JP2014094863A5 - - Google Patents

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Publication number
JP2014094863A5
JP2014094863A5 JP2012247804A JP2012247804A JP2014094863A5 JP 2014094863 A5 JP2014094863 A5 JP 2014094863A5 JP 2012247804 A JP2012247804 A JP 2012247804A JP 2012247804 A JP2012247804 A JP 2012247804A JP 2014094863 A5 JP2014094863 A5 JP 2014094863A5
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JP
Japan
Prior art keywords
ozone generator
generator according
hollow portion
flow path
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012247804A
Other languages
English (en)
Japanese (ja)
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JP6175721B2 (ja
JP2014094863A (ja
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Publication date
Application filed filed Critical
Priority to JP2012247804A priority Critical patent/JP6175721B2/ja
Priority claimed from JP2012247804A external-priority patent/JP6175721B2/ja
Priority to PCT/JP2013/080469 priority patent/WO2014073686A1/ja
Priority to US14/442,011 priority patent/US20160023900A1/en
Publication of JP2014094863A publication Critical patent/JP2014094863A/ja
Publication of JP2014094863A5 publication Critical patent/JP2014094863A5/ja
Application granted granted Critical
Publication of JP6175721B2 publication Critical patent/JP6175721B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012247804A 2012-11-09 2012-11-09 オゾン発生装置、及び、オゾン発生方法 Expired - Fee Related JP6175721B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012247804A JP6175721B2 (ja) 2012-11-09 2012-11-09 オゾン発生装置、及び、オゾン発生方法
PCT/JP2013/080469 WO2014073686A1 (ja) 2012-11-09 2013-11-11 オゾン発生装置、及び、オゾン発生方法
US14/442,011 US20160023900A1 (en) 2012-11-09 2013-11-11 Ozone generator and ozone generation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012247804A JP6175721B2 (ja) 2012-11-09 2012-11-09 オゾン発生装置、及び、オゾン発生方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017079313A Division JP2017141159A (ja) 2017-04-12 2017-04-12 オゾン発生装置、及び、オゾン発生方法

Publications (3)

Publication Number Publication Date
JP2014094863A JP2014094863A (ja) 2014-05-22
JP2014094863A5 true JP2014094863A5 (enExample) 2015-12-24
JP6175721B2 JP6175721B2 (ja) 2017-08-09

Family

ID=50684777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012247804A Expired - Fee Related JP6175721B2 (ja) 2012-11-09 2012-11-09 オゾン発生装置、及び、オゾン発生方法

Country Status (3)

Country Link
US (1) US20160023900A1 (enExample)
JP (1) JP6175721B2 (enExample)
WO (1) WO2014073686A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103766000B (zh) * 2011-06-03 2018-04-10 株式会社和广武 Cvd装置以及cvd膜的制造方法
CN104192809B (zh) * 2014-08-26 2016-08-17 深圳市信诚高科科技开发有限公司 一种模块化板式臭氧发生器
CN108227413B (zh) * 2016-12-15 2023-12-08 中微半导体设备(上海)股份有限公司 一种光刻胶去除装置及其清洗方法
CN107484319B (zh) * 2017-08-17 2024-03-26 福州美美环保科技有限公司 一种可拓展的等离子发生装置
CN108977828B (zh) * 2018-10-19 2023-11-03 胡松 一种膜电极电解臭氧发生器及其制备工艺
WO2020095504A1 (ja) * 2018-11-08 2020-05-14 株式会社村田製作所 プラズマ処理装置
CN109336058A (zh) * 2018-11-30 2019-02-15 南昌大学 一种外场增强臭氧发生装置
CN110395695A (zh) * 2019-08-28 2019-11-01 烟台三禾畜牧养殖环境净化工程有限公司 移动式臭氧发生器
US20210185793A1 (en) * 2019-12-13 2021-06-17 Applied Materials, Inc. Adhesive material removal from photomask in ultraviolet lithography application
CN112749483B (zh) * 2020-12-28 2023-06-06 北方工业大学 建立放电室模型的方法、装置、电子设备及存储介质
US11803118B2 (en) * 2021-04-12 2023-10-31 Applied Materials, Inc. Methods and apparatus for photomask processing
CN118044338A (zh) * 2022-09-14 2024-05-14 东芝三菱电机产业系统株式会社 活性气体生成装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54171670U (enExample) * 1978-05-25 1979-12-04
JPS5944782A (ja) * 1982-09-07 1984-03-13 増田　閃一 沿面コロナ放電素子およびその製造方法
JPS623002A (ja) * 1985-06-28 1987-01-09 Hidetoshi Ishida オゾン発生器の電極体
JPS62292605A (ja) * 1986-06-09 1987-12-19 Techno Japan Kk オゾン発生器
JPH0519299Y2 (enExample) * 1988-05-30 1993-05-21
JP2589599B2 (ja) * 1989-11-30 1997-03-12 住友精密工業株式会社 吹出型表面処理装置
JP2537304B2 (ja) * 1989-12-07 1996-09-25 新技術事業団 大気圧プラズマ反応方法とその装置
JPH04108603A (ja) * 1990-08-27 1992-04-09 Kazuhiro Miyama オゾン発生装置
JP3015268B2 (ja) * 1994-12-27 2000-03-06 オーニット株式会社 低温プラズマ発生体
JP3038907U (ja) * 1996-12-20 1997-06-30 華鴻國際企業有限公司 オゾン発生装置
JP3959906B2 (ja) * 1998-10-26 2007-08-15 松下電工株式会社 プラズマ処理装置及びプラズマ処理方法
JP2001079446A (ja) * 1999-09-13 2001-03-27 Mitsubishi Electric Corp 放電ユニット
JP2002068713A (ja) * 2000-08-31 2002-03-08 West Electric Co Ltd オゾン発生装置
WO2010137153A1 (ja) * 2009-05-28 2010-12-02 多田電機株式会社 オゾン発生装置

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