JP2014512677A - ミラーアレイ - Google Patents
ミラーアレイ Download PDFInfo
- Publication number
- JP2014512677A JP2014512677A JP2014500414A JP2014500414A JP2014512677A JP 2014512677 A JP2014512677 A JP 2014512677A JP 2014500414 A JP2014500414 A JP 2014500414A JP 2014500414 A JP2014500414 A JP 2014500414A JP 2014512677 A JP2014512677 A JP 2014512677A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- base plate
- component
- optical
- mirror array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 238000003491 array Methods 0.000 claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims description 175
- 239000000758 substrate Substances 0.000 claims description 47
- 238000005286 illumination Methods 0.000 claims description 43
- 238000004519 manufacturing process Methods 0.000 claims description 42
- 230000005855 radiation Effects 0.000 claims description 39
- 230000005291 magnetic effect Effects 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 24
- 125000006850 spacer group Chemical group 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 230000005294 ferromagnetic effect Effects 0.000 claims description 7
- 238000010923 batch production Methods 0.000 claims description 5
- 238000001393 microlithography Methods 0.000 claims description 3
- 210000001747 pupil Anatomy 0.000 description 41
- 238000001816 cooling Methods 0.000 description 40
- 229910052751 metal Inorganic materials 0.000 description 32
- 239000002184 metal Substances 0.000 description 32
- 239000011888 foil Substances 0.000 description 23
- 238000000576 coating method Methods 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 13
- 239000003302 ferromagnetic material Substances 0.000 description 13
- 239000013067 intermediate product Substances 0.000 description 12
- 230000008901 benefit Effects 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 230000009467 reduction Effects 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000010354 integration Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 239000012809 cooling fluid Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000013011 mating Effects 0.000 description 3
- 239000002086 nanomaterial Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- QLJCFNUYUJEXET-UHFFFAOYSA-K aluminum;trinitrite Chemical compound [Al+3].[O-]N=O.[O-]N=O.[O-]N=O QLJCFNUYUJEXET-UHFFFAOYSA-K 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 208000028333 fixed pupil Diseases 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 208000022749 pupil disease Diseases 0.000 description 1
- 238000010405 reoxidation reaction Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
- G03F7/70116—Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Epidemiology (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Elements Other Than Lenses (AREA)
- Microscoopes, Condenser (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
を備え、ミラー素子(23)の全体が、ミラーアレイ(22)の全反射面の寄せ木張りを形成し、ミラーアレイ(22)を、全反射面の寄せ木張りが複数のミラーアレイ(22)のタイル張りによって拡張され得るようにタイル要素としてモジュール式に具現したミラーアレイ。
【選択図】図24
Description
Claims (20)
- 表面法線(41)に対して垂直に延びる全表面を有するミラーアレイ(22)であって、
a.それぞれが
i.反射面(36)、及び
ii.少なくとも1変位自由度
