JP2014063979A - 太陽電池及びその製造方法 - Google Patents
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Abstract
【解決手段】本発明の太陽電池は、第1導電型の不純物を含有する基板と、基板の第1面に配置され、第1導電型と反対の第2導電型の不純物を含有し、第1シート抵抗を有する低濃度エミッタ部と第1シート抵抗より低い第2シート抵抗を有する高濃度エミッタ部を備えるエミッタ部と、エミッタ部の上に配置される第1誘電層と、高濃度エミッタ部上に第1方向に配置される第1フィンガー電極と低濃度エミッタ部上に第1方向と交差する第2方向に配置される第1バスバー電極を含む第1電極と、基板の第2面に形成され、基板と接続される第2電極とを含み、第1バスバー電極は電気伝導性の金属粒子と熱硬化性樹脂(resin)を含み、第1フィンガー電極は、高濃度エミッタ部と接触するシード層とシード層の上に形成される導電性金属層を含む。
【選択図】図4
Description
Claims (21)
- 第1導電型の不純物を含有する基板と、
前記基板の第1面に配置され、前記第1導電型と反対の第2導電型の不純物を含有し、第1シート抵抗を有する低濃度エミッタ部と、前記第1シート抵抗より低い第2シート抵抗を有する高濃度エミッタ部を備えるエミッタ部と、
前記エミッタ部の上に配置される第1誘電層と、
前記高濃度エミッタ部上に第1方向に配置される第1フィンガー電極と、前記低濃度エミッタ部上に第2方向に配置される第1バスバー電極を含む第1電極と、
前記基板の第2面に形成され、前記基板と接続される第2電極とを含み、
前記第1バスバー電極は電気伝導性の金属粒子と熱硬化性樹脂を含み、前記第1フィンガー電極は、前記の高濃度エミッタ部と接触するシード層と、前記シード層の上に形成される導電性金属層を含む、太陽電池。 - 前記第1バスバー電極と前記低濃度エミッタ部の間には、前記第1誘電層が配置される、請求項1記載の太陽電池。
- 前記金属粒子は、銀(Ag)を含む、請求項1記載の太陽電池。
- 前記金属粒子の大きさは1μm以下である、請求項1記載の太陽電池。
- 前記第1バスバー電極はガラスフリットを含まないか、ガラスフリットを前記バスバーペーストの単位体積当たり10%以下の体積比で含む、請求項1記載の太陽電池。
- 前記第1バスバー電極は、前記エミッタ部との境界面に再結晶化された金属層を含まない、請求項1記載の太陽電池。
- 前記熱硬化性樹脂は、モノマー系のエポキシ樹脂またはアクリル樹脂を含む、請求項1記載の太陽電池。
- 前記第1フィンガー電極はメッキ構造である、請求項1記載の太陽電池。
- 前記シード層は、ニッケル−シリサイド(Ni−Si)を含み、
前記導電性金属層は、スズ(Sn)、銅(Cu)と銀(Ag)のうち少なくとも一つを含む、請求項1記載の太陽電池。 - 前記低濃度エミッタ部は、前記第1誘電層と直接接触し、前記第1バスバー電極は、前記第1誘電層と直接接触する、請求項1記載の太陽電池。
- 前記第2電極は、第1方向に配置される第2フィンガー電極と前記第1方向と交差する第2方向に配置される第2バスバー電極を含む、請求項1記載の太陽電池。
- 前記第2フィンガー電極は、シード層と、前記シード層の上に形成される導電性金属層とを含む、請求項11記載の太陽電池。
- 前記第2バスバー電極は電気伝導性の金属粒子と熱硬化性樹脂を含む、請求項11記載の太陽電池。
- 基板の第1面に第1シート抵抗を有する低濃度エミッタ部を形成するステップと、
前記低濃度エミッタ部上に第1誘電層を形成するステップと、
前記第1誘電層上にドーパントペーストを塗布し、前記のドーパントペーストにレーザービームを照射して前記第1シート抵抗より低い第2シート抵抗を有する高濃度エミッタ部を形成するステップと、
前記高濃度エミッタ部上に第1方向に第1フィンガー電極を形成し、第2方向に第1バスバー電極を形成する第1電極形成ステップと、
前記基板の第2面に第2電極を形成するステップとを含み、
前記第1電極形成ステップで、前記第1フィンガー電極はメッキ方式で形成し、前記第1バスバー電極は電気伝導性の金属粒子と熱硬化性樹脂を含むバスバーペーストを塗布し設定温度で熱処理して形成する太陽電池の製造方法。 - 前記第1電極形成ステップにおいて、前記バスバーペーストを設定温度で熱処理する工程温度は300℃〜350℃の間である、請求項14記載の太陽電池の製造方法。
