JP2014529274A - 断面膨張モード共振器 - Google Patents
断面膨張モード共振器 Download PDFInfo
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- JP2014529274A JP2014529274A JP2014533609A JP2014533609A JP2014529274A JP 2014529274 A JP2014529274 A JP 2014529274A JP 2014533609 A JP2014533609 A JP 2014533609A JP 2014533609 A JP2014533609 A JP 2014533609A JP 2014529274 A JP2014529274 A JP 2014529274A
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- piezoelectric
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- resonator
- resonator structure
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
- H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H2009/241—Bulk-mode MEMS resonators
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2426—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators in combination with other electronic elements
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
本開示は、同時係属中の、2011年9月30日に出願した、「CROSS−SECTIONAL DILATION MODE RESONATORS」と題する米国特許仮出願第61/541,546号(代理人整理番号第QUALP096P/112736P1号)、および2011年11月14日に出願した、「CROSS−SECTIONAL DILATION MODE RESONATORS」と題する米国特許出願第13/295,970号(代理人整理番号第QUALP096A/112736U1号)の優先権を主張する。これらの先願の開示は、本開示の一部と見なされ、かつ参照によりすべての目的のためにその全体が本開示に組み込まれる。
12 干渉変調器、IMOD、ピクセル
13 矢印
14 可動反射層
15 光
16 光学スタック
18 ポスト
19 ギャップ
20 透明基板
21 コントローラ、プロセッサ
22 アレイドライバ
24 行ドライバ回路
26 列ドライバ回路
27 ネットワークインターフェース
28 フレームバッファ
29 ドライバコントローラ
30 ディスプレイアレイ、ディスプレイパネル
40 ディスプレイデバイス
41 ハウジング
43 アンテナ
45 スピーカー
46 マイクロフォン
47 トランシーバ
48 入力デバイス
50 電力システム
52 調整ハードウェア
100 膨張モード共振器(DMR)構造
104 上側導電層
104a 上側電極
104b 上側電極
108 導電層
112 圧電層
116 上面
120 下面
124 入力AC信号
128 出力信号
140 アース端子
144 アース端子
148 キャビティ
150 支持構造
152 テザー
204 下側導電層
204a 入力電極
204b 出力電極
300 2次元(2D)の膨張モード形状
302 長方形形状
304 第1の領域
308 第2の領域
312 領域
316 領域
320 領域
324 領域
408a 接続部材
408b 接続部材
416 キャビティ
504 交流(AC)電圧源
506a 第1の端子
506b 第2の端子
508 電界
516 電位
520 センサー
800 構造
804 ガラス基板
808 犠牲(SAC)層
810 露出エリア
812 ポスト酸化物層
812a ポスト酸化物アンカー
812b ポスト酸化物アンカー
812c ポスト酸化物層、温度補償層
816 第1の金属層
818 下側電極、下側導電層
819 側部エリア
820 圧電膜、圧電層
822 ストリップ、圧電層
823 ビア
824 第2の金属層
826 上側電極
826a 電極
826b 電極
828 リリース保護層
829 側壁
832 キャビティ
900A DMR構造
900B DMR構造
900C DMR構造