を有する複数のミラー素子(23)
を備え、
b.該ミラー素子(23)の全体が、前記ミラーアレイ(22)の全反射面の寄せ木張りを形成し、
c.前記ミラーアレイ(22)を、前記全反射面の寄せ木張りが複数の前記ミラーアレイ(22)のタイル張りによって拡張され得るようにタイル要素としてモジュール式に具現したミラーアレイ。 - 請求項1に記載のミラーアレイ(22)において、前記全表面は、前記全反射面よりも5mm以下、前記表面法線(41)に対して垂直な方向に突出することを特徴とするミラーアレイ。
- 光学コンポーネント(40;40a)であって、
a.請求項1又は2に記載のミラーアレイ(22)と、
b.前記表面法線(41)の方向に前記ミラーアレイ(22)に対してオフセット配置した担持構造(43)と
を備え、
c.該担持構造(43)は、前記ミラーアレイ(22)の全表面よりも1mm以下、前記表面法線(41)に対して垂直な方向に突出することを特徴とする光学コンポーネント。 - 請求項3に記載の光学コンポーネント(40;40a)において、前記担持構造(43)を、縁部領域(22)のみで前記ミラーアレイ(41)に機械的に接続したことを特徴とする光学コンポーネント。
- 請求項3又は4に記載の光学コンポーネント(40;40a)において、前記ミラー素子(23)の変位を制御する制御デバイス(51)を前記担持構造(43)に組み込んだことを特徴とする光学コンポーネント。
- 請求項3〜5のいずれか1項に記載の光学コンポーネント(40;40a)において、前記担持構造(43)のうち前記ミラーアレイ(22)に対して反対側に配置した電気インタフェース(55)を設けたことを特徴とする光学コンポーネント。
- 請求項3〜6のいずれか1項に記載の光学コンポーネント(40;40a)において、前記担持構造(43)は少なくとも1つの強磁性体(57)を備えることを特徴とする光学コンポーネント。
- 光学アセンブリ(65)であって、
a.光学コンポーネント(40;40a)を配置するベースプレート(59)と、
b.請求項3〜7のいずれか1項に記載の少なくとも1つの光学コンポーネント(40;40a)とを備え、
c.該少なくとも1つの光学コンポーネント(40;40a)を、固定デバイス(66)によって前記ベースプレートに固定した光学アセンブリ。 - 請求項8に記載の光学アセンブリ(65)であって、請求項3〜7のいずれか1項に記載の少なくとも5個の光学コンポーネント(40;40a)を備えたことを特徴とする光学アセンブリ。
- 請求項8及び9のいずれか1項に記載の光学アセンブリ(65)において、前記少なくとも1つの光学コンポーネント(40;40a)を、前記ベースプレート(59)に交換可能に配置したことを特徴とする光学アセンブリ。
- 請求項8〜10のいずれか1項に記載の光学アセンブリ(65)において、前記固定デバイス(66)は磁気手段(79)を備えることを特徴とする光学アセンブリ。
- 請求項8〜11のいずれか1項に記載の光学アセンブリ(65)において、前記少なくとも1つのコンポーネント(40;40a)のインタフェース(55)との電気接点を形成するばね式コンタクトピン(82)を設けたことを特徴とする光学アセンブリ。
- 請求項3〜7のいずれか1項に記載の光学アセンブリ(40;40a)を製造する方法であって、
請求項1又は2に記載の少なくとも1つのミラーアレイ(22)及び被覆基板(92)を有するウェハスタックを設けるステップと、
キャリア基板(95)を設けるステップと、
該キャリア基板(95)を前処理するステップと、
該キャリア基板(95)を前記ウェハスタックに接続するステップと
を含み、前記キャリア基板(95)を前記ウェハスタックに接続するバッチ法を行う方法。 - 請求項3〜7のいずれか1項に記載の光学コンポーネント(40;40a)を取り扱うツール(106)であって、
a.所定の保持力を発生させる少なくとも1つの電磁石(108、109)と、
b.前記ツール(106)と前記コンポーネント(40;40a)との間の所定の機械的接触領域を画定する少なくとも1つのスペーサ要素(112)と
を備えたツール。 - 請求項8〜12のいずれか1項に記載の光学アセンブリ(65)を製造する方法であって、
ベースプレート(59)に磁気固定デバイス(66、79)を設けるステップと、
コンポーネント(40;40a)を前記ベースプレート(59)に配置するステップと
を含み、前記コンポーネント(40;40a)を前記ベースプレート(59)に配置する目的で、前記磁石(79)が配置すべき前記コンポーネント(40;40a)それぞれに加える力を、付加的な磁場によって少なくとも部分的に補償する方法。 - 請求項8〜12のいずれか1項に記載のアセンブリ(65)を備えた投影露光装置(1)の光学ユニット(4、7)。
- EUV投影露光装置(1)の照明系であって、
a.請求項16に記載の光学ユニット(4)と、
b.EUV放射線源(3)と
を備えた照明系。 - 請求項16に記載の光学ユニット(4、7)を備えたEUVマイクロリソグラフィ用の投影露光装置(1)。
- 微細構造又はナノ構造コンポーネントを製造する方法であって、
感光性材料から構成される層を少なくとも部分的に施した基板を設けるステップと、
被結像構造を有するレチクル(24)を設けるステップと、
請求項18に記載の投影露光装置(1)を設けるステップと、
該投影露光装置(1)を用いて、前記レチクル(24)の少なくとも一部を前記基板の前記感光層の領域に投影するステップと
を含む方法。 - 請求項19に記載の方法により製造したコンポーネント。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011006100A DE102011006100A1 (de) | 2011-03-25 | 2011-03-25 | Spiegel-Array |
DE102011006100.2 | 2011-03-25 | ||
US201161470633P | 2011-04-01 | 2011-04-01 | |
US61/470633 | 2011-04-01 | ||
PCT/EP2012/055239 WO2012130768A2 (en) | 2011-03-25 | 2012-03-23 | Mirror array |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014512677A true JP2014512677A (ja) | 2014-05-22 |
JP6053748B2 JP6053748B2 (ja) | 2016-12-27 |
Family
ID=46831525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014500414A Active JP6053748B2 (ja) | 2011-03-25 | 2012-03-23 | ミラーアレイ |
Country Status (7)
Country | Link |
---|---|
US (1) | US9791691B2 (ja) |
