JP2014119412A - Multi-axis physical quantity detection apparatus, manufacturing method of multi-axis physical quantity detection apparatus, electronic apparatus and moving body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a physical quantity detection apparatus with reduced thermal effects in a physical quantity detection sensor.SOLUTION: A multi-axis physical quantity detection apparatus 100 comprises: a metal block (holding part aggregate) 30; a physical quantity detection sensor 40 provided on each of a plurality of holding parts of the metal block 30; and side wall parts 31a, 32a, 33a, 34a arranged so as to intersect with a bottom surface part (block surfaces 30a, 30b, 30c) composing the plurality of holding parts and the corresponding bottom surface part. The physical quantity detection sensors 40 are provided in contact with the corresponding bottom surface part (block surfaces 30a, 30b, 30c) and the side wall parts 31a, 32a, 33a, 34a.

Description

  The present invention relates to a multi-axis physical quantity detection device capable of maintaining high accuracy, a method for manufacturing the multi-axis physical quantity detection device, and an electronic apparatus and a moving body including the multi-axis physical quantity detection device.

  Conventionally, as a multi-axis physical quantity detection device, for example, an inertial sensor unit as disclosed in Patent Document 1 is known. In this inertial sensor unit, three sensor boards each having an acceleration sensor and an angular velocity sensor mounted on the same board are attached to a sensor housing, and these three sensor boards are arranged so that they are orthogonal to each other. Located in the housing. That is, the inertial sensor unit is configured to be attached to each sensor substrate in a pair so that the detection axes of the angular velocity sensor and the acceleration sensor are in the same state.

  Therefore, when the angular velocity sensor is tilted, the tilt of the sensor substrate can be recognized as the tilt of the angular velocity sensor by the output of the acceleration sensor provided on the same sensor substrate, and the output of the angular velocity sensor due to the tilt is easy It is possible to correct. Further, the inertial sensor unit is attached to the sensor housing so that the sensor substrates are orthogonal to each other, so that the angular velocity and acceleration in three directions can be acquired at one time, and can function as a multi-axis physical quantity detection device.

JP 2005-106749 A

  However, in the conventional technique, when the temperature change occurs in the inertial sensor unit, the temperature of the acceleration sensor and the angular velocity sensor may be different for each sensor substrate and become non-uniform. Therefore, there is a difference in detection accuracy for each sensor substrate, that is, detection accuracy in each of the three directions, and there is a problem that the function as the multi-axis physical quantity detection device is deteriorated.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples or forms.

  Application Example 1 A multi-axis physical quantity detection device according to this application example includes a plurality of physical quantity detection sensors, and a holding unit aggregate having a plurality of holding units that hold the physical quantity detection sensors. The holding portion has a bottom surface portion and a side wall portion arranged to intersect the bottom surface portion, and the physical quantity detection sensor is in contact with the bottom surface portion and the side wall portion. To do.

  According to the multi-axis physical quantity detection device of this application example, the holding unit aggregate includes a plurality of holding units in which the physical quantity detection sensors are respectively arranged. The multi-axis physical quantity detection device functions as a so-called multi-axis sensor when physical quantity detection sensors arranged in a plurality of holding units respectively detect physical quantities in the holding units. And the some holding | maintenance part of a holding | maintenance part aggregate | assembly has a bottom face part and the side wall part arrange | positioned in the form which cross | intersects with respect to this bottom face part. The physical quantity detection sensor disposed in the holding unit having such a configuration is connected so as to contact the bottom surface and the side wall. That is, the physical quantity detection sensor in the multi-axis physical quantity detection device can set a wider contact area between the holding unit assembly and the physical quantity detection sensor than the conventional structure in which only the bottom surface part is connected. As a result, each physical quantity detection sensor has improved thermal conductivity with the holding part assembly.For example, even if a temperature change occurs in any of the physical quantity detection sensors, It is the structure which can suppress the said temperature change by heat conduction in between. That is, in the multi-axis physical quantity detection device, each physical quantity detection sensor can maintain a substantially uniform temperature and maintain high accuracy. Furthermore, since the physical quantity detection sensor is in contact with the side wall portion in addition to the contact with the bottom surface portion of the holding portion, for example, even if the configuration is adhesively fixed to the holding portion assembly, It becomes difficult to peel off and the impact resistance can be improved.

  Application Example 2 In the multi-axis physical quantity detection device according to the application example described above, it is preferable that the plurality of holding portions have a convex portion, and a side surface of the convex portion is the side wall portion.

  According to this configuration, the holding portion in which the physical quantity detection sensor is arranged is formed so that the convex portion protrudes from the surface serving as the bottom surface portion, and the side surface of the convex portion intersects with the bottom surface portion. Such a convex portion, which is a side wall portion, can be easily formed by a form that is formed integrally with the holding part assembly or a form that is formed separately and fixed to the holding part assembly. In addition to facilitating heat conduction between the physical quantity detection sensor and the holding part assembly, it plays an effective role in positioning and fixing the physical quantity detection sensor to the holding part assembly.

  Application Example 3 In the multi-axis physical quantity detection device according to the application example described above, the plurality of holding portions have a recess, a bottom surface of the recess is the bottom surface portion, and an inner surface of the recess is the side wall portion. It is preferable that there is.