908 電極
912a 第1の電極
912b 第2の電極
916a 第1の電極
916b 第2の電極
1000A DMR
1000B DMR
1100A DMR
1100B DMR
1200A 共振器構造
1200B 共振器構造
1200C 共振器構造
1220 下面
1300 DMR構造
1400 共振器構造
1500 共振器構造
2000 温度補償型構造
2100 空気ギャップ構造
2200 回路、ラダーフィルタ回路
2208 入力端子
2216 出力端子
2220 直列共振器
2220a 直列共振器
2220b 直列共振器
2224 シャント共振器
2224a シャント共振器
2224b シャント共振器
2300 ラダーフィルタ回路
2304 入力端子
2308 出力端子
2312 通過帯域
2316 ヌル
2320 ヌル
2400 ラダーフィルタ回路
2404 追加のシャント共振器
2404a シャント共振器
2404b シャント共振器
2408 ヌル
2412 ヌル
2416 除去領域
2420 除去領域
2500 回路
2508 ヌル
2512 ヌル
2516 除去領域
2520 除去領域
2600 ラダーフィルタ回路
2604 インダクタ、シャントインダクタ
2608 ヌル周波数
2612 ヌル周波数
2616 通過帯域領域
2622 除去領域
2700 ラダーフィルタ回路
2704 インダクタ、シャントインダクタ
2708 ヌル周波数
2712 ヌル周波数
2716 除去領域
2720 除去領域
2800 共振器構造
2800a 螺旋形状の共振器
2800b 螺旋形状の共振器
2804 入力電極
2804a 入力電極
2804b 第1の電極
2808 内側の終了点
2812 螺旋形状の圧電材料
2814 螺旋区画
2816 外側の終了点
2820 電極
2820a 電極
2820b 電極
2900 ラダーフィルタ回路
Claims (27)
- 1つまたは複数の電極の第1の導電層と、
1つまたは複数の電極の第2の導電層と、
圧電材料から形成され、前記第1の導電層と前記第2の導電層との間に配設される圧電層であって、X軸および前記X軸に垂直なY軸の平面内の横方向距離(D)と、前記X軸および前記Y軸に垂直なZ軸に沿った厚さ(T)とを含む寸法を有し、前記厚さと前記横方向距離との数値的比率T/Dが、前記電極のうちの1つまたは複数に与えられる信号に応答して前記Z軸に沿った変位と前記X軸および前記Y軸の前記平面に沿った変位とを有する前記圧電層の振動モードを与えるように構成される、圧電層と
を備える、圧電共振器構造。 - 前記圧電層の前記横方向距離が前記X軸に沿った幅であり、
前記圧電層の前記変位が、前記Z軸に沿って、かつ前記X軸に沿って発生する、請求項1に記載の圧電共振器構造。 - 前記圧電層の前記横方向距離が前記Y軸に沿った長さであり、
前記圧電層の前記変位が、前記Z軸に沿って、かつ前記Y軸に沿って発生する、請求項1に記載の圧電共振器構造。 - 前記振動モードが2次元振動モードである、請求項1から3のいずれか一項に記載の圧電共振器構造。
- 前記振動モードが3次元振動モードである、請求項1から4のいずれか一項に記載の圧電共振器構造。
- 前記数値的比率T/Dが、電気機械結合に関連する指定の範囲内にある、請求項1から5のいずれか一項に記載の圧電共振器構造。
- 前記指定範囲が、第1の電気機械結合に関連する第1の範囲と、前記第1の電気機械結合と異なる第2の電気機械結合に関連する第2の範囲とを含む、請求項6に記載の圧電共振器構造。
- 前記第1の電気機械結合が、前記第1の範囲内で前記数値的比率T/Dに対して可変である、請求項7に記載の圧電共振器構造。
- 前記第2の電気機械結合が、前記第1の電気機械結合より高い、請求項7に記載の圧電共振器構造。
- 前記Z軸が前記圧電層を二等分し、
前記振動モードが前記Z軸に対して対称形の形状を有する、請求項1から9のいずれか一項に記載の圧電共振器構造。 - 前記X軸および前記Y軸の前記平面に沿った前記変位が均一ではない、請求項1から10のいずれか一項に記載の圧電共振器構造。
- 前記振動モードが、前記圧電材料の係数の組合せに関連する、請求項1から11のいずれか一項に記載の圧電共振器構造。
- 係数の前記組合せが、d31係数、d32係数、d33係数、d24係数およびd15係数から成る群から選択される2つ以上の係数を含む、請求項1から12のいずれか一項に記載の圧電共振器構造。
- 1つまたは複数の電極の前記第1の導電層が、前記圧電層の第1の表面の実質的部分を覆う、請求項1から13のいずれか一項に記載の圧電共振器構造。
- 1つまたは複数の電極の前記第2の導電層が、前記圧電層の第2の表面の実質的部分を覆う、請求項1から14のいずれか一項に記載の圧電共振器構造。
