JP2015041388A5 - - Google Patents
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- Publication number
- JP2015041388A5 JP2015041388A5 JP2013170069A JP2013170069A JP2015041388A5 JP 2015041388 A5 JP2015041388 A5 JP 2015041388A5 JP 2013170069 A JP2013170069 A JP 2013170069A JP 2013170069 A JP2013170069 A JP 2013170069A JP 2015041388 A5 JP2015041388 A5 JP 2015041388A5
- Authority
- JP
- Japan
- Prior art keywords
- metal oxide
- oxide film
- wiring
- film
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910044991 metal oxide Inorganic materials 0.000 claims 20
- 150000004706 metal oxides Chemical class 0.000 claims 20
- 230000006870 function Effects 0.000 claims 7
- 239000003990 capacitor Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013170069A JP2015041388A (ja) | 2013-08-20 | 2013-08-20 | 記憶装置、及び半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013170069A JP2015041388A (ja) | 2013-08-20 | 2013-08-20 | 記憶装置、及び半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015041388A JP2015041388A (ja) | 2015-03-02 |
| JP2015041388A5 true JP2015041388A5 (enrdf_load_stackoverflow) | 2016-09-23 |
Family
ID=52695463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013170069A Withdrawn JP2015041388A (ja) | 2013-08-20 | 2013-08-20 | 記憶装置、及び半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2015041388A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180063084A (ko) * | 2015-09-30 | 2018-06-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 전자 기기 |
| JP6975560B2 (ja) * | 2017-06-23 | 2021-12-01 | 株式会社半導体エネルギー研究所 | 記憶装置 |
| JP7419258B2 (ja) * | 2018-11-26 | 2024-01-22 | 株式会社半導体エネルギー研究所 | 二次電池システム |
| TWI842855B (zh) | 2019-03-29 | 2024-05-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3324129B2 (ja) * | 1991-12-27 | 2002-09-17 | 株式会社日立製作所 | 半導体多値メモリ |
| JP5594927B2 (ja) * | 2007-04-11 | 2014-09-24 | ピーエスフォー ルクスコ エスエイアールエル | 半導体記憶装置 |
| JP2008293605A (ja) * | 2007-05-25 | 2008-12-04 | Elpida Memory Inc | 半導体記憶装置 |
| JP5497417B2 (ja) * | 2009-12-10 | 2014-05-21 | 富士フイルム株式会社 | 薄膜トランジスタおよびその製造方法、並びにその薄膜トランジスタを備えた装置 |
| KR101883802B1 (ko) * | 2009-12-28 | 2018-07-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
| TWI574259B (zh) * | 2010-09-29 | 2017-03-11 | 半導體能源研究所股份有限公司 | 半導體記憶體裝置和其驅動方法 |
| KR101995082B1 (ko) * | 2010-12-03 | 2019-07-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막 및 반도체 장치 |
| US9214474B2 (en) * | 2011-07-08 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
| JP2013137853A (ja) * | 2011-12-02 | 2013-07-11 | Semiconductor Energy Lab Co Ltd | 記憶装置および記憶装置の駆動方法 |
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2013
- 2013-08-20 JP JP2013170069A patent/JP2015041388A/ja not_active Withdrawn