158726号公報JP 2010-158726 A 特開2010−131747号公報JP 2010-131747 A

従来の一般的なエアーの噴き付けによる工具洗浄では、工具に強固に付着した異物及び油分を充分に取り除くことができなかった。また、特許文献1及び特許文献2に記載の洗浄液の噴き付けによる工具洗浄では、工具に付着した油分は取り除くことができるが、エアーの噴き付けと同様に、工具に強固に付着した異物を充分に取り除くことができない。また、特許文献3に記載の超音波洗浄機による工具洗浄でも、工具に付着した油分は取り除くことができるが、工具に強固に付着した異物については、ある程度取り除くことができるものの、充分に取り除くことはできないという問題があった。   Conventional tool cleaning by general air spraying has not been able to sufficiently remove foreign matter and oil firmly adhered to the tool. In addition, the tool cleaning by spraying the cleaning liquid described in Patent Document 1 and Patent Document 2 can remove oil adhering to the tool. However, as in the case of air spraying, the foreign matter firmly adhered to the tool is sufficiently removed. Can not be removed. In addition, the oil adhering to the tool can also be removed by the tool cleaning by the ultrasonic cleaner described in Patent Document 3, but the foreign matter firmly adhering to the tool can be removed to some extent, but it should be removed sufficiently. There was a problem that I could not.

また、特許文献2に記載の方法は、工具の洗浄を行った後にCCDカメラによって工具に付着した異物の有無を判定することはできるが、洗浄液の噴き付けによる工具洗浄では異物除去が充分に行えないことを前提としたものであって、工具に強固に付着した異物を充分に取り除く工具洗浄方法は未だ提供されていない。   The method described in Patent Document 2 can determine the presence or absence of foreign matter adhering to the tool with a CCD camera after cleaning the tool, but cleaning the tool by spraying the cleaning liquid can sufficiently remove the foreign matter. There is no tool cleaning method that sufficiently removes the foreign matter firmly adhered to the tool.

また、洗浄液を噴き付ける工具洗浄方法では、洗浄液を噴き付ける噴射装置が必要になり、超音波洗浄による工具洗浄方法では、超音波を発生させる装置と電源が必要になり、特に加工機内で工具を洗浄する場合には装置が複雑になって扱いにくいという問題があった。   In addition, the tool cleaning method that sprays cleaning liquid requires an injection device that sprays the cleaning liquid, and the tool cleaning method that uses ultrasonic cleaning requires a device that generates ultrasonic waves and a power source. In the case of cleaning, there is a problem that the apparatus becomes complicated and difficult to handle.

そこで、本発明は、切削加工によって工具に強固に付着した異物や油分を簡単な構成で確実に取り除くことが可能な工作機械の工具洗浄方法及び工具洗浄装置を提供するものである。   Therefore, the present invention provides a tool cleaning method and a tool cleaning device for a machine tool that can reliably remove foreign matters and oils firmly attached to a tool by cutting with a simple configuration.

本発明は、上記課題を解決するために、粉末状の砥粒を含む洗浄液の中に工具を進入させ、該工具を回転させて洗浄を行う工作機械の工具洗浄方法を提供するものである。   In order to solve the above-mentioned problems, the present invention provides a tool cleaning method for a machine tool in which a tool is inserted into a cleaning liquid containing powdery abrasive grains and cleaning is performed by rotating the tool.

また、本発明の工作機械の工具洗浄方法は、前記洗浄液に前記砥粒を浸漬させた砥粒浸漬層と、該砥粒浸漬層の上方に前記砥粒を含まない洗浄液層と、を有することを特徴とする。   The tool cleaning method for a machine tool of the present invention includes an abrasive grain immersion layer in which the abrasive grains are immersed in the cleaning liquid, and a cleaning liquid layer that does not include the abrasive grains above the abrasive grain immersion layer. It is characterized by.

また、本発明の工作機械の工具洗浄方法は、粉末状の砥粒を含む洗浄液の中において、前記工具を700〜2500min−1で回転させることを特徴とする。 Moreover, the tool cleaning method for a machine tool according to the present invention is characterized in that the tool is rotated at 700 to 2500 min −1 in a cleaning liquid containing powdery abrasive grains.

また、本発明は、粉末状の砥粒と洗浄液を収容した洗浄容器と、工具を回転駆動する回転駆動装置と、を備え、前記工具を前記洗浄容器内の前記砥粒を含む洗浄液の中に進入させ、該工具を回転させて洗浄を行う工作機械の工具洗浄装置を提供するものである。   The present invention also includes a cleaning container containing powdery abrasive grains and a cleaning liquid, and a rotation drive device that rotationally drives a tool, and the tool is placed in the cleaning liquid containing the abrasive grains in the cleaning container. The present invention provides a tool cleaning device for a machine tool that enters and rotates the tool to perform cleaning.

また、本発明の工作機械の工具洗浄装置は、前記洗浄容器内に、前記洗浄液に前記砥粒を浸漬させた砥粒浸漬層と、該砥粒浸漬層の上方に前記砥粒を含まない洗浄液層と、を有することを特徴とする。   The tool cleaning device for a machine tool according to the present invention includes an abrasive grain immersion layer in which the abrasive grains are immersed in the cleaning liquid in the cleaning container, and a cleaning liquid that does not include the abrasive grains above the abrasive grain immersion layer. And a layer.