  According to this configuration, the holding portion in which the physical quantity detection sensor is arranged has the concave portion, and the physical quantity detection sensor is arranged in the concave portion. In this case, the bottom surface of the concave portion is the bottom surface portion of the holding unit assembly, and the inner side surface (inner side surface) of the concave portion is a side wall portion disposed so as to intersect the bottom surface portion. A form in which the concave part is formed integrally with the holding part aggregate, a form in which the concave part is formed separately and fixed to the holding part aggregate, and the like can be considered. The physical quantity detection sensor is a form in which the physical quantity detection sensor is housed in the recess and is in contact with a wide area, and the heat conduction with the holding unit assembly is increased so that each physical quantity detection sensor is in a more uniform temperature state. It is possible to hold it.

  Application Example 4 In the multi-axis physical quantity detection device according to the application example described above, it is preferable that the physical quantity detection sensor has a lid body containing metal, and the lid body and the bottom surface portion are connected.

  According to this configuration, the physical quantity detection sensor has a lid formed of a metal having a high thermal conductivity or the like, and the lid is connected to the bottom surface of the holding unit assembly. . Thereby, the multi-axis physical quantity detection device has a configuration in which the thermal conductivity between the physical quantity detection sensor and the holding unit assembly is further improved.

  Application Example 5 In the multi-axis physical quantity detection device according to the application example described above, it is preferable that the holding unit assembly includes a metal having a thermal conductivity of 150 W / mK or more.

  According to this configuration, since the holding unit aggregate has a thermal conductivity of 150 W / mK or more, the thermal conductivity between each physical quantity detection sensor and the holding unit assembly is improved. Thereby, in the multi-axis physical quantity detection device, the heat transfer between the physical quantity detection sensor and the holding unit assembly is quickly performed, and the temperature of each physical quantity detection sensor is effectively equalized. Examples of the corresponding metal include aluminum, copper, tungsten, silver, and the like.

  Application Example 6 A method for manufacturing a multi-axis physical quantity detection device according to this application example includes a bottom surface portion and a plurality of holding portions having sidewall portions arranged to intersect the bottom surface portion, and includes a metal. A preparing step of preparing a holding unit assembly and a plurality of physical quantity detection sensors having a lid containing metal; and an arrangement step of arranging the plurality of physical quantity detection sensors so that the lid side faces the bottom surface part. A connection step of connecting the plurality of physical quantity detection sensors so as to contact the bottom surface portion and the side wall portion.

  According to the manufacturing method of the multi-axis physical quantity detection device of this application example, the holding unit aggregate prepared in the preparation step includes a plurality of holding units in which the physical quantity detection sensors are respectively arranged. The multi-axis physical quantity detection device functions as a so-called multi-axis sensor when physical quantity detection sensors arranged in a plurality of holding units respectively detect physical quantities in the holding units. The physical quantity detection sensor has a lid formed of metal or the like. And the some holding | maintenance part of a holding | maintenance part aggregate | assembly has a bottom face part and the side wall part arrange | positioned in the form which cross | intersects with respect to this bottom face part. Next, in the arrangement step, the physical quantity detection sensor is arranged to face the lid with the lid facing the bottom surface of the holding unit assembly. At this time, the bottom surface portion and the side wall portion function as positioning when the physical quantity detection sensor is disposed. On the other hand, when there is no positioning such as the bottom surface portion and the side wall portion, it is necessary to widen the holding portion of the holding portion assembly in consideration of positional deviation. Accordingly, the holding portion assembly having the bottom surface portion and the side wall portion can be made smaller than the holding portion assembly having no bottom surface portion and the side wall portion. In addition, the holding unit assembly can be simply positioned in the arrangement of the physical quantity detection sensors, and the arrangement man-hours can be reduced. Next, after the physical quantity detection sensor is arranged, in the connection step, the physical quantity detection sensor is fixed in a state of being connected to the bottom surface portion and the side wall portion of the holding unit assembly. This fixing is performed by mechanical fixing with an adhesive or a screw. As a result, the physical quantity detection sensor in the multi-axis physical quantity detection device can set a wider contact area between the holding part assembly and the physical quantity detection sensor than the conventional structure in which only the bottom part is connected. The thermal conductivity between the body is improved. Further, in the multi-axis physical quantity detection device, for example, even if a temperature change occurs in any of the physical quantity detection sensors, the temperature change can be suppressed by heat conduction with the holding unit assembly. Is possible. That is, in the multi-axis physical quantity detection device, each physical quantity detection sensor can maintain a substantially uniform temperature and maintain high accuracy. Furthermore, since the physical quantity detection sensor is in contact with the side wall portion in addition to the contact with the bottom surface portion of the holding portion assembly, for example, even when the holding portion assembly is bonded and fixed to the holding portion assembly, etc. It becomes difficult to peel from the body, and the impact resistance can be improved.

  Application Example 7 An electronic apparatus according to this application example includes the multi-axis physical quantity detection device described in the application example.

