JP2014067973A - Print wiring board with adhesive sheet, manufacturing method of the same, and manufacturing method of laminated print wiring board using the same - Google Patents

Print wiring board with adhesive sheet, manufacturing method of the same, and manufacturing method of laminated print wiring board using the same Download PDF

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JP2014067973A
JP2014067973A JP2012214153A JP2012214153A JP2014067973A JP 2014067973 A JP2014067973 A JP 2014067973A JP 2012214153 A JP2012214153 A JP 2012214153A JP 2012214153 A JP2012214153 A JP 2012214153A JP 2014067973 A JP2014067973 A JP 2014067973A
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wiring board
printed wiring
adhesive sheet
manufacturing
adhesive
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JP6016017B2 (en
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Kiyoo Hattori
清男 服部
Akira Shimizu
明 清水
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Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a print wiring board with an adhesive sheet that is likely to have a fine wiring pattern or small via diameter with an easy alignment when forming a bottomed via in an adhesive sheet, and that can be used regardless of an aspect ratio of the print wiring board, and to provide a manufacturing method of the same and a manufacturing method of a laminated print wiring board using the same.SOLUTION: A print wiring board with an adhesive sheet includes a print wiring board having a flat connection terminal, a thermosetting adhesive sheet comprising a protective film and an adhesive material and temporarily adhered on the print wiring board, a bottomed via for interlayer connection penetrating through the adhesive sheet across the flat connection terminal, a conductive paste filled in the bottomed via and tentatively hardened, and a cavity opening penetrating through the adhesive sheet and the print wiring board for housing electronic component elements. There are also provided a manufacturing method of the same, and a manufacturing method of a laminated print wiring board using the same.

Description

本発明は、接着シート付きプリント配線板とその製造方法及びそれを用いた貼り合せプリント配線板の製造方法に関するものである。   The present invention relates to a printed wiring board with an adhesive sheet, a manufacturing method thereof, and a manufacturing method of a bonded printed wiring board using the same.

近年、スマートフォンに代表されるように携帯機器製品の小型化・薄型化の高機能化に伴い、プリント配線板も小型・薄型化、高機能化が要求されている。部品内蔵基板の開発も進められているが、プリント配線板と内蔵部品との商流や品質保証他の問題があり、一部で実用化されているに過ぎない。一方、これに代替できる技術としてキャビティ構造を持つプリント配線板を使用したモジュールやパッケージがある。キャビティ構造を持つプリント配線板の製造には、部品を実装したベース基板上に、キャビティ用の開口を設けたスペーサー基板を貼り合せる、いわゆる貼り合せ工法が有利であることから、ベース基板とスペーサー基板の間に導通接続を付加可能な貼り合せプリント配線板及びその製造方法が要求されている。   2. Description of the Related Art In recent years, as a mobile device product is becoming smaller and thinner, as represented by smartphones, printed wiring boards are also required to be smaller, thinner and more functional. Development of a component-embedded board is underway, but there are problems such as the commercial flow of printed wiring boards and built-in components, quality assurance, and so on. On the other hand, as an alternative technology, there are modules and packages using a printed wiring board having a cavity structure. For the production of printed wiring boards with a cavity structure, the base substrate and spacer substrate are advantageous because the so-called bonding method, in which a spacer substrate with a cavity opening is bonded onto the base substrate on which the components are mounted, is advantageous. There is a demand for a bonded printed wiring board and a method for manufacturing the same, to which a conductive connection can be added.

また、ベース基板に部品実装した後にスペーサー基板及び蓋基板を貼り合わせる工法による部品内蔵的なモジュールやパッケージも実用化されている。この際、スペーサー基板に接着シートを貼り付けた、接着シート付きプリント配線板及びその製造方法が要求されている。   Modules and packages with built-in components have also been put into practical use by a method in which a spacer substrate and a lid substrate are bonded together after components are mounted on a base substrate. Under the present circumstances, the printed wiring board with an adhesive sheet which affixed the adhesive sheet on the spacer board | substrate, and its manufacturing method are requested | required.

第1のプリント配線板と第2のプリント配線板との間に導通接続を付加させた貼り合せプリント配線板の製造方法としては、表面に接続端子を有する第1のプリント配線板及び第2のプリント配線板との間に、貫通穴に導電ペーストを充填した絶縁性接着シートを挟み、加熱加圧し接続する方法Aがある(特許文献1)。   As a method for manufacturing a bonded printed wiring board in which a conductive connection is added between the first printed wiring board and the second printed wiring board, the first printed wiring board having a connection terminal on the surface and the second printed wiring board are used. There is a method A in which an insulating adhesive sheet in which a conductive paste is filled in a through hole is sandwiched between a printed wiring board and connected by heating and pressing (Patent Document 1).

また、表面に接続端子を有する第1のプリント配線板と、貫通スルーホールを有する第2のプリント配線板を、絶縁性接着シートを使用して加熱加圧し接着した後、第2のプリント配線板の貫通スルーホールであった穴に侵入してきた接着材を、レーザーにより除去し、その後貴金属めっきや導電ペーストの充填等で導通接続する方法Bがある。   In addition, the first printed wiring board having connection terminals on the surface and the second printed wiring board having through-holes are bonded by heating and pressing using an insulating adhesive sheet, and then the second printed wiring board. There is a method B in which the adhesive material that has penetrated into the through-holes is removed by laser and then conductively connected by precious metal plating or filling with conductive paste.

また、第1の基板、第2の基板を絶縁性接着シートやプリプレグ等で加熱加圧し接着した後、両基板を貫通するスルーホールによる層間接続を実施し、導通接続する方法Cがある。   Further, there is a method C in which the first substrate and the second substrate are bonded by heating and pressurizing with an insulating adhesive sheet, a prepreg, or the like, and then interlayer connection is performed by through holes penetrating both the substrates, thereby conducting conduction.

また、第1の基板、第2の基板を絶縁性接着シートやプリプレグ等で加熱加圧し接着した後、両基板の片方の面からドリルやレーザー穴あけにより片方の基板を貫通する有底ビアを形成し、その後貴金属めっきや導電ペーストの充填等で導通接続する方法Dがある。   After the first and second substrates are heated and pressed with an insulating adhesive sheet or prepreg, etc., bottomed vias that penetrate one of the substrates are formed by drilling or laser drilling from one side of both substrates. Then, there is a method D for conducting a conductive connection by precious metal plating or filling with a conductive paste.

