JP2014510839A - 太陽熱コレクターのための熱吸収体を製造する方法 - Google Patents
太陽熱コレクターのための熱吸収体を製造する方法 Download PDFInfo
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- JP2014510839A JP2014510839A JP2013553973A JP2013553973A JP2014510839A JP 2014510839 A JP2014510839 A JP 2014510839A JP 2013553973 A JP2013553973 A JP 2013553973A JP 2013553973 A JP2013553973 A JP 2013553973A JP 2014510839 A JP2014510839 A JP 2014510839A
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- layer
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0676—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
- F24S70/25—Coatings made of metallic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Thermal Sciences (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
- 減圧コーティングライン上に熱吸収体の完成基材を配置し(120)、減圧コーティングライン上に配置した完成基材の上に、光を吸収するよう構成した層を、物理蒸着法によって堆積する(160)工程を含む、太陽熱コレクターのための熱吸収体を製造する方法(100)。
- 完成基材上に層を堆積する前に、減圧コーティングラインの入口チャンバー内でのプラズマイオン洗浄によって完成基材を洗浄する(140)工程を更に含む、請求項1に記載した方法。
- 減圧コーティングラインのチャンバー部のコーティングチャンバー内で、3つの層を堆積する工程を含む、請求項1又は2のいずれか一項に記載した方法であって、該3つの層は、チタン、アルミニウム、窒素、及び以下の元素:ケイ素、イットリウム、セリウム、及びクロミウムの一つを含む組成を有する、完成基材上の第1層;チタン、アルミニウム、窒素、酸素、及び以下の元素:ケイ素、イットリウム、セリウム、及びクロミウムの一つを含む組成を有する、第1層の上の第2層;並びに、チタン、アルミニウム、ケイ素、窒素、及び酸素を含む組成を有する、第2層の上の第3層;である、方法。
- 完成基材をチャンバー部内に入れる前に、チャンバー部内部で完成基材の洗浄又は層の堆積の1つを提供した後に、及び完成基材をチャンバー部から出す際に、完成基材を減圧コーティングに沿って運搬する(130、150、180)工程を更に含む、請求項1〜3のいずれか一項に記載した方法。
- 請求項1〜4のいずれか一項に記載した方法によって製造された、太陽熱コレクターのための熱吸収体(300)。
- 請求項1〜4のいずれか一項に記載した方法によって製造された熱吸収体を含む、太陽熱コレクター(400)。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/FI2011/050160 WO2012113968A1 (en) | 2011-02-22 | 2011-02-22 | Method for manufacturing thermal absorber for solar thermal collector |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014510839A true JP2014510839A (ja) | 2014-05-01 |
JP6061867B2 JP6061867B2 (ja) | 2017-01-18 |
Family
ID=46720142
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013553973A Expired - Fee Related JP6061867B2 (ja) | 2011-02-22 | 2011-02-22 | 太陽熱コレクターのための熱吸収体を製造する方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10107524B2 (ja) |
EP (1) | EP2678617B1 (ja) |
JP (1) | JP6061867B2 (ja) |
DK (1) | DK2678617T3 (ja) |
PL (1) | PL2678617T3 (ja) |
SI (1) | SI2678617T1 (ja) |
WO (1) | WO2012113968A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013088451A1 (en) * | 2011-12-15 | 2013-06-20 | Council Of Scientific & Industrial Research | An improved solar selective coating having high thermal stability and a process for the preparation thereof |
CN103317792B (zh) * | 2013-06-08 | 2015-05-27 | 武汉理工大学 | 非真空中高温太阳能选择性吸收周期涂层及其制备方法 |
FI127237B (en) * | 2014-02-17 | 2018-02-15 | Savo Solar Oy | Solvärmeabsorbatorelement |
US11441817B2 (en) * | 2018-04-19 | 2022-09-13 | Massachusetts Institute Of Technology | Photothermal trap |
WO2020028560A1 (en) * | 2018-07-31 | 2020-02-06 | Hudson William J | Commercial building solar heating system |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5485441U (ja) * | 1977-11-30 | 1979-06-16 | ||
JPS5726164A (en) * | 1980-07-14 | 1982-02-12 | Uni Shidonii Za | Method and apparatus for reactively spattering surface coating with gradient on substrate |
JPS5860166A (ja) * | 1981-10-06 | 1983-04-09 | Agency Of Ind Science & Technol | 太陽熱利用物の構成材における太陽熱選択吸収膜 |
JPH02172222A (ja) * | 1988-12-26 | 1990-07-03 | Hitachi Ltd | 薄膜形成装置 |
US20020073988A1 (en) * | 2000-12-20 | 2002-06-20 | Werner Reichert | Solar collector element |
JP2004205184A (ja) * | 2002-12-20 | 2004-07-22 | Sagae Shoji Kk | 園芸用施設の加温装置及び加温方法 |
JP2004317117A (ja) * | 2003-04-02 | 2004-11-11 | Showa Denko Kk | 太陽光発電機能を有する太陽熱集熱器 |
CN101004297A (zh) * | 2007-01-22 | 2007-07-25 | 罗赞继 | 涂复选择性吸收复合膜的太阳能吸热板芯及其制做方法 |
