JP2014502373A - 光学ミラーのためのアルミニウム上の強化され保護された銀被覆 - Google Patents
光学ミラーのためのアルミニウム上の強化され保護された銀被覆 Download PDFInfo
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- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0875—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising two or more metallic layers
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- G02B1/105—
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
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- Optics & Photonics (AREA)
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- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Optical Elements Other Than Lenses (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
被覆すべき製品器具(基板)を被覆槽に装填する工程[100]、
被覆槽を3×10-6トール未満の圧力まで排気する工程[102]、
7〜15分間の範囲の期間に亘り約10sccmのアルゴン流を被覆槽に通して、300〜500WでRF前処理を行う工程[104]、
それによってクロムを窒化クロムに転化させる400WのRF出力で約30sccmのN2および約5sccmのAr(約6/1 V/VのN2/Ar)の流れの中でクロム(Cr)の堆積により、50〜150nmの範囲の厚さまで、その場で形成される窒化クロムバリア層を堆積させる工程[106]、
RF出力をオフにし、銀層を75〜150nmの範囲の厚さまで堆積させる工程[108]、
RF出力をオフにし、ガスを流さずに、0.1〜0.6nmの範囲の厚さを有するクロム(Cr)層を堆積させる工程[110]、
RF出力を200〜300Wの設定値でオンにして、約50sccmの酸素流を提供し、これらの条件を維持して、クロム層を酸化クロム層(形成された酸化クロム層とも呼ばれる)に完全に酸化させる工程[112]、
1つまたは複数の強化層を堆積させる工程[114]、および
例えば、窒素または空気を使用して、槽を排気し、きれいにし、槽から被覆鏡を取り出す工程[116]、
を有する。
12 窒化クロム層
14 銀層
16 酸化クロム層
18 第1の強化層
20 第2の強化層
22 第3の強化層
Claims (10)
- 向上した電解腐食耐性を有する銀鏡において、アルミニウム基板であって、該アルミニウム基板上の50〜150nmの範囲の厚さを有するその場で形成された窒化クロム層、該窒化クロム層上の75〜150nmの範囲の厚さを有する銀層、該銀層の上面の0.1〜0.6nmの厚さを有する形成された酸化クロム層、および該酸化クロム層上に形成された1つまたは複数の強化層を有するアルミニウム基板から実質的になり、
複数の強化層が使用された場合、交互の隣接する強化層に異なる材料が使用され、各個別の強化層が10〜100nmの範囲の厚さを有する、銀鏡。 - 前記窒化クロム層の厚さが75〜125nmの範囲にある、請求項1記載の銀鏡。
- 前記銀層の厚さが100〜130nmの範囲にある、請求項1記載の銀鏡。
- 前記強化層が、個別に、二酸化ケイ素、一酸化ケイ素、五酸化ニオブ、フッ化イッテルビウム、二酸化チタン、五酸化タンタル、フッ化マグネシウム、フッ化イットリウム、酸化アルミニウム、酸化イットリウム、酸化ジルコニウム、酸化ハフニウム、またはそれらの組合せからなる群より選択される、請求項1記載の銀鏡。
- アルミニウム基板、該基板上に堆積された100nm厚のCrN層、該CrN層上に堆積された120nm厚のAg層、該Ag層上に形成された0.45nm厚の酸化クロム層、該酸化クロム層上に堆積された55.3nm厚の第1の二酸化ケイ素層、該第1の二酸化ケイ素層上に堆積された20.9nm厚の五酸化ニオブおよび該五酸化ニオブ層上に堆積された53.8nm厚の第2の二酸化ケイ素層からなる銀被覆鏡であって、
前記酸化クロム層を除いた各層の厚さのばらつきが±5%であり、該酸化クロム層が、±10%の厚さのばらつきを有する、銀被覆鏡。 - アルミニウム基板を使用した銀鏡であって、アルミニウムと銀との間の電解反応を回避する銀鏡を形成する方法において、
被覆すべき前記アルミニウム基板を被覆槽に装填する工程、
該被覆槽を3×10-6トール未満の圧力まで排気する工程、
7〜15分間の範囲の期間に亘り約10sccmのアルゴン流を前記被覆槽に通して、300〜500WでRF前処理を行う工程、
それによってクロムを窒化クロムに転化させる250〜400WのRF出力で約30sccmのN2および約5sccmのArの流れの中でクロムの堆積により、50〜150nmの範囲の厚さまで、窒化クロムバリア層を堆積させる工程、
前記RF出力をオフにし、銀層を75〜150nmの範囲の厚さまで堆積させる工程、
前記RF出力をオフにし、ガスを流さずに、0.1〜0.6nmの範囲の厚さを有するクロム層を堆積させる工程、
前記RF出力を250Wの設定値でオンにして、約50sccmの酸素流を提供し、これらの条件を維持して、前記クロム層を酸化クロム層に完全に酸化させる工程、
1つまたは複数の強化層を堆積させる工程、および
前記槽を排気し、きれいにし、該槽から前記アルミニウム基板を使用した銀鏡を取り出す工程、
を有する方法。 - 交互の隣接する強化層に異なる材料が使用されるという条件で、前記強化層が複数使用され、該強化層の数が3〜9の範囲にあり、各個別の強化層が10〜100nmの範囲の厚さを有する、請求項6記載の方法。
- 前記強化層が、独立して、二酸化ケイ素、一酸化ケイ素、五酸化ニオブ、フッ化イッテルビウム、二酸化チタン、五酸化タンタル、フッ化マグネシウム、フッ化イットリウム、酸化アルミニウム、酸化イットリウム、酸化ジルコニウム、酸化ハフニウム、またはそれらの組合せからなる群より選択される、請求項7記載の方法。
- 前記窒化クロムバリア層の厚さが75〜125nmの範囲にある、請求項6記載の方法。
- 前記銀層の厚さが100〜130nmの範囲にある、請求項6記載の方法。
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US41496210P | 2010-11-18 | 2010-11-18 | |
