JP5321643B2 - Coating device - Google Patents

Abstract

The invention provides a coating device capable of carrying out high-speed intermittent coating and coating the whole region of a coated object. The coating device uses an attraction port possessing a gas, is equipped with a plurality of bumps on the wall surface at the attraction port side or a nozzle of which the wall surface wettability at the attraction port side is not constant. By enhancing the attraction to enable a coating liquid to infiltrate the nozzle wall surface selectively, a plurality of tiny cracks are generated at a coating bead.

Description

  The present invention relates to a liquid application apparatus that applies a liquid such as ink to a predetermined position on an object.

  2. Description of the Related Art Conventionally, a coating apparatus using an extrusion nozzle (die head) has been widely used in various fields because it can apply a uniform thin film. FIG. 9 is a side sectional view of the vicinity of a coating liquid discharge port of a conventional die head.

  This nozzle (die head) basically has a structure including a manifold (not shown) for spreading the coating liquid from the liquid inlet in the width direction and a coating slit through which the coating liquid is pushed out. Yes. Then, the coating liquid flowing into the inside from the liquid inlet spreads in the width direction in the manifold, passes through the coating slit at the tip, and is pushed out from the coating liquid discharge port 2 and applied to the surface of the substrate. ing.

  In order for this coating apparatus to cope with an increase in coating speed, it is necessary to stably hold the bead 4 pushed out from the coating liquid discharge port 2 at the tip of the nozzle (die head) 1. As a method for that purpose, a pressure reducing chamber 7 is added to the upstream side of the slit in the nozzle 1 (or a portion where a coating liquid such as a hole shape is discharged), and the pressure reducing chamber 7 decompresses the vicinity of the bead at the tip of the nozzle 1. Is generally known. FIG. 10 is a perspective view of the suction port side wall surface of the conventional liquid coating apparatus. Thus, in the conventional liquid application apparatus, the suction port side wall surface is a smooth surface.

  Furthermore, in recent years, in order to produce high-performance devices with low cost and high productivity, in a base material that is conveyed at high speed by roll-to-roll, at a shorter interval (meaning “shorten the uncoated part”), It has been required to form a coating film intermittently. In addition, in the application of a single wafer to a material to be coated, it is required to form a coating film over the entire surface of the material to be coated in order to improve the product power by reducing the size and weight of the device and to reduce the material cost. It's getting on.

  In order to realize such high-speed intermittent application and application to the entire area of the material to be applied, it is necessary to uniformly realize the liquid squeezing at the application end portion in the application width direction in a short time.

  FIG. 11 shows a method of raising the nozzle 1 at the end portion (meaning “away from the material to be coated”). FIG. 11A shows a side cross section, and FIG. The figure seen is shown.

  Conventionally, as shown in FIG. 11, to stop the application liquid from the pump (not shown) at the terminal end, in order to realize the liquid sharpness at the application terminal end in the application width direction uniformly in a short time, A method of raising the nozzle 1 has been used. According to this method, when the nozzle 1 is raised, the bead 4 extends, and a portion where the bead is thin is locally generated. The bead is cracked from the thin portion, and the bead is separated. Patent Document 1 discloses a method for forming a coating liquid suction space in a flow path in the nozzle 1 by a suck back piston (not shown) as a method for improving the liquid cracking of the coating terminal portion.

JP 2002-045762 A

  12A and 12B are diagrams in which a defect in which the coating film is partially connected by tailing occurs, FIG. 12A is an enlarged view of the tailing portion, and FIG. 12B is an overview of the nozzle upper part during coating. FIG. 12 (c) shows a side view of the nozzle during application. Moreover, FIG. 13 is a figure of the tailing which generate | occur | produced in the application | coating to the to-be-coated material of a sheet | seat, Fig.13 (a) is a nozzle upper general view at the time of application | coating, FIG.13 (b) is the to-be-coated after application | coating. FIG. 13 (c) is an enlarged view of the tail portion. In both figures, 1 is a nozzle, 21 is a tailing portion, 5 is a material to be coated, and 8 is a coating film.

