JP2014237085A - Coating device - Google Patents
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Abstract
Description
本発明は、塗布装置に関するものであって、特に平板状の裏面への塗布材の付着を防止し、基板の表面に均一な塗布膜を形成する塗布装置に関するものである。 The present invention relates to a coating apparatus, and particularly to a coating apparatus that prevents adhesion of a coating material to a flat plate-like back surface and forms a uniform coating film on the surface of a substrate.
液晶ディスプレイ等のフラットパネルディスプレイに用いられるカラーフィルタには、ガラス等の基板上にレジスト液等の塗布液が塗布されたものが使用されている。
一般に基板にレジストを塗布する方法には、スピンコーター方式（特許文献１）や、スリットコーター方式（特許文献２）、スプレイコーター方式（特許文献３）等があるが、近時の液晶表記装置の大型化に対応するため、スリットダイコーター方式が多用されている。
As a color filter used in a flat panel display such as a liquid crystal display, a color filter in which a coating solution such as a resist solution is coated on a substrate such as glass is used.
In general, methods for applying a resist to a substrate include a spin coater method (Patent Document 1), a slit coater method (Patent Document 2), a spray coater method (Patent Document 3), and the like. In order to cope with the increase in size, the slit die coater method is frequently used.
しかし、スリットコーター方式やスプレイコーター方式においては、ガラス基板の端部からレジストがはみ出ることにより、ガラス基板を載置するテーブル等の汚れが生じるという問題が有り、更にテーブルとガラス基板の隙間に毛細管現象によってレジストが浸入することによる裏面の汚れが問題となる。 However, in the slit coater method and the spray coater method, there is a problem that the resist sticks out from the end of the glass substrate, thereby causing a stain on the table on which the glass substrate is placed, and a capillary tube is formed in the gap between the table and the glass substrate. Contamination on the back surface due to the penetration of the resist due to the phenomenon becomes a problem.
そこで、これらの方式では、ガラス基板のサイズより小さい領域にレジストを塗布する方式が用いられているが、スリットダイやスプレイの吐出口の幅が、形成すべき塗膜の幅に合わせて設定されていても、ガラス基板上では吐出口の両端からはみ出るようにして塗膜が形成されて、レジストが予定したガラス基板の塗布領域の周囲にはみ出すため、塗布領域が大きくできないという問題がある。
また、塗布領域中央部とガラス基板の境界部分における塗布膜が異なるため、ガラス基板の一部領域が更に無駄になるという問題が生じる。
Therefore, in these methods, a method in which a resist is applied to an area smaller than the size of the glass substrate is used, but the width of the slit die and the discharge outlet of the spray is set in accordance with the width of the coating film to be formed. However, since the coating film is formed on the glass substrate so as to protrude from both ends of the discharge port, and the resist protrudes around the application region of the glass substrate, there is a problem that the application region cannot be enlarged.
Moreover, since the coating film in the boundary part of a coating area center part and a glass substrate differs, the problem that the one part area | region of a glass substrate becomes useless arises.
この発明は、以上のような事情に鑑みてなされたものであり、基板、例えば液晶ディスプレイ等のカラーフィルタ用ガラス基板にレジスト等の塗布液を塗布する際に、ガラス基板の裏面にレジストによる汚れを防止し、更に、ガラス基板上の全面にレジストを塗布し、ガラス基板の無駄を少なくする基板塗布装置を提供することを目的とする。 The present invention has been made in view of the circumstances as described above. When a coating solution such as a resist is applied to a substrate, for example, a glass substrate for a color filter such as a liquid crystal display, the backside of the glass substrate is stained with the resist. It is another object of the present invention to provide a substrate coating apparatus that prevents the waste of the glass substrate by applying a resist on the entire surface of the glass substrate.
