JP2014119412A - 多軸物理量検出装置、多軸物理量検出装置の製造方法、電子機器および移動体 - Google Patents

多軸物理量検出装置、多軸物理量検出装置の製造方法、電子機器および移動体 Download PDF

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Publication number
JP2014119412A
JP2014119412A JP2012276553A JP2012276553A JP2014119412A JP 2014119412 A JP2014119412 A JP 2014119412A JP 2012276553 A JP2012276553 A JP 2012276553A JP 2012276553 A JP2012276553 A JP 2012276553A JP 2014119412 A JP2014119412 A JP 2014119412A
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physical quantity
quantity detection
axis
detection sensor
detection device
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Japanese (ja)
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JP2014119412A5 (enrdf_load_stackoverflow
Inventor
Jun Watanabe
潤 渡辺
Takahiro Kameda
高弘 亀田
Kazuyuki Nakasendo
和之 中仙道
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Seiko Epson Corp
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Seiko Epson Corp
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JP2012276553A 2012-12-19 2012-12-19 多軸物理量検出装置、多軸物理量検出装置の製造方法、電子機器および移動体 Withdrawn JP2014119412A (ja)

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JP2014119412A true JP2014119412A (ja) 2014-06-30
JP2014119412A5 JP2014119412A5 (enrdf_load_stackoverflow) 2015-12-17

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017526919A (ja) * 2014-08-26 2017-09-14 ザ ユニバーシティー コート オブ ザ ユニバーシティー オブ グラスゴー 加速度の測定
JP2018132311A (ja) * 2017-02-13 2018-08-23 セイコーエプソン株式会社 物理量検出装置および電子機器
JP2018132349A (ja) * 2017-02-14 2018-08-23 セイコーエプソン株式会社 物理量検出器および物理量検出装置
US11073532B2 (en) 2018-03-09 2021-07-27 Seiko Epson Corporation Sensor module, inclinometer, and structural health monitoring

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012316A (en) * 1989-03-28 1991-04-30 Cardiac Pacemakers, Inc. Multiaxial transducer interconnection apparatus
JP2007040766A (ja) * 2005-08-01 2007-02-15 Toyota Motor Corp センサユニット
US7291023B1 (en) * 2006-11-21 2007-11-06 Autoliv Asp, Inc. Electric vehicle motion sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012316A (en) * 1989-03-28 1991-04-30 Cardiac Pacemakers, Inc. Multiaxial transducer interconnection apparatus
JP2007040766A (ja) * 2005-08-01 2007-02-15 Toyota Motor Corp センサユニット
US7291023B1 (en) * 2006-11-21 2007-11-06 Autoliv Asp, Inc. Electric vehicle motion sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017526919A (ja) * 2014-08-26 2017-09-14 ザ ユニバーシティー コート オブ ザ ユニバーシティー オブ グラスゴー 加速度の測定
US10802042B2 (en) 2014-08-26 2020-10-13 The University Court Of The University Of Glasgow Measurement of acceleration
JP2018132311A (ja) * 2017-02-13 2018-08-23 セイコーエプソン株式会社 物理量検出装置および電子機器
US10718641B2 (en) 2017-02-13 2020-07-21 Seiko Epson Corporation Physical quantity measurement device and electronic apparatus
JP2018132349A (ja) * 2017-02-14 2018-08-23 セイコーエプソン株式会社 物理量検出器および物理量検出装置
US11073532B2 (en) 2018-03-09 2021-07-27 Seiko Epson Corporation Sensor module, inclinometer, and structural health monitoring

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