  According to the electronic apparatus of this application example, the multi-axis physical quantity detection device of the above application example is mounted, and this multi-axis physical quantity detection device improves the thermal conductivity between the holding unit assembly and the physical quantity detection sensor. As a result, the temperature of each physical quantity detection sensor becomes substantially uniform, and high accuracy can be maintained. An electronic device in which such a multi-axis physical quantity detection device is mounted has improved characteristics and reliability as a device.

  Application Example 8 A moving object according to this application example includes the multi-axis physical quantity detection device described in the application example.

  According to the moving body of this application example, the multi-axis physical quantity detection device of the above application example is mounted, and this multi-axis physical quantity detection device improves the thermal conductivity between the holding unit assembly and the physical quantity detection sensor. As a result, the temperature of each physical quantity detection sensor becomes substantially uniform, and high accuracy can be maintained. Such a moving body can surely grasp the moving state, posture, and the like by the detection function of the multi-axis physical quantity detection device, and can move safely and stably.

Sectional drawing which shows the structure of the multi-axis physical quantity detection apparatus which concerns on Embodiment 1 of this invention. 1 is an exploded perspective view illustrating a configuration of a multi-axis physical quantity detection device according to Embodiment 1. FIG. (A) The top view which shows the structure of a physical quantity detection sensor, (b) Sectional drawing which shows the structure of a physical quantity detection sensor. (A) (b) Sectional drawing which shows operation | movement of a physical quantity detection sensor. The flowchart which shows the manufacturing method of a multi-axis physical quantity detection apparatus. Sectional drawing which shows the structure of the multi-axis physical quantity detection apparatus which concerns on Embodiment 2 of this invention. FIG. 5 is an exploded perspective view illustrating a configuration of a multi-axis physical quantity detection device according to a second embodiment. (A) Perspective view showing a video camera equipped with a multi-axis physical quantity detection device, (b) Perspective view showing a mobile phone equipped with the multi-axis physical quantity detection device, (c) Equipped with a multi-axis physical quantity detection device The perspective view which shows the moving body which is doing.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred configurations of the multi-axis physical quantity detection device, the multi-axis physical quantity detection device manufacturing method, the electronic apparatus, and the moving body of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a cross-sectional view showing a configuration of a multi-axis physical quantity detection device according to Embodiment 1 of the present invention, and FIG. 2 is an exploded perspective view showing the configuration of the multi-axis physical quantity detection device. In FIG. 2, the shape and arrangement of the component parts are mainly shown, and the device cover 60 and wiring are omitted. In each figure, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other.
(Embodiment 1)

  As shown in FIGS. 1 and 2, the multi-axis physical quantity detection device 100 includes a metal base plate 10 that is in the shape of a square plate and is parallel to the XY plane, and Z (+) of the metal base plate 10. A hexahedral metal block (holding unit assembly) 30 disposed on the receiving surface 10a which is the side surface, and a block surface 30a and a block located on the upper surface of the metal block 30 opposite to the metal base plate 10 Oscillation for driving the physical quantity detection sensor 40 provided in each of the physical quantity detection sensor 40 and the physical quantity detection sensor 40 respectively disposed on the three faces of the block face 30b and the block face 30c located on the side face adjacent to the face 30a. Circuit board 50 and device cover 6 provided on metal base plate 10 and covering metal block 30, physical quantity detection sensor 40, and oscillation circuit board 50 It has a, and. The physical quantity detection sensor 40 includes a package base 411 and a lid (lid body) 412 which will be described in detail with reference to FIG. 3, and an oscillation circuit board 50 is disposed on the package base 411 side.

  Further, on the block surface 30a on which the physical quantity detection sensor 40 is arranged, a convex portion 31 provided along the Y axis at the end in the X (+) axis direction and protruding in the Z (+) axis direction, and Y A convex portion 32 provided along the X axis and projecting in the Z (+) axial direction is formed at the (−) axial end portion. Similarly, the block surface 30b is formed with a convex portion 33 provided along the Z-axis at the end in the X (+) axis direction and protruding in the Y (+) axis direction. Is formed at the end in the Y (−) axis direction along the Z axis and protrudes in the X (−) axis direction. In this case, the metal block 30 is integrally formed including the convex portions 31, 32, 33, and 34.

  And the convex part 31 has the side wall part 31a orthogonal to the block surface 30a, and the convex part 32 has the side wall part 32a orthogonal to the block surface 30a. The physical quantity detection sensor 40 disposed on the block surface 30a is fixed in a state where the lid 412 is connected to the block surface 30a, the side wall portion 31a, and the side wall portion 32a. Similarly, the convex part 33 has the side wall part 33a orthogonal to the block surface 30b, and the physical quantity detection sensor 40 arrange | positioned at the block surface 30b has the lid 412 of the block surface 30b, the side wall part 33a, and the metal base plate 10. It is fixed in a state connected to the receiving surface 10a. The convex portion 34 has a side wall portion 34 a orthogonal to the block surface 30 c, and the physical quantity detection sensor 40 arranged on the block surface 30 c has a lid 412 on the block surface 30 c, the side wall portion 34 a, and the receiving surface 10 a of the metal base plate 10. It is fixed in a connected state. In this case, the receiving surface 10a of the metal base plate 10 fulfills a function according to the side walls 31a, 32a, 33a, 34a. In addition, the metal block 30 and the physical quantity detection sensor 40 in the multi-axis physical quantity detection device 100 can be fixed by a chemical method using an adhesive or the like, a mechanical method using a screw, or the like. Here, an adhesive is used. .

