JP2014521192A5 - - Google Patents

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Publication number
JP2014521192A5
JP2014521192A5 JP2014518593A JP2014518593A JP2014521192A5 JP 2014521192 A5 JP2014521192 A5 JP 2014521192A5 JP 2014518593 A JP2014518593 A JP 2014518593A JP 2014518593 A JP2014518593 A JP 2014518593A JP 2014521192 A5 JP2014521192 A5 JP 2014521192A5
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JP
Japan
Prior art keywords
charged particles
angle
incidence
charged
reduction system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2014518593A
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English (en)
Japanese (ja)
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JP2014521192A (ja
JP6026527B2 (ja
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Publication date
Priority claimed from US13/174,020 external-priority patent/US8633457B2/en
Application filed filed Critical
Publication of JP2014521192A publication Critical patent/JP2014521192A/ja
Publication of JP2014521192A5 publication Critical patent/JP2014521192A5/ja
Application granted granted Critical
Publication of JP6026527B2 publication Critical patent/JP6026527B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014518593A 2011-06-30 2012-06-07 ルーバを含むバックグラウンド低減システム Active JP6026527B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/174,020 2011-06-30
US13/174,020 US8633457B2 (en) 2011-06-30 2011-06-30 Background reduction system including louver
PCT/US2012/041343 WO2013002993A1 (en) 2011-06-30 2012-06-07 Background reduction system including louver

Publications (3)

Publication Number Publication Date
JP2014521192A JP2014521192A (ja) 2014-08-25
JP2014521192A5 true JP2014521192A5 (https=) 2015-07-16
JP6026527B2 JP6026527B2 (ja) 2016-11-16

Family

ID=47389602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014518593A Active JP6026527B2 (ja) 2011-06-30 2012-06-07 ルーバを含むバックグラウンド低減システム

Country Status (6)

Country Link
US (1) US8633457B2 (https=)
EP (1) EP2726906A4 (https=)
JP (1) JP6026527B2 (https=)
CN (1) CN103748483A (https=)
TW (1) TW201301333A (https=)
WO (1) WO2013002993A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2682978B1 (en) * 2012-07-05 2016-10-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Contamination reduction electrode for particle detector
US9082580B2 (en) 2013-09-23 2015-07-14 Kla-Tencor Corporation Notched magnetic lens for improved sample access in an SEM

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135388A (https=) * 1974-09-20 1976-03-25 Hitachi Ltd
SU693487A1 (ru) 1978-01-16 1979-10-25 Предприятие П/Я В-2502 Счетчик гейгера-мюллера с экраном
FR2591036A1 (fr) * 1985-12-04 1987-06-05 Balteau Dispositif de detection et de localisation de particules neutres, et applications
SU1814427A1 (ru) 1988-11-23 1995-04-20 Физико-технический институт им.А.Ф.Иоффе Электростатический спектрометр для энергетического и углового анализа заряженных частиц
JPH10256136A (ja) * 1997-03-14 1998-09-25 Nikon Corp 荷電ビーム露光装置
JP3603779B2 (ja) * 2000-11-01 2004-12-22 株式会社日立製作所 電子検出装置，荷電粒子ビーム装置，半導体集積回路装置、および半導体集積回路装置の加工，観察，検査方法
US7394053B2 (en) * 2004-09-09 2008-07-01 Beth Israel Deaconess Medical Center, Inc. Systems and methods for multi-modal imaging having a spatial relationship in three dimensions between first and second image data
US7476876B2 (en) * 2005-12-21 2009-01-13 Axcelis Technologies, Inc. Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems
US7692156B1 (en) * 2006-08-23 2010-04-06 Radiation Monitoring Devices, Inc. Beam-oriented pixellated scintillators for radiation imaging
US8304751B2 (en) * 2008-05-12 2012-11-06 Mitsubishi Electric Corporation Charged particle beam irradiation apparatus
EP2454749A4 (en) * 2009-07-17 2013-09-04 Kla Tencor Corp ENERGY ANALYZER OF CHARGED PARTICLES

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