JP2014190807A - 加速度センサ - Google Patents

加速度センサ Download PDF

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Publication number
JP2014190807A
JP2014190807A JP2013066063A JP2013066063A JP2014190807A JP 2014190807 A JP2014190807 A JP 2014190807A JP 2013066063 A JP2013066063 A JP 2013066063A JP 2013066063 A JP2013066063 A JP 2013066063A JP 2014190807 A JP2014190807 A JP 2014190807A
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JP
Japan
Prior art keywords
support substrate
torsion beam
acceleration
movable
lower electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013066063A
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English (en)
Japanese (ja)
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JP2014190807A5 (https=
Inventor
Takahiro Miyazaki
崇裕 宮▲崎▼
Mineichi Sakai
峰一 酒井
Yoshimasa Sugimoto
圭正 杉本
Yumi Maruyama
ユミ 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2013066063A priority Critical patent/JP2014190807A/ja
Priority to PCT/JP2014/001697 priority patent/WO2014156119A1/ja
Publication of JP2014190807A publication Critical patent/JP2014190807A/ja
Publication of JP2014190807A5 publication Critical patent/JP2014190807A5/ja
Pending legal-status Critical Current

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  • Micromachines (AREA)
  • Pressure Sensors (AREA)
JP2013066063A 2013-03-27 2013-03-27 加速度センサ Pending JP2014190807A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013066063A JP2014190807A (ja) 2013-03-27 2013-03-27 加速度センサ
PCT/JP2014/001697 WO2014156119A1 (ja) 2013-03-27 2014-03-25 物理量センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013066063A JP2014190807A (ja) 2013-03-27 2013-03-27 加速度センサ

Publications (2)

Publication Number Publication Date
JP2014190807A true JP2014190807A (ja) 2014-10-06
JP2014190807A5 JP2014190807A5 (https=) 2015-07-16

Family

ID=51837199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013066063A Pending JP2014190807A (ja) 2013-03-27 2013-03-27 加速度センサ

Country Status (1)

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JP (1) JP2014190807A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109444467A (zh) * 2018-12-29 2019-03-08 深迪半导体(上海)有限公司 一种共享质量块的三轴电容式加速度计

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189716A (ja) * 1995-11-07 1997-07-22 Temic Telefunken Microelectron Gmbh 超小型機械的加速度センサ
JP2010038903A (ja) * 2008-07-31 2010-02-18 Honeywell Internatl Inc 閉ループ線形駆動加速度計を用いて面外線形加速度を検出するためのシステムおよび方法
JP2012154919A (ja) * 2011-01-24 2012-08-16 Freescale Semiconductor Inc デュアルプルーフマスを有するｍｅｍｓセンサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189716A (ja) * 1995-11-07 1997-07-22 Temic Telefunken Microelectron Gmbh 超小型機械的加速度センサ
JP2010038903A (ja) * 2008-07-31 2010-02-18 Honeywell Internatl Inc 閉ループ線形駆動加速度計を用いて面外線形加速度を検出するためのシステムおよび方法
JP2012154919A (ja) * 2011-01-24 2012-08-16 Freescale Semiconductor Inc デュアルプルーフマスを有するｍｅｍｓセンサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109444467A (zh) * 2018-12-29 2019-03-08 深迪半导体(上海)有限公司 一种共享质量块的三轴电容式加速度计
CN109444467B (zh) * 2018-12-29 2021-07-06 深迪半导体(绍兴)有限公司 一种共享质量块的三轴电容式加速度计

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