US61/414,962 | 2010-11-18 | ||
PCT/US2011/060082 WO2012067924A1 (en) | 2010-11-18 | 2011-11-10 | Enhanced, protected silver coatings on aluminum for optical mirror and method of making same |
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JP2015106255A Division JP6038229B2 (ja) | 2010-11-18 | 2015-05-26 | 光学ミラーのためのアルミニウム上の強化され保護された銀被覆 |
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JP2014502373A true JP2014502373A (ja) | 2014-01-30 |
JP5984828B2 JP5984828B2 (ja) | 2016-09-06 |
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JP2015106255A Expired - Fee Related JP6038229B2 (ja) | 2010-11-18 | 2015-05-26 | 光学ミラーのためのアルミニウム上の強化され保護された銀被覆 |
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US (2) | US8828526B2 (ja) |
EP (1) | EP2640864B1 (ja) |
JP (2) | JP5984828B2 (ja) |
WO (1) | WO2012067924A1 (ja) |
Cited By (2)
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KR20170066497A (ko) * | 2014-10-27 | 2017-06-14 | 알메코 게엠베하 | 온도 및 부식 안정 표면 반사체 |
JP2018120016A (ja) * | 2017-01-23 | 2018-08-02 | 東洋製罐グループホールディングス株式会社 | 耐ガンマ線反射膜 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9488760B2 (en) * | 2013-02-28 | 2016-11-08 | Corning Incorporated | Enhanced, durable silver coating stacks for highly reflective mirrors |
CN104103747A (zh) * | 2013-04-03 | 2014-10-15 | 光宝电子(广州)有限公司 | 发光二极管封装结构 |
DE102014108679A1 (de) | 2014-06-20 | 2015-12-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optisches Element mit einer reflektierenden Beschichtung |
US11143800B2 (en) * | 2017-06-16 | 2021-10-12 | Corning Incorporated | Extending the reflection bandwith of silver coating stacks for highly reflective mirrors |
CN110128873B (zh) * | 2018-09-12 | 2022-03-15 | 惠州市崯涛新材料科技有限公司 | 黑金刚镜面银颜料及其制造方法 |
CN111751916A (zh) * | 2019-12-30 | 2020-10-09 | 宁波瑞凌新能源科技有限公司 | 一种阻隔层膜结构及其应用 |
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2011
- 2011-11-10 EP EP11788698.6A patent/EP2640864B1/en not_active Not-in-force
- 2011-11-10 WO PCT/US2011/060082 patent/WO2012067924A1/en active Application Filing
- 2011-11-10 JP JP2013539906A patent/JP5984828B2/ja not_active Expired - Fee Related
- 2011-11-15 US US13/296,383 patent/US8828526B2/en not_active Expired - Fee Related
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2014
- 2014-08-06 US US14/452,912 patent/US10001588B2/en not_active Expired - Fee Related
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2015
- 2015-05-26 JP JP2015106255A patent/JP6038229B2/ja not_active Expired - Fee Related
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KR20170066497A (ko) * | 2014-10-27 | 2017-06-14 | 알메코 게엠베하 | 온도 및 부식 안정 표면 반사체 |
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JP6038229B2 (ja) | 2016-12-07 |
WO2012067924A1 (en) | 2012-05-24 |
EP2640864B1 (en) | 2015-01-28 |
US20140349097A1 (en) | 2014-11-27 |
EP2640864A1 (en) | 2013-09-25 |
US20120128954A1 (en) | 2012-05-24 |
JP5984828B2 (ja) | 2016-09-06 |
US8828526B2 (en) | 2014-09-09 |
US10001588B2 (en) | 2018-06-19 |
JP2015180955A (ja) | 2015-10-15 |
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