また、本発明の工作機械の工具洗浄装置は、前記洗浄容器が工作機械の工具チェンジャ又は/及び工具マガジンの把持部で把持可能に形成してあることを特徴とする。   The tool cleaning device for a machine tool according to the present invention is characterized in that the cleaning container is formed so as to be gripped by a tool changer of the machine tool and / or a grip portion of a tool magazine.

また、本発明の工作機械の工具洗浄装置は、前記砥粒の平均粒径が100〜500μmであることを特徴とする。   Moreover, the tool cleaning apparatus of the machine tool of this invention is characterized by the average particle diameter of the said abrasive grain being 100-500 micrometers.

また、本発明の工作機械の工具洗浄装置は、前記洗浄液が速乾性の洗浄液であることを特徴とする。   In the tool cleaning device for machine tools according to the present invention, the cleaning liquid is a quick-drying cleaning liquid.

本発明の工作機械の工具洗浄方法は、粉末状の砥粒を含む洗浄液の中に工具を進入させ、該工具を回転させて洗浄を行う構成を有することにより、洗浄液中において沈殿状態にある粉末状の砥粒は、砥粒間に洗浄液が介在していることで、砥粒間に洗浄液による適度な結合力が生じ、砥粒が工具表面に付着した異物を取り除く力として作用する。   The tool cleaning method for a machine tool according to the present invention has a configuration in which a tool is inserted into a cleaning liquid containing powdery abrasive grains and the tool is rotated to perform cleaning, whereby a powder in a precipitated state in the cleaning liquid. Since the cleaning liquid is interposed between the abrasive grains, the shaped abrasive grains generate an appropriate binding force due to the cleaning liquid between the abrasive grains, and the abrasive grains act as a force for removing foreign substances adhering to the tool surface.

本発明の工作機械の工具洗浄方法は、洗浄対象の工具を粉末状の砥粒を含む洗浄液中において工具径に応じた適切な回転数で回転させることにより、洗浄液中の粉末状の砥粒が工具のすくい面及び逃げ面に作用し、工具に強固に付着した異物を取り除くと共に、洗浄液が工具表面に付着している油分を取り除くから、切削加工によって工具に強固に付着した異物及び油分を簡単な構成で確実に取り除くことができ、その後の工具測定において正しい測定値を得ることができる効果がある。   In the tool cleaning method for a machine tool according to the present invention, by rotating a tool to be cleaned in a cleaning liquid containing powdery abrasive grains at an appropriate number of rotations according to the tool diameter, the powdery abrasive grains in the cleaning liquid are changed. Acts on the rake and flank surfaces of the tool to remove foreign matter firmly adhered to the tool and removes the oil adhering to the tool surface from the cleaning liquid. With such a configuration, it can be surely removed, and a correct measurement value can be obtained in the subsequent tool measurement.

また、本発明の工作機械の工具洗浄方法は、前記洗浄液に前記砥粒を浸漬させた砥粒浸漬層と、該砥粒浸漬層の上方に前記砥粒を含まない洗浄液層と、を有することにより、工具を砥粒浸漬層に進入させて砥粒による異物の除去ができると共に、工具を砥粒浸漬層から引き上げる際に砥粒を含まない洗浄液層を通るから、砥粒浸漬層において工具に付着した砥粒を洗浄液層で洗い落とすことができ、確実に異物を取り除くことができる効果がある。   The tool cleaning method for a machine tool of the present invention includes an abrasive grain immersion layer in which the abrasive grains are immersed in the cleaning liquid, and a cleaning liquid layer that does not include the abrasive grains above the abrasive grain immersion layer. Allows the tool to enter the abrasive grain immersion layer to remove foreign matter by the abrasive grains, and when the tool is pulled up from the abrasive grain immersion layer, it passes through a cleaning liquid layer that does not contain abrasive grains. Adhering abrasive grains can be washed off with the cleaning liquid layer, and there is an effect that foreign matters can be surely removed.

また、本発明の工作機械の工具洗浄方法は、粉末状の砥粒を含む洗浄液の中において、前記工具を700〜2500min−1で回転させることにより、洗浄液中の砥粒が工具のすくい面及び逃げ面に適切に作用し、強固に付着した異物を確実に取り除くことができる効果がある。 Further, the tool cleaning method for a machine tool of the present invention is such that, in a cleaning liquid containing powdery abrasive grains, the tool is rotated at 700 to 2500 min −1 so that the abrasive grains in the cleaning liquid and the rake face of the tool and It acts on the flank appropriately and has an effect of reliably removing foreign substances adhered firmly.

また、本発明の工作機械の工具洗浄装置は、粉末状の砥粒と洗浄液を収容した洗浄容器と、工具を回転駆動する回転駆動装置と、を備え、前記工具を前記洗浄容器内の前記砥粒を含む洗浄液の中に進入させ、該工具を回転させて洗浄を行う構成を有することにより、洗浄液を充填した洗浄容器内において沈殿状態にある粉末状の砥粒は、砥粒間に洗浄液が介在していることで、砥粒間に洗浄液による適度な結合力が生じ、砥粒が工具表面に付着した異物を取り除く力として作用する。   In addition, a tool cleaning device for a machine tool according to the present invention includes a cleaning container containing powdery abrasive grains and a cleaning liquid, and a rotation driving device that rotationally drives a tool, and the tool is placed in the polishing container in the cleaning container. The powdery abrasive grains that are in a precipitated state in the cleaning container filled with the cleaning liquid are introduced into the cleaning liquid containing the grains and rotated by rotating the tool. By being interposed, an appropriate binding force due to the cleaning liquid is generated between the abrasive grains, and the abrasive grains act as a force for removing foreign substances adhering to the tool surface.