  In the multi-axis physical quantity detection device 100 having such a configuration, the block surface 30a, the block surface 30b, and the block surface 30c, and the convex portion 31, the convex portion 32, the convex portion 33, and the convex portion 34 correspond to a holding portion. Further, the block surfaces 30a, 30b, and 30c correspond to the bottom surface portion on which the physical quantity detection sensor 40 is disposed, and the side wall portions 31a, 32a, 33a, and 34a and the receiving surface 10a of the metal base plate 10 have a corresponding bottom surface portion. It is the structure arrange | positioned so that it may cross. The metal block 30 and the metal base plate 10 preferably have good heat transfer with each of the physical quantity detection sensors 40, and the multi-axis physical quantity detection device 100 is aluminum (Al) which is lightweight and easy to process. Is used.

  Next, the physical quantity detection sensor 40 provided in the multi-axis physical quantity detection device 100 will be described. FIG. 3A is a plan view showing the configuration of the physical quantity detection sensor, and FIG. 3B is a cross-sectional view showing the configuration of the physical quantity detection sensor. FIG. 3B shows a cross section taken along the line II in FIG. In FIG. 3, x-axis, y-axis, and z-axis different from the coordinate axes used in FIGS. 1 and 2 are illustrated as three axes orthogonal to each other.

  The physical quantity detection sensor 40 includes a package 41, an element base body 42, and a physical quantity detection element 43. First, the package 41 includes a package base 411 and a lid (metal lid) 412. The package base 411 has a flat plate shape, is provided along the x-axis direction at the end of the flat plate, and a step 413 for fixing the element base body 42, and a hole penetrating the flat plate and a hole are blocked. And an external terminal 460 for connecting to the oscillation circuit substrate 50 is formed on the surface opposite to the stepped portion 413. The package base 411 is formed of an aluminum oxide sintered body obtained by firing a ceramic green sheet. Aluminum oxide sintered bodies are excellent for packages, but are difficult to process. However, in this case, since the package base 411 has a flat plate shape, it can be easily formed. Note that the package base 411 can also be formed using a material such as quartz, glass, or silicon.

  The lid 412 has a housing portion 417 formed in a concave shape on the inner side, and is arranged so as to cover the element base body 42 fixed to the step portion 413 of the package base 411. The lid 412 can be made of the same material as the package base 411, or a metal such as Kovar or stainless steel. Here, since the lid 412 is preferably formed of a metal having good thermal conductivity, Kovar is used. ing. The lid 412 is bonded to the package base 411 via the seam ring 416. When the package base 411 and the lid 412 are bonded to each other, the housing portion 417 can be sealed in a reduced-pressure airtight state.

  In such a physical quantity detection sensor 40, the housing portion 417 is sealed after the package base 411 and the lid 412 are joined, the air in the housing portion 417 is removed from the hole of the sealing portion 414 and the pressure is reduced. It is performed by a method of closing with a material (sealing material). As a result, the element base body 42 and the physical quantity detection element 43 are depressurized and sealed in the airtight container 417. Note that the inside of the housing portion 417 may be filled with an inert gas such as nitrogen, helium, or argon.

  Next, the element base body 42 has a plate shape formed by etching or the like from a crystal plate, and extends in the x-axis direction and is fixed to the step portion 413 of the package base 411 with an adhesive 451. A joint portion 422 extending from the fixed portion 421 in the y-axis direction, a movable portion 423 extending from the joint portion 422 in the opposite direction to the fixed portion 421, and movable from one end of the fixed portion 421 A frame portion 424 extending to the other end of the fixed portion 421 along the outer edge of the portion 423, a physical quantity detection element 43 that is stretched from the fixed portion 421 to the movable portion 423 and fixed, and provided in the movable portion 423. Mass part 425 (425a, 425b, 425c, 425d).

  The movable portion 423 is surrounded by the frame portion 424 and the fixed portion 421, and is connected to the fixed portion 421 via the joint portion 422 and is cantilevered. The joint portion 422 is provided between the fixed portion 421 and the movable portion 423, and connects the fixed portion 421 and the movable portion 423. The joint portion 422 is formed thinner than the fixed portion 421 and the movable portion 423, and functions as an intermediate hinge when the movable portion 423 is displaced (rotated) with respect to the fixed portion 421. The mass part 425 (425a, 425b, 425c, 425d) provided in the movable part 423 is rectangular in a plan view as viewed from the z-axis direction, and the mass parts 425a, 425b are the lid 412 of the movable part 423. It is arranged on the side and is fixed by a joint 452 at a symmetrical position with the physical quantity detection element 43 as the center. On the other hand, the mass portions 425c and 425d are disposed on the package base 411 side of the movable portion 423, and are fixed by the joint portions 452 so as to overlap the mass portions 425a and 425b, respectively.