  In the method of raising the nozzle 1 at the end portion as shown in FIG. 11, it is difficult to control the behavior of the beads being shredded while being stretched. As shown in a) and FIG. 13C, “tailing” that falls on the material to be coated occurs. As a result, as shown in FIG. 12, in the intermittent application with a short unapplied portion, a defect that the coating film is partially connected occurs, and the yield decreases. Therefore, there is a problem that the uncoated portion cannot be shortened by a certain length or more, and the productivity improvement and the cost reduction cannot be realized sufficiently.

  In addition, in the application to the material to be coated on a single wafer, when trying to apply to the entire material to be coated, the coating liquid protrudes from the material to be coated due to “tailing”, and the contamination of the equipment or the protruding coating liquid is different from other materials. Defects due to adhering to the sample will occur. As a result, as shown in FIG. 13, it is necessary to secure an area of the material to be applied corresponding to “tailing” in the device design, and it becomes difficult to reduce the size and weight of the device. There was a problem that cost reduction was difficult.

  Further, the method of forming the coating solution suction space in the flow path in the nozzle 1 by the suck back piston has a problem that the structure of the nozzle becomes complicated, and maintenance such as disassembly, cleaning, and assembly becomes complicated and difficult. . In addition, there is a problem that it is difficult to reduce the size and weight of the nozzle, resulting in expensive equipment.

  Furthermore, it is very difficult to precisely control the suck back piston that sucks an appropriate amount of a small amount of bead liquid. During continuous mass production, the amount of suction is small and "tailing" occurs, and the amount of suction is reduced. A situation frequently occurs that air is mixed into the nozzle due to too much, and uniform discharge of the coating liquid cannot be continued. For this reason, there has been a problem that during the production, the adjustment frequency of the suction amount of the suck back piston is increased, and the productivity is lowered.

  The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to provide a coating apparatus that enables high-speed intermittent coating and coating over the entire coated material.

In order to achieve the above object, the invention described in claim 1 is a liquid application device for applying a liquid to an object to be applied, and has a nozzle for discharging a coating liquid, and the nozzle is a discharge port for the coating liquid. further comprising a suction port of the gas on the upstream side of the recess is provided on the wall surface of the suction side of the nozzle, the recess is characterized Rukoto formed in plural toward the other from one of the coating width direction applied Device.

  According to this configuration, the upstream side of the bead is depressurized by the gas sucked from the gas suction port provided in the upstream side range of the coating liquid discharge port 2, and the coating liquid is selectively wetted only in a portion except the concave portion of the wall surface. Thus, a portion where the bead is thin can be formed over the entire coating width, and the bead can be quickly separated from the material to be coated by causing the bead to crack from the thin portion of the bead.

  In order to achieve the above object, the invention according to claim 2 is characterized in that the angle between the nozzle tip surface and the wall on the suction port side of the nozzle is not the same in the coating width direction. It is.

  According to this configuration, the upstream side of the bead is depressurized by the gas sucked from the gas suction port provided in the upstream side range of the coating liquid discharge port 2, and the coating liquid is selectively wetted only in a portion except the concave portion of the wall surface. Thus, a portion where the bead is thin can be formed over the entire coating width, and the bead can be quickly separated from the material to be coated by causing the bead to crack from the thin portion of the bead.

In order to achieve the above object, the invention described in claim 3 is a liquid application device for applying a liquid to an object to be applied, and has a nozzle for discharging an application liquid, and the nozzle is a part of the application liquid. A gas suction port is further provided upstream of the discharge port, and there are a plurality of regions having different wettability on the wall surface on the suction port side of the nozzle, and the region includes a region having low wettability and a region having high wettability. It is a coating apparatus characterized by being formed alternately in the coating width direction .

  According to this configuration, the upstream side of the bead is depressurized by the gas sucked from the gas suction port provided in the upstream side range of the coating liquid discharge port 2, and the coating liquid is selectively applied only to a portion excluding a portion having low wettability on the wall surface. The bead thickness can be formed over the entire coating width by wetting up, and the bead can be quickly separated from the material to be coated by cracking the bead from the thin bead thickness portion. .

  As described above, according to the present invention, it is possible to provide a coating apparatus that enables high-speed intermittent coating and coating over the entire coated material.