EP (1) | EP2689282B1 (ja) |
JP (1) | JP6053748B2 (ja) |
CN (1) | CN103547955B (ja) |
DE (1) | DE102011006100A1 (ja) |
TW (1) | TWI477812B (ja) |
WO (1) | WO2012130768A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017534902A (ja) * | 2014-09-23 | 2017-11-24 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 投影リソグラフィのための照明光学ユニット及びそのための中空導波管構成要素 |
Families Citing this family (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012202167A1 (de) * | 2012-02-14 | 2013-08-14 | Carl Zeiss Smt Gmbh | Vorrichtung zur magnetfeldkompensierten Positionierung eines Bauelements |
DE102012202169A1 (de) * | 2012-02-14 | 2013-03-07 | Carl Zeiss Smt Gmbh | Haltevorrichtung |
DE102012206609B4 (de) | 2012-04-23 | 2023-08-10 | Carl Zeiss Smt Gmbh | Strahlführungsoptik für ein Vielstrahlsystem sowie Verfahren |
DE102012206612A1 (de) | 2012-04-23 | 2013-10-24 | Carl Zeiss Smt Gmbh | Optisches Bauelement zur Führung eines Strahlungsbündels |
DE102012207048A1 (de) | 2012-04-27 | 2013-04-18 | Carl Zeiss Smt Gmbh | Verfahren zur Herstellung einer optischen Baugruppe |
DE102012213937A1 (de) * | 2012-08-07 | 2013-05-08 | Carl Zeiss Smt Gmbh | Spiegel-Austauscharray |
DE102012218219A1 (de) | 2012-10-05 | 2014-04-10 | Carl Zeiss Smt Gmbh | Verfahren zur Regelung der Verkippung eines Spiegelelements |
DE102013208446A1 (de) * | 2013-05-08 | 2014-06-18 | Carl Zeiss Smt Gmbh | Optische Baugruppe |
DE102013209442A1 (de) * | 2013-05-22 | 2014-11-27 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
DE102013212363A1 (de) * | 2013-06-27 | 2014-07-31 | Carl Zeiss Smt Gmbh | Facettenspiegel, insbesondere für die EUV-Projektionslithografie |
DE102013217146A1 (de) * | 2013-08-28 | 2015-03-05 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
DE102013219057A1 (de) * | 2013-09-23 | 2015-03-26 | Carl Zeiss Smt Gmbh | Facettenspiegel für eine Projektionsbelichtungsanlage |
US9658542B2 (en) | 2013-10-14 | 2017-05-23 | Carl Zeiss Smt Gmbh | Optical element |
DE102013222823B4 (de) | 2013-11-11 | 2023-06-15 | Robert Bosch Gmbh | Verfahren zur Herstellung von mikromechanischen Bauteilen |
DE102013222836B4 (de) | 2013-11-11 | 2023-06-07 | Robert Bosch Gmbh | 1Mikroelektromechanisches Bauelement und entsprechendes Herstellungsverfahren |
EP2687906A3 (de) | 2013-11-21 | 2015-12-02 | Carl Zeiss SMT GmbH | Einrichtung und Verfahren zur Steuerung der Positionierung eines verlagerbaren Einzelspiegels |
DE102014202755A1 (de) | 2014-02-14 | 2015-08-20 | Carl Zeiss Smt Gmbh | Verfahren zur Verlagerung mindestens eines optischen Bauelements |
DE102014203189A1 (de) | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Spiegel-Array |
DE102014207866A1 (de) | 2014-04-25 | 2015-10-29 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren zur Regelung der Positionierung einer Vielzahl von verstellbaren Spiegel-Elementen einer Vielspiegel-Anordnung |
DE102014217620A1 (de) | 2014-09-03 | 2016-03-03 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für eine Projektionsbelichtungsanlage |
DE102014219647A1 (de) | 2014-09-29 | 2016-03-31 | Carl Zeiss Smt Gmbh | Mikroaktuator, Spiegelanordnung und Projektionsbelichtungsanlage für die Mikrolithographie |