特開2003−188536号公報JP 2003-188536 A

近年の配線パターンの微細化に伴い、接着シート付きプリント配線板については、プリント配線板を電気的に接続するためのビアホール径やピッチも微細化されており、前記した方法(特許文献1)の場合は、プリント配線板の接続端子と接着シートの貫通穴との位置合わせが困難であることが問題となる。さらにキャビティ構造の貼り合せプリント配線板を製造する際は、接着シート及びプリント配線板にそれぞれ予めキャビティ部となる領域をルーター加工等で開口させておく必要があるが、接着シートは、単体では寸法変化を生じ易いため、プリント配線板の開口との位置ずれも問題となる。   With recent miniaturization of wiring patterns, via hole diameters and pitches for electrically connecting printed wiring boards have been miniaturized for printed wiring boards with adhesive sheets. In such a case, it is difficult to align the connection terminal of the printed wiring board and the through hole of the adhesive sheet. Furthermore, when manufacturing a bonded printed wiring board with a cavity structure, it is necessary to open the area to be the cavity part in the adhesive sheet and the printed wiring board in advance by router processing or the like. Since the change is likely to occur, a positional deviation from the opening of the printed wiring board also becomes a problem.

また、貼り合せプリント配線板の製造方法としては、第1・第2のプリント配線板を電気的に接続するためのビアホール径やピッチも近年微細化されており、前記した方法A(特許文献1)の場合は、第1、第2のプリント配線板の接続端子と接着シート貫通穴の位置合わせが困難であり問題となっていた。さらにキャビティ構造の貼り合せプリント配線板を製造する際は、接着シート及びスペーサー基板となる第1又は第2のプリント配線板にそれぞれ予めキャビティ部となる領域をルーター加工等で開口させておく必要があるが、接着シートは、単体では寸法変化を生じ易いため、プリント配線板の開口との位置ずれも問題となる。   In addition, as a method for manufacturing a bonded printed wiring board, via hole diameters and pitches for electrically connecting the first and second printed wiring boards have been miniaturized in recent years, and the above-described method A (Patent Document 1). ), It was difficult to align the connection terminals of the first and second printed wiring boards and the adhesive sheet through-holes. Furthermore, when manufacturing a bonded printed wiring board having a cavity structure, it is necessary to open an area to be a cavity portion in advance in the first or second printed wiring board to be an adhesive sheet and a spacer substrate by router processing or the like. However, since the adhesive sheet is apt to undergo dimensional changes by itself, positional deviation from the opening of the printed wiring board also becomes a problem.

また、前記した方法Bは、第2のプリント配線板の板厚が薄く、第1・第2のプリント配線板の接続に用いる有底ビアにおいて、レーザーによる接着材の除去やその後の貴金属めっき・導電ペーストの充填が可能な場合は問題ないが、板厚が厚くビア径が小さくなるに連れ各工程での工程能力が低下し対応困難となる。一般的に第1・第2のプリント配線板を接続する有底ビアのアスペクト比が0.8以上の場合は不適である。   In the above-mentioned method B, the thickness of the second printed wiring board is thin, and in the bottomed via used for connecting the first and second printed wiring boards, the adhesive removal by laser and the subsequent noble metal plating / There is no problem if the conductive paste can be filled, but as the plate thickness increases and the via diameter decreases, the process capability in each process decreases, making it difficult to handle. In general, it is not suitable when the aspect ratio of the bottomed via connecting the first and second printed wiring boards is 0.8 or more.

前記した方法Cの場合は、貫通スルーホール形成に機械ドリルを使用することが一般的であり、配線パターンの微細化へ追従できないのが問題であった。一般的に機械ドリル径は直径0.1mmが最小である。   In the case of the above-described method C, it is common to use a mechanical drill for forming the through-hole, and it has been a problem that it cannot follow the miniaturization of the wiring pattern. In general, the minimum diameter of the mechanical drill is 0.1 mm.

方法Dの場合は機械ドリルを使用する場合は前記方法Cの場合と同じく微細化への追従が課題であり、レーザードリルを使用する場合は貫通するプリント配線板の板厚やビア径に依存し、方法Bと同じようにアスペクト比が0.8以上の場合は適用困難である。   In the case of the method D, following the miniaturization is the same as in the case of the method C when using the mechanical drill, and when using the laser drill, it depends on the thickness of the printed wiring board to penetrate and the via diameter. As in Method B, it is difficult to apply when the aspect ratio is 0.8 or more.

本発明は、上記問題点に鑑みてなされたものであり、接着シートへの有底ビア形成時の位置合わせが容易なことにより、配線パターンの微細化やビア径の微小化に有利であり、かつプリント配線板のアスペクト比に関係なく適用が可能な、接着シート付きプリント配線板とその製造方法及びそれを用いた貼り合せプリント配線板の製造方法を提供することを目的とするものである。   The present invention has been made in view of the above problems, and is advantageous for miniaturization of the wiring pattern and the via diameter by easy alignment when forming the bottomed via to the adhesive sheet, It is another object of the present invention to provide a printed wiring board with an adhesive sheet that can be applied regardless of the aspect ratio of the printed wiring board, a manufacturing method thereof, and a manufacturing method of a bonded printed wiring board using the printed wiring board.