Schematic of the liquid coating apparatus in Embodiment 1 of the present invention The uneven | corrugated | grooved part perspective view of the suction port side wall surface of the liquid application apparatus in Embodiment 1 of this invention (A) is side sectional drawing of the method which wets up a coating liquid selectively only in the coating terminal part in Embodiment 1 of this invention except the recessed part of the gas suction port side wall surface of a nozzle (die head). (B) is a coating end point in the first embodiment of the present invention from the coating liquid discharge port side of the method in which the coating liquid is selectively wetted only in the portion excluding the concave portion of the side wall surface of the gas suction port of the nozzle. Viewed The perspective view of the part from which the wettability of the suction port side wall surface of the liquid application apparatus with which the wettability of the wall surface by the side of the suction port of a nozzle is not constant in Embodiment 2 of this invention differs (A) is a side cross-sectional view of a method for selectively wetting up a coating solution only in a highly wettable portion of the side wall surface of the gas suction port of the nozzle at the coating end portion in Embodiment 2 of the present invention, (b) ) Is a view as seen from the coating liquid discharge port side in the method of selectively wetting up only the highly wettable portion of the gas suction port side wall surface of the nozzle at the coating end portion in the second embodiment of the present invention. The figure of the uneven | corrugated | grooved part of the suction inlet side wall surface of the nozzle of this invention in Embodiment 1 (A) is a cross-sectional side view of the nozzle when applied using the nozzle of the present invention in Embodiment 1 and the nozzle 1 is tilted to the upstream side of the application at the application end, and (b) is an application liquid discharge port View from the side (A) is a side sectional view of the nozzle when applied using the nozzle of the present invention in Embodiment 2, and the nozzle 1 is tilted to the upstream side of the application at the application end portion, and (b) is an application liquid discharge port View from the side Side sectional view near the coating liquid discharge port of the conventional die head Perspective view of suction inlet side wall surface of conventional liquid coating apparatus (A) is a side sectional view of the method of raising the nozzle at the end portion, and (b) is a view seen from the coating liquid discharge port side of the method of raising the nozzle at the end portion. (A) is an enlarged view of a tailing portion where a defect occurs in which the coating film is partially connected by tailing, (b) is an overview of the nozzle upper part during coating, and (c) is during coating. Nozzle side view (A) is a schematic view of the upper part of the nozzle at the time of application, (b) is an overview of the upper part of the coated material after coating, and (c) is an enlarged view of the tailing that occurs in the application of the single wafer to the coated material.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1 is a schematic diagram of a liquid coating apparatus according to Embodiment 1 of the present invention. The coating liquid in the coating liquid tank is fed out by a liquid feeding pump capable of stable liquid feeding, such as a metering pump, and fed into the nozzle 1. Thereafter, the coating liquid is pushed out from the manifold to a slit (in the case of stripe coating, a narrow slit or a hole-shaped flow path), and is further discharged from the coating liquid discharge port 2 to be relatively relative to the nozzle 1. A coating film 8 is formed by coating the material to be coated 5 that is traveling.

  In the present invention, for example, a decompression pump or the like is connected to the decompression chamber 7 via a flow rate adjusting valve or a flow meter, and the gas between the nozzle 1 and the material to be coated is sucked. Thus, by sucking gas from the gas suction port 3 provided on the coating upstream side of the coating liquid discharge port 2, the vicinity of the upstream side of the bead 4 is decompressed, and against the shearing force due to the running of the substrate, A force for pulling the bead 4 upstream can be obtained, and the bead 4 can be maintained.

  Here, when trying to realize high-speed intermittent application and application to the entire area of the material to be applied, a method of raising the nozzle at the end portion has been used conventionally, but the beads are broken up while extending. Since it is difficult to control the behavior, a “tailing” occurs in which the coating solution that partially extends the longest falls on the material to be coated.

  In some cases, a sucking back piston may be used to form a coating liquid suction space in the flow path in the nozzle. However, the nozzle structure becomes complicated, and maintenance such as disassembly, cleaning, and assembly becomes complicated and difficult. In other words, it is difficult to reduce the size and weight of the nozzle, or the equipment becomes expensive. Furthermore, it is very difficult to precisely control the suck back piston that sucks an appropriate amount of minute bead liquid, and the adjustment frequency of the suck back piston suction amount during production increases, which reduces productivity. .

  In FIG. 2, the uneven | corrugated | grooved part perspective view of the suction port side wall surface of the liquid application apparatus in Embodiment 1 of this invention is shown. FIG. 3A is a side cross-sectional view of a method in which the coating liquid is selectively wetted only at a portion of the coating terminal portion excluding the recess on the side wall surface of the gas suction port of the nozzle (die head). FIG. 3B shows a view seen from the coating liquid discharge port side.