DE102014224993A1 (de) | 2014-12-05 | 2016-06-09 | Carl Zeiss Smt Gmbh | Verstellsystem-Bauelement, Spiegelanordnung und Projektionsbelichtungsanlage für die Mikrolithographie |
DE102014224991A1 (de) | 2014-12-05 | 2016-06-09 | Carl Zeiss Smt Gmbh | Verstellsystem-Bauelement, Baugruppe, Spiegelanordnung und Projektionsbelichtungsanlage für dieMikrolithographie |
DE102014224994A1 (de) | 2014-12-05 | 2015-12-17 | Carl Zeiss Smt Gmbh | Spiegelanordnung, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
DE102014226917A1 (de) | 2014-12-23 | 2015-12-17 | Carl Zeiss Smt Gmbh | Beleuchtungssystem für die EUV-Projektionslithographie |
TWI701517B (zh) | 2014-12-23 | 2020-08-11 | 德商卡爾蔡司Smt有限公司 | 光學構件 |
DE102015204874A1 (de) | 2015-03-18 | 2016-09-22 | Carl Zeiss Smt Gmbh | Einrichtung zur Verschwenkung eines Spiegel-Elements mit zwei Schwenk-Freiheitsgraden |
JP6654279B2 (ja) * | 2015-06-10 | 2020-02-26 | 天馬微電子有限公司 | 光学素子及び表示装置 |
DE102015215213A1 (de) | 2015-08-10 | 2016-07-21 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
DE102015220018A1 (de) | 2015-10-15 | 2016-10-06 | Carl Zeiss Smt Gmbh | Verfahren zur Herstellung eines mikroelektromechanischen Bauelements mit mindestens einem beweglichen Bestandteil |
DE102015224598A1 (de) | 2015-12-08 | 2016-03-03 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik |
DE102015225535A1 (de) | 2015-12-17 | 2016-10-27 | Carl Zeiss Smt Gmbh | Verfahren zur Herstellung einer Vielspiegel-Anordnung mit einer Vielzahl von verlagerbaren Einzelspiegeln |
JP6720633B2 (ja) * | 2016-03-29 | 2020-07-08 | セイコーエプソン株式会社 | 電気光学装置、電気光学ユニットおよび電子機器 |
CN106082107B (zh) * | 2016-06-08 | 2017-11-07 | 无锡微奥科技有限公司 | 一种热驱动mems微镜阵列器件及其制造方法 |
DE102016213785A1 (de) | 2016-07-27 | 2018-02-01 | Carl Zeiss Smt Gmbh | Verfahren zur Einstellung eines Beleuchtungssettings |
DE102016216188A1 (de) | 2016-08-29 | 2018-03-01 | Carl Zeiss Smt Gmbh | Steuereinrichtung |
DE102017200775A1 (de) | 2017-01-19 | 2018-07-19 | Carl Zeiss Smt Gmbh | Bauelement für eine Projektionsbelichtungsanlage |
US10845706B2 (en) * | 2017-04-12 | 2020-11-24 | Asml Netherlands B.V. | Mirror array |
DE102017215664A1 (de) | 2017-09-06 | 2019-03-07 | Carl Zeiss Smt Gmbh | Optisches System für eine Projektionsbelichtungsanlage |
DE102018207103A1 (de) | 2018-05-08 | 2019-03-21 | Carl Zeiss Smt Gmbh | Feldfacettenspiegel |
DE102019200193B3 (de) | 2019-01-09 | 2020-02-06 | Carl Zeiss Smt Gmbh | Optisches System für eine Projektionsbelichtungsanlage |
DE102019204699B4 (de) * | 2019-04-02 | 2022-08-18 | Carl Zeiss Smt Gmbh | Dichtungsvorrichtung, Komponente und Lithographieanlage |
DE102020211359A1 (de) * | 2020-09-10 | 2022-03-10 | Carl Zeiss Smt Gmbh | Baugruppe eines optischen Systems für die Mikrolithographie |
CN112198768A (zh) * | 2020-10-22 | 2021-01-08 | Tcl华星光电技术有限公司 | 曝光机 |
DE102021100994B3 (de) | 2021-01-19 | 2022-03-10 | Bundesrepublik Deutschland (Bundesministerium für Wirtschaft und Energie) | Spiegelhalter, Frequenzstabilisierungs-System und Atomuhr |
DE102021203721A1 (de) * | 2021-04-15 | 2022-10-20 | Carl Zeiss Smt Gmbh | Aktuator-sensor-vorrichtung und lithographieanlage |
