JP2015014530A - 振動センサ - Google Patents
振動センサ Download PDFInfo
- Publication number
- JP2015014530A JP2015014530A JP2013141703A JP2013141703A JP2015014530A JP 2015014530 A JP2015014530 A JP 2015014530A JP 2013141703 A JP2013141703 A JP 2013141703A JP 2013141703 A JP2013141703 A JP 2013141703A JP 2015014530 A JP2015014530 A JP 2015014530A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- vibration
- vibration sensor
- weight
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000001514 detection method Methods 0.000 claims abstract description 29
- 239000010409 thin film Substances 0.000 claims abstract description 16
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 10
- 239000010408 film Substances 0.000 description 9
- 239000004020 conductor Substances 0.000 description 7
- 239000002033 PVDF binder Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
Description
Claims (4)
- 薄膜状の第1圧電素子と、
薄膜状の第2圧電素子と、
前記第1圧電素子に接し、前記第1圧電素子に重みを与える錘と、
前記第1圧電素子および前記第2圧電素子が接続され、前記第1圧電素子および前記第2圧電素子の各検出値に応じた値を出力する出力部と、
を備え、
前記第1圧電素子および前記第2圧電素子は、
与えられた振動に対する増減が互いに逆である検出値を前記出力部に出力することを特徴とする振動センサ。 - 請求項1に記載の振動センサにおいて、
前記第1圧電素子および前記第2圧電素子のそれぞれは、
前記検出値としての電圧を出力する正相端子および逆相端子を有し、
前記第1圧電素子の正相端子が前記第2圧電素子の逆相端子に接続され、前記第1圧電素子の逆相端子が前記第2圧電素子の正相端子に接続されていることを特徴とする振動センサ。 - 請求項1または請求項2に記載の振動センサにおいて、
前記錘は板状に形成され、
前記錘の底面に前記第1圧電素子が接合され、
前記錘の上面に前記第2圧電素子が接合されていることを特徴とする、振動センサ。 - 請求項1から請求項3のいずれか1項に記載の振動センサにおいて、
前記出力部は、インピーダンス変換を行うバッファアンプを含むことを特徴とする振動センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013141703A JP6282414B2 (ja) | 2013-07-05 | 2013-07-05 | 振動センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013141703A JP6282414B2 (ja) | 2013-07-05 | 2013-07-05 | 振動センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015014530A true JP2015014530A (ja) | 2015-01-22 |
JP6282414B2 JP6282414B2 (ja) | 2018-02-21 |
Family
ID=52436339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013141703A Active JP6282414B2 (ja) | 2013-07-05 | 2013-07-05 | 振動センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6282414B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018198629A1 (ja) * | 2017-04-24 | 2018-11-01 | 株式会社デンソー | 振動検出器 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01148970A (ja) * | 1987-12-07 | 1989-06-12 | Matsushita Electric Ind Co Ltd | 加速度センサ |
JPH0280967A (ja) * | 1988-09-19 | 1990-03-22 | Matsushita Electric Ind Co Ltd | 加速度センサ |
JPH06207869A (ja) * | 1993-01-11 | 1994-07-26 | Fujikura Ltd | 圧電型振動センサ |
JPH09243447A (ja) * | 1996-03-07 | 1997-09-19 | Samsung Electron Co Ltd | 振動検出センサー |
-
2013
- 2013-07-05 JP JP2013141703A patent/JP6282414B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01148970A (ja) * | 1987-12-07 | 1989-06-12 | Matsushita Electric Ind Co Ltd | 加速度センサ |
JPH0280967A (ja) * | 1988-09-19 | 1990-03-22 | Matsushita Electric Ind Co Ltd | 加速度センサ |
JPH06207869A (ja) * | 1993-01-11 | 1994-07-26 | Fujikura Ltd | 圧電型振動センサ |
JPH09243447A (ja) * | 1996-03-07 | 1997-09-19 | Samsung Electron Co Ltd | 振動検出センサー |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018198629A1 (ja) * | 2017-04-24 | 2018-11-01 | 株式会社デンソー | 振動検出器 |
Also Published As
Publication number | Publication date |
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JP6282414B2 (ja) | 2018-02-21 |
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