  Next, the physical quantity detection element 43 is located between the base 431a fixed to the fixed portion 421 with the adhesive 450, the base 431b fixed to the movable portion 423 with the adhesive 450, and the base 431a and the base 431b. And a vibrating beam portion 432 (432a, 432b) for detecting a physical quantity. In this case, the vibrating beam portion 432 has a prismatic shape, and when a drive signal (AC voltage) is applied to excitation electrodes (not shown) provided in the vibrating beam portions 432a and 432b, x Bending vibration is performed along the axis so as to be separated from or close to each other. The excitation electrode is electrically connected to the external terminal 460 through a wiring (not shown) for applying a drive signal.

  In this case, the physical quantity detection element 43 is formed by patterning a quartz substrate cut out at a predetermined angle from a quartz crystal or the like by a photolithography technique and an etching technique. Furthermore, it is desirable that the physical quantity detection element 43 is made of the same material as the element base body 42 in consideration of reducing the difference in linear expansion coefficient from the element base body 42.

  In the multi-axis physical quantity detection device 100, as shown in FIG. 2, the physical quantity detection sensor 40 connected to the block surface 30a of the metal block 30 is arranged so that the physical quantity detection element 43 is along the X axis, Acceleration of etc. is detected. The physical quantity detection sensor 40 connected to the block surface 30b of the metal block 30 is arranged so that the physical quantity detection element 43 extends along the Z axis, detects acceleration around the X axis, and the like on the block surface 30c of the metal block 30. The physical quantity detection sensor 40 to be connected is arranged so that the physical quantity detection element 43 extends along the Y axis, and detects acceleration around the Z axis. With such an arrangement, the multi-axis physical quantity detection device 100 functions as a multi-axis detection sensor.

  Next, the operation of the physical quantity detection sensor 40 will be described. 4A and 4B are cross-sectional views showing the operation of the physical quantity detection sensor. As shown in FIG. 4A, when an acceleration is applied to the physical quantity detection sensor 40 in the direction of the arrow α1 in the + z direction, for example, a force acts on the movable part 423 in the −z direction, and the movable part 423 The joint portion 422 is displaced in the −z direction with the fulcrum as a fulcrum. As a result, a force in a direction in which the base portion 431a and the base portion 431b are separated from each other along the y-axis is applied to the physical quantity detection sensor 40, and tensile stress is generated in the vibration beam portion 432 of the physical quantity detection element 43. Therefore, the resonance frequency, which is the frequency at which the vibrating beam portion 432 vibrates, increases.

  On the other hand, as shown in FIG. 4B, when an acceleration is applied to the physical quantity detection sensor 40 in the direction of the arrow α2 in the −z direction, for example, a force acts on the movable part 423 in the + z direction, and the movable part 423 is displaced in the + z direction with the joint portion 422 as a fulcrum. Thereby, a force in a direction in which the base portion 431a and the base portion 431b approach each other along the y-axis is applied to the physical quantity detection sensor 40, and a compressive stress is generated in the vibration beam portion 432 of the physical quantity detection element 43. Therefore, the resonance frequency of the vibrating beam portion 432 is lowered.

  The physical quantity detection sensor 40 detects the change in the resonance frequency of the physical quantity detection element 43 as described above. That is, the acceleration applied to the physical quantity detection sensor 40 is derived by converting it into a numerical value determined by a look-up table or the like in accordance with the detected change rate of the resonance frequency.

  The physical quantity detection sensor 40 can also be used as an inclinometer. In the physical quantity detection sensor 40 as an inclinometer, the direction in which the gravitational acceleration is applied to the physical quantity detection sensor 40 changes according to the change in the posture due to the inclination, and tensile stress or compression stress is generated in the vibrating beam portion 432. Then, the resonance frequency of the vibrating beam portion 432 changes, and a change in posture due to the inclination is derived.

In the multi-axis physical quantity detection device 100 described above, the three physical quantity detection sensors 40 are connected to any one of the bottom surfaces (block surfaces 30a, 30b, 30c) of the metal block 30, and the side walls 31a, 32a, 33a. , 34a. In addition, the connection of the metal block 30 to the block surfaces 30a, 30b, and 30c is performed on the side of the lid 412 that is a metal lid body with good heat conduction in the physical quantity detection sensor 40. Accordingly, each physical quantity detection sensor 40 has improved thermal conductivity with the metal block 30 compared to the case where it is connected only to the block surfaces 30a, 30b, and 30c, and any physical quantity detection sensor 40 has a temperature change. Even if this occurs, the temperature change can be reduced by heat conduction between the physical quantity detection sensor 40 and the metal block 30. Accordingly, the multi-axis physical quantity detection device 100 can maintain high accuracy because each of the physical quantity detection sensors 40 maintains a substantially uniform temperature. In addition, since the physical quantity detection sensor 40 is connected to the block surfaces 30a, 30b, and 30c and the side walls 31a, 32a, 33a, and 34a of the metal block 30 and is fixed in a wide area, the impact resistance can be improved. .
(Manufacturing method of multi-axis physical quantity detection device)

  Next, a method for manufacturing the multi-axis physical quantity detection device 100 will be described. FIG. 5 is a flowchart showing a manufacturing method of the multi-axis physical quantity detection device. First, in step S1, a metal block and a physical quantity detection sensor are prepared. In the case of the multi-axis physical quantity detection device 100, a metal block 30 having convex portions 31, 32, 33, and 34 and three physical quantity detection sensors 40 are prepared. Here, the metal base plate 10 is attached to the metal block 30, and the metal block 30 including the metal base plate 10 and the physical quantity detection sensor 40 are separately manufactured in the previous step. In the manufacture of the metal block 30 and the metal base plate 10, the metal used is aluminum, but any metal having a thermal conductivity of 150 W / mK or more can be used. For example, aluminum with a thermal conductivity of about 200 W / mK, copper with a thermal conductivity of about 370 W / mK, tungsten with a thermal conductivity of about 190 W / mK, silver with a thermal conductivity of about 420 W / mK, etc. It is done. This process S1 corresponds to a preparation process. After preparation, the process proceeds to step S2.