上記目的を達成するために、本発明の塗布装置は、塗布対象である基板を水平に載置するためのテーブルであって、該テーブルの各側面には該テーブル上面に平行な方向に気体を噴射するための噴射口が設けられたテーブルと、前記テーブルの噴射口に接続され、該噴射口に噴射用空気を供給するための空気圧縮装置と、前記テーブル側面側に向けて前記テーブル側面を取り囲むように開口部を形成する吸引用ノズルと、該吸引用ノズルを前記テーブルに対し、前記テーブル上面に垂直方向に接近離間可能にする垂直移動手段と、前記吸引用ノズルに接続され、前記開口部から空気を吸引排出するための真空装置と、該テーブルの上方側に設けられ、前記基板の上面に、塗布材を塗布するためのスリット状の吐出口を有する塗布用ノズルであって、該塗布用ノズルのスリットの長さが前記テーブルの前記塗布用ノズルのスリットと平行な方向の長さより長いものである塗布ノズルと、前記塗布用ノズルに塗布材を供給するための塗布材供給装置と、前記テーブルを前記塗布手段に対し相対的に移動させる移動手段と、を有することを特徴としている。
更に、好ましくは、前記テーブルの上面（被塗布基板を載置する面）に網目状の溝を設けたことを特徴としている。
In order to achieve the above object, a coating apparatus of the present invention is a table for horizontally placing a substrate to be coated, and gas is supplied to each side surface of the table in a direction parallel to the upper surface of the table. A table provided with an injection port for spraying; an air compressor connected to the injection port of the table for supplying air for injection; and the table side surface facing the table side surface side. A suction nozzle that forms an opening so as to surround, a vertical movement means that allows the suction nozzle to be moved toward and away from the table in a vertical direction with respect to the upper surface of the table, and the opening connected to the suction nozzle. A vacuum device for sucking and discharging air from the section, and a coating nozzle provided on the upper side of the table and having a slit-like discharge port for coating a coating material on the upper surface of the substrate. A coating nozzle having a length of the slit of the coating nozzle longer than a length of the table in a direction parallel to the slit of the coating nozzle, and a coating material supply for supplying the coating material to the coating nozzle And a moving means for moving the table relative to the coating means.
Furthermore, it is preferable that a mesh-like groove is provided on the upper surface of the table (the surface on which the substrate to be coated is placed).
また、本発明の方法は、前記の塗布装置を用いた塗布方法であって、前記テーブルと相似形の被塗布基板であって、該被塗布基板の前記塗布用ノズルのスリットと平行な方向の長さが該スリットの長さに等しい被塗布基板を、該塗布基板の中心と前記テーブルの中心を略一致させて前記テーブルに載置した後、前記垂直移動手段を作動させて前記吸引部材の開口部を降下させて該開口部を前記テーブル側面に対向させた後、前記真空装置を作動させて、前記開口部の圧力を負圧状態に保った後、前記空気圧縮装置から前記テーブルの各噴射口に圧縮空気を供給し、前記噴射口から前記テーブルの上面に平行な空気の流れを生じさせてから、前記移動手段を作動させて、前記布基板の前記移動方向の縁と前記塗布用ノズルのスリット位置が一致するように、前記テーブルを前記塗布用ノズルに対して相対移動させた後、前記塗布材供給装置から前記塗布用ノズルに塗布材を供給し、前記塗布用ノズルから塗前記布材を連続吐出させながら、前記テーブルを前記塗布用ノズルに対して連続的に相対移動させて、前記被塗布基板の上面全域を塗布材で塗布することを特徴としている。 Further, the method of the present invention is a coating method using the above-described coating apparatus, which is a substrate to be coated similar to the table, in a direction parallel to the slit of the coating nozzle of the substrate to be coated. A substrate to be coated having a length equal to the length of the slit is placed on the table so that the center of the coating substrate and the center of the table are substantially aligned, and then the vertical movement means is operated to After lowering the opening and making the opening face the side surface of the table, the vacuum device is operated to maintain the pressure in the opening at a negative pressure state, and then the air compressor is used to move each of the tables. Compressed air is supplied to the injection port, and a flow of air parallel to the upper surface of the table is generated from the injection port, and then the moving means is operated to move the edge of the cloth substrate in the moving direction and the coating Nozzle slit position matches After the table is moved relative to the coating nozzle, the coating material is supplied from the coating material supply device to the coating nozzle, and the coating material is continuously discharged from the coating nozzle. However, the entire surface of the substrate to be coated is coated with a coating material by continuously moving the table relative to the coating nozzle.
本発明によれば、以下の優れた効果を奏する。
請求項１に係る塗布装置によれば、被塗布基板の上面の全域に塗布材が均一に塗布でき、且つ、被塗布基板を載置するテーブルの側面に設けられた空気噴射ノズルから噴射される空気によって形成される空気の流れにより、テーブルからはみ出た被塗布基板の下面側に塗布材が回り込むのが防止される。
The present invention has the following excellent effects.
