JP2015041388A5 - - Google Patents

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Publication number
JP2015041388A5
JP2015041388A5 JP2013170069A JP2013170069A JP2015041388A5 JP 2015041388 A5 JP2015041388 A5 JP 2015041388A5 JP 2013170069 A JP2013170069 A JP 2013170069A JP 2013170069 A JP2013170069 A JP 2013170069A JP 2015041388 A5 JP2015041388 A5 JP 2015041388A5
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JP
Japan
Prior art keywords
metal oxide
oxide film
wiring
film
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2013170069A
Other languages
English (en)
Japanese (ja)
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JP2015041388A (ja
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Publication date
Application filed filed Critical
Priority to JP2013170069A priority Critical patent/JP2015041388A/ja
Priority claimed from JP2013170069A external-priority patent/JP2015041388A/ja
Publication of JP2015041388A publication Critical patent/JP2015041388A/ja
Publication of JP2015041388A5 publication Critical patent/JP2015041388A5/ja
Withdrawn legal-status Critical Current

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JP2013170069A 2013-08-20 2013-08-20 記憶装置、及び半導体装置 Withdrawn JP2015041388A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013170069A JP2015041388A (ja) 2013-08-20 2013-08-20 記憶装置、及び半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013170069A JP2015041388A (ja) 2013-08-20 2013-08-20 記憶装置、及び半導体装置

Publications (2)

Publication Number Publication Date
JP2015041388A JP2015041388A (ja) 2015-03-02
JP2015041388A5 true JP2015041388A5 (zh) 2016-09-23

Family

ID=52695463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013170069A Withdrawn JP2015041388A (ja) 2013-08-20 2013-08-20 記憶装置、及び半導体装置

Country Status (1)

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JP (1) JP2015041388A (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108140657A (zh) * 2015-09-30 2018-06-08 株式会社半导体能源研究所 半导体装置及电子设备
JP6975560B2 (ja) * 2017-06-23 2021-12-01 株式会社半導体エネルギー研究所 記憶装置
JP7419258B2 (ja) * 2018-11-26 2024-01-22 株式会社半導体エネルギー研究所 二次電池システム
JP7429686B2 (ja) 2019-03-29 2024-02-08 株式会社半導体エネルギー研究所 半導体装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3324129B2 (ja) * 1991-12-27 2002-09-17 株式会社日立製作所 半導体多値メモリ
JP5594927B2 (ja) * 2007-04-11 2014-09-24 ピーエスフォー ルクスコ エスエイアールエル 半導体記憶装置
JP2008293605A (ja) * 2007-05-25 2008-12-04 Elpida Memory Inc 半導体記憶装置
JP5497417B2 (ja) * 2009-12-10 2014-05-21 富士フイルム株式会社 薄膜トランジスタおよびその製造方法、並びにその薄膜トランジスタを備えた装置
KR101883802B1 (ko) * 2009-12-28 2018-07-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
TWI574259B (zh) * 2010-09-29 2017-03-11 半導體能源研究所股份有限公司 半導體記憶體裝置和其驅動方法
KR101995082B1 (ko) * 2010-12-03 2019-07-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 산화물 반도체막 및 반도체 장치
US9214474B2 (en) * 2011-07-08 2015-12-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
JP2013137853A (ja) * 2011-12-02 2013-07-11 Semiconductor Energy Lab Co Ltd 記憶装置および記憶装置の駆動方法

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