JP2014160769A - Sheet sticking device and sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking device which prevents the deterioration of the processing capacity per unit time, and to provide a sticking method.SOLUTION: A sheet sticking device 1 comprises: delivery means 2 of delivering a rolled material RS with an adhesive sheet AS bonded temporarily on a strip of peeling sheet RL; peeling means 3 of peeling the adhesive sheet AS from the peeling sheet RL; sticking means 4 of pressing and sticking the adhesive sheet AS peeled from the peeling sheet RL to an adherend WF; collecting means 5 of collecting the peeling sheet RL from which the adhesive sheet AS is peeled in the peeling means 3; and storing means 6 of storing the peeling sheet RL before collected by the collection means 5.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.

2. Description of the Related Art Conventionally, a sheet pasting apparatus for pasting an adhesive sheet on a semiconductor wafer (hereinafter sometimes simply referred to as a wafer) in a semiconductor manufacturing process is known (see, for example, Patent Document 1).
The sheet sticking apparatus described in Patent Document 1 cuts a belt-like raw adhesive sheet attached to a wafer with a sticking roller along the outer shape of the wafer with a cutter blade, and the raw adhesive sheet winding unit (collecting means) It is configured to wind up and collect unnecessary portions.

JP 2009-158879 A

  However, in the conventional apparatus as described in Patent Document 1, when the recovery means is full of the recovered material and the recovered material cannot be recovered, the operation of the apparatus must be temporarily stopped in order to remove the recovered material from the apparatus. In other words, there is a disadvantage that the processing capacity per unit time is lowered.

  The objective of this invention is providing the sheet sticking apparatus and sticking method which can prevent that the processing capacity per unit time falls.

  The sheet sticking apparatus of the present invention includes a feeding means for feeding out a raw material temporarily attached to a strip-shaped release sheet, a peeling means for peeling the adhesive sheet from the release sheet, and an adhesive peeled from the release sheet Affixing means for pressing and adhering the sheet to the adherend, a recovery means for recovering the release sheet from which the adhesive sheet has been released by the release means, and a release sheet before being recovered by the recovery means can be accumulated And storage means.

  The sheet sticking device of the present invention preferably includes a cutting means for cutting the release sheet.

  The sheet sticking method of the present invention includes: a step of feeding an original sheet temporarily attached to a strip-shaped release sheet; a step of peeling the adhesive sheet from the release sheet; and an adhesive sheet peeled from the release sheet. It is characterized by performing a step of pressing and adhering to an adherend, a step of collecting the release sheet from which the adhesive sheet has been peeled, and a step of accumulating the release sheet before being collected.

  According to the present invention as described above, by providing the storage means, it is not necessary to temporarily stop the operation of the apparatus when removing the collected material from the apparatus, thereby preventing the processing capacity per unit time from being lowered. can do.

  In the present invention, if the cutting means is provided, the collected material collected by the collecting means can be separated from the release sheet before the collection by the same means, so that the collected material can be easily detached from the collecting means.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
Note that the X axis, the Y axis, and the Z axis in this embodiment are orthogonal to each other, the X axis and the Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the X-axis arrow direction, “Right” is the opposite direction, “Front” is the front direction orthogonal to the Y-axis paper surface, and “Back” is the opposite direction.

  In FIG. 1, a sheet sticking apparatus 1 includes a feeding means 2 for feeding out a raw fabric RS in which an adhesive sheet AS having an adhesive layer AD on one surface of a base sheet BS is temporarily attached to a strip-like release sheet RL; A peeling plate 3 as peeling means for peeling the adhesive sheet AS from the sheet RL, and a pressing roller 4 as sticking means for pressing and sticking the adhesive sheet AS peeled from the peeling sheet RL to the wafer WF as an adherend. The recovery means 5 for recovering the release sheet RL from which the adhesive sheet AS has been released by the release plate 3, the storage means 6 for storing the release sheet RL before being recovered by the recovery means 5, and the recovery means 5 A table 92 that supports the wafer WF, and includes a cutting means 7 that cuts the release sheet RL and a detection means 8 that can detect that a predetermined amount of the release sheet RL has been wound up by the collecting means 5. Fine the table 92 relative to the pressing roller 4 is disposed in the vicinity of the support means 9 comprising a linear motor 91 as a driving device for relatively moving.