DE102021212553A1 (de) * | 2021-11-08 | 2023-05-11 | Carl Zeiss Smt Gmbh | Optisches system, lithographieanlage und verfahren |
DE102022200264A1 (de) | 2022-01-12 | 2022-12-15 | Carl Zeiss Smt Gmbh | Vorrichtung zur Verkippung eines Spiegels, optisches Bauelement, optische Baugruppe, Verfahren zur Verkippung eines Spiegels, Verfahren zur Herstellung einer Vorrichtung zur Verkippung eines Spiegels und EUV-Projektionsbelichtungsanlage |
WO2023184517A1 (en) * | 2022-04-02 | 2023-10-05 | Huawei Technologies Co.,Ltd. | Mems device for euv mask-less lithography |
DE102023204477A1 (de) | 2022-05-12 | 2023-11-16 | Carl Zeiss Smt Gmbh | Mikroelektromechanisches System (MEMS) |
WO2024037916A1 (en) | 2022-08-16 | 2024-02-22 | Carl Zeiss Smt Gmbh | Micro-optical element |
DE102022209935A1 (de) | 2022-09-21 | 2024-03-21 | Carl Zeiss Smt Gmbh | Vorrichtung zur stressreduzierten Lagerung von MEMS-basierten Mikrospiegeln |
DE102022210285A1 (de) | 2022-09-28 | 2024-03-28 | Carl Zeiss Smt Gmbh | Tragevorrichtung für ein oder mehrere MEMS-Bauelemente |
DE102022212279A1 (de) | 2022-11-18 | 2024-05-23 | Carl Zeiss Smt Gmbh | Baugruppe eines optischen Systems |
DE102022212277A1 (de) | 2022-11-18 | 2024-05-23 | Carl Zeiss Smt Gmbh | Baugruppe eines optischen Systems |
DE102022212904A1 (de) | 2022-11-30 | 2023-10-12 | Carl Zeiss Smt Gmbh | Einzelspiegel eines Facettenspiegels einer Beleuchtungsoptik einer Projektionsbelichtungsanlage |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005275814A (ja) * | 2004-03-24 | 2005-10-06 | Yasumi Matsumoto | 就労者評価システム、方法、およびプログラム |
US20050275814A1 (en) * | 2004-06-10 | 2005-12-15 | Lsi Logic Corporation, A Delaware Corporation | Maskless vortex phase shift optical direct write lithography |
WO2009100856A1 (en) * | 2008-02-15 | 2009-08-20 | Carl Zeiss Smt Ag | Facet mirror for use in a projection exposure apparatus for microlithography |
JP2012506135A (ja) * | 2008-10-20 | 2012-03-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 放射線ビームを案内するための光学モジュール |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10138313A1 (de) | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
US6870554B2 (en) * | 2003-01-07 | 2005-03-22 | Anvik Corporation | Maskless lithography with multiplexed spatial light modulators |
US6934072B1 (en) | 2004-05-27 | 2005-08-23 | Angstrom Inc. | Variable focal length lens comprising micromirrors with two degrees of freedom rotation and one degree of freedom translation |
US7145269B2 (en) | 2004-03-10 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, Lorentz actuator, and device manufacturing method |
US7777959B2 (en) | 2004-05-27 | 2010-08-17 | Angstrom, Inc. | Micromirror array lens with fixed focal length |
DE102006023652B4 (de) | 2006-05-18 | 2008-10-30 | Esa Patentverwertungsagentur Sachsen-Anhalt Gmbh | Elektromotorische Einrichtung zur Betätigung von Gaswechselventilen |
SE533579C2 (sv) * | 2007-01-25 | 2010-10-26 | Silex Microsystems Ab | Metod för mikrokapsling och mikrokapslar |
JP5267029B2 (ja) * | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