  In step S2, an adhesive is applied to the bottom and side walls of the metal block. In this case, the bottom surface portions are the block surface 30a opposite to the surface disposed on the receiving surface 10a of the metal base plate 10 in the metal block 30, and the block surfaces 30b and 30c adjacent to the block surface 30a. And an adhesive agent is apply | coated to each side wall part 31a, 32a, 33a, 34a of convex part 31,32,33,34. Although it does not prescribe | regulate especially as an adhesive agent, the epoxy resin type thermosetting type adhesive agent is used here. The adhesive is preferably applied to the bottom surface portion and the side wall portion from the viewpoint of fixing strength, but may be either the bottom surface portion or the side wall portion. Further, the metal block 30 and the physical quantity detection sensor 40 in the multi-axis physical quantity detection device 100 can be fixed by a method using screws or the like, but here, a case where an adhesive is used is shown. After application, the process proceeds to step S3.

  In step S3, the lid (lid) of the physical quantity detection sensor is arranged to face the metal block. In the physical quantity detection sensor 40, the lid 412 formed of metal Kovar in this case has better thermal conductivity than the package base 411 made of ceramic sintered aluminum oxide. Therefore, in the physical quantity detection sensor 40, the lid 412 side is disposed toward the metal block 30 so as to promote heat conduction between the physical quantity detection sensor 40 and the metal block 30. At that time, as described above with reference to FIG. 2, the physical quantity detection sensor 40 has the physical quantity detection element 43 arranged in a predetermined direction. This process S3 corresponds to an arrangement process. After placement, the process proceeds to step S4.

  In step S4, the physical quantity detection sensor is connected to the bottom and side walls of the metal block. In other words, the physical quantity detection sensor 40 arranged with the lid 412 side facing the metal block 30 is divided into a bottom surface portion (block surfaces 30a, 30b, 30c) and side wall portions 31a, 32a, 33a, 34a to which an adhesive is applied. To connect to the metal block 30. Since the adhesive has already been applied to the metal block 30 on which the physical quantity detection sensor 40 is disposed in step S2, the physical quantity detection sensor 40 is temporarily fixed with the adhesive. After the connection, the process proceeds to step S5.

  In step S5, it is confirmed whether or not a physical quantity detection sensor is connected to the three surfaces of the metal block. This confirmation is performed by a confirmation sensor or an operator. If the physical quantity detection sensor 40 is connected to all three surfaces of the metal block 30, the process proceeds to step S6. On the other hand, if the physical quantity detection sensor 40 is connected to only one or two surfaces of the metal block, the process proceeds to step S3. Return.

If all the connections of the physical quantity detection sensor 40 have been completed, in step S6, the adhesive is heated to fix the physical quantity detection sensor. Here, since the thermosetting adhesive is used, the physical quantity detection sensor 40 is fixed to the metal block 30 by curing the adhesive by heating. This step S6 corresponds to the connection step together with step S4. Thus, the flow relating to the manufacturing method of the multi-axis physical quantity detection device 100 is completed.
(Embodiment 2)

  Next, another preferred example of the multi-axis physical quantity detection device 100 will be described. FIG. 6 is a cross-sectional view showing a configuration of a multi-axis physical quantity detection device according to Embodiment 2 of the present invention. FIG. 7 is an exploded perspective view showing the configuration of the multi-axis physical quantity detection device according to the second embodiment. The multi-axis physical quantity detection device 200 according to the second embodiment is characterized by the connection structure between the metal block (holding unit aggregate) 80 and the physical quantity detection sensor 40, and the characteristic portion is different from the multi-axis physical quantity detection device 100 according to the first embodiment. Is different. Therefore, the same reference numerals as those in the first embodiment are given except for the parts different from the first embodiment.

  As shown in FIGS. 6 and 7, the multi-axis physical quantity detection device 200 includes a metal base plate 10, a metal block 80 disposed on the receiving surface 10 a of the metal base plate 10, and the metal base plate 10 of the metal block 80. And a physical quantity detection sensor 40 disposed on each of three surfaces (a plurality of holding portions) adjacent to the upper plane on the opposite side to the upper plane and the oscillation provided for each of the physical quantity detection sensors 40 A circuit board 50 and a device cover 60 are provided.

