JP2014190807A5 - - Google Patents
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- Publication number
- JP2014190807A5 JP2014190807A5 JP2013066063A JP2013066063A JP2014190807A5 JP 2014190807 A5 JP2014190807 A5 JP 2014190807A5 JP 2013066063 A JP2013066063 A JP 2013066063A JP 2013066063 A JP2013066063 A JP 2013066063A JP 2014190807 A5 JP2014190807 A5 JP 2014190807A5
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- torsion beam
- lower electrodes
- acceleration
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000001133 acceleration Effects 0.000 claims 6
- 238000001514 detection method Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013066063A JP2014190807A (ja) | 2013-03-27 | 2013-03-27 | 加速度センサ |
| PCT/JP2014/001697 WO2014156119A1 (ja) | 2013-03-27 | 2014-03-25 | 物理量センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013066063A JP2014190807A (ja) | 2013-03-27 | 2013-03-27 | 加速度センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014190807A JP2014190807A (ja) | 2014-10-06 |
| JP2014190807A5 true JP2014190807A5 (https=) | 2015-07-16 |
Family
ID=51837199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013066063A Pending JP2014190807A (ja) | 2013-03-27 | 2013-03-27 | 加速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014190807A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444467B (zh) * | 2018-12-29 | 2021-07-06 | 深迪半导体(绍兴)有限公司 | 一种共享质量块的三轴电容式加速度计 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19541388A1 (de) * | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
| US8171793B2 (en) * | 2008-07-31 | 2012-05-08 | Honeywell International Inc. | Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer |
| US8539836B2 (en) * | 2011-01-24 | 2013-09-24 | Freescale Semiconductor, Inc. | MEMS sensor with dual proof masses |
-
2013
- 2013-03-27 JP JP2013066063A patent/JP2014190807A/ja active Pending
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