DE102013201506A1 (de) * | 2012-02-17 | 2013-08-22 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
DE102013201509A1 (de) * | 2012-02-17 | 2013-08-22 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
-
2011
- 2011-03-25 DE DE102011006100A patent/DE102011006100A1/de not_active Ceased
-
2012
- 2012-03-23 JP JP2014500414A patent/JP6053748B2/ja active Active
- 2012-03-23 TW TW101110078A patent/TWI477812B/zh active
- 2012-03-23 WO PCT/EP2012/055239 patent/WO2012130768A2/en unknown
- 2012-03-23 CN CN201280025247.8A patent/CN103547955B/zh active Active
- 2012-03-23 EP EP12710281.2A patent/EP2689282B1/en active Active
-
2013
- 2013-09-19 US US14/031,464 patent/US9791691B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005275814A (ja) * | 2004-03-24 | 2005-10-06 | Yasumi Matsumoto | 就労者評価システム、方法、およびプログラム |
US20050275814A1 (en) * | 2004-06-10 | 2005-12-15 | Lsi Logic Corporation, A Delaware Corporation | Maskless vortex phase shift optical direct write lithography |
WO2009100856A1 (en) * | 2008-02-15 | 2009-08-20 | Carl Zeiss Smt Ag | Facet mirror for use in a projection exposure apparatus for microlithography |
JP2011512659A (ja) * | 2008-02-15 | 2011-04-21 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィのための投影露光装置に使用するファセットミラー |
JP2012506135A (ja) * | 2008-10-20 | 2012-03-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 放射線ビームを案内するための光学モジュール |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017534902A (ja) * | 2014-09-23 | 2017-11-24 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 投影リソグラフィのための照明光学ユニット及びそのための中空導波管構成要素 |
Also Published As
Publication number | Publication date |
---|---|
EP2689282A2 (en) | 2014-01-29 |
CN103547955B (zh) | 2017-06-09 |
WO2012130768A9 (en) | 2013-02-28 |
DE102011006100A1 (de) | 2012-09-27 |
JP6053748B2 (ja) | 2016-12-27 |
DE102011006100A8 (de) | 2014-07-10 |
TWI477812B (zh) | 2015-03-21 |
EP2689282B1 (en) | 2019-08-28 |
WO2012130768A3 (en) | 2013-01-10 |
US9791691B2 (en) | 2017-10-17 |
WO2012130768A2 (en) | 2012-10-04 |
CN103547955A (zh) | 2014-01-29 |
US20140055767A1 (en) | 2014-02-27 |
TW201250291A (en) | 2012-12-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6053748B2 (ja) | ミラーアレイ | |
JP6530603B2 (ja) | 光学コンポーネント | |
JP6207530B2 (ja) | 光学コンポーネント | |
JP5355699B2 (ja) | 放射線ビームを案内するための光学モジュール | |
US9851555B2 (en) | Optical component | |
US9874819B2 (en) | Mirror array | |
WO2014140015A1 (en) | Optical device | |
KR102401868B1 (ko) | 투영 노광 시스템의 오브젝트 필드를 조명하는 방법 | |
US10866528B2 (en) | Component for a projection exposure apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150122 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20151006 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20151221 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160203 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160531 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160824 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20161108 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20161129 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6053748 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |