JP2014067797A5 - - Google Patents

Download PDF

Info

Publication number
JP2014067797A5
JP2014067797A5 JP2012210759A JP2012210759A JP2014067797A5 JP 2014067797 A5 JP2014067797 A5 JP 2014067797A5 JP 2012210759 A JP2012210759 A JP 2012210759A JP 2012210759 A JP2012210759 A JP 2012210759A JP 2014067797 A5 JP2014067797 A5 JP 2014067797A5
Authority
JP
Japan
Prior art keywords
clean unit
gas
fan
circulation path
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012210759A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014067797A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012210759A priority Critical patent/JP2014067797A/ja
Priority claimed from JP2012210759A external-priority patent/JP2014067797A/ja
Publication of JP2014067797A publication Critical patent/JP2014067797A/ja
Publication of JP2014067797A5 publication Critical patent/JP2014067797A5/ja
Pending legal-status Critical Current

Links

JP2012210759A 2012-09-25 2012-09-25 基板処理装置、基板処理方法及び半導体装置の製造方法 Pending JP2014067797A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012210759A JP2014067797A (ja) 2012-09-25 2012-09-25 基板処理装置、基板処理方法及び半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012210759A JP2014067797A (ja) 2012-09-25 2012-09-25 基板処理装置、基板処理方法及び半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2014067797A JP2014067797A (ja) 2014-04-17
JP2014067797A5 true JP2014067797A5 (enrdf_load_stackoverflow) 2015-11-12

Family

ID=50743923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012210759A Pending JP2014067797A (ja) 2012-09-25 2012-09-25 基板処理装置、基板処理方法及び半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP2014067797A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6613864B2 (ja) * 2015-12-14 2019-12-04 Ｔｄｋ株式会社 ミニエンバイロメント装置
CN107504557A (zh) * 2017-07-14 2017-12-22 太仓诚泽网络科技有限公司 室内空气净化系统
US11610794B2 (en) * 2018-10-26 2023-03-21 Applied Materials, Inc. Side storage pods, equipment front end modules, and methods for operating the same
JP7221110B2 (ja) 2019-03-28 2023-02-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
CN119617552A (zh) * 2024-11-26 2025-03-14 华能(嘉峪关)新能源有限公司 单晶硅电池生产线和电池生产车间内环境控制方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226456A (ja) * 1992-02-17 1993-09-03 Dainippon Screen Mfg Co Ltd 縦型基板熱処理装置のクリーンエアユニットの取付構造
JP3372585B2 (ja) * 1993-04-13 2003-02-04 東京エレクトロン株式会社 処理装置
JP3279727B2 (ja) * 1993-04-30 2002-04-30 東京エレクトロン株式会社 熱処理装置
JP3543995B2 (ja) * 1994-04-07 2004-07-21 東京エレクトロン株式会社 処理装置
JP3502514B2 (ja) * 1996-09-09 2004-03-02 東京エレクトロン株式会社 熱処理装置
JP3878275B2 (ja) * 1997-03-21 2007-02-07 三機工業株式会社 クリーンルーム
US7553516B2 (en) * 2005-12-16 2009-06-30 Asm International N.V. System and method of reducing particle contamination of semiconductor substrates

Similar Documents

Publication Publication Date Title
JP2014067797A5 (enrdf_load_stackoverflow)
CO6290719A2 (es) Filtro de aire para ventilación y control de temperatura de alojamientos, especialmente alojamientos de equipos eléctricos
JP2014058969A5 (enrdf_load_stackoverflow)
JP2017513188A5 (enrdf_load_stackoverflow)
JP2017228606A5 (enrdf_load_stackoverflow)
JP2012212819A5 (enrdf_load_stackoverflow)
JP2014138063A5 (enrdf_load_stackoverflow)
JP2015111030A5 (ja) 高清浄部屋システム
ES2447642B1 (es) Recuperador de calor para sistemas de ventilación mecánica controlada
JP2017502251A5 (ja) 流体処理装置および流体流れを冷却する方法
JP2013530911A5 (enrdf_load_stackoverflow)
JP2015069968A5 (enrdf_load_stackoverflow)
AR098354A1 (es) Aparato de lecho fluidizado
WO2013175125A3 (fr) Dispositif de sechage d'au moins un verre optique
JP2016036764A5 (enrdf_load_stackoverflow)
JP2010249730A5 (enrdf_load_stackoverflow)
WO2017033161A3 (en) Apparatus and method for drying and cooling seeds
JP2013118937A5 (enrdf_load_stackoverflow)
JP2014067979A5 (ja) 基板処理装置および半導体装置の製造方法
JP2012148874A5 (enrdf_load_stackoverflow)
JP3201352U7 (enrdf_load_stackoverflow)
ITBO20080007A1 (it) Gruppo deumidificatore a basso consumo energetico
TH176493A (th) อุปกรณ์ลดความชื้น/เพิ่มความชื้น
PL408375A1 (pl) Centrala wentylacyjna
UA86027U (ru) Конвейерная ленточная сушилка