本発明の工作機械の工具洗浄装置は、洗浄対象の工具を粉末状の砥粒を含む洗浄液中において工具径に応じた適切な回転数で回転させることにより、洗浄液中の粉末状の砥粒が工具のすくい面及び逃げ面に作用し、工具に強固に付着した異物を取り除くと共に、洗浄液が工具表面に付着している油分を取り除くから、切削加工によって工具に強固に付着した異物及び油分を簡単な構成で確実に取り除くことができ、その後の工具測定において正しい測定値を得ることができる効果がある。   The tool cleaning device for a machine tool according to the present invention rotates a tool to be cleaned in a cleaning liquid containing powdery abrasive grains at an appropriate rotation speed according to the tool diameter, so that the powdery abrasive grains in the cleaning liquid are changed. Acts on the rake and flank surfaces of the tool to remove foreign matter firmly adhered to the tool and removes the oil adhering to the tool surface from the cleaning liquid. With such a configuration, it can be surely removed, and a correct measurement value can be obtained in the subsequent tool measurement.

また、本発明の工作機械の工具洗浄装置は、前記洗浄容器内に、前記洗浄液に前記砥粒を浸漬させた砥粒浸漬層と、該砥粒浸漬層の上方に前記砥粒を含まない洗浄液層と、を有することにより、工具を砥粒浸漬層に進入させて砥粒による異物の除去ができると共に、工具を砥粒浸漬層から引き上げる際に砥粒を含まない洗浄液層を通るから、砥粒浸漬層において工具に付着した砥粒を洗浄液層で洗い落とすことができ、確実に異物を取り除くことができる効果がある。   The tool cleaning device for a machine tool according to the present invention includes an abrasive grain immersion layer in which the abrasive grains are immersed in the cleaning liquid in the cleaning container, and a cleaning liquid that does not include the abrasive grains above the abrasive grain immersion layer. Since the tool can enter the abrasive grain immersion layer to remove foreign substances by the abrasive grains, and when the tool is pulled up from the abrasive grain immersion layer, the abrasive grains are passed through the cleaning liquid layer. The abrasive grains adhering to the tool in the grain immersion layer can be washed away by the cleaning liquid layer, and there is an effect that foreign matters can be surely removed.

また、本発明の工作機械の工具洗浄装置は、前記洗浄容器が工作機械の工具チェンジャ又は/及び工具マガジンの把持部で把持可能に形成してあることにより、工具チェンジャ又は/及び工具マガジンの把持部で洗浄容器を把持して工作機械の主軸の軸線上の洗浄位置と工具を格納する格納部との間を運搬できるから、工具を主軸に装着したままで工具洗浄を行うことができると共に、洗浄時以外は洗浄容器を他の工具と共に格納部に格納することができる。すなわち、工具チェンジャ又は工具マガジンを備えた工作機械では、本発明の洗浄容器を工具と共に格納部に格納するという簡単な構成によって、従来は除去できなかった異物を確実に取り除くことができる効果がある。   The tool cleaning device for a machine tool according to the present invention is configured such that the cleaning container is formed so as to be grippable by a tool changer or / and a tool magazine gripping part of the machine tool. Since the cleaning container can be held between the cleaning position on the axis of the spindle of the machine tool and the storage section for storing the tool, the tool can be cleaned while the tool is mounted on the spindle. The cleaning container can be stored in the storage unit together with other tools except during cleaning. That is, in a machine tool provided with a tool changer or a tool magazine, there is an effect that foreign matters that could not be removed conventionally can be surely removed by a simple configuration in which the cleaning container of the present invention is stored in the storage unit together with the tool. .

また、本発明の工作機械の工具洗浄装置は、前記砥粒の平均粒径が100〜500μmであることにより、洗浄液を充填した洗浄容器内において沈殿状態にある粉末状の砥粒は、砥粒間に適度の洗浄液が介在することで、砥粒間に洗浄液による適切な結合力が生じるから、工具に過度の負担をかけることなく砥粒が工具表面に付着した異物を取り除くのに充分な結合力を付与することができ、確実に異物を取り除くことができる効果がある。   Further, the tool cleaning device for a machine tool according to the present invention is such that the average particle diameter of the abrasive grains is 100 to 500 μm, so that the powdery abrasive grains in a precipitated state in the cleaning container filled with the cleaning liquid are abrasive grains. With an appropriate amount of cleaning liquid in between, an appropriate bonding force is generated between the abrasive grains by the cleaning liquid, so that the abrasive grains are bonded enough to remove foreign substances adhering to the tool surface without imposing an excessive burden on the tool. A force can be applied, and there is an effect that foreign matters can be surely removed.

また、本発明の工作機械の工具洗浄装置は、前記洗浄液が速乾性の洗浄液であることにより、工具に付着した洗浄液が短時間で乾くから、工具洗浄後直に工具測定を行うことができる効果がある。   Further, the tool cleaning device for a machine tool of the present invention has an effect that the tool can be measured immediately after cleaning the tool because the cleaning liquid is a quick-drying cleaning liquid and the cleaning liquid attached to the tool dries in a short time. There is.