  In addition, a concave portion (holding portion) 81 having an opening similar to a quadrangular shape (FIG. 3A) in plan view of the physical quantity detection sensor 40 is formed on the upper plane on which the physical quantity detection sensor 40 is arranged. Yes. Similarly, a concave portion (holding portion) 82 having an opening having a shape similar to that of the physical quantity detection sensor 40 is formed on one side vertical surface, and a shape similar to that of the physical quantity detection sensor 40 is formed on the other side vertical surface. A concave portion (holding portion) 83 having an opening is formed. In this case, the metal block 80 is integrally formed including the recesses 81, 82, 83.

  And the recessed part 81 has the bottom face part 81a which is a bottom face which forms concave shape, and the four side wall parts 81b which are the inner side surfaces orthogonal to the bottom face part 81a. The physical quantity detection sensor 40 disposed in the recess 81 is fixed in a state where the lid 412 is connected to the bottom surface portion 81a and the side wall portion 81b. Similarly, the concave portion 82 includes a bottom surface portion 82a that is a bottom surface that forms a concave shape, and four side wall portions 82b that are inner surfaces orthogonal to the bottom surface portion 82a, and the lid 412 of the physical quantity detection sensor 40 is provided with the lid 412. It is fixed in a state where it is connected to the bottom surface portion 82a and the side wall portion 82b. The concave portion 83 includes a bottom surface portion 83a which is a bottom surface forming a concave shape, and four side wall portions 83b which are inner side surfaces orthogonal to the bottom surface portion 83a, and the lid 412 of the physical quantity detection sensor 40 is the bottom surface portion 83a. And fixed to the side wall 83b.

  The metal block 80 preferably has good heat transfer with each of the physical quantity detection sensors 40, and the multi-axis physical quantity detection apparatus 200 uses aluminum (Al) which is lightweight and easy to process.

The multi-axis physical quantity detection device 200 having such a configuration has a configuration in which the physical quantity detection sensor 40 is disposed inside the recesses 81, 82, 83 of the metal block 80. Therefore, the physical quantity detection sensor 40 has a larger contact area with the metal block 80 and is more likely to conduct heat compared to the form in the first embodiment, so that each of the physical quantity detection sensors 40 is in a more uniform temperature state. Can be held. Thereby, in the multi-axis physical quantity detection device 200, the three physical quantity detection sensors 40 can maintain high accuracy, and can accurately detect accelerations in three directions (multi-axis).
(Electronics)

  Next, electronic devices using the multi-axis physical quantity detection devices 100 and 200 will be described. FIG. 8A is a perspective view showing a video camera provided with a multi-axis physical quantity detection device, and FIG. 8B is a perspective view showing a mobile phone provided with the multi-axis physical quantity detection device. The video camera 300 and the mobile phone 400 as these electronic devices are equipped with the multi-axis physical quantity detection device 100 among the multi-axis physical quantity detection devices 100 and 200 according to the present invention. First, the video camera 300 illustrated in FIG. 8A includes an image receiving unit 301, an operation unit 302, an audio input unit 303, and a display unit 304. This video camera 300 includes a multi-axis physical quantity detection device 100, and the three physical quantity detection sensors 40 maintain a uniform temperature state, and perform acceleration in the X-axis, Y-axis, and Z-axis (not shown) directions. By detecting it, the function of correcting camera shake can be exhibited. Thereby, the video camera 300 can record a clear moving image.

A cellular phone 400 illustrated in FIG. 8B includes a plurality of operation buttons 401, a display unit 402, a camera mechanism 403, and a shutter button 404, and functions as a telephone and a camera. The mobile phone 400 includes the multi-axis physical quantity detection device 100, and the three physical quantity detection sensors 40 maintain a uniform temperature state, and perform acceleration in the X-axis, Y-axis, and Z-axis (not shown) directions. By detecting it, the function of correcting camera shake of the camera mechanism 403 can be exhibited. Thereby, the mobile phone 400 can record a clear image by the camera mechanism 403.
(Moving body)

  Next, a moving body using the multi-axis physical quantity detection devices 100 and 200 will be described. FIG.8 (c) is a perspective view which shows the mobile body provided with the multi-axis physical quantity detection apparatus. As shown in FIG. 8C, the moving body 500 in this case is an automobile, and the multi-axis physical quantity detection device 100 is used as an example. In the moving body 500, the multi-axis physical quantity detection device 100 is built in an electronic control unit (ECU) 503 mounted on the vehicle body 501. The electronic control unit 503 detects the acceleration state and the like applied to the vehicle body 501 by the three physical quantity detection sensors 40 of the multi-axis physical quantity detection device 100 maintaining a uniform temperature state. It is possible to grasp the posture and control the tire 502 and the like accurately. Thereby, the mobile body 500 can move safely and stably.

  The multi-axis physical quantity detection device, the manufacturing method of the multi-axis physical quantity detection device, the electronic apparatus, and the moving body described above are not limited to the forms in each embodiment, and are in forms such as the following modifications. Also, the same effect as the embodiment can be obtained.

  (Modification 1) Although the multi-axis physical quantity detection devices 100 and 200 include the three physical quantity detection sensors 40, the invention is not limited to this. For example, the multi-axis physical quantity detection devices 100 and 200 may include a plurality of physical quantity detection sensors 40 other than three corresponding to the physical quantity to be detected.