  The feeding means 2 peels between a support roller 21 that supports the raw fabric RS so that it can be fed, a guide roller 22 that guides the raw fabric RS, and a driving roller 24 that is driven by a rotation motor 23 as a drive device. And a pinch roller 25 that sandwiches the sheet RL.

  The collection means 5 is provided with a collection roller 52 that is driven by a rotation motor 51 as a drive device and collects the release sheet RL as a collection RB.

  The storage means 6 is provided on the opposite side of the first holding member 63 with the release sheet RL sandwiched between the first holding member 63 supported by the output shaft 62 of the linear motor 61 as the driving device, and serves as the driving device. And a second holding member 66 supported by the output shaft 65 of the linear motion motor 64.

  The cutting means 7 includes a cutting blade 73 supported by a slider 72 of a linear motor 71 as a driving device.

  The detection means 8 includes a sensor 81 that can detect that the outer diameter of the recovered material RB has reached a predetermined value. Examples of the sensor 81 include non-contact sensors such as area sensors and line sensors, contact sensors such as limit switches, and imaging devices such as cameras.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, the raw fabric RS is set as shown by a solid line in FIG. Next, when the detection means such as an optical sensor or an imaging means (not shown) detects that the wafer WF transported by the support means 9 has reached a predetermined position, the feeding means 2 drives the rotation motor 23, and the wafer While the raw fabric RS is fed out at substantially the same speed as the moving speed of the WF, the collecting means 5 drives the rotation motor 51 and collects the release sheet RL by the recovery roller 52 while applying a predetermined tension to the release sheet RL. As a result, the adhesive sheet AS is peeled off from the release sheet RL by the release plate 3, the adhesive sheet AS is pressed against the wafer WF by the pressing roller 4, and the recovered material RB is formed on the outer periphery of the recovery roller 52. The
Then, the wafer WF with the adhesive sheet AS attached is transferred to the next step by a transfer means (not shown), and thereafter the same operation as described above is repeated.

  Here, the same operation as described above is repeated, and when the detecting means 8 detects that the outer diameter of the collected material RB has reached a predetermined value, the accumulating means 6 drives the linear motors 61 and 64, and FIG. As shown by a middle two-dot chain line, the release sheet RL is sandwiched between the first and second holding members 63 and 66. Next, the cutting means 7 drives the linear motor 71 and moves the cutting blade 73 in the front-rear direction to cut the release sheet RL. Thereby, the collected material RB collected by the collecting roller 52 can be separated from the release sheet RL before the collection by the collecting roller 52, and the collected material RB can be detached from the collecting roller 52. In addition, when a cover (not shown) is provided, the cover may be controlled so that it cannot be opened or closed unless the cutting operation of the release sheet RL by the cutting means 7 is completed. In addition, when an area sensor is provided, it may be controlled so that the cutting operation of the release sheet RL by the cutting unit 7 is stopped or the cutting operation is not performed when the area sensor detects a detection object.

  Here, while the recovered material RB is being removed, the release sheet RL continues to be fed toward the recovery roller 52. However, as indicated by a two-dot chain line in FIG. 1, the first holding member 63 and the second holding member 66 are used. Since the release sheet RL is held between the driving roller 24 and the first and second holding members 63 and 66, the release sheet RL can be loosened and accumulated.

  When the collected material RB is completely removed, the operator drives the linear motion motors 61 and 64 via input means such as a switch and an optical sensor (not shown) to hold the release sheet RL by the first and second holding members 63 and 66. To release. Thereafter, when the operator sets the leading end portion of the release sheet RL on the recovery roller 52, the recovery means 5 drives the rotation motor 51, and the release sheet RL is again moved by the recovery roller 52 until a predetermined tension is applied to the release sheet RL. Wind up. When a cover or an area sensor (not shown) is provided, the collection of the release sheet RL by the collection unit 5 is controlled to be performed after the cover is closed, or after the area sensor no longer detects the detected object. It is better to control.

  According to the present embodiment as described above, the storage means 6 is provided, so that it is not necessary to temporarily stop the operation of the sheet sticking device 1 when the collected material RB is removed from the sheet sticking device 1, and the unit time It is possible to prevent the per unit processing capacity from being lowered.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, instead of the peeling plate 3, the peeling means may be constituted by a roller.
Further, instead of the pressing roller 4, a pressing member made of a blade material, rubber, resin, sponge, or the like may be employed, or a configuration of pressing by air spraying may be employed.
Further, the sticking means may be provided with a driving device for applying a pressing force to the adhesive sheet AS in the pressing roller 4, or provided with a detecting means such as a load cell or a pressure gauge for detecting the pressing force applied to the adhesive sheet AS. Alternatively, a cutting means for cutting the adhesive sheet AS along the outer shape of the wafer WF after attaching the adhesive sheet AS larger than the outer shape of the wafer WF may be provided.

  Further, the collecting unit 5 can adopt any configuration capable of collecting the release sheet RL. For example, the collection unit 5 collects the release sheet RL at random without winding it up, or chops and collects it with a shredder or the like. A configuration may be adopted.

Further, the accumulation means 6 determines that the release sheet RL has been wound up by a predetermined amount when the rotation motor 23 reaches a predetermined number of rotations after starting the collection of the release sheet RL, and removes the release sheet RL. You may make it accumulate | store.
In addition, the storage unit 6 stops driving the rotation motor 51 instead of sandwiching the release sheet RL between the first and second holding members 63 and 66, so that the drive unit 24 and the collection roller 52 are stopped. The release sheet RL may be loosened to accumulate the release sheet RL.
Further, one of the first and second holding members 63 and 66 may be fixed without being moved.

  Moreover, the cutting | disconnection means 7 can employ | adopt the arbitrary structures which can cut | disconnect the peeling sheet RL, For example, you may comprise with a laser cutter etc. Further, instead of the cutting means 7, it may be configured to cut manually. Further, the release sheet RL may be cut after all the adhesive sheets AS of the raw fabric RS are pasted or after the adhesive sheets AS are pasted on all the wafers WF.

  Further, the type and material of the adherend and the adhesive sheet AS in the present invention are not particularly limited. For example, the adhesive sheet AS has an intermediate layer between the base sheet BS and the adhesive layer AD. The base sheet BS has a cover layer on the upper surface, such as three or more layers, and may be a so-called double-sided adhesive sheet that can peel the base sheet BS from the adhesive layer AD. Such a double-sided adhesive sheet may have a single layer or a multilayer intermediate layer, or may be a single layer or a multilayer without an intermediate layer. Further, the adherend may be a semiconductor wafer, and the adhesive sheet AS may be a protective sheet, a dicing tape, a die attach film, or the like. At this time, the semiconductor wafer can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, etc., and the adhesive sheet AS to be attached to such a semiconductor wafer is not limited to them, and any use such as any sheet, film, tape, An adhesive sheet having a shape can be applied. Further, the adherend may be a substrate of an optical disk, and the adhesive sheet AS may have a resin layer constituting a recording layer. As described above, as the adherend, not only other adherends such as a glass plate, a steel plate, earthenware, a wooden plate, or a resin plate, but also members and articles in any form can be targeted.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 Sheet sticking apparatus 2 Feeding means 3 Peeling plate (peeling means)
4 Pressing roller (sticking means)
5 Collecting means 6 Accumulating means 7 Cutting means AS Adhesive sheet RF Release sheet RS Original fabric WF Wafer (Substrate)

Claims (3)

A feeding means for feeding out the raw material temporarily attached to the strip-shaped release sheet by the adhesive sheet;
Peeling means for peeling the adhesive sheet from the release sheet;
A sticking means for pressing and sticking the adhesive sheet peeled off from the release sheet to the adherend;
A recovery means for recovering the release sheet from which the adhesive sheet has been released by the release means;
A sheet sticking apparatus comprising: a storing unit capable of storing a release sheet before being collected by the collecting unit.   The sheet sticking apparatus according to claim 1, further comprising a cutting unit that cuts the release sheet. A step of feeding the original fabric temporarily attached to the strip-shaped release sheet,
Peeling the adhesive sheet from the release sheet;
A process of pressing and adhering the adhesive sheet peeled from the release sheet to the adherend,
Collecting the release sheet from which the adhesive sheet has been released; and
And a step of accumulating the release sheet before being collected.

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