本発明に係る工作機械の工具洗浄装置の一実施例を示す構成図。The block diagram which shows one Example of the tool cleaning apparatus of the machine tool which concerns on this invention. 本発明に係る工作機械の工具洗浄装置の他の施例を示す構成図。The block diagram which shows the other Example of the tool cleaning apparatus of the machine tool which concerns on this invention. 洗浄容器の格納状態を示す斜視図。The perspective view which shows the storing state of a washing container. 加工直後の工具状態を示す写真図。The photograph figure which shows the tool state immediately after a process. エアー噴き付け後の工具状態を示す写真図。The photograph figure which shows the tool state after air spraying. 超音波洗浄後の工具状態を示す写真図。The photograph figure which shows the tool state after ultrasonic cleaning. 本発明の工具洗浄後の工具状態を示す写真図。The photograph figure which shows the tool state after the tool washing | cleaning of this invention. 加工直後の工具状態を示す写真図。The photograph figure which shows the tool state immediately after a process. エアー噴き付け後の工具状態を示す写真図。The photograph figure which shows the tool state after air spraying. 超音波洗浄後の工具状態を示す写真図。The photograph figure which shows the tool state after ultrasonic cleaning. 本発明の工具洗浄後の工具状態を示す写真図。The photograph figure which shows the tool state after the tool washing | cleaning of this invention. 本発明に係る工作機械の工具洗浄方法の一例を示すフローチャート。The flowchart which shows an example of the tool cleaning method of the machine tool which concerns on this invention.

本発明の実施の形態を図示する実施例に基づいて説明する。
本発明の工作機械の工具洗浄装置は、粉末状の砥粒11と洗浄液12を収容した洗浄容器10と、工具1を回転駆動する回転駆動装置2と、を備え、工具1を洗浄容器10内の砥粒11を含む洗浄液12の中に進入させ、工具1を回転させて洗浄を行うことを特徴とする。
Embodiments of the present invention will be described based on examples shown in the drawings.
The tool cleaning device for a machine tool according to the present invention includes a cleaning container 10 containing powdery abrasive grains 11 and a cleaning liquid 12, and a rotation driving device 2 that rotationally drives the tool 1, and the tool 1 is placed in the cleaning container 10. It is characterized in that it is made to enter a cleaning liquid 12 containing the abrasive grains 11 and the tool 1 is rotated to perform cleaning.

図1は、本発明に係る工作機械の工具洗浄装置の一実施例を示す構成図である。図1に示す実施例において、回転駆動装置2は、主軸(スピンドルシャフト)と該主軸を駆動する駆動モータとで構成されている。主軸は、ボールベアリングなどの軸受でスピンドルヘッドに回転自在に支持されている。主軸の後端部には、カップリングを介して駆動モータが直結されている。   FIG. 1 is a block diagram showing an embodiment of a tool cleaning device for a machine tool according to the present invention. In the embodiment shown in FIG. 1, the rotary drive device 2 is composed of a main shaft (spindle shaft) and a drive motor for driving the main shaft. The main shaft is rotatably supported on the spindle head by a bearing such as a ball bearing. A drive motor is directly connected to the rear end of the main shaft via a coupling.

洗浄液12には、速乾性の脱脂洗浄剤や超音波洗浄機用の洗浄剤など種々の洗浄剤を用いることができる。洗浄液12は、工具に付着した異物や油分を取り除くために、(1)洗浄力と、(2)脱脂能力と、(3)速乾性を備えていることが好ましい。洗浄液12が速乾性を備えていると、洗浄後直に工具測定を行っても洗浄液12による測定誤差が生じない。なお、洗浄後直に工具測定を行わない場合には、洗浄液12に速乾性を備えない超音波洗浄機用の洗浄剤を用いてもよい。   As the cleaning liquid 12, various cleaning agents such as a quick-drying degreasing cleaner and a cleaning agent for an ultrasonic cleaner can be used. The cleaning liquid 12 preferably has (1) cleaning power, (2) degreasing ability, and (3) quick-drying properties in order to remove foreign matters and oil adhering to the tool. If the cleaning liquid 12 has a quick drying property, a measurement error due to the cleaning liquid 12 does not occur even if tool measurement is performed immediately after cleaning. In addition, when the tool measurement is not performed immediately after cleaning, a cleaning agent for an ultrasonic cleaning machine that does not have quick drying property may be used for the cleaning liquid 12.

粉末状の砥粒11には、アルミナ(酸化アルミニウム)系砥粒など、鋼製の工具に付着した異物を除去可能な種々の砥粒を用いることができる。実施例では、粉末状の砥粒11にホワイトアランダム(WA)と呼ばれるアルミナ系砥粒の一種を用いた。WAは、炭素鋼、合金鋼、工具鋼、ステンレス鋼などの鉄鋼材料によく馴染み、一般砥粒の中では特に「切れ味」に優れた砥石として知られており、焼入れ鋼や工具鋼などの比較的加工しづらい工具に対しても効果を発揮する。なお、砥粒11は、アルミナ系砥粒に限定されるものではなく、工具に付着して異物を取り除くことが可能な種々の素材を用いてもよい。   As the powdery abrasive grains 11, various abrasive grains that can remove foreign substances adhering to a steel tool such as alumina (aluminum oxide) abrasive grains can be used. In the examples, a kind of alumina abrasive grains called white alundum (WA) was used for the powdery abrasive grains 11. WA is familiar to steel materials such as carbon steel, alloy steel, tool steel, and stainless steel, and is known as a grindstone with excellent “sharpness” among general abrasive grains. Compared to hardened steel and tool steel. Effective for tools that are difficult to machine. The abrasive grains 11 are not limited to alumina-based abrasive grains, and various materials that can adhere to the tool and remove foreign substances may be used.