本発明は以下を特徴とする。
1. 平坦な接続端子を有するプリント配線板と、保護フィルムと接着材とを備えプリント配線板上に仮接着した熱硬化性の接着シートと、前記接着シートを貫通して前記平坦な接続端子に到る層間接続用の有底ビアと、有底ビアに充填され仮硬化された導電性ペーストと、接着シート及びプリント配線板を貫通して設けられ電子部品素子を収納するためのキャビティ用開口と、を有する接着シート付きプリント配線板。
2. 項1の接着シート付きプリント配線板の製造方法であって、平坦な接続端子及びを有するプリント配線板上に、保護フィルムと接着材とを備える熱硬化性の接着シートを仮接着する工程(A)と、前記仮接着後の接着シートを貫通して前記平坦な接続端子に到る層間接続用の有底ビアを形成する工程(B)と、前記接着シートを仮接着したプリント配線板に、電子部品素子を収納するためのキャビティとなる開口を形成する工程(C)と前記有底ビアに導電性ペーストを充填し仮硬化する工程(D
)と、を有する接着シート付きプリント配線板の製造方法。
3. 項1の接着シート付きプリント配線板を用いる貼り合せプリント配線板の製造方法であって、項2の接着シート付きプリント配線板の製造方法により、接着シート付きプリント配線板を製造する工程(A〜D)と、前記接着シート付きプリント配線板の導電性ペーストが充填された有底ビアと対応する平坦な接続端子を有する第2のプリント配線板を製造する工程(E)と、前記接着シート付きプリント配線板の保護フィルムを剥離して接着材付きの第1のプリント配線板を準備する工程(F)と、前記接着材付きの第1のプリント配線板の導電性ペーストが充填された有底ビアと、この有底ビアに対応した第2のプリント配線板の平坦な接続端子とを、加熱加圧して接続する加熱加圧工程(G)と、を有する貼り合せプリント配線板の製造方法。
The present invention is characterized by the following.
1. A printed wiring board having a flat connection terminal, a thermosetting adhesive sheet temporarily bonded on the printed wiring board with a protective film and an adhesive, and the flat connection terminal through the adhesive sheet Bottomed vias for interlayer connection, conductive paste filled in the bottomed vias and temporarily cured, and openings for cavities provided through the adhesive sheet and the printed wiring board for accommodating electronic component elements, A printed wiring board with an adhesive sheet.
2. A process for producing a printed wiring board with an adhesive sheet according to Item 1, wherein a thermosetting adhesive sheet comprising a protective film and an adhesive is temporarily bonded on a printed wiring board having flat connection terminals (A) And (B) forming a bottomed via for interlayer connection that penetrates the adhesive sheet after temporary bonding to reach the flat connection terminal, and a printed wiring board on which the adhesive sheet is temporarily bonded, A step (C) of forming an opening to be a cavity for housing an electronic component element, and a step of filling the bottomed via with a conductive paste and pre-curing (D)
And a method for producing a printed wiring board with an adhesive sheet.
3. A method for producing a bonded printed wiring board using the printed wiring board with an adhesive sheet according to Item 1, wherein the printed wiring board with an adhesive sheet is produced by the method for producing a printed wiring board with an adhesive sheet according to Item 2 (A to D), a step (E) of manufacturing a second printed wiring board having a flat connection terminal corresponding to a bottomed via filled with a conductive paste of the printed wiring board with the adhesive sheet, and with the adhesive sheet A step (F) of preparing a first printed wiring board with an adhesive by peeling off a protective film of the printed wiring board, and a bottomed base filled with a conductive paste of the first printed wiring board with the adhesive Manufacturing a bonded printed wiring board having a via and a heating and pressing step (G) for connecting the flat connecting terminal of the second printed wiring board corresponding to the bottomed via by heating and pressing. Law.

本発明によれば、接着シートへの有底ビア形成時の位置合わせが容易なことにより、配線パターンの微細化やビアの微小化に有利であり、かつプリント配線板のアスペクト比には関係なく適用が可能な接着シート付きプリント配線板とその製造方法及びそれを用いた貼り合せプリント配線板の製造方法を提供することができる。   According to the present invention, it is advantageous for the miniaturization of the wiring pattern and the miniaturization of the via due to the easy alignment when forming the bottomed via on the adhesive sheet, and regardless of the aspect ratio of the printed wiring board. It is possible to provide a printed wiring board with an adhesive sheet that can be applied, a manufacturing method thereof, and a manufacturing method of a bonded printed wiring board using the same.

本発明の接着シート付きプリント配線板の断面図である。It is sectional drawing of the printed wiring board with an adhesive sheet of this invention. 本発明の接着シート付きプリント配線板の製造方法の一部を示す断面図である。It is sectional drawing which shows a part of manufacturing method of the printed wiring board with an adhesive sheet of this invention. 本発明の貼り合せプリント配線板の製造方法の一部を示す断面図である。It is sectional drawing which shows a part of manufacturing method of the bonding printed wiring board of this invention. 本発明の貼り合せプリント配線板の断面図である。It is sectional drawing of the bonded printed wiring board of this invention.

以下、図面を用いて本発明の実施の形態を説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<接着シート付きプリント配線板>
図1に、本実施の形態の接着シート付きプリント配線板14を示す。本実施の形態は、平坦な接続端子12を有するプリント配線板7と、保護フィルム2と接着材1とを備えプリント配線板7上に仮接着した熱硬化性の接着シート16と、前記接着シート16を貫通して前記平坦な接続端子12に到る層間接続用の有底ビア11と、有底ビア11に充填され仮硬化された導電性ペースト6と、接着シート16及びプリント配線板7を貫通して設けられ電子部品素子を収納するためのキャビティ用開口5と、を有する接着シート付きプリント配線板14である。
<Printed wiring board with adhesive sheet>
In FIG. 1, the printed wiring board 14 with an adhesive sheet of this Embodiment is shown. In the present embodiment, a printed wiring board 7 having a flat connection terminal 12, a thermosetting adhesive sheet 16 provided with a protective film 2 and an adhesive 1 and temporarily bonded onto the printed wiring board 7, and the adhesive sheet A bottomed via 11 for interlayer connection that passes through 16 and reaches the flat connection terminal 12, a conductive paste 6 filled in the bottomed via 11 and temporarily cured, an adhesive sheet 16, and a printed wiring board 7 A printed wiring board 14 with an adhesive sheet having a cavity opening 5 for penetrating and accommodating an electronic component element.

接着シートとは、保護フィルムと接着材により構成され、保護フィルムを剥がした状態の接着材面を被接着材料に密着させ、加圧により追従させ、加熱により接着材の樹脂成分を溶融・硬化させ、接着せしめる機能を持つ。加熱又は加圧の加減により仮接着が可能で、仮接着後に機械加工やレーザー加工等の加工が可能である。仮接着に対しさらなる加熱・加圧(本接着)により最終的な接着特性を得る。   An adhesive sheet is composed of a protective film and an adhesive. The adhesive surface with the protective film peeled off is brought into close contact with the material to be adhered, followed by pressurization, and the resin component of the adhesive is melted and cured by heating. It has the function of adhering. Temporary bonding is possible by adjusting heating or pressurization, and machining or laser processing can be performed after temporary bonding. Final bonding characteristics are obtained by further heating and pressurization (main bonding) with respect to temporary bonding.