According to the coating apparatus of the first aspect, the coating material can be uniformly applied over the entire upper surface of the substrate to be coated, and is sprayed from the air spray nozzle provided on the side surface of the table on which the substrate to be coated is placed. The flow of air formed by the air prevents the coating material from flowing around the lower surface side of the substrate to be coated that protrudes from the table.
更に、この空気の流れによって、前記テーブルからはみ出た被塗布基板の下面側が下側に引き寄せられると共に、テーブルと被塗布基板の隙間の空気が吸い出されるため、被塗布基板がテーブルに引き寄せられて、被塗布基板がテーブルに固定されるという効果がある。 Furthermore, the lower surface side of the substrate to be coated that protrudes from the table is drawn downward by this air flow, and the air in the gap between the table and the substrate to be coated is sucked out, so that the substrate to be coated is attracted to the table. There is an effect that the substrate to be coated is fixed to the table.
以下、図面を参照しながら本発明の実施の形態を説明する。図１は本発明の実施の形態における塗布装置の概略図である。塗布装置１は被塗布基板Ｗ（以下、単に「基板Ｗ」という。）を載置するテーブル２と、テーブル２をＸ軸方向に移動させるためのテーブル移動装置３と、テーブル２に圧縮空気を供給するための空気圧縮機４と、前記テーブル２よりＺ軸方向に上側に配設された、基板Ｗの上面に塗布材を塗布するための塗布用ノズル５と、この塗布用ノズル５をＸ方向に移動させるための塗布用ノズルＸ軸移動装置６と、塗布用ノズル５をＺ軸方向に移動させるための塗布用ノズルＺ軸移動装置７と、塗布用ノズル５に塗布材を供給するための塗布材供給装置８とを備えている。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic view of a coating apparatus according to an embodiment of the present invention. The coating apparatus 1 includes a table 2 on which a substrate to be coated W (hereinafter simply referred to as “substrate W”) is placed, a table moving apparatus 3 for moving the table 2 in the X-axis direction, and compressed air to the table 2. An air compressor 4 for supplying, a coating nozzle 5 for coating a coating material on the upper surface of the substrate W, which is disposed above the table 2 in the Z-axis direction, and this coating nozzle 5 is X An application nozzle X-axis moving device 6 for moving in the direction, an application nozzle Z-axis moving device 7 for moving the application nozzle 5 in the Z-axis direction, and supplying the coating material to the application nozzle 5 The coating material supply device 8 is provided.
更に、塗布装置１は、前記テーブル２よりＺ軸方向に上側に配設された、吸引用ノズル９と、この吸引用ノズル９をＺ軸方向に移動させるための吸引用ノズルＺ軸移動装置１０と、吸引用ノズル９に接続された真空ポンプ１１と、テーブル移動装置３と空気圧縮機４とノズルＸ軸移動装置６、Ｙ軸移動装置７と塗布材供給装置８と真空ポンプ１１を制御する制御装置（図示せず）を有している。 Further, the coating apparatus 1 includes a suction nozzle 9 disposed above the table 2 in the Z-axis direction, and a suction nozzle Z-axis moving device 10 for moving the suction nozzle 9 in the Z-axis direction. And the vacuum pump 11 connected to the suction nozzle 9, the table moving device 3, the air compressor 4, the nozzle X-axis moving device 6, the Y-axis moving device 7, the coating material supply device 8, and the vacuum pump 11. A control device (not shown) is included.
テーブル２は、基板Ｗを載置する上面と、上面に対向する下面と、側面によって構成されており、該側面には前記上面に平行な方向に気体を噴射するための噴射口が設けられている。そして、該上面形状は角型のほか円形に限られないが、塗布対象である基板の相似形であることが望ましい。 The table 2 includes an upper surface on which the substrate W is placed, a lower surface facing the upper surface, and a side surface, and an injection port for injecting gas in a direction parallel to the upper surface is provided on the side surface. Yes. The top surface shape is not limited to a square shape but also a circular shape, but is preferably a similar shape of the substrate to be coated.
以下、形状が角型である場合のテーブル２（以下、単に「角型テーブル２」という。）について以下説明する。
角型テーブル２は、図２ｄに示すように、内側が空洞部２２になっており、噴射口２０は各側面２ｃ、２ｄ、２ｅ、２ｆを貫通して空洞部２２に連通している。そして、基板Ｗの載置面２ａは単に平面である他、碁盤目状に断面略Ｕ字やＶ字の溝２３ａ、２３ｂ（図２ａ）を設けてもよい。
この場合、後述（図３）のように噴射口２０から噴射される空気流Ｆ１によって発生するに二次流れＦ２により、これらの溝２３ａ、２３ｂを通じて基板Ｗと載置面２ａの間の空気が吸引され易くなるため、基板Ｗが載置面２ａに押し付けられ、基板Ｗに対する載置面２ａの保持力がより安定する。
Hereinafter, the table 2 in the case where the shape is square (hereinafter, simply referred to as “square table 2”) will be described.
As shown in FIG. 2d, the square table 2 has a hollow portion 22 inside, and the injection port 20 communicates with the hollow portion 22 through the side surfaces 2c, 2d, 2e, and 2f. The mounting surface 2a of the substrate W is not only a flat surface, but may be provided with grooves 23a and 23b (FIG. 2a) having a substantially U-shaped or V-shaped cross section in a grid pattern.
In this case, as will be described later (FIG. 3), the air between the substrate W and the mounting surface 2a passes through the grooves 23a and 23b due to the secondary flow F2 generated by the air flow F1 injected from the injection port 20. Since it becomes easy to be attracted | sucked, the board | substrate W is pressed against the mounting surface 2a, and the holding force of the mounting surface 2a with respect to the board | substrate W becomes more stable.
また、角型テーブル２の下面２ｂには圧縮空気の供給口２１が設けられており、後述の空気圧縮機４で製造された圧縮空気がこの供給口２１を通じて空洞部２２に供給される。
その際、圧縮機４から供給される圧縮空気の流れが、一旦、上面２ａの裏面に衝突し、空洞部２２内の圧力が均一になるため、各側面２ｃ、２ｄ、２ｅ、２ｆの各噴射口２０から噴射される空気流が均一化し易くなる。
尚、本実施の形態では圧縮空気を一旦、空洞部２２に供給する構成としているが、各側面２ｃ、２ｄ、２ｅ、２ｆ別に圧縮空気を分配する構成にしても良い。
A compressed air supply port 21 is provided on the lower surface 2 b of the square table 2, and compressed air produced by an air compressor 4 described later is supplied to the cavity 22 through the supply port 21.
At that time, the flow of compressed air supplied from the compressor 4 once collides with the back surface of the upper surface 2a, and the pressure in the cavity portion 22 becomes uniform, so that each injection of each side surface 2c, 2d, 2e, 2f It becomes easy to equalize the air flow injected from the port 20.
In the present embodiment, the compressed air is once supplied to the cavity portion 22, but the compressed air may be distributed for each of the side surfaces 2 c, 2 d, 2 e, and 2 f.
そして、角型テーブル２の上面２ａに上面２ａと相似形であって上面２ａより大きいサイズの基板Ｗを載置した場合に、各噴射口２０から噴射された空気流は図３に示すように上面２ａより外側にはみ出した基板Ｗの下面において空気流Ｆ１となり、塗布材が基板Ｗの上面に塗布された際に、その塗布材が基板Ｗの下面側に回り込むのが防止される。 And when the board | substrate W of the size similar to the upper surface 2a and larger than the upper surface 2a is mounted in the upper surface 2a of the square table 2, the airflow injected from each injection port 20 is as shown in FIG. The air flow F1 is generated on the lower surface of the substrate W protruding outside the upper surface 2a, and the coating material is prevented from flowing around the lower surface side of the substrate W when the coating material is applied to the upper surface of the substrate W.
更に、基板Ｗの下面に沿って基板Ｗの縁側に流れる空気流Ｆ１によって、その流れに接している基板Ｗの部分（角型テーブル２から外側にはみ出した部分）の圧力が基板Ｗの上面側の圧力より低下するため、基板Ｗを角型テーブル２側に押し付ける圧力Ｐ１が発生する。
また、前記基板Ｗの下面の流れによって基板Ｗと角型テーブル２の隙間の空気が吸引されるため（Ｆ２）、基板Ｗと角型テーブル２の隙間の空気圧力が低下し、基板Ｗが角型テーブル２側に押し付ける力Ｐ２が発生する。
即ち、前記各側面２ｃ、２ｄ、２ｅ、２ｆの噴射口２０から噴射される空気流によって、基板Ｗの下面に塗布材が回り込むことを防止する作用と、基板Ｗを角型テーブル２の上面２ａに押し付けるという作用が同時に生じるようになっている。
Further, the pressure of the portion of the substrate W in contact with the flow (the portion protruding outward from the square table 2) by the air flow F1 flowing toward the edge of the substrate W along the lower surface of the substrate W is on the upper surface side of the substrate W. The pressure P1 for pressing the substrate W against the square table 2 is generated.
Further, since the air in the gap between the substrate W and the square table 2 is sucked by the flow of the lower surface of the substrate W (F2), the air pressure in the gap between the substrate W and the square table 2 is reduced, and the substrate W is square. A force P2 that presses against the mold table 2 side is generated.
That is, an action of preventing the coating material from flowing around the lower surface of the substrate W by the air flow injected from the injection ports 20 of the side surfaces 2c, 2d, 2e, and 2f, and the upper surface 2a of the square table 2 on the substrate W. At the same time, the action of pressing on is generated.
角型テーブル２をＸ軸方向に移動させるための角型テーブル移動装置３は一般に常用されるボールスクリュウーとナットを用いた機構（図示せず）や、チェーンコンベア等を用いた機構による一軸テーブル等である。
また、空気圧縮機４は一般の往復動タイプの圧縮機やロータリーやルーツタイプの圧縮機が用いられるが、これらに限定するものではない。
The square table moving device 3 for moving the square table 2 in the X-axis direction is a commonly used mechanism (not shown) using a ball screw and nut, a uniaxial table using a mechanism using a chain conveyor, or the like. It is.
The air compressor 4 may be a general reciprocating compressor or a rotary or roots type compressor, but is not limited thereto.
塗布用ノズル５は、その概略は図５のように、スリット状開口部５ａと塗布材を塗布材供給装置８から塗布用ノズル５に供給するための供給ポート５ｂを有しているものであり、スリット状開口部５ａの長さＬが角型テーブル２の巾（基板Ｗの搬送方向のＸ方向に直角な方向の巾）より長いものである。
尚、塗布用ノズル５の構造はスリットコーター等で用いられるものの他、角型テーブル２の巾（基板Ｗの搬送方向のＸ方向に直角な方向の巾）より長いスプレイノズルを用いても良い。
As schematically shown in FIG. 5, the coating nozzle 5 has a slit-like opening 5 a and a supply port 5 b for supplying the coating material from the coating material supply device 8 to the coating nozzle 5. The length L of the slit-shaped opening 5a is longer than the width of the square table 2 (the width in the direction perpendicular to the X direction in the transport direction of the substrate W).
In addition, the structure of the nozzle 5 for application | coating may use the spray nozzle longer than the width | variety of the square table 2 (width | variety perpendicular to the X direction of the conveyance direction of the board | substrate W) other than what is used with a slit coater.
そして、塗布用ノズル５は図示しない門形支持体に塗布用ノズル５をＸ軸方向に移動させるための塗布用ノズルＸ軸移動装置６と、塗布用ノズル３をＺ方向に移動させるための塗布用ノズルＺ軸移動装置７とを介して取り付けられており、これら塗布用ノズルＸ軸移動装置６と塗布用ノズルＺ軸移動装置７によって塗布用ノズル５がＸＺ平面（図１の紙面に平行な面）に沿って移動可能になっている。 Then, the coating nozzle 5 is applied to an unillustrated gate-shaped support body, the coating nozzle X-axis moving device 6 for moving the coating nozzle 5 in the X-axis direction, and the coating for moving the coating nozzle 3 in the Z-direction. The application nozzle 5 is attached via the application nozzle X-axis movement device 7 and the application nozzle X-axis movement device 6 and the application nozzle Z-axis movement device 7 so that the application nozzle 5 is parallel to the XZ plane (in FIG. Surface).