  As shown in FIG. 2, in the present invention, a plurality of projections and depressions are provided on the wall surface of the nozzle on the gas suction port 3 side, and the amount of gas suction is increased in a short time at the coating end portion. Thereby, the upstream side of the bead is depressurized more than at the time of application, and as shown in FIG. 3, only the portion of the wall surface excluding the concave portion can selectively wet the application liquid.

  As a result, a plurality of thin portions of the bead can be formed over the entire coating width, and a plurality of fine cracks are formed in the bead from the thin portion of the bead so that the bead is quickly separated from the material to be coated. Is possible.

  As described above, according to the present invention, by forming a plurality of cracks in the bead over the entire coating width, the bead can be promptly separated so that the bead elongation becomes minute. As a result, the minute tailing at the coating end is smoothed in the coating film by leveling, so that the tailing does not fall down as in the conventional method, and high-speed intermittent coating and coating over the entire area of the coating material are possible. It becomes possible.

(Embodiment 2)
FIG. 4 is a perspective view of a portion where the wettability of the side wall surface of the suction port is different in the liquid coating apparatus in which the wettability of the wall surface on the suction port side of the nozzle (die head) is not constant.

  In FIG. 4, 9 is a portion with low wettability and 10 is a portion with high wettability, and the liquid coating apparatus according to Embodiment 2 of the present invention has a plurality of regions having different wettability in the coating width direction. The structure is formed. When coating using such a liquid coating apparatus, the amount of gas suction is increased for a short time at the coating end portion.

  Here, FIG. 5 shows a method in which the coating liquid is selectively wetted only at a portion having a high wettability on the side wall surface of the gas suction port of the nozzle in the coating end portion in the second embodiment of the present invention. FIG. 5A is a side sectional view, and FIG. 5B is a view as seen from the coating liquid discharge port side.

  In this way, by increasing the gas suction amount for a short time at the coating end portion, the upstream side of the bead is depressurized more than at the time of coating, and as shown in FIG. The coating liquid can be wetted up. As a result, a portion with a thin bead can be formed over the entire coating width, and the bead can be quickly separated from the material to be coated by causing the bead to crack from the thin portion of the bead.

  As described above, according to the present invention, by forming a plurality of cracks in the bead over the entire coating width, the bead can be promptly separated so that the bead elongation becomes minute. As a result, the minute tailing at the coating end is smoothed in the coating film by leveling, so that the tailing does not fall down as in the conventional method, and high-speed intermittent coating and coating over the entire area of the coating material are possible. It becomes possible.

  Here, in the first and second embodiments, even when the nozzle 1 is tilted to the upstream side of the application at the application end portion, the wetting of the application liquid can be promoted in the same manner as increasing the gas suction amount for a short time, Similar effects can be obtained.

Example 1
This will be described in more detail with reference to an example using the first embodiment. In this embodiment, using the nozzle 1 of FIG. 1 manufactured by grinding hardened stainless steel, the unevenness of the suction port side wall surface is partially set at an angle with respect to the discharge port front end surface as shown in FIG. It applied with the nozzle changed into.

  Further, methyl cellulose having a coating gap 19 of 100 μm, a viscosity of 100 mPa · s at a shear rate of 1000 (1 / s) on a PET film substrate that travels relatively to the nozzle 1 at a coating speed of 150 mm / s. The aqueous solution was applied with a thickness of 10 μm. The coating width was 100 cm and the coating distance was 100 cm. Moreover, the uncoated part length in intermittent application was 1 cm. The coating liquid discharge port 2 has a slit shape with a gap of 100 μm, and the gas suction port 3 has a slit shape with a gap of 500 μm. Further, the pressure of the gas suction port at the time of application was set to -10 kPa, and the pressure of the gas suction port at the end of application was set to -15 kPa.

  In addition, the width of the concave portion on the side wall surface of the suction port in FIG. 2 was set to Z = 3 mm, and the width of the convex portion was set to Y = 3 mm. In addition, the angle θ1 = 150 ° with respect to the discharge port front end surface of the nozzle in FIG. 6 is evaluated, and the occurrence of tailing when the coating is intermittently performed 500 times with the nozzle when θ2 is changed from 135 ° to 45 ° is also performed. Is shown in Table 1. In the evaluation of the occurrence of tailing, “O” was evaluated when no tailing having a length of 0.5 mm or more occurred, and “X” was evaluated when the tailing occurred.