表面が平坦化された接続端子とは、フィルドビアにより平坦化されたビアとそのランドにより接続端子を構成している場合、貫通穴の内壁に貴金属めっきを付けたスルーホールに穴埋め剤を充填し、蓋めっきにより表面を平坦化した部位を接続端子としている場合、又はそれぞれのビア及びスルーホールから引き出した回路(ランド他)により平坦化された接続端子を構成している場合、スルーホール又は有底ビアに導電ペースト等の導電性充填剤を充填し硬化させ表面を平坦化した部位を接続端子としている場合を指す。   When the connecting terminal whose surface is flattened is constituted by a via flattened by a filled via and its land, a filling agent is filled in a through hole in which noble metal plating is applied to the inner wall of the through hole, If the connection terminal is a part whose surface has been flattened by lid plating, or if the connection terminal is flattened by a circuit (land etc.) drawn from each via and through hole, the through hole or bottomed This refers to the case where the via is filled with a conductive filler such as a conductive paste and hardened and the surface is flattened as a connection terminal.

導電性ペーストとは、電気的接続を目的としたビアやスルーホールに充填することが可能で、スラリー状の樹脂の中に導電性の粒子が混合してあり、加熱や加圧により硬化させることができる。導電性ペーストを介して電気的接続を得る事を目的として用いられる。   Conductive paste can be filled into vias and through holes for electrical connection, and conductive particles are mixed in slurry resin and cured by heating or pressing. Can do. It is used for the purpose of obtaining electrical connection via a conductive paste.

本実施の形態の接着シート付きプリント配線板においては、熱硬化性の接着シートをプリント配線板に接着した状態で、平坦化された接続端子をめがけてレーザー加工することが可能であるため、従来問題であったプリント配線板の接続端子と接着シート貫通穴の位置合わせが容易となる。さらにキャビティ構造の接着シート付きプリント配線板又は貼り合せプリント配線板を製造する際は、接着シート及びプリント配線板を、それぞれ別々に予めキャビティ部となる領域をルーター加工等で開口させておく必要がなく、プリント配線板に接着シートを仮接着した状態でルータ加工機等を用いて開口できるため、工程が簡略化されると同時に開口の位置精度が向上する効果がある。   In the printed wiring board with an adhesive sheet of the present embodiment, since it is possible to perform laser processing on the flattened connection terminals in a state where the thermosetting adhesive sheet is adhered to the printed wiring board, it is conventional. It becomes easy to align the connection terminal of the printed wiring board and the adhesive sheet through-hole, which was a problem. Furthermore, when manufacturing a printed wiring board with an adhesive sheet or a bonded printed wiring board having a cavity structure, it is necessary to open the adhesive sheet and the printed wiring board separately in advance by a router process or the like, respectively, in the area that becomes the cavity portion. In addition, since the opening can be performed using a router processing machine or the like with the adhesive sheet temporarily bonded to the printed wiring board, the process is simplified and the positional accuracy of the opening is improved.

<接着シート付きプリント配線板の製造方法>
図2に、本実施の形態の接着シート付きプリント配線板14の製造方法を示す。本実施の形態の接着シート付きプリント配線板14の製造方法は、平坦な接続端子12を有するプリント配線板7上に、保護フィルム2と接着材1とを備える熱硬化性の接着シート16を仮接着する工程(A)と、前記仮接着後の接着シート16を貫通して前記平坦な接続端子12に到る層間接続用の有底ビア11を形成する工程(B)と、前記接着シート16を仮接着したプリント配線板7に、電子部品素子(図示しない。)を収納するためのキャビティ用開口5を形成する工程(C)と前記有底ビア11に導電性ペースト6を充填し仮硬化する工程(E)と、を有する。
<Method for producing printed wiring board with adhesive sheet>
In FIG. 2, the manufacturing method of the printed wiring board 14 with an adhesive sheet of this Embodiment is shown. In the manufacturing method of the printed wiring board 14 with the adhesive sheet of the present embodiment, a thermosetting adhesive sheet 16 including the protective film 2 and the adhesive 1 is temporarily provided on the printed wiring board 7 having the flat connection terminals 12. A step (A) of bonding, a step (B) of forming a bottomed via 11 for interlayer connection passing through the adhesive sheet 16 after the temporary bonding and reaching the flat connection terminal 12, and the adhesive sheet 16 A step (C) of forming a cavity opening 5 for accommodating an electronic component element (not shown) on the printed wiring board 7 temporarily bonded with the conductive paste 6 is filled in the bottomed via 11 and temporarily cured. Step (E).

本実施の形態の接着シート付きプリント配線板の製造方法によれば、熱硬化性の接着シートをプリント配線板に接着した状態で、平坦化された接続端子をめがけてレーザー加工することが可能であるため、従来問題であったプリント配線板の接続端子と接着シート貫通穴の位置合わせが容易となる。さらにキャビティ構造の接着シート付きプリント配線板又は貼り合せプリント配線板を製造する際は、接着シート及びプリント配線板を、それぞれ別々に予めキャビティ部となる領域をルーター加工等で開口させておく必要がなく、プリント配線板に接着シートを仮接着した状態でルータ加工機等を用いて開口できるため、工程が簡略化されると同時に開口の位置精度が向上する効果がある。   According to the method for manufacturing a printed wiring board with an adhesive sheet of the present embodiment, it is possible to perform laser processing with the thermosetting adhesive sheet attached to the printed wiring board and facing the flattened connection terminals. Therefore, it is easy to align the connection terminal of the printed wiring board and the adhesive sheet through hole, which has been a problem in the past. Furthermore, when manufacturing a printed wiring board with an adhesive sheet or a bonded printed wiring board having a cavity structure, it is necessary to open the adhesive sheet and the printed wiring board separately in advance by a router process or the like, respectively, in the area that becomes the cavity portion. In addition, since the opening can be performed using a router processing machine or the like with the adhesive sheet temporarily bonded to the printed wiring board, the process is simplified and the positional accuracy of the opening is improved.