- 前記第1電極形成ステップにおいて、前記バスバーペーストを設定温度で熱処理する際に、前記バスバーペーストは、前記第1誘電層を貫通していない、請求項14記載の太陽電池の製造方法。
- 前記第1電極形成ステップにおいて、前記バスバーペーストを設定温度で熱処理する際に、前記のエミッタ部との境界面に再結晶化された金属層が形成されない、請求項14記載の太陽電池の製造方法。
- 前記第1電極形成ステップにおいて、前記の設定温度での熱処理後、前記金属粒子の形状は前記の熱処理前の前記金属粒子の形状を維持する、請求項14記載の太陽電池の製造方法。
- 前記バスバーペーストは、ガラスフリットを含まないか、ガラスフリットを前記バスバーペーストの単位体積当たり10%以下の体積比で含む、請求項14記載の太陽電池の製造方法。
- 前記熱硬化性樹脂は、モノマー系のエポキシ樹脂またはアクリル樹脂を含む、請求項14記載の太陽電池の製造方法。
- 前記第1電極形成ステップにおいて、
前記第1フィンガー電極は、前記の高濃度エミッタ部上にニッケルを含むシード層と、前記シード層の上に導電性金属層で形成され、
前記のバスバーペーストを設定温度で熱処理する際に、前記第1フィンガー電極のシード層にはニッケル(Ni)と、前記高濃度エミッタ部のシリコン(Si)が化学的に結合したニッケル−シリサイド(Ni−Si)層が形成される、請求項14記載の太陽電池の製造方法。
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Cited By (3)
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JP2016189439A (ja) * | 2015-03-30 | 2016-11-04 | 京セラ株式会社 | 太陽電池素子およびその製造方法 |
KR101875741B1 (ko) * | 2017-01-06 | 2018-07-06 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
JP2021022735A (ja) * | 2020-09-21 | 2021-02-18 | アートビーム株式会社 | 太陽電池および太陽電池の製造方法 |
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KR101921738B1 (ko) * | 2012-06-26 | 2018-11-23 | 엘지전자 주식회사 | 태양 전지 |
KR101661948B1 (ko) * | 2014-04-08 | 2016-10-04 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
TWI583010B (zh) * | 2016-07-05 | 2017-05-11 | 新日光能源科技股份有限公司 | 太陽能電池 |
TWI656659B (zh) * | 2017-10-13 | 2019-04-11 | 茂迪股份有限公司 | 太陽能電池之製造方法 |
CN112133767A (zh) * | 2019-06-24 | 2020-12-25 | 泰州隆基乐叶光伏科技有限公司 | 太阳能电池及其制作方法 |
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Also Published As
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EP2711988A3 (en) | 2014-11-05 |
KR101956734B1 (ko) | 2019-03-11 |
CN103681930A (zh) | 2014-03-26 |
US20220093809A1 (en) | 2022-03-24 |
KR20140037999A (ko) | 2014-03-28 |
JP5746263B2 (ja) | 2015-07-08 |
EP2711988A2 (en) | 2014-03-26 |
EP2711988B1 (en) | 2016-12-28 |
US20140076394A1 (en) | 2014-03-20 |
CN103681930B (zh) | 2016-12-28 |
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