JP2014116403A5 - - Google Patents
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- Publication number
- JP2014116403A5 JP2014116403A5 JP2012268340A JP2012268340A JP2014116403A5 JP 2014116403 A5 JP2014116403 A5 JP 2014116403A5 JP 2012268340 A JP2012268340 A JP 2012268340A JP 2012268340 A JP2012268340 A JP 2012268340A JP 2014116403 A5 JP2014116403 A5 JP 2014116403A5
- Authority
- JP
- Japan
- Prior art keywords
- detection
- mark
- reference member
- exposure
- projection optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000001514 detection method Methods 0.000 claims description 69
- 230000003287 optical effect Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims 8
- 238000005259 measurement Methods 0.000 claims 7
- 238000007654 immersion Methods 0.000 claims 6
- 238000005286 illumination Methods 0.000 claims 5
- 230000001678 irradiating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012268340A JP6102230B2 (ja) | 2012-12-07 | 2012-12-07 | 露光装置及び露光方法、並びにデバイス製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012268340A JP6102230B2 (ja) | 2012-12-07 | 2012-12-07 | 露光装置及び露光方法、並びにデバイス製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014116403A JP2014116403A (ja) | 2014-06-26 |
| JP2014116403A5 true JP2014116403A5 (enExample) | 2015-12-03 |
| JP6102230B2 JP6102230B2 (ja) | 2017-03-29 |
Family
ID=51172120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012268340A Active JP6102230B2 (ja) | 2012-12-07 | 2012-12-07 | 露光装置及び露光方法、並びにデバイス製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6102230B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102676391B1 (ko) * | 2015-09-30 | 2024-06-18 | 가부시키가이샤 니콘 | 노광 장치, 노광 방법, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1068604A (ja) * | 1996-08-27 | 1998-03-10 | Canon Inc | 光干渉計測方法およびそれを用いた光干渉計測装置 |
| WO2004053426A1 (en) * | 2002-12-05 | 2004-06-24 | Kla-Tencor Technologies Corporation | Apparatus and methods for detecting overlay errors using scatterometry |
| EP3267258A1 (en) * | 2006-02-21 | 2018-01-10 | Nikon Corporation | Exposure apparatus, exposure method and device manufacturing method |
| CN101385120B (zh) * | 2006-02-21 | 2012-09-05 | 株式会社尼康 | 测定装置及方法、处理装置及方法、图案形成装置及方法、曝光装置及方法、以及元件制造方法 |
| KR101770082B1 (ko) * | 2006-09-01 | 2017-08-21 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 디바이스 제조 방법, 그리고 캘리브레이션 방법 |
| NL2005092A (en) * | 2009-07-16 | 2011-01-18 | Asml Netherlands Bv | Object alignment measurement method and apparatus. |
| SG168488A1 (en) * | 2009-07-16 | 2011-02-28 | Asml Netherlands Bv | Position calibration of alignment heads in a multi-head alignment system |
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2012
- 2012-12-07 JP JP2012268340A patent/JP6102230B2/ja active Active