<貼り合せプリント配線板の製造方法>
図2及び3に、本実施の形態の貼り合せプリント配線板15の製造方法を示す。本実施の形態の貼り合せプリント配線板15の製造方法は、図1の接着シート付きプリント配線板14を用いる貼り合せプリント配線板15の製造方法であって、図2の接着シート付きプリント配線板14の製造方法により、接着材1付きの第1のプリント配線板7を製造する工程(A〜D)と、前記接着材1付きの第1のプリント配線板7の導電性ペースト6が充填された有底ビア11と対応する平坦な接続端子13を有する第2のプリント配線板8を製造する工程(E)と、前記接着シート付きプリント配線板14の保護フィルム2を剥離する工程(F)と、前記接着材1付き第1のプリント配線板7の導電性ペースト6が充填された有底ビア11と、この有底ビア11に対応した第2のプリント配線板8の平坦な接続端子13とを、加熱加圧して接続する加熱加圧工程(G)と、を有する。
<Method for producing bonded printed wiring board>
2 and 3 show a manufacturing method of the bonded printed wiring board 15 of the present embodiment. The method for manufacturing the bonded printed wiring board 15 according to the present embodiment is a method for manufacturing the bonded printed wiring board 15 using the printed wiring board 14 with the adhesive sheet of FIG. 1 and includes the printed wiring board with the adhesive sheet of FIG. 14, the steps (A to D) of manufacturing the first printed wiring board 7 with the adhesive 1 and the conductive paste 6 of the first printed wiring board 7 with the adhesive 1 are filled. The step (E) of manufacturing the second printed wiring board 8 having the flat connection terminals 13 corresponding to the bottomed vias 11 and the step (F) of peeling off the protective film 2 of the printed wiring board 14 with the adhesive sheet A bottomed via 11 filled with the conductive paste 6 of the first printed wiring board 7 with the adhesive 1 and a flat connection terminal 13 of the second printed wiring board 8 corresponding to the bottomed via 11. And Having a heating and pressing step of connecting pressurizes (G), the.

本実施の形態の貼り合せプリント配線板の製造方法によれば、熱硬化性の接着シートをプリント配線板に接着した状態で、平坦化された接続端子をめがけてレーザー加工することが可能であるため、従来問題であったプリント配線板の接続端子と接着シート貫通穴の位置合わせが容易となる。さらにキャビティ構造の接着シート付きプリント配線板又は貼り合せプリント配線板を製造する際は、接着シート及びプリント配線板を、それぞれ別々に予めキャビティ部となる領域をルーター加工等で開口させておく必要がなく、プリント配線板に接着シートを仮接着した状態でルータ加工機等を用いて開口できるため、工程が簡略化されると同時に開口の位置精度が向上する効果がある。   According to the method for manufacturing a bonded printed wiring board according to the present embodiment, it is possible to perform laser processing with the thermosetting adhesive sheet attached to the printed wiring board and facing the flattened connection terminals. Therefore, it is easy to align the connection terminal of the printed wiring board and the adhesive sheet through hole, which has been a problem in the past. Furthermore, when manufacturing a printed wiring board with an adhesive sheet or a bonded printed wiring board having a cavity structure, it is necessary to open the adhesive sheet and the printed wiring board separately in advance by a router process or the like, respectively, in the area that becomes the cavity portion. In addition, since the opening can be performed using a router processing machine or the like with the adhesive sheet temporarily bonded to the printed wiring board, the process is simplified and the positional accuracy of the opening is improved.

また、本実施の形態の貼り合わせプリント配線板の製造方法においては、第1のプリント配線板と第2のプリント配線板の接続に用いるのが、接続用ビアやスルーホールに対する貴金属めっきや導電ペーストの充填ではないため、貼り合わせるプリント配線板のアスペクト比に関係することなく接続できる効果がある。   Moreover, in the manufacturing method of the bonded printed wiring board of this Embodiment, it is used for the connection of a 1st printed wiring board and a 2nd printed wiring board, noble metal plating with respect to a connection via and a through hole, and an electrically conductive paste Therefore, there is an effect that the connection can be made regardless of the aspect ratio of the printed wiring board to be bonded.

以下、本発明の接着シート付きプリント配線板とその製造方法及びそれを用いた貼り合せプリント配線板の製造方法の実施例を説明するが、本発明は、本実施例に限定されない。   Hereinafter, although the Example of the printed wiring board with an adhesive sheet of this invention, its manufacturing method, and the manufacturing method of a bonded printed wiring board using the same is described, this invention is not limited to a present Example.

(実施例1)接着シート付きプリント配線板
<接着シート>
接着シート16として、絶縁接着シートAS−2600、厚さ0.025mmで、長さ500mm、幅400mm(日立化成工業株式会社製、商品名)を準備した(図2(1))。
Example 1 Printed Wiring Board with Adhesive Sheet <Adhesive Sheet>
As the adhesive sheet 16, an insulating adhesive sheet AS-2600 having a thickness of 0.025 mm, a length of 500 mm, and a width of 400 mm (trade name, manufactured by Hitachi Chemical Co., Ltd.) was prepared (FIG. 2 (1)).

<プリント配線板>
プリント配線板7用の銅張り積層板として、ガラスエポキシ製の絶縁層の両側に、銅箔(18μm)を積層一体化した、厚さ0.20mmで、長さ500mm、幅400mmのMCL−E679−FG(日立化成工業株式会社製、商品名)を準備した(図2(2))。
<Printed wiring board>
As a copper-clad laminate for the printed wiring board 7, MCL-E679 having a thickness of 0.20 mm, a length of 500 mm, and a width of 400 mm, in which a copper foil (18 μm) is laminated and integrated on both sides of an insulating layer made of glass epoxy. -FG (Hitachi Chemical Industry Co., Ltd., brand name) was prepared (FIG. 2 (2)).

次に、この銅張り積層板のL1(図2(2)の下面側の導体を示す。以下、同様。)及びL2(図2(2)の上面側の導体を示す。以下、同様。)に、エッチングレジストとして、ドライフィルムNIT225(ニチゴー・モートン株式会社製、商品名)をラミネータで仮圧着し、フィルム状のフォトマスクを貼り合わせて露光量140mJ/cmの紫外線で両面に、導体パターンを焼付け、0.9質量%炭酸ナトリウム水溶液で現像してエッチングレジストを形成し、その後、エッチングレジストのない部分を塩化銅エッチング液でエッチング除去した。このとき、L2側にコンフォーマルマスクが形成され、その開口は直径100μmであり、L2側の銅箔は全面残した。 Next, L1 (shows the conductor on the lower surface side of FIG. 2 (2). The same applies hereinafter) and L2 (shows the conductor on the upper surface side of FIG. 2 (2). The same applies hereinafter.) In addition, as an etching resist, dry film NIT225 (product name, manufactured by Nichigo Morton Co., Ltd.) is temporarily pressure-bonded with a laminator, a film-like photomask is bonded, and a conductive pattern is formed on both sides with an ultraviolet ray having an exposure amount of 140 mJ / cm 2. The resist was baked and developed with a 0.9% by mass aqueous sodium carbonate solution to form an etching resist. Thereafter, the portion without the etching resist was removed by etching with a copper chloride etching solution. At this time, a conformal mask was formed on the L2 side, the opening was 100 μm in diameter, and the copper foil on the L2 side was left over.