  Here, as a comparative example (1), the same results by the conventional nozzle 1 shown in FIGS.

  Here, the conventional nozzle 1 has a structure in which there is no uneven portion on the side wall surface of the suction port of the nozzle, that is, θ1 = θ2 in FIG. The conventional nozzle 1 has θ1 = θ2 = 150 °, the coating liquid discharge port 2 has a slit shape with a gap of 100 μm, and the gas suction port 3 has a slit shape with a gap of 500 μm. Furthermore, the pressure of the gas suction port at the time of application was set to −10 kPa. Further, a methylcellulose aqueous solution having a coating gap 19 of 100 μm and a viscosity of 100 mPa · s at a shear rate of 1000 (1 / s) on a PET film substrate that travels relative to the nozzle 1 at a coating speed of 150 mm / s. Was applied at a thickness of 10 μm.

  The coating width was 100 cm and the coating distance was 100 cm. Moreover, the uncoated part length in intermittent application was 1 cm.

  From Table 1, in the conventional nozzle 1 (Comparative Example 1), it is impossible to control the tearing behavior while the bead is stretched between the nozzle tip surface and the substrate to be coated, and the longest partly. A “tailing” in which the extended coating solution falls on the material to be coated occurs, and a defect that the coating film is partially connected across the uncoated portion occurs, resulting in a decrease in yield.

  On the other hand, in the nozzle 1 (Example 1) of the present invention, the upstream side of the bead is depressurized by the gas sucked from the gas suction port provided in the upstream side range of the coating liquid discharge port 2, and the concave portion of the wall surface is formed. By selectively wetting up the coating solution only on the portion other than the portion, a portion with a thin bead thickness could be formed over the entire coating width. By making a crack in the bead from the thin part of the bead, the bead can be quickly separated from the material to be coated. As a result, 500 sheets could be applied without causing defects due to tailing.

  As described above, according to the present invention, it is possible to provide a liquid coating apparatus capable of high-speed intermittent coating without causing tailing by causing cracks in the bead over the entire coating width.

  In this embodiment, only θ1 is set to 150 ° and θ2 is changed from 135 ° to 45 °. However, the present invention is not limited to this, and a similar effect can be obtained by providing a difference between θ1 and θ2. Moreover, although it described only when it was set as the width | variety of the dent part of the suction port side wall surface: Z = 3mm and the width | variety of a convex part: Y = 3mm, the same effect will be acquired if a several uneven | corrugated part is provided. However, it is not limited to this.

(Example 2)
This will be described in more detail with reference to an example using the second embodiment. In this example, the same application as in Example 1 was performed using the nozzle 1 of FIG. 4 manufactured by grinding hardened stainless steel. Here, the portion 9 having low wettability of the coating liquid provided on the suction port side wall surface of the nozzle is formed as a region of 10 mm along the wall surface in the coating width direction W = 3 mm and the height direction (surface roughness Ra0.4). In addition, the low wettability portions 9 and the alternating high wettability portions 10 are formed as a coating width direction V = 3 mm and a height direction as a 10 mm region along the wall surface (fluorine-based material). The coating conditions other than the surface treatment were performed in the same manner as in Example 1. Table 2 shows the results when a plurality of portions having different wettability (contact angles) are applied to the nozzle suction side wall surface with nozzles alternately present in the entire coating width.

  Further, the comparative example is the same as that of Example 1, and the same results are shown in Table 2 by the conventional nozzle 1 shown in FIGS. Here, the nozzle 1 of the conventional method has a structure in which there is no difference in wettability of the side wall surface of the suction port of the nozzle, that is, there is no difference in wettability between portions 9 and 10 in FIG.

  From Table 2, in the conventional nozzle 1 (Comparative Example 1), it is impossible to control the tearing behavior while the bead is stretched between the nozzle tip surface and the substrate to be coated. A “tailing” in which the extended coating solution falls on the material to be coated occurs, and a defect that the coating film is partially connected across the uncoated portion occurs, resulting in a decrease in yield.

