JP2014229159A5 - - Google Patents

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Publication number
JP2014229159A5
JP2014229159A5 JP2013109493A JP2013109493A JP2014229159A5 JP 2014229159 A5 JP2014229159 A5 JP 2014229159A5 JP 2013109493 A JP2013109493 A JP 2013109493A JP 2013109493 A JP2013109493 A JP 2013109493A JP 2014229159 A5 JP2014229159 A5 JP 2014229159A5
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JP
Japan
Prior art keywords
diaphragm
valve seat
inclined surface
control valve
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013109493A
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English (en)
Japanese (ja)
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JP2014229159A (ja
JP6111862B2 (ja
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Publication date
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Priority claimed from JP2013109493A external-priority patent/JP6111862B2/ja
Priority to JP2013109493A priority Critical patent/JP6111862B2/ja
Priority to PCT/JP2014/059087 priority patent/WO2014188785A1/ja
Priority to KR1020157020487A priority patent/KR101752988B1/ko
Priority to US14/764,262 priority patent/US10018277B2/en
Priority to CN201480006894.3A priority patent/CN104969136B/zh
Publication of JP2014229159A publication Critical patent/JP2014229159A/ja
Publication of JP2014229159A5 publication Critical patent/JP2014229159A5/ja
Publication of JP6111862B2 publication Critical patent/JP6111862B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013109493A 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ Active JP6111862B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013109493A JP6111862B2 (ja) 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ
CN201480006894.3A CN104969136B (zh) 2013-05-24 2014-03-28 流量控制阀及使用该流量控制阀的质量流量控制器
KR1020157020487A KR101752988B1 (ko) 2013-05-24 2014-03-28 유량 제어 밸브 및 그것을 사용한 매스 플로우 컨트롤러
US14/764,262 US10018277B2 (en) 2013-05-24 2014-03-28 Flow rate control valve and mass flow controller using the same
PCT/JP2014/059087 WO2014188785A1 (ja) 2013-05-24 2014-03-28 流量制御弁及びそれを用いたマスフローコントローラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013109493A JP6111862B2 (ja) 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ

Publications (3)

Publication Number Publication Date
JP2014229159A JP2014229159A (ja) 2014-12-08
JP2014229159A5 true JP2014229159A5 (cg-RX-API-DMAC7.html) 2016-01-21
JP6111862B2 JP6111862B2 (ja) 2017-04-12

Family

ID=51933351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013109493A Active JP6111862B2 (ja) 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ

Country Status (5)

Country Link
US (1) US10018277B2 (cg-RX-API-DMAC7.html)
JP (1) JP6111862B2 (cg-RX-API-DMAC7.html)
KR (1) KR101752988B1 (cg-RX-API-DMAC7.html)
CN (1) CN104969136B (cg-RX-API-DMAC7.html)
WO (1) WO2014188785A1 (cg-RX-API-DMAC7.html)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9903497B2 (en) * 2013-09-30 2018-02-27 Hitachi Metals, Ltd. Flow control valve and a mass flow controller using the same
CN107709857B (zh) 2015-06-17 2020-05-12 威斯塔德尔特有限责任公司 阀的低滞后隔膜
WO2017007888A1 (en) 2015-07-09 2017-01-12 Vistadeltek, Llc Control plate in a valve
JP2017057911A (ja) * 2015-09-16 2017-03-23 タカノ株式会社 ピエゾバルブ
KR102331560B1 (ko) * 2016-09-29 2021-11-26 히타치 긴조쿠 가부시키가이샤 유량 제어 밸브 및 그것을 사용한 질량 유량 제어 장치
JP6793026B2 (ja) * 2016-12-13 2020-12-02 株式会社堀場エステック バルブ装置及びバルブ制御装置
DE102017201633A1 (de) 2017-02-01 2018-08-02 Volkswagen Aktiengesellschaft Druckbegrenzungsventil
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
CN114658860B (zh) 2017-06-05 2024-11-29 伊利诺斯工具公司 用于高传导性阀的控制板
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
US10774938B2 (en) * 2017-11-09 2020-09-15 Swagelok Company Diaphragm valve with metal seat
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ
CN107844133A (zh) * 2017-12-20 2018-03-27 北京创昱科技有限公司 一种质量流量控制器
KR102592722B1 (ko) * 2018-03-19 2023-10-24 가부시키가이샤 프로테리아루 다이어프램 밸브 및 그것을 사용한 질량 유량 제어 장치
ES2953306T3 (es) * 2019-05-29 2023-11-10 Fischer G Rohrleitungssysteme Ag Puesta en marcha de válvula de diafragma
US11892100B2 (en) * 2019-12-27 2024-02-06 Fujikin Incorporated Diaphragm valve, flow control device, fluid control device, and semiconductor manufacturing device
JP7353197B2 (ja) * 2020-01-31 2023-09-29 川崎重工業株式会社 減圧弁及びバルブユニット
JP7531881B2 (ja) * 2020-03-24 2024-08-13 株式会社フジキン 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil
CN113190050A (zh) * 2021-04-01 2021-07-30 青岛芯笙微纳电子科技有限公司 一种基于压电控制阀的mems质量流量控制器及控制方法
FR3133899B1 (fr) * 2022-03-24 2024-02-16 Hutchinson Dispositif d’amortissement de pression pour un circuit de fluide

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134029U (cg-RX-API-DMAC7.html) * 1974-09-05 1976-03-12
JPS5134029A (ja) 1974-09-17 1976-03-23 Akihiro Fujimura Dendowabuntaipuraitaa
US4566476A (en) * 1985-03-29 1986-01-28 Draft Systems, Inc. Flow control device
JP2560468Y2 (ja) * 1992-02-18 1998-01-21 株式会社本山製作所 メタルダイヤフラム弁
US5413311A (en) * 1994-03-01 1995-05-09 Tescom Corporation Gas valve
EP0780611A1 (en) 1995-12-22 1997-06-25 Applied Materials, Inc. Flow control valve
DE69814815T2 (de) * 1997-02-03 2004-04-08 Swagelok Co., Solon Membranventil
US6062246A (en) * 1997-04-08 2000-05-16 Hitachi Metals Ltd. Mass flow controller and operating method thereof
JP3562692B2 (ja) * 1997-08-11 2004-09-08 日立金属株式会社 マスフローコントローラ
JP3583123B1 (ja) * 2004-01-06 2004-10-27 株式会社東京フローメータ研究所 流量制御弁及び流量制御装置
JP2010159790A (ja) 2009-01-07 2010-07-22 Fujikin Inc ダイヤフラム弁用ダイヤフラム押さえおよびこれを備えたダイヤフラム弁

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