次に、L2側のコンフォーマルマスクの開口からレーザ加工し、層間接続用の非貫通ビアを形成した。また、ドリル加工により、層間接続用の貫通穴を形成した。   Next, laser processing was performed from the opening of the conformal mask on the L2 side to form a non-through via for interlayer connection. Further, through holes for interlayer connection were formed by drilling.

次に、フィルドビアめっきを行い、非貫通ビアには、めっきで充填されたフィルドビアを形成し、貫通穴には、スルーホールめっきを形成した。   Next, filled via plating was performed. Filled vias filled with plating were formed in non-through vias, and through-hole plating was formed in through holes.

次に、スルーホールめっきが形成された貫通穴を、穴埋め樹脂で充填した後、フィルドビア及び穴埋め樹脂が充填された貫通穴の上面(L2側)をバフ研磨により平坦化した。   Next, the through hole in which the through hole plating was formed was filled with a hole filling resin, and then the upper surface (L2 side) of the through hole filled with the filled via and the hole filling resin was flattened by buffing.

次に、無電解銅めっきにより下地銅めっきを形成した後、電気銅めっきで厚付けを行うことで、穴埋め樹脂が充填された貫通穴上に蓋めっきを形成した。   Next, after forming the base copper plating by electroless copper plating, the lid plating was formed on the through hole filled with the hole filling resin by thickening with the electrolytic copper plating.

次に、両側の導体を、サブトラクト法によりパターン形成し、導体パターンL1及びL2を形成し、プリント配線板7を作製した(図2(2))。サブトラクト法によるパターン形成では、エッチングレジストとして、ドライフィルムNIT225(ニチゴー・モートン株式会社製、商品名)をラミネータで仮圧着し、フィルム状のフォトマスクを貼り合わせて露光量140mJ/cmの紫外線で両面に、導体パターンを焼付け、0.9質量%炭酸ナトリウム水溶液で現像してエッチングレジストを形成し、その後、エッチングレジストのない部分を塩化銅エッチング液でエッチング除去した。このとき、導体パターンL2側のフィルドビア上の平坦な接続端子12及び貫通穴上の平坦な接続端子12の直径は130μmであった。 Next, the conductors on both sides were patterned by the subtracting method to form conductor patterns L1 and L2, and a printed wiring board 7 was produced (FIG. 2 (2)). In pattern formation by the subtract method, as an etching resist, dry film NIT225 (manufactured by Nichigo Morton Co., Ltd., trade name) is temporarily pressure-bonded with a laminator, a film-like photomask is bonded, and an exposure amount of 140 mJ / cm 2 is used. Conductive patterns were baked on both surfaces and developed with a 0.9% by mass aqueous sodium carbonate solution to form an etching resist. Thereafter, portions without the etching resist were etched away with a copper chloride etching solution. At this time, the diameters of the flat connection terminal 12 on the filled via on the conductor pattern L2 side and the flat connection terminal 12 on the through hole were 130 μm.

<接着シートの仮接着>
次に、プリント配線板7のL2側に、接着シート16として、AS−2600(日立化成工業株式会社製、商品名)を仮接着した(図2(3))。仮接着は熱プレス装置を用いて、
70℃、5.0MPa、30秒の条件で行った。
<Temporary adhesion of adhesive sheet>
Next, AS-2600 (trade name, manufactured by Hitachi Chemical Co., Ltd.) was temporarily bonded to the L2 side of the printed wiring board 7 as the adhesive sheet 16 (FIG. 2 (3)). Temporary bonding uses a hot press machine.
It was performed under the conditions of 70 ° C., 5.0 MPa, 30 seconds.

<有底ビアA形成>
次に、接着シート16を仮接着したプリント配線板7のL2側において、接続用の有底ビア11を接着シートに形成した(図2(4))。
<Formation of bottomed via A>
Next, a bottomed via 11 for connection was formed on the adhesive sheet on the L2 side of the printed wiring board 7 to which the adhesive sheet 16 was temporarily bonded (FIG. 2 (4)).

有底ビア11の形成方法について、詳細を以下に説明する。まず、L2側の接着シート16に直接炭酸ガスレーザを用いたレーザ加工により、有底ビア11を形成した(図2(4))。このとき、レーザー加工のアライメントは、プリント配線板7にパターン形成により付加したアライメントマーク(図示しない。)を直接読み取って実施したため、有底ビア11と受けパッド(接続端子12)との位置は、何れも有底ビア11が受けパッド(接続端子12)から外れることはなく、位置精度は良好であった。   Details of the method for forming the bottomed via 11 will be described below. First, the bottomed via 11 was formed on the L2 side adhesive sheet 16 by laser processing using a carbon dioxide laser directly (FIG. 2 (4)). At this time, the alignment of the laser processing was performed by directly reading an alignment mark (not shown) added to the printed wiring board 7 by pattern formation. Therefore, the positions of the bottomed via 11 and the receiving pad (connection terminal 12) are In any case, the bottomed via 11 did not come off from the receiving pad (connection terminal 12), and the positional accuracy was good.

<キャビティ加工>
次に、プリント配線板7のL1側から、絶縁層(基板10)、接着材1及び保護フィルム2を貫通してプリント配線板7の導電パターンL2(接着シート16側)に到るキャビティ用開口5を形成した(図2(5))。キャビティ用開口5は、ルーター加工によって行った。
<Cavity processing>
Next, the cavity opening from the L1 side of the printed wiring board 7 through the insulating layer (substrate 10), the adhesive 1 and the protective film 2 to the conductive pattern L2 (adhesive sheet 16 side) of the printed wiring board 7 5 was formed (FIG. 2 (5)). The cavity opening 5 was made by router processing.

<導電性ペースト充填>
次に、接着シート16を仮接着したプリント配線板7の接着シート16に付加した有底ビア11に導電性ペースト6を充填した。(図2(6))。
<Conductive paste filling>
Next, the conductive paste 6 was filled in the bottomed via 11 added to the adhesive sheet 16 of the printed wiring board 7 to which the adhesive sheet 16 was temporarily bonded. (FIG. 2 (6)).