塗布用ノズルＸ軸移動装置６は、図４に示すように、角型テーブル２が所定の位置（塗布を行なう位置）に移動後に基板Ｗへの塗布開始時するに際し、塗布用ノズル５のスリット状開口部５ａのＸ軸方向の縁（図１の紙面に向かってＸ軸方向右側の縁）を角型テーブル２上の基板Ｗの端面イの上方に一致させるように塗布用ノズル５を移動させた後、矢印Ｘ１の方向に移動させるものである。（尚、塗布用ノズルＸ軸移動装置６は角型テーブル移動装置３によって代用可能である。）
塗布用ノズルＺ軸移動装置７は角型テーブル２の移動時には塗布用ノズル５を上方に退避させ、角型テーブル２が所定の位置（塗布位置）に移動した後に、塗布用ノズル５を基板Ｗとの間隔が予め決められた間隔になるように降下しＺ軸方向の位置決めを行なうためのものである。
塗布用ノズルＸ軸移動装置６及び塗布用ノズルＺ軸移動装置７は、一般に用いられるボールネジとナット（図示せず）及びスライダ（図示せず）を用いた一軸テーブルである。
尚、前記塗布用ノズル５を基板Ｗとの間隔は塗布材の粘度等の性状によって異なる。
As shown in FIG. 4, the coating nozzle X-axis moving device 6 is configured such that the slit of the coating nozzle 5 starts when the square table 2 starts to be applied to the substrate W after being moved to a predetermined position (position where coating is performed). The coating nozzle 5 is moved so that the edge in the X-axis direction (the edge on the right side in the X-axis direction toward the paper surface of FIG. 1) of the cylindrical opening 5a is aligned above the end surface A of the substrate W on the square table 2 Then, it is moved in the direction of arrow X1. (The application nozzle X-axis moving device 6 can be replaced by the square table moving device 3).
The application nozzle Z-axis moving device 7 retracts the application nozzle 5 upward when the square table 2 is moved, and after the square table 2 has moved to a predetermined position (application position), the application nozzle 5 is moved to the substrate W. Is positioned so as to be positioned in advance in the Z-axis direction.
The application nozzle X-axis moving device 6 and the application nozzle Z-axis moving device 7 are uniaxial tables using commonly used ball screws, nuts (not shown), and sliders (not shown).
The distance between the coating nozzle 5 and the substrate W varies depending on properties such as the viscosity of the coating material.
吸引用ノズル９は図６に示すように樋状部材９ａ、９ｂ、９ｃ、９ｄで構成される四角形をしており、樋状部材９ａ、９ｂ、９ｃ、９ｄで囲われた内側９０の形状は基板Ｗの相似形で、吸引用ノズル９を上下させた際に基板Ｗに接触しない大きさを有している。
そして、樋状部材９ａ、９ｂ、９ｃ、９ｄの各樋の一部に真空ポンプ１１に連通する排気ポート９１が夫々設けられており、この排気ポート９１から樋状部材９ａ、９ｂ、９ｃ、９ｄの開口部の空気（噴射口２０から噴射される空気流Ｆ１と二次流Ｆ２及びこれらの空気流によって搬送される塗布材の飛まつ等を含んだ空気）が真空ポンプ１１によって吸引排出されるようになっている（図３）。
As shown in FIG. 6, the suction nozzle 9 has a quadrangular shape made up of bowl-shaped members 9a, 9b, 9c, 9d. The shape of the inner side 90 surrounded by the bowl-shaped members 9a, 9b, 9c, 9d is It is similar to the substrate W and has a size that does not contact the substrate W when the suction nozzle 9 is moved up and down.
Exhaust ports 91 communicating with the vacuum pump 11 are respectively provided in part of the saddles of the saddle-like members 9a, 9b, 9c, 9d, and the saddle-like members 9a, 9b, 9c, 9d are provided from the exhaust port 91, respectively. The vacuum pump 11 sucks and discharges the air in the opening (air including the air flow F1 and the secondary flow F2 ejected from the ejection port 20 and the flying material of the coating material conveyed by these air flows). (Fig. 3).
