JP2015031695A5 - - Google Patents

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Publication number
JP2015031695A5
JP2015031695A5 JP2014157446A JP2014157446A JP2015031695A5 JP 2015031695 A5 JP2015031695 A5 JP 2015031695A5 JP 2014157446 A JP2014157446 A JP 2014157446A JP 2014157446 A JP2014157446 A JP 2014157446A JP 2015031695 A5 JP2015031695 A5 JP 2015031695A5
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JP
Japan
Prior art keywords
phase
optical
control system
optical element
light beam
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JP2014157446A
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English (en)
Japanese (ja)
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JP2015031695A (ja
JP6550217B2 (ja
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Priority claimed from FR1301855A external-priority patent/FR3009378B1/fr
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Publication of JP2015031695A5 publication Critical patent/JP2015031695A5/ja
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Publication of JP6550217B2 publication Critical patent/JP6550217B2/ja
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JP2014157446A 2013-08-01 2014-08-01 測定すべき光学面を制御するシステム Active JP6550217B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1301855 2013-08-01
FR1301855A FR3009378B1 (fr) 2013-08-01 2013-08-01 Systeme de controle d'une surface optique a mesurer

Publications (3)

Publication Number Publication Date
JP2015031695A JP2015031695A (ja) 2015-02-16
JP2015031695A5 true JP2015031695A5 (https=) 2019-01-24
JP6550217B2 JP6550217B2 (ja) 2019-07-24

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ID=49667209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014157446A Active JP6550217B2 (ja) 2013-08-01 2014-08-01 測定すべき光学面を制御するシステム

Country Status (5)

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US (1) US20150036149A1 (https=)
EP (1) EP2833094B1 (https=)
JP (1) JP6550217B2 (https=)
FR (1) FR3009378B1 (https=)
IN (1) IN2014DE02192A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12053240B2 (en) 2020-05-20 2024-08-06 Arizona Optical Metrology Llc Systems and methods for measurement of optical wavefronts

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820049A (en) * 1987-10-16 1989-04-11 Zygo Corporation Coating and method for testing plano and spherical wavefront producing optical surfaces and systems having a broad range of reflectivities
DE19819762A1 (de) * 1998-05-04 1999-11-25 Bosch Gmbh Robert Interferometrische Meßeinrichtung
JP2003202204A (ja) * 2002-01-07 2003-07-18 Nikon Corp 干渉計、露光装置、および露光方法
US7317527B1 (en) * 2004-11-29 2008-01-08 Kla-Tencor Technologies Corporation Spatial light modulator fourier transform
JP4108085B2 (ja) * 2005-02-18 2008-06-25 富士通株式会社 光学歪補正装置および光学歪補正方法
US7599069B2 (en) * 2005-05-06 2009-10-06 The University Of Chicago Vector beam generator using a passively phase stable optical interferometer
US20060268282A1 (en) * 2005-05-25 2006-11-30 Evans Christopher J Adaptive nulls for testing off-axis segments of aspherics
US8049822B2 (en) * 2006-02-27 2011-11-01 Sanyo Electric Co., Ltd. Projection type video display
US20080297912A1 (en) * 2007-06-01 2008-12-04 Electro Scientific Industries, Inc., An Oregon Corporation Vario-astigmatic beam expander
US8243281B2 (en) * 2007-09-25 2012-08-14 Carl Zeiss Smt Gmbh Method and system for measuring a surface of an object
EP2286179B1 (en) * 2008-04-08 2021-05-19 QED Technologies International, Inc. Stitching of near-nulled subaperture measurements
KR101085061B1 (ko) * 2009-04-08 2011-11-18 한국과학기술원 고속카메라와 연속위상주사 방법을 이용한 진동둔감 간섭계
CN102661719B (zh) * 2012-04-16 2014-03-26 中国人民解放军国防科学技术大学 用于非球面子孔径拼接测量的近零位补偿器及面形测量仪和测量方法

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