  On the other hand, in the nozzle 1 (Example 2) of the present invention, the upstream side of the bead is decompressed by the gas sucked from the gas suction port provided in the upstream side range of the coating liquid discharge port 2, and the wettability of the wall surface is reduced. By selectively letting the coating solution wet out only in the parts other than the low part, it is possible to form a thin part of the bead over the entire coating width, and to generate multiple fine cracks in the bead from the thin part of the bead. Thus, the bead can be quickly separated from the material to be coated. As a result, 500 sheets could be applied without causing defects due to tailing.

  As described above, according to the present invention, it is possible to provide a liquid coating apparatus capable of high-speed intermittent coating without causing tailing by causing cracks in the bead over the entire coating width. In the present embodiment, only the case where the contact angle of the region with low wettability (high contact angle) is set to 70 ° is described. However, the present invention is not limited to this, and a similar effect can be obtained by providing a difference in wettability. .

  Further, the width of the portion with low wettability of the coating liquid provided on the side wall surface of the suction port of the nozzle is set to a coating width direction V = 3 mm, and is formed as a region of 10 mm along the wall surface in the height direction. 10 is described only when the coating width direction W = 3 mm and the height direction is formed as a region of 10 mm along the wall surface, but the same effect can be obtained if there are a plurality of portions having different wettability. Not limited to.

(Example 3)
This will be described in more detail with reference to an example using the first embodiment.

  FIG. 7 is a diagram showing a case where coating is performed using the nozzle of the present invention in the first embodiment, and the nozzle 1 is tilted to the upstream side of coating at the coating terminal portion, and FIG. FIG. 7B is a view as seen from the coating liquid discharge port side.

  In the present embodiment, using the nozzle 1 of FIG. 1 manufactured by grinding hardened stainless steel, the pressure at the gas suction port at the coating terminal is set to −10 kPa at the coating terminal, and the nozzle 1 The nozzle structure and coating conditions were the same as in Example 1 except that the nozzle was tilted 10 ° upstream of the coating. Table 3 shows the results of application with nozzles having different concave-convex structure on the nozzle suction side wall surface.

  Further, the comparative example is the same as that of Example 1, and the same results are shown in Table 3 by the conventional nozzle 1 shown in FIGS.

  From Table 3, in the conventional nozzle 1 (Comparative Example 1), it is impossible to control the tearing behavior while the bead extends between the nozzle tip surface and the substrate to be coated, and the longest partly. A “tailing” in which the extended coating solution falls on the material to be coated occurs, and a defect that the coating film is partially connected across the uncoated portion occurs, resulting in a decrease in yield.

  On the other hand, in the nozzle 1 (Embodiment 3) of the present invention, by tilting the nozzle, the beads are easily attracted to the gas suction port side, and the coating liquid is selectively wetted only in the portion excluding the concave portion of the wall surface. It is possible to form a thin part of the bead over the entire coating width, and it is possible to quickly separate the bead from the material to be coated by generating a plurality of fine cracks in the bead from the thin part of the bead. became. As a result, 500 sheets could be applied without causing defects due to tailing.

  As described above, according to the present invention, it is possible to provide a liquid coating apparatus capable of high-speed intermittent coating without causing tailing by causing cracks in the bead over the entire coating width.

  In the present embodiment, only the case where the nozzle 1 is tilted 10 ° to the upstream side of the coating at the coating end portion is described, but the same effect can be obtained if the nozzle 1 is tilted to the upstream side of the coating with the gas suction port. The angle is not limited to this.

  In this embodiment, only θ1 is set to 150 ° and θ2 is changed from 135 ° to 45 °. However, the present invention is not limited to this, and a similar effect can be obtained by providing a difference between θ1 and θ2. Moreover, although it described only when it was set as the width | variety of the dent part of the suction port side wall surface: Z = 3mm and the width | variety of a convex part: Y = 3mm, the same effect will be acquired if a several uneven | corrugated part is provided. However, it is not limited to this.

Example 4
This will be described in more detail with reference to an example using the second embodiment.

  FIG. 8 is a diagram showing a case where coating is performed using the nozzle of the present invention in the second embodiment, and the nozzle 1 is tilted to the upstream side of coating at the coating end portion, and FIG. 8A is a sectional side view of the nozzle. FIG. 8B is a view as seen from the coating liquid discharge port side.