US20070196670A1 (en) * | 2006-02-21 | 2007-08-23 | Harish Chandra Barshilia | solar selective coating having higher thermal stability useful for harnessing solar energy and a process for the preparation thereof |
Family Cites Families (11)
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JPS6014275B2 (ja) * | 1975-09-22 | 1985-04-12 | 矢崎総業株式会社 | 太陽熱利用集熱器の選択吸収面およびその製法 |
JPS5469554A (en) | 1977-11-14 | 1979-06-04 | Nippon Steel Corp | Controlling method for looper |
US4309261A (en) * | 1980-07-03 | 1982-01-05 | University Of Sydney | Method of and apparatus for reactively sputtering a graded surface coating onto a substrate |
WO2004071984A1 (en) * | 2003-02-14 | 2004-08-26 | Glaverbel | Glazing panel carrying a coating stack |
CN101086059B (zh) | 2006-06-05 | 2011-07-20 | 黄鸣 | 太阳能集热管真空磁控溅射连续镀膜线系统 |
GB0710237D0 (en) * | 2007-05-30 | 2007-07-11 | Thermomax Ltd | Solar collector assembley |
CN101344334B (zh) | 2008-08-18 | 2010-06-02 | 范天方 | 一种太阳光谱选择性吸收膜及其制备方法 |
US8347877B2 (en) * | 2009-02-19 | 2013-01-08 | Mill Masters, Inc. | Solar energy collecting system and method |
DE202009015334U1 (de) * | 2009-11-11 | 2010-02-25 | Almeco-Tinox Gmbh | Optisch wirksames Mehrschichtsystem für solare Absorption |
FR2963411B1 (fr) | 2010-07-28 | 2012-09-14 | Commissariat Energie Atomique | Absorbeur de capteur solaire thermique, capteur le comprenant, et procede pour sa preparation. |
DE202010010835U1 (de) * | 2010-07-29 | 2010-11-04 | Xpertec Gmbh | Vollaluminiumabsorber zur Wärmeerzeugung aus Sonnenlicht zur Anwendung bei Solarkollektoren |
-
2011
- 2011-02-22 EP EP11859207.0A patent/EP2678617B1/en active Active
- 2011-02-22 US US13/985,397 patent/US10107524B2/en not_active Expired - Fee Related
- 2011-02-22 PL PL11859207T patent/PL2678617T3/pl unknown
- 2011-02-22 JP JP2013553973A patent/JP6061867B2/ja not_active Expired - Fee Related
- 2011-02-22 WO PCT/FI2011/050160 patent/WO2012113968A1/en active Application Filing
- 2011-02-22 DK DK11859207.0T patent/DK2678617T3/da active
- 2011-02-22 SI SI201131780T patent/SI2678617T1/sl unknown
Patent Citations (9)
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JPS5485441U (ja) * | 1977-11-30 | 1979-06-16 | ||
JPS5726164A (en) * | 1980-07-14 | 1982-02-12 | Uni Shidonii Za | Method and apparatus for reactively spattering surface coating with gradient on substrate |
JPS5860166A (ja) * | 1981-10-06 | 1983-04-09 | Agency Of Ind Science & Technol | 太陽熱利用物の構成材における太陽熱選択吸収膜 |
JPH02172222A (ja) * | 1988-12-26 | 1990-07-03 | Hitachi Ltd | 薄膜形成装置 |
US20020073988A1 (en) * | 2000-12-20 | 2002-06-20 | Werner Reichert | Solar collector element |
JP2004205184A (ja) * | 2002-12-20 | 2004-07-22 | Sagae Shoji Kk | 園芸用施設の加温装置及び加温方法 |
JP2004317117A (ja) * | 2003-04-02 | 2004-11-11 | Showa Denko Kk | 太陽光発電機能を有する太陽熱集熱器 |
US20070196670A1 (en) * | 2006-02-21 | 2007-08-23 | Harish Chandra Barshilia | solar selective coating having higher thermal stability useful for harnessing solar energy and a process for the preparation thereof |
CN101004297A (zh) * | 2007-01-22 | 2007-07-25 | 罗赞继 | 涂复选择性吸收复合膜的太阳能吸热板芯及其制做方法 |
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Title |
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Also Published As
Publication number | Publication date |
---|---|
PL2678617T3 (pl) | 2019-12-31 |
EP2678617B1 (en) | 2019-06-12 |
WO2012113968A1 (en) | 2012-08-30 |
US20140048059A1 (en) | 2014-02-20 |
DK2678617T3 (da) | 2019-09-02 |
EP2678617A4 (en) | 2015-09-02 |
US10107524B2 (en) | 2018-10-23 |
EP2678617A1 (en) | 2014-01-01 |
SI2678617T1 (sl) | 2019-10-30 |
JP6061867B2 (ja) | 2017-01-18 |
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