洗浄容器10には、洗浄液12を充填し、洗浄液12中に粉末状の砥粒11を浸漬させている。洗浄容器10内には、洗浄液12に砥粒11を浸漬させた砥粒浸漬層Aと、砥粒浸漬層Aの上方に砥粒11を含まない洗浄液層Bと、を有している。この洗浄液層Bは、工具を砥粒浸漬層Aから引き上げる際に、工具1に付着した砥粒11を洗い落とすのに充分な厚みを有していればよい。なお、洗浄後の工具1に付着した砥粒11は、エアーの噴き付けや洗浄液の噴き付けによって容易に取り除くことができるから、洗浄容器10には洗浄液層Bを設けなくてもよい。   The cleaning container 10 is filled with a cleaning liquid 12, and powdery abrasive grains 11 are immersed in the cleaning liquid 12. The cleaning container 10 includes an abrasive grain immersion layer A in which abrasive grains 11 are immersed in a cleaning liquid 12, and a cleaning liquid layer B that does not include the abrasive grains 11 above the abrasive grain immersion layer A. The cleaning liquid layer B only needs to have a thickness sufficient to wash away the abrasive grains 11 attached to the tool 1 when the tool is pulled up from the abrasive grain immersion layer A. In addition, since the abrasive grains 11 attached to the cleaned tool 1 can be easily removed by spraying air or spraying a cleaning liquid, the cleaning liquid layer B may not be provided in the cleaning container 10.

砥粒11は、洗浄液12を充填した洗浄容器10内において沈殿状態にあり、砥粒11間に適度の洗浄液12が介在することで、砥粒11間に洗浄液12による適切な結合力が生じる。砥粒11の粒径は、小さすぎると砥粒11間の結合力が強くなりすぎて洗浄効率が低下し、大きすぎると小径工具のすくい面に砥粒11が入り込みにくくなるため、平均粒径が100〜500μmであることが好ましい。砥粒11の粒度は、WA(ホワイトアランダム)を用いた場合に、JIS規格の80番(平均粒径177〜250μm)が最も好ましい。   The abrasive grains 11 are in a precipitated state in the cleaning container 10 filled with the cleaning liquid 12, and an appropriate binding force by the cleaning liquid 12 is generated between the abrasive grains 11 when the appropriate cleaning liquid 12 is interposed between the abrasive grains 11. If the grain size of the abrasive grains 11 is too small, the bonding force between the abrasive grains 11 becomes too strong and the cleaning efficiency decreases. If the grain size is too large, the abrasive grains 11 do not easily enter the rake face of the small-diameter tool. Is preferably 100 to 500 μm. The grain size of the abrasive grains 11 is most preferably JIS standard No. 80 (average particle diameter of 177 to 250 μm) when WA (white alundum) is used.

表1は、工具1の回転数と洗浄効率の関係を示している。洗浄時における工具1の回転数は、工具径が1〜3mmの小径工具では、1000min−1で最も洗浄効率が良くなり、回転数が低くても、回転数が高くても洗浄効率は低下する。回転駆動装置2は、粉末状の砥粒11を含む洗浄液12(砥粒浸漬層A)において、工具1を700〜2500min−1で回転させることが好ましい。 Table 1 shows the relationship between the number of rotations of the tool 1 and the cleaning efficiency. As for the rotation speed of the tool 1 at the time of cleaning, in the case of a small diameter tool having a tool diameter of 1 to 3 mm, the cleaning efficiency is best at 1000 min −1 , and the cleaning efficiency decreases even if the rotation speed is low or high. . The rotation drive device 2 preferably rotates the tool 1 at 700 to 2500 min −1 in the cleaning liquid 12 (abrasive grain immersion layer A) containing the powdery abrasive grains 11.

図2は、本発明に係る工作機械の工具洗浄装置の他の施例を示す構成図であり、図3は、洗浄容器の格納状態を示す斜視図である。   FIG. 2 is a block diagram showing another embodiment of the tool cleaning device for a machine tool according to the present invention, and FIG. 3 is a perspective view showing a stored state of the cleaning container.

図2及び図3に示す実施例において、洗浄容器10は、容器の上部外周に溝部13を設けて、工具チェンジャ3又は/及び工具マガジン4の把持部3a,4aで把持可能に形成してある。本実施例の洗浄容器10は、工具チェンジャ3の把持部3a又は工具マガジン4の把持部4aで把持されて、工作機械の主軸の軸線上の洗浄位置と工具を格納する格納部との間を簡単に移動することができる。本実施例では、工具1を主軸(回転駆動装置2)に装着したままで工具洗浄を行うことができると共に、洗浄時以外は洗浄容器10を他の工具と共に工具マガジン4などの格納部に格納することができる。   In the embodiment shown in FIGS. 2 and 3, the cleaning container 10 is formed so as to be able to be gripped by the tool changer 3 and / or the gripping parts 3 a and 4 a of the tool magazine 4 by providing a groove 13 on the upper outer periphery of the container. . The cleaning container 10 of the present embodiment is gripped by the gripping portion 3a of the tool changer 3 or the gripping portion 4a of the tool magazine 4, and between the cleaning position on the axis of the spindle of the machine tool and the storage portion for storing the tool. It can be moved easily. In this embodiment, the tool 1 can be cleaned while the tool 1 is mounted on the main shaft (rotary drive device 2), and the cleaning container 10 is stored in a storage unit such as the tool magazine 4 together with other tools except during cleaning. can do.

なお、工作機械の主軸が、工具マガジン4の所定位置まで移動して工具交換可能な構成の場合には、工具チェンジャ3は必要ない。また、洗浄容器10は、実施例のように工作機械の内部に設置される場合に限らず、工作機械の外部に設置してもよい。また、回転駆動装置2は、実施例のように工作機械の主軸に限らず、洗浄用の回転駆動装置を用いてもよい。   Note that the tool changer 3 is not necessary when the spindle of the machine tool is configured to move to a predetermined position of the tool magazine 4 and allow tool exchange. Further, the cleaning container 10 is not limited to being installed inside the machine tool as in the embodiment, and may be installed outside the machine tool. Further, the rotational drive device 2 is not limited to the main spindle of the machine tool as in the embodiment, and a rotational drive device for cleaning may be used.

次に、本発明に係る工作機械の工具洗浄装置を用いた工具洗浄方法について説明する。図6は、本発明に係る工作機械の工具洗浄方法の一例を示すフローチャートである。   Next, a tool cleaning method using the tool cleaning device for a machine tool according to the present invention will be described. FIG. 6 is a flowchart showing an example of a tool cleaning method for a machine tool according to the present invention.

(1)洗浄対象である工具1を、回転駆動装置2である工作機械の主軸に装着する(ステップS1)。   (1) The tool 1 to be cleaned is mounted on the spindle of the machine tool that is the rotation drive device 2 (step S1).

(2)工作機械の工具マガジン4などの格納部に格納されている洗浄容器10を、工具チェンジャ3の把持部3aで把持して待機位置から移動させ、主軸の軸線上の洗浄位置に位置決めする(ステップS2)。   (2) The cleaning container 10 stored in the storage unit such as the tool magazine 4 of the machine tool is gripped by the gripping part 3a of the tool changer 3, moved from the standby position, and positioned at the cleaning position on the axis of the spindle. (Step S2).

(3)主軸に装着された工具1を、適切な回転数で回転させる(ステップS3)。実施例では、基準回転数S=1000min−1で工具1を回転させている。 (3) The tool 1 mounted on the spindle is rotated at an appropriate number of rotations (step S3). In the embodiment, the tool 1 is rotated at the reference rotation speed S = 1000 min −1 .

(4)工具1を洗浄容器10内の砥粒浸漬層A内に進入させ(ステップS4)、所定時間の工具洗浄を行う(ステップS5)。実施例では、標準洗浄時間を30秒とした。なお、工具1への異物の付着が少ない又は弱い場合には、洗浄時間は10秒程度で充分である。   (4) The tool 1 is made to enter the abrasive grain immersion layer A in the cleaning container 10 (step S4), and the tool is cleaned for a predetermined time (step S5). In the examples, the standard cleaning time was 30 seconds. In addition, when the adhesion of foreign matter to the tool 1 is small or weak, a cleaning time of about 10 seconds is sufficient.

(5)工具1を洗浄容器10内から引き上げた後に主軸を停止させる(ステップS6)。このときに、工具1が砥粒11を含まない洗浄液層B内を回転しながら通ることによって、ステップS5において工具1に付着した砥粒11を洗い落とすことができる。   (5) The spindle is stopped after the tool 1 is lifted from the cleaning container 10 (step S6). At this time, the tool 1 passes through the cleaning liquid layer B not containing the abrasive grains 11 while rotating, whereby the abrasive grains 11 attached to the tool 1 in step S5 can be washed away.

(6)洗浄容器10を工具マガジン4などの待機位置へ戻す(ステップS7)。   (6) Return the cleaning container 10 to the standby position such as the tool magazine 4 (step S7).

比較例Comparative example

本発明に係る工作機械の工具洗浄方法と従来の洗浄方法との比較例について説明する。図4(a)乃至図4(d)は、工具径3.0mm4枚刃の工具での比較例を示す写真図である。図5(a)乃至図5(d)は、工具径1.0mm2枚刃の工具での比較例を示す写真図である。   A comparative example of a tool cleaning method for a machine tool according to the present invention and a conventional cleaning method will be described. 4 (a) to 4 (d) are photographic views showing comparative examples using a tool having a tool diameter of 3.0 mm and a four-blade tool. FIG. 5A to FIG. 5D are photographic diagrams showing a comparative example using a tool having a tool diameter of 1.0 mm and two blades.

図4(a)は、加工直後の工具状態を示す写真図であり、工具表面には油分と共に多数の切粉が付着している。図4(b)は、一般的なエアー噴き付け後の工具状態を示す写真図であり、工具に付着した切粉がある程度減少しているものの、工具表面には油分と共に多くの切粉が付着している。   Fig.4 (a) is a photograph figure which shows the tool state immediately after a process, and many swarf has adhered to the tool surface with oil. Fig. 4 (b) is a photograph showing the state of the tool after general air spraying. Although the amount of chips adhering to the tool is reduced to some extent, a lot of chips are attached to the tool surface along with oil. doing.

図4(c)は、従来技術の超音波洗浄後の工具状態を示す写真図であり、工具表面に付着した油分と大部分の切粉は取り除くことができているが、工具に強固に付着した切粉を取り除くことができていない。図4(d)は、本発明の工具洗浄後の工具状態を示す写真図である。本発明の工具洗浄方法では、従来の超音波洗浄で取り除くことができなかった工具に強固に付着した切粉(異物)についても略全て除去できていることが分かる。   FIG. 4 (c) is a photograph showing the state of the tool after ultrasonic cleaning according to the prior art, where oil and most of the chips adhering to the tool surface can be removed, but firmly attached to the tool. I have not been able to remove the chips. FIG.4 (d) is a photograph figure which shows the tool state after the tool washing | cleaning of this invention. It can be seen that in the tool cleaning method of the present invention, almost all chips (foreign matter) firmly adhered to the tool that could not be removed by conventional ultrasonic cleaning can be removed.

図5(a)は、加工直後の工具状態を示す写真図であり、工具表面には油分と共に多数の切粉が付着している。図5(b)は、一般的なエアー噴き付け後の工具状態を示す写真図であり、工具に付着した切粉がある程度減少しているものの、工具表面には油分と共に多くの切粉が付着している。   Fig.5 (a) is a photograph figure which shows the tool state immediately after a process, and many cuttings have adhered to the tool surface with oil. Fig. 5 (b) is a photograph showing the state of the tool after general air spraying. Although the amount of chips adhering to the tool is reduced to some extent, a lot of chips are attached to the tool surface along with oil. doing.

図5(c)は、従来技術の超音波洗浄後の工具状態を示す写真図であり、工具表面に付着した油分と大部分の切粉は取り除くことができているが、工具に強固に付着した切粉を取り除くことができていない。図5(d)は、本発明の工具洗浄後の工具状態を示す写真図である。本発明の工具洗浄方法では、従来の超音波洗浄で取り除くことができなかった工具に強固に付着した切粉(異物)についても略全て除去できていることが分かる。このように、本発明の工具洗浄方法では、種々の形状の工具について効果を発揮することができる。   FIG.5 (c) is a photograph figure which shows the tool state after ultrasonic cleaning of a prior art, Although the oil component and most chip which adhered to the tool surface can be removed, it adheres firmly to a tool. I have not been able to remove the chips. FIG.5 (d) is a photograph figure which shows the tool state after the tool washing | cleaning of this invention. It can be seen that in the tool cleaning method of the present invention, almost all chips (foreign matter) firmly adhered to the tool that could not be removed by conventional ultrasonic cleaning can be removed. Thus, the tool cleaning method of the present invention can exert an effect on tools having various shapes.

1 工具
2 回転駆動装置
3 工具チェンジャ
4 工具マガジン
10 洗浄容器
11 砥粒
12 洗浄液
A 砥粒浸漬層
B 洗浄液層
DESCRIPTION OF SYMBOLS 1 Tool 2 Rotation drive device 3 Tool changer 4 Tool magazine 10 Cleaning container 11 Abrasive grain 12 Cleaning liquid A Abrasive grain immersion layer B Cleaning liquid layer

Claims (8)

粉末状の砥粒を含む洗浄液の中に工具を進入させ、該工具を回転させて洗浄を行う工作機械の工具洗浄方法。   A tool cleaning method for a machine tool, in which a tool is moved into a cleaning liquid containing powdery abrasive grains, and cleaning is performed by rotating the tool. 前記洗浄液に前記砥粒を浸漬させた砥粒浸漬層と、該砥粒浸漬層の上方に前記砥粒を含まない洗浄液層と、を有することを特徴とする請求項1に記載の工作機械の工具洗浄方法。   The machine tool according to claim 1, further comprising: an abrasive grain immersion layer in which the abrasive grains are immersed in the cleaning liquid; and a cleaning liquid layer that does not include the abrasive grains above the abrasive grain immersion layer. Tool cleaning method. 粉末状の砥粒を含む洗浄液の中において、前記工具を700〜2500min−1で回転させることを特徴とする請求項1又は2に記載の工作機械の工具洗浄方法。 The tool cleaning method for a machine tool according to claim 1 or 2, wherein the tool is rotated at 700 to 2500 min -1 in a cleaning liquid containing powdery abrasive grains. 粉末状の砥粒と洗浄液を収容した洗浄容器と、工具を回転駆動する回転駆動装置と、を備え、
前記工具を前記洗浄容器内の前記砥粒を含む洗浄液の中に進入させ、該工具を回転させて洗浄を行う工作機械の工具洗浄装置。
A cleaning container containing powdery abrasive grains and a cleaning liquid, and a rotational drive device that rotationally drives the tool,
A tool cleaning device for a machine tool that performs cleaning by causing the tool to enter a cleaning liquid containing the abrasive grains in the cleaning container and rotating the tool.
前記洗浄容器内に、前記洗浄液に前記砥粒を浸漬させた砥粒浸漬層と、該砥粒浸漬層の上方に前記砥粒を含まない洗浄液層と、を有することを特徴とする請求項4に記載の工作機械の工具洗浄装置。   5. The cleaning container includes an abrasive grain immersion layer in which the abrasive grains are immersed in the cleaning liquid, and a cleaning liquid layer that does not include the abrasive grains above the abrasive grain immersion layer. Tool cleaning equipment for machine tools as described in 1. 前記洗浄容器が工作機械の工具チェンジャ又は/及び工具マガジンの把持部で把持可能に形成してあることを特徴とする請求項4又は5に記載の工作機械の工具洗浄装置。   The tool cleaning device for a machine tool according to claim 4 or 5, wherein the cleaning container is formed so as to be gripped by a tool changer of the machine tool and / or a grip portion of a tool magazine. 前記砥粒の平均粒径が100〜500μmであることを特徴とする請求項4乃至6の何れか一項に記載の工作機械の工具洗浄装置。   The tool cleaning device for a machine tool according to any one of claims 4 to 6, wherein an average grain size of the abrasive grains is 100 to 500 µm. 前記洗浄液が速乾性の洗浄液であることを特徴とする請求項4乃至7の何れか一項に記載の工作機械の工具洗浄装置。   The tool cleaning apparatus for a machine tool according to any one of claims 4 to 7, wherein the cleaning liquid is a quick-drying cleaning liquid.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016002986A1 (en) 2015-03-20 2016-10-13 Suzuki Motor Corporation Belt tension adjustment device for engine
US11980984B2 (en) 2020-09-25 2024-05-14 E. Zoller Gmbh Co. Kg Einstell- Und Messgeraete Reprocessing apparatus and method for reprocessing tools, tool holders and/or tool units