  In the present embodiment, using the nozzle 1 of FIG. 4 manufactured by grinding hardened stainless steel, the pressure of the gas suction port at the coating end portion is set to −10 kPa at the coating end portion, and the nozzle 1 The nozzle structure and coating conditions were the same as in Example 1 except that the nozzle was tilted 10 ° upstream of the coating. Table 4 shows the results when coating was performed with nozzles having different wettability (contact angles) on the side wall surfaces of the nozzle suction ports.

  Further, the comparative example is the same as that of Example 1, and the same results obtained by the conventional nozzle 1 shown in FIGS.

  From Table 4, in the conventional nozzle 1 (Comparative Example 1), it is impossible to control the tearing behavior while the bead is stretched between the nozzle tip surface and the substrate to be coated. A “tailing” in which the extended coating solution falls on the material to be coated occurs, and a defect that the coating film is partially connected across the uncoated portion occurs, resulting in a decrease in yield.

  On the other hand, in the nozzle 1 (Embodiment 4) of the present invention, by tilting the nozzle, the beads are easily attracted to the gas suction port side, and only the portion excluding the portion with low wettability on the wall surface is selectively applied. By wetting up the liquid, it is possible to form a thin part of the bead over the entire coating width, and by cracking the bead from the thin part of the bead, the bead can be quickly separated from the material to be coated. It has become possible. As a result, 500 sheets could be applied without causing defects due to tailing.

  As described above, according to the present invention, it is possible to provide a liquid coating apparatus that enables high-speed intermittent coating without tailing by generating a plurality of fine cracks in the bead over the entire coating width.

  In the present embodiment, only the case where the nozzle 1 is tilted 10 ° to the upstream side of the coating at the coating end portion is described, but the same effect can be obtained if the nozzle 1 is tilted to the upstream side of the coating with the gas suction port. The angle is not limited to this.

  Further, in this embodiment, only the case where the contact angle with low wettability (region with high contact angle) is set to 70 ° is described, but the present invention is not limited to this, and the same effect can be obtained by providing a difference in wettability. .

  Further, the width of the low wettability portion of the coating solution provided on the side wall of the suction port of the nozzle is set to a coating width direction V = 3 mm, and is formed as a region of 10 mm along the wall surface in the height direction, and has high wettability. Although only the case where the portion 10 is formed as a region having a coating width direction W = 3 mm and a height direction of 10 mm along the wall surface is described, if there are a plurality of portions having different wettability, the same effect can be obtained. Not exclusively.

(Example 5)
This will be described in more detail with reference to an example using the first embodiment. In this embodiment, the coating width is set to 100 cm on a glass substrate (width 110 cm × length 70 cm) traveling relative to the nozzle 1 using the nozzle 1 of FIG. 1 manufactured by grinding hardened stainless steel. The nozzle structure and coating conditions were the same as in Example 1 except that the coating distance was 68 cm and 500 sheets were coated. Table 5 shows the results of coating with nozzles having different concave-convex structure on the nozzle suction side wall surface.

  Further, the comparative example is the same as that of Example 1, and the same results are shown in Table 5 together with the conventional nozzle 1 shown in FIGS.

  From Table 5, in the conventional nozzle 1 (Comparative Example 1), it is impossible to control the tearing behavior while the bead extends between the nozzle tip surface and the substrate to be coated, and the longest partly. “Tailing” in which the stretched coating solution falls on the material to be coated occurs, causing a defect that the coating solution adheres to an uncoated portion region provided on the outer periphery of the glass substrate, resulting in a decrease in yield.

  On the other hand, in the nozzle 1 of the present invention (Example 5), the upstream side of the bead is decompressed by the gas sucked from the gas suction port provided in the upstream side range of the coating liquid discharge port 2, and the concave portion of the wall surface is formed. By selectively letting the coating solution wet out only on the part to be removed, a part with a thin bead thickness can be formed over the entire coating width, and by applying multiple fine cracks on the bead from the thin part of the bead, It became possible to quickly separate the beads from the material. As a result, 500 sheets could be applied to the entire coated material without causing defects due to tailing.

  As described above, according to the present invention, it is possible to provide a liquid application apparatus that enables high-speed intermittent application without tailing by generating a plurality of fine cracks in the bead over the entire application width.