そして、 吸引用ノズル９は吸引用ノズルＺ軸移動装置１０を介して前記図示しない門形支持体に取り付けられており、吸引用ノズルＺ軸移動装置１０は、塗布用ノズル５から基板Ｗの表面に塗布材を塗布する際に吸引用ノズル９の樋状部材９ａ、９ｂ、９ｃ、９ｄを降下させて垂直方向（Ｚ方向）の中心を角型テーブル２の噴射口２０の略中心にセットし、前記塗布材の塗布終了後に角型テーブル２のＸ軸方向移動時には樋状部材９ａ、９ｂ、９ｃ、９ｄを樋状部材９ａ、９ｂ、９ｃ、９ｄのＺ軸方向上方に退避させるためのものである。 The suction nozzle 9 is attached to the portal support (not shown) via the suction nozzle Z-axis moving device 10, and the suction nozzle Z-axis moving device 10 extends from the coating nozzle 5 to the surface of the substrate W. When applying the coating material, the saddle-shaped members 9a, 9b, 9c, 9d of the suction nozzle 9 are lowered to set the center in the vertical direction (Z direction) to the approximate center of the injection port 20 of the square table 2. When the rectangular table 2 is moved in the X-axis direction after the application of the coating material is completed, the bowl-shaped members 9a, 9b, 9c, 9d are retracted upward in the Z-axis direction of the bowl-shaped members 9a, 9b, 9c, 9d. It is.
次に、上記のように構成された塗布装置１の塗布動作について、図１から図６に基づいて説明する。
先ず、空気圧縮機４を作動させて、圧縮空気を角型テーブル２に供給し、噴射口２０から空気を噴射させる。その状態で基板Ｗの中心を角型テーブル２の中心に略一致させるように載置する。
これによって、前述のごとく基板Ｗが角型テーブル２に押し付けられ、基板Ｗが角型テーブル２の載置面に保持される。
Next, the application | coating operation | movement of the coating device 1 comprised as mentioned above is demonstrated based on FIGS.
First, the air compressor 4 is operated, compressed air is supplied to the square table 2, and air is injected from the injection port 20. In this state, the substrate W is placed so that the center of the substrate W substantially coincides with the center of the square table 2.
As a result, the substrate W is pressed against the square table 2 as described above, and the substrate W is held on the mounting surface of the square table 2.
その後、角型テーブル移動装置３を作動させて角型テーブル２を所定のＸ１方向位置に搬送し所定の位置（塗布を行なう位置）にセットする。
角型テーブル２が前記所定の位置にセットされた後、吸引用ノズルＺ軸移動装置１０を作動させて、吸引用ノズル９を降下させて、樋状部材９ａ、９ｂ、９ｃ、９ｄの垂直方向（Ｚ方向）の中心が角型テーブル２の噴射口２０の略中心に位置するようにセットし、真空ポンプ１１を作動させる。
Thereafter, the square table moving device 3 is operated to convey the square table 2 to a predetermined position in the X1 direction and set it at a predetermined position (position where application is performed).
After the square table 2 is set at the predetermined position, the suction nozzle Z-axis moving device 10 is operated to lower the suction nozzle 9, and the vertical direction of the bowl-shaped members 9a, 9b, 9c, 9d The vacuum pump 11 is operated by setting so that the center in the (Z direction) is positioned substantially at the center of the injection port 20 of the square table 2.
次に、塗布用ノズルＸ軸移動装置６を作動させて、塗布用ノズル５のスリット状開口部５ａのＸ軸方向の縁（図１の紙面に於けるＸ軸右側の縁）を角型テーブル２上の基板Ｗの稜線イの上方に一致させた後、塗布用ノズルＺ軸移動装置７を作動させて、塗布用ノズル５のスリット状開口部５ａと基板Ｗの隙間を予め設定された間隔になるように降下させてＺ方向の位置で固定する。 Next, the application nozzle X-axis moving device 6 is operated so that the edge in the X-axis direction of the slit-like opening 5a of the application nozzle 5 (the edge on the right side of the X-axis in FIG. 1) is a square table. 2, the coating nozzle Z-axis moving device 7 is operated, and the gap between the slit-shaped opening 5 a of the coating nozzle 5 and the substrate W is set in advance. Is lowered and fixed at the position in the Z direction.
次に、その状態で塗布用ノズルＸ軸移動装置６を作動させて、塗布用ノズル５をＸ軸方向矢印Ｘ１の方向に連続的に移動させ、基板Ｗの上面に塗布材を塗布する。
この塗布作業終了後、塗布用ノズルＺ軸移動装置７を作動させて塗布用ノズル５をＺ軸方向上方に退避させてから、吸引用ノズルＺ軸移動装置１０を作動させて吸引用ノズル９を角型テーブル２のＺ軸上方に退避させた後、角型テーブル２をＸ軸矢印Ｘ１と反対の方向に移動させて角型テーブル２を初期位置に戻し、空気圧縮機４を停止させて、基盤Ｗを角型テーブル２から取りはずして、塗布作業を終了する。
Next, the coating nozzle X-axis moving device 6 is operated in this state, and the coating nozzle 5 is continuously moved in the direction of the X-axis direction arrow X1 to apply the coating material on the upper surface of the substrate W.