  (Modification 2) The metal block 30 of the multi-axis physical quantity detection device 100 is integrally formed including the convex portions 31, 32, 33, and 34, but is not limited to this, for example, the metal block 30. The protrusions 31, 32, 33, and 34 may be formed as separate bodies, and the protrusions 31, 32, 33, and 34 may be fixed at predetermined positions on the metal block 30. Similarly, the metal block 80 is integrally formed including the recesses 81, 82, and 83. For example, in the recess 81 of the metal block 80, a quadrangular ring having four side wall portions 81b is formed separately. In addition, a configuration in which the quadrangular ring is fixed to a surface to be the bottom surface portion 81a of the metal block 80 may be used. In this case, the recesses 82 and 83 are similarly configured.

  (Modification 3) In the physical quantity detection sensor 40, the package base 411 of the package 41 has a flat plate shape, and the lid 412 has a concave shape having an accommodating portion 417 on the inner side. However, the present invention is not limited to this configuration. 412 may be a flat plate shape, and the package base 411 may be a concave shape having a receiving portion 417 on the inner side.

  (Modification 4) In the multi-axis physical quantity detection device 200, the three physical quantity detection sensors 40 are disposed in any one of the recesses 81, 82, and 83, and are connected and fixed to the respective four side walls. Instead of connecting to all four side wall portions, for example, a form of connection to three side wall portions may be used. Furthermore, in the multi-axis physical quantity detection device 200, the recesses 81, 82, 83 may have a form in which the side walls 81b, 82b, 83b each having four surfaces lack any one of the surfaces. In this case, the physical quantity detection sensor 40 is connected to, for example, three surfaces of the side walls 81b, 82b, and 83b. However, from the viewpoint of heat transfer, as shown in the second embodiment, the physical quantity detection sensor 40 is preferably connected to the four surfaces of the side wall portions 81b, 82b, and 83b.

  (Modification 5) The multi-axis physical quantity detection devices 100 and 200 can include not only the physical quantity detection sensor 40 that functions as the accelerometer and inclinometer described above, but also a vibration sensor, a gravity sensor, an angular velocity sensor, and the like. Even when a plurality of any of the sensors are mounted, the multi-axis physical quantity detection devices 100 and 200 can maintain a uniform temperature state and can exhibit the sensor function to the maximum.

  DESCRIPTION OF SYMBOLS 10 ... Metal base board, 30 ... Metal block as holding | maintenance part aggregate | assembly, 30a, 30b, 30c ... Block surface as holding | maintenance part and bottom face part, 31 ... Convex part as holding | maintenance part, 31a ... Side wall part, 32 ... Holding | maintenance 32a ... side wall part, 33 ... convex part as holding part, 33a ... side wall part, 34 ... convex part as holding part, 34a ... side wall part, 40 ... physical quantity detection sensor, 41 ... package, 42 ... element base body, 43 ... physical quantity detection element, 80 ... metal block, 81 ... concave portion, 81a ... bottom surface portion, 81b ... side wall portion, 82 ... concave portion, 82a ... bottom surface portion, 82b ... side wall portion, 83 ... concave portion, 83a ... Bottom part, 83b ... Side wall part, 100 ... Multi-axis physical quantity detection device, 200 ... Multi-axis physical quantity detection device, 300 ... Video camera as electronic device, 400 ... Mobile phone as electronic device, 411 ... Cage base, 412 ... lid as a metal lid, 500 ... mobile.

Claims (8)

A plurality of physical quantity detection sensors;
A holding unit assembly having a plurality of holding units holding the physical quantity detection sensor,
The holding portion includes a bottom surface portion and a side wall portion arranged to intersect the bottom surface portion, and the physical quantity detection sensor is in contact with the bottom surface portion and the side wall portion. Multi-axis physical quantity detector.   2. The multi-axis physical quantity detection device according to claim 1, wherein the plurality of holding portions have a convex portion, and a side surface of the convex portion is the side wall portion.   2. The multi-axis physical quantity detection device according to claim 1, wherein the plurality of holding portions have a recess, a bottom surface of the recess is the bottom surface portion, and an inner surface of the recess is the side wall portion. .   The multi-axis physical quantity detection according to any one of claims 1 to 3, wherein the physical quantity detection sensor includes a lid body containing metal, and the lid body and the bottom surface portion are connected to each other. apparatus.   The multi-axis physical quantity detection device according to any one of claims 1 to 4, wherein the holding unit assembly includes a metal having a thermal conductivity of 150 W / mK or more. A plurality of holding portions having a bottom surface portion and a side wall portion disposed so as to intersect the bottom surface portion, a holding portion aggregate including metal, and a plurality of physical quantity detection sensors including a lid including metal; A preparation process to prepare,
An arrangement step of arranging the plurality of physical quantity detection sensors so that the lid side faces the bottom surface portion;
A connection step of connecting the plurality of physical quantity detection sensors so as to contact the bottom surface portion and the side wall portion;
The manufacturing method of the multi-axis physical quantity detection apparatus characterized by including.   An electronic apparatus comprising the multi-axis physical quantity detection device according to any one of claims 1 to 5.   A moving body comprising the multi-axis physical quantity detection device according to any one of claims 1 to 5.

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