  In this embodiment, only θ1 is set to 150 ° and θ2 is changed from 135 ° to 45 °. However, the present invention is not limited to this, and a similar effect can be obtained by providing a difference between θ1 and θ2. Moreover, although it described only when it was set as the width | variety of the dent part of the suction port side wall surface: Z = 3mm and the width | variety of a convex part: Y = 3mm, the same effect will be acquired if a several uneven | corrugated part is provided. However, it is not limited to this.

(Example 6)
This will be described in more detail with reference to an example using the second embodiment.

  In this embodiment, the coating width is set to 100 cm on a glass substrate (width 110 cm × length 70 cm) traveling relative to the nozzle 1 using the nozzle 1 of FIG. 4 manufactured by grinding hardened stainless steel. The nozzle structure and coating conditions were the same as in Example 5 except that the coating distance was 68 cm and 500 sheets were coated. Table 6 shows the results when coating was performed with nozzles having different wettability (contact angles) on the side wall surfaces of the nozzle suction ports.

  Further, the comparative example is the same as that of Example 1, and the same results obtained with the conventional nozzle 1 shown in FIGS.

  From Table 6, in the conventional nozzle 1 (Comparative Example 1), it is impossible to control the behavior that the bead is broken while extending between the nozzle tip surface and the substrate to be coated, and the longest partly. A “tailing” in which the extended coating solution falls on the material to be coated occurs, and a defect that the coating film is partially connected across the uncoated portion occurs, resulting in a decrease in yield.

  On the other hand, in the nozzle 1 (Example 6) of the present invention, the upstream side of the bead is decompressed by the gas sucked from the gas suction port provided in the upstream side range of the coating liquid discharge port 2, and the wettability of the wall surface is reduced. By selectively letting the coating solution wet out only in the parts other than the low part, it is possible to form a thin part of the bead over the entire coating width, and to generate multiple fine cracks in the bead from the thin part of the bead. Thus, the bead can be quickly separated from the material to be coated. As a result, 500 sheets could be applied to the entire coated material without causing defects due to tailing.

  As described above, according to the present invention, it is possible to provide a liquid application apparatus that enables high-speed intermittent application without tailing by generating a plurality of fine cracks in the bead over the entire application width. In this embodiment, only the case where the contact angle with low wettability (the region with a high contact angle) is set to 70 ° is described. However, the present invention is not limited to this, and a similar effect can be obtained by providing a difference in wettability. .

  Further, the width of the low wettability portion of the coating liquid provided on the side wall surface of the suction port of the nozzle is set to a coating width direction V = 3 mm, and is formed as a region of 10 mm along the wall surface in the height direction. Although only the case where the high portion 10 is formed as a coating width direction W = 3 mm and a region of 10 mm along the wall surface in the height direction is described, the same effect can be obtained if there are a plurality of portions having different wettability. Not limited to this.

  Since the present invention enables high-speed intermittent application and application to the entire coated material, for example, high-performance devices such as organic EL, plasma display, liquid crystal display, solar battery, and lithium secondary battery can be manufactured at low cost. In addition, it can be applied to a printing manufacturing process that is required to produce with high productivity.

DESCRIPTION OF SYMBOLS 1 Nozzle 2 Coating liquid discharge port 3 Gas suction port 4 Bead 5 To-be-coated material 6 Concave part 7 Depressurization chamber 8 Coating film 9 Low wettability part 10 High wettability part 19 Coating gap 21 Trailing 22 Roll 23 Tilt nozzle angle

Claims (3)

A liquid application device for applying a liquid to an application object,
A nozzle that discharges the coating liquid; the nozzle further includes a gas suction port upstream of the discharge port of the coating liquid; and a recess is provided on a wall surface on the suction port side of the nozzle. while a plurality of formed toward the other from Rukoto the width direction,
An applicator characterized by.   The coating apparatus according to claim 1, wherein an angle between a tip surface of the nozzle and a wall surface on a suction port side of the nozzle is not the same in the coating width direction. A liquid application device for applying a liquid to an application object,
A nozzle that discharges the coating liquid; the nozzle further includes a gas suction port upstream of the discharge port of the coating liquid; and a plurality of regions having different wettability are provided on a wall surface on the suction port side of the nozzle The region is formed by alternately forming regions with low wettability and regions with high wettability in the coating width direction ;
An applicator characterized by.

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