導電性ペースト6はDDペーストAE1651(タツタシステムエレクトロニクス株式会社製、製品名)を準備し、有底ビア11形成において形成したビア位置に対応したメタルマスクを介して、スクリーン印刷機による印刷工法により充填した。   As the conductive paste 6, DD paste AE1651 (product name, manufactured by Tatsuta System Electronics Co., Ltd.) is prepared and filled by a printing method using a screen printer through a metal mask corresponding to the via position formed in the formation of the bottomed via 11. did.

<乾燥>
次に接着シート16に導電性ペースト6を印刷した接着シート付きプリント配線板14をボックス型乾燥機にて乾燥を行った。乾燥条件は80℃、60分である。以上により、接着シート付きプリント配線板14を作製した。
<Dry>
Next, the printed wiring board 14 with an adhesive sheet obtained by printing the conductive paste 6 on the adhesive sheet 16 was dried with a box-type dryer. Drying conditions are 80 ° C. and 60 minutes. The printed wiring board 14 with an adhesive sheet was produced by the above.

(実施例2)貼り合せプリント配線板 (Example 2) Bonded printed wiring board

<接着シート付きプリント配線板>
実施例1と同様に、図2(1)〜(6)に従って、接着シート付きプリント配線板14を作製した。
<Printed wiring board with adhesive sheet>
In the same manner as in Example 1, a printed wiring board 14 with an adhesive sheet was produced according to FIGS.

<第2のプリント配線板>
第2のプリント配線板用の銅張り積層板として、ガラスエポキシ製の絶縁層の両側に、銅箔(18μm)を積層一体化した、厚さ0.20mmで、長さ500mm、幅400mmのMCL−E679−FG(日立化成工業株式会社製、商品名)を準備した(図示しない。)。
<Second printed wiring board>
As a copper-clad laminate for the second printed wiring board, MCL with a thickness of 0.20 mm, a length of 500 mm, and a width of 400 mm is obtained by laminating and integrating copper foil (18 μm) on both sides of a glass epoxy insulating layer. -E679-FG (trade name, manufactured by Hitachi Chemical Co., Ltd.) was prepared (not shown).

次に、この銅張り積層板のL1(図示しない。)及びL2(図示しない。)に、エッチングレジストとして、ドライフィルムNIT225(ニチゴー・モートン株式会社製、商品名)をラミネータで仮圧着し、フィルム状のフォトマスクを貼り合わせて露光量140mJ/cmの紫外線で両面に、導体パターンを焼付け、0.9質量%炭酸ナトリウム水溶液で現像してエッチングレジストを形成し、その後、エッチングレジストのない部分を塩化銅エッチング液でエッチング除去した。このとき、L2側にコンフォーマルマスクが形成され、その開口は直径100μmであり、L2側の銅箔は全面残した。 Next, a dry film NIT225 (trade name, manufactured by Nichigo Morton Co., Ltd.) is temporarily bonded with a laminator as an etching resist to L1 (not shown) and L2 (not shown) of the copper-clad laminate, and the film A photomask is pasted and a conductive pattern is baked on both sides with an ultraviolet ray with an exposure amount of 140 mJ / cm 2 and developed with a 0.9% by mass aqueous sodium carbonate solution to form an etching resist. Was removed by etching with a copper chloride etchant. At this time, a conformal mask was formed on the L2 side, the opening was 100 μm in diameter, and the copper foil on the L2 side was left over.

次に、L2側のコンフォーマルマスクの開口からレーザ加工し、層間接続用の非貫通ビアを形成した。   Next, laser processing was performed from the opening of the conformal mask on the L2 side to form a non-through via for interlayer connection.

次に、フィルドビアめっきを行い、非貫通ビアには、めっきで充填されたフィルドビアを形成した。   Next, filled via plating was performed, and filled vias filled with plating were formed in the non-through vias.

次に、L2側の導体を、サブトラクト法によりパターン形成し、導体パターンL2を形成した(図示しない。)。   Next, the conductor on the L2 side was patterned by the subtract method to form a conductor pattern L2 (not shown).

次に、導体パターンL2側に絶縁層と銅箔を積層成形し、この銅箔にコンフォーマルマスクを形成し、コンフォーマルマスクの開口からレーザ加工して層間接続用の非貫通ビアを形成し、フィルドビアめっきを行い、パターン形成を行うという工程を数回繰り返し、
4層の導体を有する第2のプリント配線板8を作製した。ここで、第2のプリント配線板8のL4側(図3の最上面側の導体を示す。)には、接着シート付きプリント配線板14の導電性ペースト6が充填された有底ビア11と対応する平坦な接続端子13を備えている(図3(7))。
Next, an insulating layer and a copper foil are laminated and formed on the conductor pattern L2 side, a conformal mask is formed on the copper foil, and laser processing is performed from the opening of the conformal mask to form a non-through via for interlayer connection, Repeat filled via plating and pattern formation several times,
A second printed wiring board 8 having four layers of conductors was produced. Here, on the L4 side of the second printed wiring board 8 (the conductor on the uppermost surface side in FIG. 3 is shown), a bottomed via 11 filled with the conductive paste 6 of the printed wiring board 14 with an adhesive sheet is provided. A corresponding flat connection terminal 13 is provided (FIG. 3 (7)).

<接着シート保護フィルム剥離工程>
次に、接着シート付きプリント配線板14の接着シート16の保護フィルム2(ポリエチレンテレフタレート製)を端から剥がし、接着シート16の表面から導電性ペースト6がはみ出した状態にした。この際、接着シート16から保護フィルム2をゆっくり剥がさないと、保護フィルム2側にペーストが付着する現象が起きるため、注意が必要である。
<Adhesive sheet protective film peeling step>
Next, the protective film 2 (made of polyethylene terephthalate) of the adhesive sheet 16 of the printed wiring board 14 with the adhesive sheet was peeled off from the end so that the conductive paste 6 protruded from the surface of the adhesive sheet 16. At this time, if the protective film 2 is not slowly peeled off from the adhesive sheet 16, a phenomenon occurs in which the paste adheres to the protective film 2 side.