After the application operation is completed, the application nozzle Z-axis moving device 7 is operated to retract the application nozzle 5 upward in the Z-axis direction, and then the suction nozzle Z-axis moving device 10 is operated to operate the suction nozzle 9. After retracting the square table 2 above the Z-axis, the square table 2 is moved in the direction opposite to the X-axis arrow X1 to return the square table 2 to the initial position, and the air compressor 4 is stopped. The base W is removed from the square table 2 and the coating operation is completed.
１．塗布装置
２．テーブル
３．テーブル移動装置
４．空気圧縮機
５．塗布用ノズル
６．塗布用ノズルＸ軸移動装置
７．塗布用ノズルＺ軸移動装置
８．塗布材供給装置
９．吸引ノズル
１０．吸引用ノズルＺ軸移動装置
１１．真空ポンプ
Ｗ．基板
1. Application device 2. Table 3. Table moving device4. 4. Air compressor 5. Application nozzle 6. Application nozzle X-axis moving device 7. Application nozzle Z-axis moving device 8. Coating material supply device Suction nozzle 10. 10. Suction nozzle Z-axis moving device Vacuum pump W. substrate
Claims (3)
前記テーブルの噴射口に接続され、該噴射口に噴射用空気を供給するための空気圧縮装置と、
前記テーブル側面側に向けて前記テーブルを取り囲むように開口部を形成する吸引用ノズルと、
該吸引用ノズルを前記テーブルに対し、垂直方向に接近離間可能にする垂直移動手段と、
前記吸引用ノズルに接続され、前記開口部から空気を吸引排出するための真空装置と、
該角型テーブルの上方側に設けられ、前記基板の上面に、塗布材を塗布するためのスリット状の吐出口を有する塗布用ノズルであって、該塗布用ノズルのスリットの長さが前記テーブルの前記塗布用ノズルと平行な方向の長さより長いものである塗布ノズルと、
前記塗布用ノズルに塗布材を供給するための塗布材供給装置と、
前記テーブルを前記塗布手段に対し相対的に移動させる移動手段と、を有することを特徴とする塗布装置 A table for horizontally placing a substrate to be coated, and each side of the table is provided with an injection port for injecting gas in a direction parallel to the upper surface of the table;
An air compressor connected to the injection port of the table, for supplying the injection air to the injection port;
A suction nozzle that forms an opening so as to surround the table toward the side of the table;
Vertical moving means for allowing the suction nozzle to approach and separate in a vertical direction with respect to the table;
A vacuum device connected to the suction nozzle for sucking and discharging air from the opening;
An application nozzle provided on the upper side of the square table and having a slit-like discharge port for applying an application material on the upper surface of the substrate, wherein the length of the slit of the application nozzle is the table An application nozzle that is longer than the length in a direction parallel to the application nozzle;
An application material supply device for supplying an application material to the application nozzle;
And a moving unit that moves the table relative to the coating unit.
A coating method using the coating apparatus according to claim 1, wherein the substrate is similar to the table, and the length of the substrate to be coated is parallel to the slit of the coating nozzle. Is placed on the table so that the center of the substrate to be coated is substantially coincident with the center of the table, and then the air parallel to the top surface of the table from the injection port After the flow is generated, the edge of the cloth substrate in the moving direction is aligned with the slit position of the coating nozzle, and then the coating material is continuously discharged from the coating nozzle while the table is applied to the table. A coating method, wherein the entire upper surface of the substrate to be coated is coated with a coating material by continuously moving relative to the nozzle for application.
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| KR20160117656A (en) * | 2015-03-30 | 2016-10-11 | 희성전자 주식회사 | Coating device for applying glue |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20160117656A (en) * | 2015-03-30 | 2016-10-11 | 희성전자 주식회사 | Coating device for applying glue |
| KR101689076B1 (en) * | 2015-03-30 | 2016-12-23 | 희성전자 주식회사 | Coating device for applying glue |
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