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49142968U (en) * 1973-04-07 1974-12-10
JPH04111769A (en) * 1990-08-29 1992-04-13 Yoshihide Shibano Burr removal and surface polishing method and device for workpiece
EP0528097A1 (en) * 1991-08-08 1993-02-24 GFM Gesellschaft für Fertigungstechnik und Maschinenbau Aktiengesellschaft Machine tool to cut flat material or similar
JPH081115A (en) * 1994-06-23 1996-01-09 Sankoole Kk Cleaning of precision parts
JPH09253593A (en) * 1996-03-27 1997-09-30 Hitachi Zosen Corp Washing device
JPH09299893A (en) * 1996-05-14 1997-11-25 Kao Corp Cleaning method
JPH11102881A (en) * 1997-09-26 1999-04-13 Sharp Corp Substrate cleaning method and device
JP2001263353A (en) * 2000-03-21 2001-09-26 Toshiba Mach Co Ltd Static air pressure main spindle device
JP2004001127A (en) * 2002-05-31 2004-01-08 Brother Ind Ltd Ultrasonic machining device and method
JP2005066746A (en) * 2003-08-25 2005-03-17 Sodick Co Ltd Method of cleaning tool before measuring tool length, and tool cleaning apparatus
WO2006030854A1 (en) * 2004-09-17 2006-03-23 Fdk Corporation Complex profile body polishing method and polishing apparatus
JP2007021660A (en) * 2005-07-15 2007-02-01 Fdk Corp Method of mirror-polishing complicated shape body, and mirror-polishing device
JP2007229614A (en) * 2006-02-28 2007-09-13 Fujitsu Ltd Washing apparatus, washing method, and production method of product
JP2010131747A (en) * 2008-12-05 2010-06-17 Mikron Agie Charmilles Ag Tool cleaning method and device

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49142968U (en) * 1973-04-07 1974-12-10
JPH04111769A (en) * 1990-08-29 1992-04-13 Yoshihide Shibano Burr removal and surface polishing method and device for workpiece
EP0528097A1 (en) * 1991-08-08 1993-02-24 GFM Gesellschaft für Fertigungstechnik und Maschinenbau Aktiengesellschaft Machine tool to cut flat material or similar
JPH081115A (en) * 1994-06-23 1996-01-09 Sankoole Kk Cleaning of precision parts
JPH09253593A (en) * 1996-03-27 1997-09-30 Hitachi Zosen Corp Washing device
JPH09299893A (en) * 1996-05-14 1997-11-25 Kao Corp Cleaning method
JPH11102881A (en) * 1997-09-26 1999-04-13 Sharp Corp Substrate cleaning method and device
JP2001263353A (en) * 2000-03-21 2001-09-26 Toshiba Mach Co Ltd Static air pressure main spindle device
JP2004001127A (en) * 2002-05-31 2004-01-08 Brother Ind Ltd Ultrasonic machining device and method
JP2005066746A (en) * 2003-08-25 2005-03-17 Sodick Co Ltd Method of cleaning tool before measuring tool length, and tool cleaning apparatus
WO2006030854A1 (en) * 2004-09-17 2006-03-23 Fdk Corporation Complex profile body polishing method and polishing apparatus
JP2007021660A (en) * 2005-07-15 2007-02-01 Fdk Corp Method of mirror-polishing complicated shape body, and mirror-polishing device
JP2007229614A (en) * 2006-02-28 2007-09-13 Fujitsu Ltd Washing apparatus, washing method, and production method of product
JP2010131747A (en) * 2008-12-05 2010-06-17 Mikron Agie Charmilles Ag Tool cleaning method and device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016002986A1 (en) 2015-03-20 2016-10-13 Suzuki Motor Corporation Belt tension adjustment device for engine
US11980984B2 (en) 2020-09-25 2024-05-14 E. Zoller Gmbh Co. Kg Einstell- Und Messgeraete Reprocessing apparatus and method for reprocessing tools, tool holders and/or tool units

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