<加熱加圧>
第1のプリント配線板7の接着材1側と第2のプリント配線板8のL4側を重ね合わせ、加熱加圧により接着した。第1のプリント配線板7と第2のプリント配線板8を重ね合わせる際は、それぞれの基板の所定の位置に開けたガイド穴にピンを差込み、ズレの防止を図った。加熱圧着は熱プレス装置を用いて、160℃、3.5MPa、60分の条件で行った。この加熱加圧により、仮接着状態であった接着材1及び仮硬化状態であった導電性ペースト6が本硬化し、第1のプリント配線板7の接続端子12と第2のプリント配線板8の接続端子13との間に、強固な接続を形成できた。
<Heating and pressing>
The adhesive 1 side of the first printed wiring board 7 and the L4 side of the second printed wiring board 8 were overlapped and adhered by heating and pressing. When the first printed wiring board 7 and the second printed wiring board 8 were overlapped, a pin was inserted into a guide hole opened at a predetermined position of each substrate to prevent displacement. The thermocompression bonding was performed using a hot press apparatus under the conditions of 160 ° C., 3.5 MPa, and 60 minutes. By this heating and pressing, the adhesive 1 that was temporarily bonded and the conductive paste 6 that was temporarily cured are fully cured, and the connection terminals 12 of the first printed wiring board 7 and the second printed wiring board 8 are cured. A strong connection could be formed with the connection terminal 13.

1.接着材
2.保護フィルム
3.(貫通穴上に平坦な接続端子を有する)スルーホール
4.フィルドビア
5.キャビティ用開口
6.導電性ペースト
7.第1のプリント配線板又はプリント配線板
8.第2のプリント配線板
9.レーザー光
10.基板
11.有底ビア
12.(平坦な)接続端子
13.(対応する平坦な)接続端子
14.接着シート付きプリント配線板
15.貼り合せプリント配線板
16.接着シート
1. 1. Adhesive material 2. Protective film 3. A through hole (having a flat connection terminal on the through hole) 4. Filled vias 5. Cavity opening 6. Conductive paste 7. First printed wiring board or printed wiring board Second printed wiring board 9. Laser light10. Substrate 11. Bottomed vias12. (Flat) connection terminal 13. (Corresponding flat) connection terminal 14. Printed wiring board with adhesive sheet15. Bonded printed wiring board 16. Adhesive sheet

Claims (3)

平坦な接続端子を有するプリント配線板と、保護フィルムと接着材とを備えプリント配線板上に仮接着した熱硬化性の接着シートと、前記接着シートを貫通して前記平坦な接続端子に到る層間接続用の有底ビアと、有底ビアに充填され仮硬化された導電性ペーストと、接着シート及びプリント配線板を貫通して設けられ電子部品素子を収納するためのキャビティ用開口と、を有する接着シート付きプリント配線板。   A printed wiring board having a flat connection terminal, a thermosetting adhesive sheet temporarily bonded on the printed wiring board with a protective film and an adhesive, and the flat connection terminal through the adhesive sheet Bottomed vias for interlayer connection, conductive paste filled in the bottomed vias and temporarily cured, and openings for cavities provided through the adhesive sheet and the printed wiring board for accommodating electronic component elements, A printed wiring board with an adhesive sheet. 請求項1の接着シート付きプリント配線板の製造方法であって、
平坦な接続端子を有するプリント配線板上に、保護フィルムと接着材とを備える熱硬化性の接着シートを仮接着する工程(A)と、
前記仮接着後の接着シートを貫通して前記平坦な接続端子に到る層間接続用の有底ビアを形成する工程(B)と、
前記接着シートを仮接着したプリント配線板に、電子部品素子を収納するためのキャビティ用開口を形成する工程(C)と
前記有底ビアに導電性ペーストを充填し仮硬化する工程(E)と、
を有する接着シート付きプリント配線板の製造方法。
It is a manufacturing method of the printed wiring board with an adhesive sheet of Claim 1,
Step (A) of temporarily adhering a thermosetting adhesive sheet comprising a protective film and an adhesive on a printed wiring board having flat connection terminals;
A step (B) of forming a bottomed via for interlayer connection that penetrates the adhesive sheet after temporary bonding and reaches the flat connection terminal;
A step (C) of forming a cavity opening for accommodating an electronic component element on a printed wiring board on which the adhesive sheet is temporarily bonded; and a step (E) of filling the bottomed via with a conductive paste and temporarily curing the conductive paste. ,
The manufacturing method of the printed wiring board with an adhesive sheet which has this.
請求項1の接着シート付きプリント配線板を用いる貼り合せプリント配線板の製造方法であって、
請求項2の接着シート付きプリント配線板の製造方法により、接着シート付きプリント配線板を製造する工程(A〜D)と、
前記接着シート付きプリント配線板の導電性ペーストが充填された有底ビアと対応する平坦な接続端子を有する第2のプリント配線板を製造する工程(E)と、
前記接着シート付きプリント配線板の保護フィルムを剥離して接着材付きの第1のプリント配線板を準備する工程(F)と、
前記接着材付きの第1のプリント配線板の導電性ペーストが充填された有底ビアと、この有底ビアに対応した第2のプリント配線板の平坦な接続端子とを、加熱加圧して接続する加熱加圧工程(G)と、
を有する貼り合せプリント配線板の製造方法。
A method for producing a bonded printed wiring board using the printed wiring board with an adhesive sheet according to claim 1,
The process (AD) which manufactures the printed wiring board with an adhesive sheet by the manufacturing method of the printed wiring board with an adhesive sheet of Claim 2,
A step (E) of producing a second printed wiring board having a flat connection terminal corresponding to a bottomed via filled with a conductive paste of the printed wiring board with the adhesive sheet;
A step (F) of preparing a first printed wiring board with an adhesive by peeling off a protective film of the printed wiring board with an adhesive sheet;
The bottomed via filled with the conductive paste of the first printed wiring board with the adhesive material and the flat connection terminal of the second printed wiring board corresponding to the bottomed via are connected by heating and pressing. Heating and pressurizing step (G),
A method for producing a bonded printed wiring board having:
JP2012214153A 2012-09-27 2012-09-27 Manufacturing method of printed wiring board with adhesive sheet and manufacturing method of bonded printed wiring board using the same Active JP6016017B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200088138A (en) * 2019-01-14 2020-07-22 주식회사 뉴프렉스 FPC Module including Magnetic sheet and Method for manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011176381A (en) * 2007-05-29 2011-09-08 Panasonic Corp Circuit board, and method of manufacturing the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011176381A (en) * 2007-05-29 2011-09-08 Panasonic Corp Circuit board, and method of manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200088138A (en) * 2019-01-14 2020-07-22 주식회사 뉴프렉스 FPC Module including Magnetic sheet and Method for manufacturing the same
KR102192120B1 (en) 2019-01-14 2020-12-16 주식회사 뉴프렉스 FPC Module including Magnetic sheet and Method for manufacturing the same

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