- 前記圧電材料が、窒化アルミニウム、酸化亜鉛、ガリウムヒ素、アルミニウムガリウムヒ素、窒化ガリウム、石英、硫化亜鉛、硫化カドミウム、タンタル酸リチウム、ニオブ酸リチウム、およびチタン酸ジルコン酸鉛から成る群から選択される1つまたは複数の品目を含む、請求項1から15のいずれか一項に記載の圧電共振器構造。
- 前記第1の導電層および前記第2の導電層の前記電極が、前記Y軸に沿って長手方向に向けられる、請求項1から16のいずれか一項に記載の圧電共振器構造。
- 前記第2の導電層電極が、前記X軸に沿って互いに離間し、前記第1の導電層電極が、前記X軸に沿って互いに離間する、請求項1から17のいずれか一項に記載の圧電共振器構造。
- 前記電極のうちの1つまたは複数が、前記構造の共振周波数に対応するフィンガー幅を有する、請求項1から18のいずれか一項に記載の圧電共振器構造。
- 前記導電層と前記圧電層とを支持構造に固定するために結合された1つまたは複数のテザーをさらに備える、請求項1から19のいずれか一項に記載の圧電共振器構造。
- 請求項1から20のいずれか一項に記載の前記圧電共振器構造と、
ディスプレイと、
前記ディスプレイと通信するように構成され、画像データを処理するように構成されたプロセッサと、
前記プロセッサと通信するように構成されたメモリデバイスと
を含む、装置。 - 少なくとも1つの信号を前記ディスプレイに送信するように構成されたドライバ回路と、
前記画像データの少なくとも一部分を前記ドライバ回路に送信するように構成されたコントローラと
をさらに備える、請求項21に記載の装置。 - 前記圧電共振器構造の前記電極のうちの1つまたは複数が、前記画像データを前記プロセッサに送信するために結合される、請求項21または22に記載の装置。
- 入力信号を受信するための第1の導電性手段と、
出力信号を与えるための第2の導電性手段と、
圧電材料から形成され、前記第1の導電性手段と前記第2の導電性手段との近傍に配設される圧電手段であって、X軸および前記X軸に垂直なY軸の平面内の横方向距離(D)と、前記X軸および前記Y軸に垂直なZ軸に沿った厚さ(T)とを含む寸法を有し、前記電極のうちの1つまたは複数に与えられる信号に応答して前記Z軸に沿った変位と前記X軸および前記Y軸の前記平面に沿った変位とを有する振動モードを与えるための、前記厚さと前記横方向距離との数値的比率T/Dを有する、圧電手段と
を備える、圧電共振器構造。 - 前記数値的比率T/Dが、電気機械結合に関連する指定の範囲内にある、請求項24に記載の圧電共振器構造。
- 前記指定範囲が、第1の電気機械結合に関連する第1の範囲と、前記第1の電気機械結合と異なる第2の電気機械結合に関連する第2の範囲とを含む、請求項25に記載の圧電共振器構造。
- 前記第1の電気機械結合が、前記第1の範囲内で前記数値的比率T/Dに対して可変である、請求項26に記載の圧電共振器構造。
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CN103858343B (zh) | 2017-03-15 |
KR101707098B1 (ko) | 2017-02-15 |
TW201320593A (zh) | 2013-05-16 |
JP5960271B2 (ja) | 2016-08-02 |
US9099986B2 (en) | 2015-08-04 |
KR101642102B1 (ko) | 2016-07-25 |
JP2015501562A (ja) | 2015-01-15 |
CN103858343A (zh) | 2014-06-11 |
WO2013048845A1 (en) | 2013-04-04 |
US20130082799A1 (en) | 2013-04-04 |
US20130083044A1 (en) | 2013-04-04 |
CN107093998A (zh) | 2017-08-25 |
KR20140079807A (ko) | 2014-06-27 |
TW201330495A (zh) | 2013-07-16 |
EP2761748A1 (en) | 2014-08-06 |
WO2013048842A1 (en) | 2013-04-04 |
KR20140079808A (ko) | 2014-06-27 |
US9270254B2 (en) | 2016-02-23 |
EP2761747A1 (en) | 2014-08-06 |
JP5937218B2 (ja) | 2016-06-22 |
CN103975525A (zh) | 2014-08-06 |
CN103975525B (zh) | 2017-02-15 |
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